Measuring device

By adopting an air-floating guide rail and slider structure in the lithium battery electrode testing equipment, the problem of sensor accuracy loss under high-speed movement and vibration is solved, achieving stable measurement at high precision and high speed, and extending the life of the device.

CN223870099UActive Publication Date: 2026-02-03CHANGZHOU DACHENG VACUUM TECH CO LTD +1
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Patent Information

Application Number
CN202520493819.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-20
Publication Date
2026-02-03
Estimated Expiration
2035-03-20

AI Technical Summary

Technical Problem

Existing lithium battery electrode testing equipment suffers severe sensor accuracy loss under high-speed motion and mechanical vibration, making it difficult to meet the requirements of high-precision and high-speed measurement.

Method used

It adopts a combination structure of air-bearing guide rail and air-bearing slider to reduce the impact of friction and vibration. It achieves near-frictionless smooth movement through the air film principle. Combined with the moving support and measuring components, it is suitable for high-precision and high-speed measurement.

Benefits of technology

It improves the stability and accuracy of the measuring device, extends its service life, and ensures the accuracy of measurements at high precision and high speed.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of lithium battery detection, in particular to a measuring device which comprises a base, an air floating guide rail, a movable support and a measuring assembly, the air floating guide rail is provided with an air floating sliding block, the movable support is of an annular structure with an opening, and the movable support is provided with a mounting part located on the side face of the annular structure. The mounting part is used for being connected with the air floating sliding block so that the movable support can move along with the air floating sliding block. Due to the arrangement of the air floating sliding block and the air floating guide rail, nearly friction-free stable movement is realized between the air floating guide rail and the air floating sliding block by utilizing an air static pressure principle, so that the abrasion between the air floating guide rail and the air floating sliding block is reduced, the service life of the device is prolonged, and the movement stability of the movable bracket and the measuring assembly on the air floating sliding block of the mounting seat is ensured; the position of the air floating sliding block can be rapidly and accurately adjusted, so that the development requirements of high-precision and high-speed measurement are met. Due to the fact that the opening is formed in the movable support, convenience is provided for installation and work of the follow-up measuring assembly.
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Description

Technical Field

[0001] This application relates to the field of lithium battery testing technology, and more specifically to a measuring device. Background Technology

[0002] In the lithium battery manufacturing process, the uneven thickness of the positive and negative electrode sheets directly affects the performance of the battery. Therefore, it is necessary to monitor and inspect the thickness and areal density of the electrode sheets. Currently, laser thickness measurement and image scanning for areal density measurement are among the most commonly used non-destructive testing methods for lithium battery electrode inspection. The principle involves two laser displacement sensors pointing at the same point, measuring the distance from the surface of the object to the sensors to calculate the thickness, and using two laser beam devices positioned vertically to measure the areal density.

[0003] However, in actual measurements, due to vibrations during equipment operation, the laser beam or X-ray device used for repeated measurements of the object being measured is easily affected. Currently, the main transmission methods in measuring equipment are screw-rail or belt-rail structures, which can only minimize the impact of vibration on the sensor by adjusting the level and adding vibration damping pads. However, due to the contradiction between the ever-increasing demand for precision detection and the need for faster measurement speeds, the impact of mechanical friction at different speeds and low-frequency vibrations of mechanical connecting parts on sensor accuracy is becoming increasingly apparent, leading to a bottleneck in further improving the repeatability accuracy of the equipment. Utility Model Content

[0004] This application provides a measuring device that can reduce the impact of high-speed motion, mechanical friction and mechanical vibration on sensors, in order to meet the development needs of high-precision and high-speed measurement.

[0005] This application provides a measuring device, including a base, an air-bearing guide rail, a movable support, and a measuring component. The air-bearing guide rail is disposed on the base and has an air-bearing slider that can reciprocate along the air-bearing guide rail. The movable support is an annular structure with an opening and has a mounting portion located on the side of the annular structure for connecting with the air-bearing slider, so that the movable support can follow the movement of the air-bearing slider. The measuring component includes a first measuring unit and a second measuring unit, which are disposed opposite to each other at the two ends of the opening and can follow the movement of the movable support.

[0006] In some optional embodiments, the first measuring unit is a radiation emitting module and the second measuring unit is a radiation receiving module.

[0007] In some optional embodiments, the first measurement module is a first laser displacement sensor, and the second measurement unit is a second laser displacement sensor.

[0008] In some alternative embodiments, the movable support is a C-shaped frame or a U-shaped frame.

