Electrochemical gas sensor

Abstract

The utility model provides an electrochemical gas sensor. The electrochemical gas sensor comprises a first shell, a first working electrode, a second working electrode, a first counter electrode, a first reference electrode, a first electrolyte and a first gas mass transfer assembly, the first electrolyte is located in the first shell, and the first counter electrode, the first reference electrode, the first working electrode and the second working electrode are separately arranged through the first electrolyte; the first gas mass transfer assembly is located in the first shell and comprises a first buffer chamber and a first gas channel, and the first buffer chamber covers the first working electrode and the second working electrode; one end of the first gas channel is connected with the first buffer chamber, and the other end penetrates through the first shell, so that gas enters the first shell. According to the electrochemical gas sensor, the first working electrode and the second working electrode work cooperatively and share the same first buffer chamber and the first gas channel, so that the influence of electrode activity change on a measurement result is eliminated through twice measurement, and the measurement stability and reliability of the electrochemical gas sensor are greatly improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chemistry, and in particular to an electrochemical gas sensor. BACKGROUND

[0002] The response of an electrochemical gas sensor to the concentration of a gas is linear within a certain concentration range, and the response sensitivity is generally controlled by the gas diffusion speed and the electrochemical reaction speed. The gas diffusion speed is relatively stable and is affected by the mechanical structure of the gas diffusion channel. However, the electrochemical reaction speed is affected by many factors, such as the solubility of the reaction gas in the electrolyte, the diffusion speed, the activity of the catalyst, the composition of the electrolyte, the solubility and diffusion speed of the reaction product in the electrolyte, and the like. This leads to poor stability of the electrochemical gas sensor.

[0003] In order to improve the stability of the electrochemical gas sensor, the common method is to improve the stability of the catalyst and the electrolyte, and to limit the gas diffusion process. When the gas diffusion is limited to stabilize the sensor, if the electrode activity is too high, the gas molecules close to the electrode surface can be quickly consumed even in the case of limited gas diffusion, which makes the sensor too sensitive to the change of the external gas concentration, and is not conducive to the measurement of the gas concentration. SUMMARY

[0004] The purpose of the present application is to provide an electrochemical gas sensor that can eliminate the influence of electrode activity change on gas measurement and improve the stability and reliability of measurement.

[0005] The present application provides an electrochemical gas sensor, comprising:

[0006] a first housing;

[0007] a first working electrode and a second working electrode;

[0008] a first gas mass transfer assembly, the first gas mass transfer assembly comprising a first buffer chamber and a first gas channel, the first buffer chamber being located in the first housing and covering the first working electrode and the second working electrode, one end of the first gas channel being connected to the first buffer chamber and the other end of the first gas channel penetrating through the first housing, for allowing gas to enter the first buffer chamber and reach the first working electrode and the second working electrode;

[0009] a first electrolyte, the first electrolyte being located in the first housing;

[0010] a first counter electrode and a first reference electrode, the first counter electrode, the first reference electrode, the first working electrode and the second working electrode being arranged separately by the first electrolyte.

[0011] In an example, the electrochemical gas sensor further comprises:

[0012] a third working electrode, the third working electrode being disposed apart from the first working electrode, the second working electrode, the first counter electrode, and the first reference electrode;

[0013] The first gas mass transfer assembly further comprises:

[0014] a second buffer chamber covering the third working electrode, the second buffer chamber being disposed apart from the first buffer chamber;

[0015] a second gas channel, the second gas channel being disposed apart from the first gas channel, one end of the second gas channel being connected to the second buffer chamber, and the other end of the second gas channel penetrating through the first housing, for allowing gas to enter the second buffer chamber and the third working electrode.

[0016] In an example, the first gas mass transfer assembly further comprises:

[0017] an electrode support membrane, one side of the electrode support membrane being in contact with the first buffer chamber, and the other side of the electrode support membrane covering the first working electrode and the second working electrode.

[0018] In an example, the electrochemical gas sensor further comprises:

[0019] a dustproof membrane, the dustproof membrane being disposed on the surface of the first housing, for preventing dust from entering the first housing.

