Active anti-pollution device for imaging lens of DI photoetching machine

Abstract

The DI photoetching machine imaging lens active anti-pollution device comprises a dustproof glass fixing seat, dustproof glass and an air knife module, a mounting hole is formed in the dustproof glass fixing seat, the dustproof glass is arranged on the mounting hole, the air knife module comprises an air knife main body and a valve, the air knife main body comprises an air collecting cavity and an air outlet gap communicated with the air collecting cavity, and the valve is arranged in the air outlet gap. The valve is communicated with the air collecting cavity, air is supplied to the air collecting cavity through the valve, and an air curtain closing the bottom end face of the mounting hole can be blown out from the air outlet gap. The dustproof glass fixing base is installed at one end of a lens barrel, when a lens works, light can be emitted through the dustproof glass, the dustproof glass can prevent dust from entering the lens barrel, air is supplied into the air collection cavity through the valve, and an air curtain formed on the bottom end face of the installation hole is blown out from the air outlet gap. The dustproof glass can be effectively prevented from being polluted and gathered by dust and polluting gas, the surface of the dustproof glass is ensured to be clean, the imaging quality is improved, manual cleaning of the dustproof glass is not needed, and worry and labor are saved.

Description

Technical Field

[0001] This utility model relates to the field of imaging lens technology for DI lithography machines, and more particularly to an active anti-contamination device for imaging lenses of DI lithography machines. Background Technology

[0002] DI lithography machines are processing equipment used in the PCB circuit board manufacturing industry. They need to be equipped with imaging lenses. Due to their harsh working environment, large dust volume, and high concentration of ink volatiles, when ink volatiles adhere to the lens surface and are immediately irradiated by ultraviolet light, the ink volatiles will solidify and adhere to the glass surface. This not only blocks the light source from curing the ink on the PCB board, but also seriously affects the imaging quality. Therefore, active contamination isolation protection must be implemented at the light-emitting end of the imaging lens. Summary of the Invention

[0003] The problem to be solved by this utility model is to provide an active anti-contamination device for the imaging lens of a DI lithography machine, which can isolate dust and prevent polluting gases from entering the lens barrel, avoid lens contamination, and improve imaging quality.

[0004] To solve the above-mentioned technical problems, an active anti-contamination device for imaging lenses of DI lithography machines is provided by this utility model, which includes a dustproof glass mounting base, a dustproof glass, and an air knife module. The dustproof glass mounting base is provided with mounting holes that match the dustproof glass, and the dustproof glass is set on the mounting holes. The air knife module includes an air knife body installed at the bottom of the dustproof glass mounting base and a valve. The air knife body includes an air collecting chamber and an air outlet gap communicating with the air collecting chamber. The valve communicates with the air collecting chamber and supplies air to the air collecting chamber through the valve. An air curtain that closes the bottom end face of the mounting hole can be blown out from the air outlet gap.

[0005] Preferably, it further includes a glass retaining ring that matches the mounting hole, with an annular limiting portion provided around the periphery of the mounting hole, the bottom end face of the dustproof glass abutting the top surface of the annular limiting portion, and the bottom end face of the glass retaining ring abutting the top surface of the dustproof glass.

[0006] Preferably, a sealant is applied between the edge of the dustproof glass and the inner wall of the mounting hole.

[0007] Preferably, the air knife body includes an air knife base and an air knife cover plate fixedly connected to the bottom of the dustproof glass mounting base. The bottom of the air knife cover plate is provided with a positioning step, and the top of the air knife base is provided with a receiving groove that matches the positioning step. The positioning step is set on the receiving groove and the two are connected by screws. The top of the air knife base is provided with an air collecting groove, and the side wall of the air knife base is provided with an air inlet that communicates with the air collecting groove. A valve is connected to the input end of the air inlet. One side of the air knife base is provided with an air outlet groove that communicates with the air collecting groove. The air collecting groove and the bottom of the air knife cover plate surround each other to form an air collecting cavity, and the air outlet groove and the bottom of the air knife cover plate surround each other to form an air outlet gap.

[0008] Preferably, the dustproof glass mounting base has an annular cavity centered on the center of the mounting hole, and the bottom of the dustproof glass mounting base has an annular groove communicating with the annular cavity, centered on the center of the mounting hole. The top of the air knife base has an arc-shaped guide part matching the annular groove, and the arc-shaped guide part is movably mounted on the annular groove. Several through holes are provided through the air knife base, and several positioning nuts are movably mounted in the annular cavity. Positioning screws are connected between the through holes and the positioning nuts.

[0009] Preferably, the valve is a throttle valve, and the output end of the valve is connected to the input end of the air inlet.

[0010] Preferably, the top periphery of the dustproof glass mounting base is provided with an annular clearance groove, the top of the dustproof glass mounting base is provided with an annular receiving groove, and a sealing ring is provided on the annular receiving groove.

[0011] Preferably, the outer ring of the glass pressure ring is provided with an external thread, and the wall surface of the mounting hole is provided with an internal thread that matches the external thread.