[0009] In some optional embodiments, the measuring device further includes a drive mechanism connected to the air-bearing slider for driving the air-bearing slider to move along the air-bearing guide rail.

[0010] In some alternative embodiments, the drive mechanism includes a drive motor or a piston cylinder.

[0011] In some alternative embodiments, the air-bearing slider is made of marble.

[0012] In some optional embodiments, the air-bearing guide rail has a T-shaped structure, the air-bearing slider forms a T-shaped mounting cavity in the middle, and the air-bearing guide rail is disposed in the T-shaped mounting cavity; the air-bearing slider is provided with an airflow hole communicating with the T-shaped mounting cavity to form an air film between the air-bearing slider and the air-bearing guide rail.

[0013] In some optional embodiments, the thickness of the gas film is 10 μm.

[0014] In some optional embodiments, multiple airflow holes are provided, and the multiple airflow holes are spaced apart along the movement direction of the air-bearing slider.

[0015] The measuring device according to this embodiment includes a base, an air-bearing guide rail, an air-bearing slider, a movable support, and measuring components. The air-bearing slider is mounted on the air-bearing guide rail and can move along it. The movable support and measuring components can follow the movement of the air-bearing slider. Due to the arrangement of the air-bearing slider and the air-bearing guide rail, the principle of air static pressure is used to achieve near-frictionless and smooth movement between the guide rail and the air-bearing slider. This not only reduces wear between the two and extends the service life of the device, but also ensures the stability of the movable support and measuring components on the air-bearing slider of the mounting base during movement. Furthermore, the air-bearing slider can achieve rapid and precise position adjustment according to actual measurement needs, thus adapting to the development needs of high-precision and high-speed measurements. The opening on the movable support facilitates the installation and operation of the subsequent measuring components and also facilitates the placement of the object being measured. Attached Figure Description

[0016] Figure 1 This is a structural side view of the measuring device in one embodiment;

[0017] Figure 2 This is a three-dimensional structural view of the measuring device in one embodiment;

[0018] Figure 3 This is a top view of the measuring device in one embodiment;

[0019] Figure 4 This is a front view of the measuring device in one embodiment.

[0020] Wherein: 100, base; 200, air-bearing guide rail; 300, air-bearing slider; 310, mounting cavity; 320, airflow hole; 330, first air-bearing block; 340, second air-bearing block; 350, third air-bearing block; 360, fourth air-bearing block; 370, fifth air-bearing block; 400, moving bracket; 410, opening; 420, mounting part; 430, slot; 500, measuring component; 510, first measuring unit; 520, second measuring unit; 530, X-ray measuring module; 531, X-ray emitting module; 532, X-ray receiving module; 540, laser measuring module; 541, first laser displacement sensor; 542, second laser displacement sensor; X, direction of movement; Y, horizontal direction; Z, vertical direction. Detailed Implementation

[0021] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0022] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments, and the operational steps involved in each embodiment can also be rearranged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for clearly describing a particular embodiment and do not imply that they represent the necessary components and / or order.

[0023] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0024] This application provides a measuring device for measuring the thickness, areal density, etc. of sheet-like test objects, including but not limited to diaphragms, electrodes, etc.

[0025] Please see Figures 1 to 4 The measuring device includes a base 100, an air-bearing guide rail 200, a movable support 400, and a measuring component 500. An air-bearing guide rail 200 is mounted on a base 100. An air-bearing slider 300 is mounted on the air-bearing guide rail 200. The air-bearing slider 300 can reciprocate along the air-bearing guide rail 200. The movable support 400 is an annular structure with an opening 410. The annular structure has a side surface, an outer edge surface, and an inner edge surface. The outer edge surface is the outermost surface, and its radius is the distance from the center of the annular structure to the outermost edge. The inner edge surface is the innermost surface, and its radius is smaller than that of the outer edge surface. The side surface is used to connect the inner edge surface and the outer edge surface. The movable support 400 has a mounting part 420 located on the side of the annular structure for connecting with the air-bearing slider 300 so that the movable support 400 can follow the movement of the air-bearing slider 300. The measuring component 500 includes a first measuring unit 510 and a second measuring unit 520. The first measuring unit 510 and the second measuring unit 520 are disposed opposite each other at the two ends of the opening 410 and can follow the movement of the movable support 400.

[0026] This application uses the combination of air-bearing guide rail 200 and air-bearing slider 300 to replace traditional lead screw guide rails, belts, etc., which can reduce friction during the movement process. This not only effectively reduces the wear of the device and extends its service life, but also ensures the smooth movement of the measuring device. Furthermore, the air-bearing slider 300 can quickly and accurately achieve position adjustment, thereby meeting the development needs of high-precision and high-speed measurement.