[0020] The present application also provides an electrochemical gas sensor, comprising:

[0021] a second housing;

[0022] a first response electrode and a second response electrode, the first response electrode and the second response electrode being of a high line-to-surface ratio structure, the first response electrode and the second response electrode being interwoven with each other while maintaining a preset distance;

[0023] a second electrolyte, the second electrolyte being located in the second housing;

[0024] a second gas mass transfer assembly, the second gas mass transfer assembly being connected to one end of the second electrolyte, and covering the first response electrode and the second response electrode;

[0025] a second counter electrode and a second reference electrode, the second counter electrode and the second reference electrode being disposed apart from the first response electrode and the second response electrode through the second electrolyte;

[0026] an inert substrate, the inert substrate being connected to the other end of the second electrolyte, for improving the stability of the electrochemical gas sensor.

[0027] In an example, the second gas mass transfer assembly comprises:

[0028] a gas permeable membrane, the gas permeable membrane being located on the surface of the second electrolyte, and gas passing through the gas permeable membrane to reach the first response electrode and the second response electrode.

[0029] In an example, the second electrolyte comprises:

[0030] An electrolyte film through which the gas reaches the first response electrode and the second response electrode.

[0031] In an example, the electrochemical gas sensor further comprises:

[0032] A sealing assembly located in the second housing for containing the second electrolyte.

[0033] In an example, the inert substrate is further connected with the first response electrode, the second response electrode, the second pair of electrodes and the second reference electrode.

[0034] In an example, the electrochemical gas sensor further comprises:

[0035] A heating substrate connected with the inert substrate for thermostatic control of the electrochemical gas sensor.

[0036] The application has the following beneficial effects compared with the prior art:

[0037] The application greatly improves the stability and reliability of the electrochemical gas sensor measurement by making the first working electrode and the second working electrode share the same first buffer chamber and the first gas channel, and eliminating the influence of electrode activity changes on the measurement results through two measurements. BRIEF DESCRIPTION OF DRAWINGS

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the application, and therefore should not be regarded as a limitation on the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0039] Figure 1 A cross-sectional schematic diagram of an electrochemical gas sensor device provided by an embodiment of the application;

[0040] Figure 2 A schematic diagram of an equivalent circuit provided by the application;

[0041] Figure 3 is Figure 1 On the basis of the corresponding embodiments, a cross-sectional schematic diagram of an electrochemical gas sensor device provided by another embodiment of the application;

[0042] Figure 4 A planar structure schematic diagram of another electrochemical gas sensor device provided by an embodiment of the application;

[0043] Figure 5is a cross-sectional view of an electrochemical gas sensor device provided by an embodiment of the present application;

[0044] Figure 6 is a cross-sectional view of an electrochemical gas sensor device provided by another embodiment of the present application.

[0045] In the above drawings, the following reference signs are used:

[0046] 110-first working electrode; 120-second working electrode; 130-first gas mass transfer component; 131-first buffer chamber; 132-first gas channel; 134-electrode support film; 135-second buffer chamber; 136-second gas channel; 140-first electrolyte; 150-first housing; 160-third working electrode; 170-dustproof film; 180-first reference electrode; 190-first counter electrode; 210-first response electrode; 220-second response electrode; 231-second counter electrode; 232-second reference electrode; 240-second gas mass transfer component; 241-gas permeable film; 250-inert substrate; 260-heating substrate; 270-second electrolyte. DETAILED DESCRIPTION

[0047] The terms "first", "second", "third", and the like, are merely used to distinguish different descriptions, and do not represent the arrangement number, and cannot be understood as indicating or implying relative importance.

[0048] In addition, the terms "horizontal", "vertical", "overhanging", and the like, do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0049] In the description of the present application, it should be noted that the terms "inner", "outer", "left", "right", "upper", "lower", and the like, indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0050] In the description of the present application, unless otherwise explicitly specified and limited, the terms "set", "mount", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication inside two elements.