[0027] This application utilizes a movable support 400 with an annular structure having an opening 410 to facilitate subsequent measurement installation and adjustment of the measuring component 500. The opening 410 also facilitates the placement of sheet-like test objects. Simultaneously, the movable support 400 can move with the air-bearing slider 300, allowing the measuring component 500 mounted on it to move flexibly, thus supporting the position adjustment of the measuring component 500.

[0028] This application achieves intuitive and accurate measurement of key parameters of the object under test (such as thickness, surface density, width, flatness, etc.) through the cooperation of the first measuring unit 510 and the second measuring unit 520.

[0029] In some embodiments, the opening 410 extends along the movement direction X of the movable support 400 to form a straight groove 430 in the middle of the movable support 400. The straight groove 430 is used to place the object to be tested, and the straight groove 430 has a through direction that is parallel to the placement direction of the object to be tested, so that the object to be tested is placed in the straight groove 430 along the through direction or can move along the through direction. By moving the object to be tested and the measuring component 500 moving with the movable support 400, the multi-directional position of the object to be tested can be measured, thereby improving the comprehensiveness and accuracy of the measurement results.

[0030] Of course, in other embodiments, the slot 430 formed after the opening 410 extends can also be arc-shaped, triangular, polygonal, or other irregularly shaped, and the slot 430 is designed to fit the object to be measured. The slot 430 can also reduce the overall weight of the measuring device.

[0031] In some embodiments, the base 100, the air-bearing guide rail 200, and the air-bearing slider 300 are all disposed on a horizontal plane (the plane containing X and Y), and the mounting portion 420 of the movable support 400 is parallel to this horizontal plane, with the aforementioned through-path perpendicular to the mounting portion 420. This arrangement fully utilizes the space surrounding the measuring device, optimizes the overall layout of the measuring device, and ensures smooth and coordinated operation of all components within the measuring device. The air-bearing guide rail 200 extends along the direction of motion X, and the air-bearing slider 300 can perform linear reciprocating motion on the air-bearing guide rail 200.

[0032] Of course, in other embodiments, the mounting portion 420 may also form an angle with the horizontal plane, the angle being greater than 0° and less than 90° (acute angle), or any value between these values. Similarly, the through direction may also form an angle with the mounting portion 420, the angle also being greater than 0° and less than 90° (acute angle), or any value between these values. Accordingly, the placement orientation of the object to be tested needs to be adjusted so that it can be smoothly installed into the opening 410.

[0033] In some embodiments, the object to be measured is arranged along the vertical direction Z, while the first measuring unit 510 and the second measuring unit 520 are arranged opposite each other in the horizontal direction Y.

[0034] In some embodiments, since the movable support 400 is disposed on the air-float slider 300, in order to avoid the air-float slider 300 interfering with the placement of the test object, at least a portion of the movable support 400 should be suspended relative to the air-float slider 300. More preferably, the opening 410 and the straight groove 430 formed by its extension are suspended relative to the air-float slider 300.

[0035] In some embodiments, the measurement component 500 may be selected from at least one of a measurement module such as a X-ray measurement module 530, a laser measurement module 540, or an image recognition measurement module. The measurement component 500 may be selected from the same type of measurement module or from different measurement modules.

[0036] Please continue reading. Figure 3 In some embodiments, the first measuring unit 510 includes a radiation emitting module 531, and the second measuring unit 520 includes a radiation receiving module 532. The radiation emitting module 531 and the radiation receiving module 532 are disposed opposite each other at both ends of the opening 410. During measurement, the radiation emitting module 531 and the radiation receiving module 532 are also disposed opposite each other on both sides of the object to be measured. The radiation emitting module 531 is used to emit radiation toward the object to be measured placed at the opening 410, and the radiation receiving module 532 is used to receive radiation passing through the object to be measured. Preferably, the radiation emitting module 531 and the radiation receiving module 532 are spaced apart in the horizontal direction Y.

[0037] In other embodiments, the first measuring unit 510 includes a first laser displacement sensor 541, and the second measuring unit 520 includes a second laser displacement sensor 542. Similarly, the first laser displacement sensor 541 and the second laser displacement sensor 542 are disposed opposite to each other at both ends of the opening 410. During measurement, the first laser displacement sensor 541 and the second laser displacement sensor 542 are also disposed opposite to each other on both sides of the object to be measured. Preferably, the first laser displacement sensor 541 and the second laser displacement sensor 542 are spaced apart in the horizontal direction Y.

[0038] In some embodiments, the first measurement unit 510 in the measurement assembly 500 includes a radiation emission module 531 and a first laser displacement sensor 541, and the second measurement unit 520 includes a radiation receiving module 532 and a second laser displacement sensor 542. The radiation emission module 531 and the radiation receiving module 532 are arranged opposite to each other and cooperate with each other, and the first laser displacement sensor 541 and the second laser displacement sensor 542 are arranged opposite to each other and cooperate with each other. When a single radiation measurement module 530 is used, the radiation spot irradiating the test object has a certain area size, and the surface density detected by the measuring device is the average surface density within the radiation spot. For small scratches that may appear on the test object (the scratch width is much smaller than the width of the radiation spot), when the measuring device performs surface density detection, the small scratches are easily averaged out, making it difficult to detect their existence. Although appropriately reducing the area of ​​the radiation spot can improve the resolution, reducing the area of ​​the radiation spot will reduce the area of ​​the test object that can be detected each time, which will lead to a decrease in detection efficiency. In addition, it is difficult to reduce the radiation spot size by changing the structure of the radiation emission device. The combination of the laser measurement module 540 and the X-ray measurement module 530 ensures both measurement efficiency and reliability of the measurement results, increasing the dimensions of data acquisition and analysis. Furthermore, by mounting the laser measurement module 540 and the X-ray measurement module 530 on the same movable support 400, the space occupied by the measuring device is reduced, and their space-separated arrangement ensures that they do not interfere with each other, effectively guaranteeing the accuracy of the results.

[0039] In some embodiments, in order to further improve the detection efficiency, multiple air-float sliders 300 and multiple moving brackets 400 can be provided respectively. Multiple air-float sliders 300 can be arranged at intervals along the placement direction or moving direction of the object to be tested. The moving bracket 400 is arranged in a one-to-one correspondence with the air-float sliders 300. The moving bracket 400 can be provided with at least one measuring component 500 including a first detection unit 510 and a second detection unit 520.

[0040] In some embodiments, the outlines of the inner and outer edges of the annular structure can be circular, elliptical, or rectangular, and the movable support 400 can be a C-shaped or U-shaped frame.

[0041] In some embodiments, the measuring device further includes a drive mechanism for driving the air-bearing slider 300 to move along the air-bearing guide rail 200. The drive mechanism includes a drive motor, a piston cylinder, etc. For example, it can be a linear drive motor, with its output end connected to the air-bearing slider 300, causing it to reciprocate linearly along the air-bearing guide rail 200 to adjust the measuring component 500 relative to the substance to be measured. Of course, the drive mechanism can also be other structures capable of driving the air-bearing slider 300 to reciprocate linearly. The drive mechanism can be mounted on the base 100 or suspended in the air; this is not limited, as long as its output end is connected to the air-bearing slider 300 and can drive the air-bearing slider 300 to move stably. Preferably, the drive mechanism is mounted on the base 100 for stable installation, preventing the drive mechanism's wobbling from affecting the movement of the air-bearing slider 300.

[0042] In some embodiments, the air-bearing slider 300 is made of marble, which covers the air-bearing guide rail 200, so that the measuring device has large rigidity and overturning moment while being compact and making high space utilization, and the air-bearing slider 300 has high load-bearing capacity and stability during movement.

[0043] Please continue reading. Figure 4 In some embodiments, the air-bearing guide rail 200 has a T-shaped structure, and the air-bearing slider 300 forms a T-shaped mounting cavity 310 in the middle, with the air-bearing guide rail 200 disposed within the T-shaped mounting cavity 310. The air-bearing slider 300 is provided with airflow holes 320 communicating with the T-shaped mounting cavity 310 to form an air film between the air-bearing slider 300 and the air-bearing guide rail 200. By covering the T-shaped air-bearing guide rail 200 with the air-bearing slider 300 having the T-shaped mounting cavity 310, the movement direction X of the air-bearing guide rail 200 and the air-bearing slider 300, as well as their degrees of freedom in each direction, can be constrained. Simultaneously, a geometrically closed air film is formed between the air-bearing slider 300 and the air-bearing guide rail 200. The presence of this air film separates the air-bearing slider 300 and the air-bearing guide rail 200. When the two move relative to each other without contact, the influence of mechanical vibration and friction on the measurement results is greatly reduced, improving the stability and accuracy of the measuring device during measurement.