[0051] Figure 1 A cross-sectional view of an electrochemical gas sensor device according to an embodiment of the present application is shown in FIG. 1. As shown, the electrochemical gas sensor device includes a first housing 150, a first working electrode 110, a second working electrode 120, a first reference electrode 180, a first counter electrode 190, a first electrolyte 140, and a first gas mass transfer assembly 130. The first gas mass transfer assembly 130 includes a first buffer chamber 131 and a first gas channel 132. The first buffer chamber 131 is located within the first housing 150 and covers the first working electrode 110 and the second working electrode 120. The first gas channel 132 has one end connected to the first buffer chamber 131 and the other end penetrating through the first housing 150 for allowing gas to enter the first buffer chamber 131 and reach the first working electrode 110 and the second working electrode 120. The first electrolyte 140 is located within the first housing 150, and the first reference electrode 180 and the first counter electrode 190 are arranged separately from the first working electrode 110 and the second working electrode 120 by the first electrolyte 140. Figure 1

[0052] The first reference electrode 180 is configured to provide a reference potential for the first working electrode 110 and the second working electrode 120. The first counter electrode 190 is configured to ensure the flow of current through the first electrolyte 140. The first electrolyte 140 can be a liquid including an electrolyte, a conductive polymer, a gel electrolyte, or a high-temperature solid electrolyte, etc. The first electrolyte 140 is in close contact with the first working electrode 110, the second working electrode 120, the first counter electrode 190, and the first reference electrode 180, and is configured to provide an electrochemical reaction environment and ionic conduction, etc.

[0053] In an embodiment, the first working electrode 110 and the second working electrode 120 are arranged in parallel to each other. Figure 2 An equivalent circuit diagram according to the present application is shown in FIG. 2. The equivalent circuit is for the electrochemical gas sensor device in a steady state, and the current response characteristics of the sensor in the steady state can be understood by the equivalent circuit diagram. The response current of the sensor to a gas satisfies the following equations (1) and (2): Figure 1

[0054]

[0055] where k is the response sensitivity, I is the response current, C is the gas concentration, R g is the gas diffusion impedance (an equivalent circuit parameter, which is only related to the structure of the first gas channel 132), R r is the working electrode reaction kinetics impedance (an equivalent circuit parameter, which is related to the total activity of the first working electrode 110 and the second working electrode 120), R m is the impedance of the A branch (an equivalent circuit parameter, which is related to the activity of the second working electrode 120), and R n ​​Impedance of B branch (equivalent circuit parameter, which is related to the activity of the second working electrode 120).

[0056] Specifically, first, the electrode potential is controlled to make the first working electrode 110 in the measurement state, and the second working electrode 120 in the non-working state. At this time, the to-be-measured gas can react on the first working electrode 110, consume the gas in the first buffer chamber 131, and cause the concentration to decrease. In this way, the concentration difference between the to-be-measured gas in the first buffer chamber 131 and the to-be-measured gas in the environment can drive the to-be-measured gas to diffuse in the first diffusion channel, diffuse from the environment to the first buffer chamber 131, and the law satisfies Fick's Law. The concentration difference polarization in the first buffer chamber 131 is small (can be ignored), and the concentration of the to-be-measured gas in the chamber can be considered uniform. Fick's Law mainly describes the relationship between the diffusion flux and the concentration gradient and how the concentration changes over time.

[0057] After the to-be-measured gas passes through the first gas channel 132, it enters the first buffer chamber 131, reaches the first working electrode 110, and undergoes an electrochemical oxidation or reduction reaction thereon. The response current satisfies formula (3):

[0058]

[0059] Wherein, I1 is the first response current, C is the gas concentration, R g is the gas diffusion impedance, R m is the electrochemical reaction impedance of the first working electrode 110 (i.e. the gas diffusion mass transfer impedance of the A branch).

[0060] Further, the electrode potential is controlled to make the first working electrode 110 and the second working electrode 120 both in the measurement state. At this time, the to-be-measured gas can react on the first working electrode 110 and the second working electrode 120 at the same time. After the to-be-measured gas diffuses through the first gas channel 132, it enters the first buffer chamber 131, reaches the first working electrode 110 and the second working electrode 120, and undergoes an electrochemical reaction on the two electrodes. At steady state, the second response current and the third response current are measured through the first working electrode 110 and the second working electrode 120 respectively, and formula (4) is satisfied.