[0044] In some embodiments, multiple airflow holes 320 are provided, and the multiple airflow holes 320 are spaced apart along the movement direction X of the air-bearing slider 300 and are arranged in all planes where the air-bearing slider 300 and the air-bearing guide rail 200 contact, so that the air film exists at any position between the air-bearing slider 300 and the air-bearing guide rail 200, thereby ensuring that there is no friction at any contact position.

[0045] Please continue reading. Figure 4In some embodiments, the air-float block 300 includes a first air-float block 330, a second air-float block 340 and a third air-float block 350 symmetrically arranged at both ends of the first air-float block 330, a fourth air-float block 360 connected to the second air-float block 340, and a fifth air-float block 370 connected to the third air-float block 350. The first air-float block 330, the second air-float block 340, the third air-float block 350, the fourth air-float block 360, and the fifth air-float block 370 surround to form the aforementioned T-shaped mounting cavity 310. The first air-float block 330, the second air-float block 340, the third air-float block 350, the fourth air-float block 360, and the fifth air-float block 370 are all provided with a plurality of air-flow holes 320 at intervals, and the plurality of air-flow holes 320 form an air-flow row. The air-flow row is arranged at intervals along the movement direction X, and the spacing of the air-flow holes 320 on the same air-float block is the same, so that the air film is uniform. Preferably, the first air flotation block 330, the fourth air flotation block 360, and the fifth air flotation block 370 are all arranged along the horizontal direction Y (including approximately horizontal), and the airflow holes 320 on them are arranged at intervals along the horizontal direction Y to form an airflow channel. The second air flotation block 340 and the third air flotation block 350 are placed in the vertical direction Z (including approximately vertical), and the airflow holes 320 on them are arranged at intervals along the vertical direction Z to form an airflow channel. This modular and symmetrical design makes the air flotation slider 300 structure more compact while ensuring minimal displacement of the air film on both sides and the upper and lower working surfaces during measurement. Simultaneously, the air film separates the air flotation guide rail 200 and the air flotation slider 300.

[0046] In some embodiments, the cross-section of the airflow hole 320 can be circular, rectangular, triangular or polygonal, and the central axis of the airflow hole 320 should be a straight line to reduce airflow resistance.

[0047] In some embodiments, the thickness of the air film is 10 μm. When the air film is sufficiently rigid, the air film gap will not change drastically when the air flotation guide 200 and the air flotation slider 300 vibrate, thereby isolating the process of vibration being transmitted from the air flotation guide 200 to the air flotation slider 300.

[0048] The above examples illustrate this application only to aid understanding and are not intended to limit its scope. Those skilled in the art to which this application pertains can make various simple deductions, modifications, or substitutions based on the ideas presented.

Claims

1. A measuring device, characterized in that, include: Base; An air-bearing guide rail is provided on the base, and an air-bearing slider is provided on the air-bearing guide rail. The air-bearing slider can reciprocate along the air-bearing guide rail. A movable support is a ring-shaped structure with an opening. The movable support has a mounting part located on the side of the ring-shaped structure for connecting with the air-bearing slider so that the movable support can follow the movement of the air-bearing slider. as well as The measuring component includes a first measuring unit and a second measuring unit, which are disposed opposite to each other at both ends of the opening and are capable of moving with the movable support.

2. The measuring device according to claim 1, characterized in that, The first measuring unit includes a radiation emitting module, and the second measuring unit includes a radiation receiving module.

3. The measuring device according to claim 1 or 2, characterized in that, The first measuring unit includes a first laser displacement sensor, and the second measuring unit includes a second laser displacement sensor.

4. The measuring device according to claim 1, characterized in that, The movable support is a C-shaped frame or a U-shaped frame.

5. The measuring device according to claim 1, characterized in that, The measuring device also includes a drive mechanism for driving the air-bearing slider to move along the air-bearing guide rail.

6. The measuring device according to claim 5, characterized in that, The drive mechanism includes a drive motor or a piston cylinder.

7. The measuring device according to claim 1, characterized in that, The air-bearing slider is made of marble.

8. The measuring device according to claim 1, characterized in that, The air-bearing guide rail has a T-shaped structure, and a T-shaped mounting cavity is formed in the middle of the air-bearing slider. The air-bearing guide rail is disposed in the T-shaped mounting cavity. The air-bearing slider is provided with an airflow hole that communicates with the T-shaped mounting cavity to form an air film between the air-bearing slider and the air-bearing guide rail.

9. The measuring device according to claim 8, characterized in that, The thickness of the air film is 10 μm.

10. The measuring device according to claim 8, characterized in that, The airflow holes are provided in multiple ways, and the multiple airflow holes are spaced apart along the movement direction of the air-floating slider.