[0061]

[0062] Wherein, I2 is the second response current, I3 is the third response current, C is the gas concentration, R g is the gas diffusion impedance, R m is the electrochemical reaction impedance of the first working electrode 110 (i.e. the impedance of the A branch), R n is the electrochemical reaction impedance of the second working electrode 120 (i.e. the impedance of the B branch).

[0063] Wherein, the impedance size of the first working electrode 110 and the impedance size of the second working electrode 120 determine the size of the second response current passing through the first working electrode 110 and the size of the third response current passing through the second working electrode 120, that is, formula (5):

[0064] I2R m = I3R n ; (5)

[0065] Further, the formula (3) (4) (5) is solved, and the first response current, the second response current and the third response current are calculated to obtain the concentration of the gas to be measured;

[0066]

[0067] Wherein, I1 is the first response current, I2 is the second response current, I3 is the third response current, C is the gas concentration, R g is the gas diffusion impedance (which can be measured by using the standard gas with known gas concentration, and then the formula (6) is used to obtain the gas diffusion impedance).

[0068] The present application eliminates the influence of electrode activity change on gas concentration measurement by sharing the same first buffer chamber 131 and first gas channel 132 by the first working electrode 110 and the second working electrode 120, thereby improving the stability and reliability of the sensor.

[0069] As Figure 1 shown, the first gas mass transfer assembly 130 further comprises an electrode support film 134, one side of which is in contact with the first buffer chamber 131, and the other side covers the first working electrode 110 and the second working electrode 120, which is used to provide physical support for the working electrode, and ensures that the working electrode can maintain its shape and position unchanged during operation, which is conducive to maintaining the long-term stability of the electrochemical sensor.

[0070] Figure 3 is Figure 1 Based on the corresponding embodiment, the present application provides a cross-sectional schematic view of an electrochemical gas sensor device, Figure 3 Based on the Figure 1 application can meet the measurement of gas concentration in the application scene which needs continuous monitoring, such as Figure 3As shown, the electrochemical gas sensor further comprises a third working electrode 160, which is arranged separately from the first reference electrode 180 and the first counter electrode 190, the first working electrode 110 and the second working electrode 120; the first gas mass transfer assembly 130 further comprises a second buffer chamber 135 and a second gas channel 136; the second buffer chamber 135 covers the third working electrode 160 and is arranged separately from the first buffer chamber 131 (but shares the first electrolyte 140); the second gas channel 136 is arranged separately from the first gas channel 132, one end of which is connected to the second buffer chamber 135 and the other end of which penetrates through the first shell 150, for allowing gas to enter the second buffer chamber 135.

[0071] The third working electrode 160 is used for continuous measurement of gas, the first working electrode 110 and the second working electrode 120 are used for high-stability measurement of gas, and the measurement results can be used to calibrate the sensitivity of the third working electrode 160; the first reference electrode 180 is used to provide a reference potential for the first working electrode 110 and the second working electrode 120; and the first counter electrode 190 is used to ensure that current can flow through the first electrolyte 140.

[0072] In an embodiment, the electrochemical gas sensor further comprises a dustproof film 170 arranged on the surface of the first shell 150, for preventing dust from entering the first shell 150.

[0073] Figure 4 Another planar structure schematic diagram of an electrochemical gas sensor device provided by an embodiment of the present application is shown in FIG. 2B. Figure 4 For a planar micro sensor, the following design can also be made: the electrochemical gas sensor comprises a first response electrode 210, a second response electrode 220, a second counter electrode 231 and a second reference electrode 232; the first response electrode 210 and the second response electrode 220 are high line-to-surface ratio structures (such as interdigital, spiral or other alternating dot array structures), and the first response electrode 210 and the second response electrode 220 are interwoven on a plane but maintain a preset distance; the preset distance between the first response electrode 210 and the second response electrode 220 can be 20-500 μm; the line-to-surface ratio refers to the ratio of the length of the first response electrode 210 or the second response electrode 220 to the surface area of the first response electrode 210 or the second response electrode 220; the length of the first response electrode 210 and the second response electrode 220 is preferably between millimeters and tens of centimeters.

[0074] In an embodiment, Figure 5 A cross-sectional view of the electrochemical gas sensor device provided by an embodiment of the present application is shown in FIG. 3B. Figure 5As shown, the electrochemical gas sensor comprises a second gas mass transfer component 240, a second electrolyte 270, an inert substrate 250, a heating substrate 260, a second shell (not shown in the figure) and a smart control board (not shown in the figure). The second gas mass transfer component 240 is a gas permeable membrane 241 covering the first response electrode 210, the second response electrode 220, the second counter electrode 231 and the second reference electrode 232; the second electrolyte 270 can be a liquid including an electrolyte, a conductive polymer, a colloidal electrolyte or a high-temperature solid electrolyte, etc.; the first response electrode 210, the second response electrode 220, the second counter electrode 231 and the second reference electrode 232 are arranged in the second electrolyte 270 in a spaced manner and in close contact, for providing an electrochemical reaction environment and ion conduction, etc.; the inert substrate 250 is in close connection with the second electrolyte 270, the first response electrode 210, the second response electrode 220, the second counter electrode 231 and the second reference electrode 232, for improving the stability of the electrochemical gas sensor; the heating substrate 260 is connected with the inert substrate 250, for constant temperature control of the electrochemical gas sensor; the second shell is used to isolate the electrochemical gas sensor from the external environment, and the smart control board is used to analyze the collected data and calculate the gas concentration.

[0075] The gas permeable membrane 241 includes but is not limited to a porous diffusion membrane or a permeable membrane, etc., and is located on the surface of the second electrolyte 270, and the gas reaches the first response electrode 210 and the second response electrode 220 through the gas permeable membrane 241. The first response electrode 210, the second response electrode 220, the second counter electrode 231 and the second reference electrode 232 are arranged in the second electrolyte 270 in a spaced manner and in close contact with the gas permeable membrane 241, and the mass transfer channel part of the gas reaching the first response electrode 210 and the second response electrode 220 through the gas permeable membrane 241 coincides. The first response electrode 210, the second response electrode 220, the second counter electrode 231 and the second reference electrode 232 are prepared on the gas permeable membrane 241, such as by screen printing, inkjet printing or MEMS (Micro-Electro-Mechanical Systems) processing technology.

[0076] Further, when the second electrolyte 270 is a liquid, the electrochemical gas sensor further comprises a sealing component (not shown in the figure), which is used to contain the second electrolyte 270.

[0077] The equivalent circuit of the planar micro electrochemical gas sensor of the above structure in a steady state response can also be represented by Figure 2 wherein Rg corresponds to the mass transfer impedance of the gas in the diffusion membrane / permeable membrane, and Rm, Rn correspond to the electrochemical reaction impedances of the first and second working electrodes.

[0078] Further, the same measurement procedure as in the above embodiment 1 Figure 1 ) is used to measure the sensor of the present structure, and the corresponding current versus gas concentration relationship still satisfies equation (6).

[0079] In another embodiment, Figure 6 is a cross-sectional view of an electrochemical gas sensor device according to another embodiment of the present application, as shown in Figure 6 which includes a first response electrode 210, a second response electrode 220, a second counter electrode 231, a second reference electrode 232, a second electrolyte 270, an inert substrate 250, a heating substrate 260, a second housing (not shown in the figure), and a smart control board (not shown in the figure). The second electrolyte 270 includes an electrolyte film, and the first response electrode 210, the second response electrode 220, the second counter electrode 231, and the second reference electrode 232 share the electrolyte film. The structure, the second electrolyte 270, the inert substrate 250, the heating substrate 260, the position and the connection relationship of the second housing of the first response electrode 210 and the second response electrode 220 are as described above, and will not be repeated here.

[0080] The equivalent circuit of the planar micro electrochemical gas sensor of the above structure at the steady state response can also be represented by Figure 2 , where R g corresponds to the mass transfer impedance of the gas in the thin layer of the second electrolyte 270, R m and R n correspond to the electrochemical reaction impedance of the first response electrode 210 and the second response electrode 220.

[0081] Further, the same measurement procedure as in the above embodiment 1 Figure 1 ) is used to measure the sensor of the present structure, and the corresponding current versus gas concentration relationship still satisfies equation (6).

[0082] In an embodiment, the diffusion or permeation rate of the gas through the second electrolyte 270 can be controlled. For example, the speed of the gas through the second electrolyte 270 which is a polyionic liquid is mainly affected by the solubility, diffusion speed, film viscosity, and temperature of the gas in the second gas mass transfer component 240. For example, the physical and chemical structure of the polyionic liquid is stable, and the solubility and diffusion speed of the gas in it are also basically fixed (R g is basically unchanged) under constant temperature conditions, so that the gas concentration can be measured stably, and stable measurement results can be obtained.

[0083] In an embodiment, for different gases to be measured, by designing different molecular structure of ionic liquid and polymer structure (i.e. the second electrolyte 270), by regulating the interaction between the gas molecules and the second electrolyte 270, the solubility and diffusion speed of different gases to be measured in the thin film can be flexibly controlled, so that the electrochemical sensor has different response sensitivity to different gases, so as to measure the concentration of the gas.

[0084] It should be noted that the features of the embodiments in the present application can be combined with each other without conflict. The above is only the preferred embodiment of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An electrochemical gas sensor, characterized in that, include: First shell; First working electrode and second working electrode; The first gas mass transfer assembly includes a first buffer chamber and a first gas channel. The first buffer chamber is located inside the first housing and covers the first working electrode and the second working electrode. One end of the first gas channel is connected to the first buffer chamber, and the other end passes through the first housing, so as to allow gas to enter the first buffer chamber and reach the first working electrode and the second working electrode. A first electrolyte, which is located inside the first casing; The first pair of electrodes and the first reference electrode are separated by the first electrolyte.

2. The electrochemical gas sensor according to claim 1, characterized in that, The electrochemical gas sensor also includes: The third working electrode is disposed separately from the first working electrode, the second working electrode, the first pair electrode and the first reference electrode; The first gas mass transfer component further includes: The second buffer chamber covers the third working electrode, and the second buffer chamber is spaced apart from the first buffer chamber. The second gas channel is spaced apart from the first gas channel; one end of the second gas channel is connected to the second buffer chamber, and the other end passes through the first housing, for allowing gas to enter the second buffer chamber and the third working electrode.

3. The electrochemical gas sensor according to claim 1, characterized in that, The first gas mass transfer component further includes: An electrode support film, one side of which contacts the first buffer chamber, and the other side covers the first working electrode and the second working electrode.

4. The electrochemical gas sensor according to claim 1, characterized in that, The electrochemical gas sensor also includes: A dustproof film is disposed on the surface of the first housing to prevent dust from entering the first housing.

5. An electrochemical gas sensor, characterized in that, include: Second shell; First response electrode and second response electrode; The first and second response electrodes have a high line-to-area ratio structure, and the first and second response electrodes are intertwined but maintain a preset distance; The second electrolyte is located inside the second shell; A second gas mass transfer component is connected to one end of the second electrolyte and covers the first and second response electrodes. The second pair of electrodes and the second reference electrode are separated from the first response electrode and the second response electrode by the second electrolyte. An inert substrate is connected to the other end of the second electrolyte to improve the stability of the electrochemical gas sensor.

6. The electrochemical gas sensor according to claim 5, characterized in that, The second gas mass transfer component includes: A gas permeable membrane is located on the surface of the second electrolyte, through which gas reaches the first and second response electrodes.

7. The electrochemical gas sensor according to claim 5, characterized in that, The second electrolyte includes: An electrolyte membrane allows gas to pass through which it reaches the first and second response electrodes.

8. The electrochemical gas sensor according to claim 5, characterized in that, The electrochemical gas sensor also includes: A sealing assembly, located within the second housing, for accommodating the second electrolyte.

9. The electrochemical gas sensor according to claim 5, characterized in that, The inert substrate is also connected to the first response electrode, the second response electrode, the second pair of electrodes, and the second reference electrode.

10. The electrochemical gas sensor according to claim 5 or 9, characterized in that, The electrochemical gas sensor also includes: A heating substrate, which is connected to the inert substrate, is used for constant temperature control of the electrochemical gas sensor.

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