[0012] The beneficial effects of this utility model are as follows: This utility model provides an active anti-contamination device for the imaging lens of a DI lithography machine. The dustproof glass mounting base is installed at one end of the lens barrel, and the input end of the valve is connected to the air supply pipe. When the lens is working, light can be emitted through the dustproof glass, which can prevent dust from entering the lens barrel. Air is supplied to the air collection chamber through the valve, and an air curtain formed on the bottom end face of the mounting hole is blown out through the air outlet gap. This can effectively isolate dust and polluting gases from contaminating and accumulating on the dustproof glass, ensuring the cleanliness of the dustproof glass surface, improving imaging quality, and eliminating the need for manual cleaning of the dustproof glass, saving time and effort. Attached Figure Description

[0013] Figure 1 A schematic diagram illustrating the external structure of this utility model is provided.

[0014] Figure 2 A cross-sectional view of the present invention is shown.

[0015] Figure 3 An exploded view of the present invention is shown.

[0016] Figure 4 A schematic diagram illustrating the structure of the air knife module of this utility model is shown.

[0017] Figure 5 A schematic diagram illustrating the external structure of the air knife base of this utility model is provided.

[0018] Figure 6 A schematic diagram illustrating the external structure of the air knife cover plate of this utility model is provided.

[0019] Figure 7A cross-sectional view of the present invention mounted on a lens is shown as an example.

[0020] Reference numerals in the attached diagrams are as follows: 1. Dustproof glass mounting base; 10. Mounting hole; 100. Annular limiting part; 101. Annular cavity; 102. Annular through groove; 103. Annular clearance groove; 104. Annular receiving groove; 2. Dustproof glass; 3. Air knife module; 30. Air knife body; 30. Air collecting chamber; 301. Air outlet gap; 31. Valve; 32. Air knife base; 32. Receiving groove; 320. Air collecting groove; 321. Air inlet; 322. Air outlet groove; 323. Arc-shaped guide part; 324. Through hole; 325. Positioning nut; 326. Positioning screw; 327. Air knife cover plate; 33. Positioning step; 330. Glass pressure ring; 4. Sealing ring; 5. Lens; 6. Lens barrel; 60. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure.

[0022] Based on the embodiments described in this disclosure, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this disclosure.

[0023] refer to Figures 1-7 .

[0024] This utility model provides an active anti-contamination device for the imaging lens of a DI lithography machine, comprising a dustproof glass mounting base 1, a dustproof glass 2, and an air knife module 3. The dustproof glass mounting base 1 is provided with a mounting hole 10 that matches the dustproof glass 2, and the dustproof glass 2 is disposed on the mounting hole 10. The air knife module 3 includes an air knife body 30 installed at the bottom of the dustproof glass mounting base 1 and a valve 31. The air knife body 30 includes an air collecting chamber 300 and an air outlet slit 301 communicating with the air collecting chamber 300. The valve 31 is connected to the air collecting chamber 300 and supplies air to the air collecting chamber 300 through the valve 31. An air curtain that closes the bottom end face of the mounting hole 10 can be blown out from the air outlet slit 301.

[0025] Its working principle is as follows, as shown in the attached document. Figure 7 As shown, the dustproof glass mounting base 1 is installed at one end of the lens barrel 60. The input end of the valve 31 is connected to the air supply pipe. When the lens 6 is working, light can be emitted through the dustproof glass 2. The dustproof glass 2 can prevent dust from entering the lens barrel 60. Air is supplied to the air collection chamber 300 through the valve 31. An air curtain formed on the bottom surface of the mounting hole 10 is blown out at the air outlet gap 301. This can effectively isolate dust and polluting gases from contaminating and accumulating on the dustproof glass 2, ensuring that the surface of the dustproof glass 2 is clean and improving the imaging quality. There is no need to manually clean the dustproof glass 2, which is convenient and labor-saving.

[0026] Based on the above embodiments, it also includes a glass retaining ring 4 that matches the mounting hole 10. An annular limiting part 100 is provided around the mounting hole 10. The bottom end face of the dustproof glass 2 is adjacent to the top surface of the annular limiting part 100. The bottom end face of the glass retaining ring 4 abuts against the top surface of the dustproof glass 2, which plays a positioning role for the dustproof glass 2 and ensures that the dustproof glass 2 is installed stably.

[0027] Based on the above embodiments, a sealant is applied between the edge of the dustproof glass 2 and the inner wall of the mounting hole 10 to effectively prevent dust, moisture and other polluting gases from entering the lens barrel 60.

[0028] Based on the above embodiments, the air knife body 30 includes an air knife base 32 and an air knife cover plate 33 fixedly connected to the bottom of the dustproof glass mounting base 1. The bottom of the air knife cover plate 33 is provided with a positioning step 330. The top of the air knife base 32 is provided with a receiving groove 320 that matches the positioning step 330. The positioning step 330 is provided on the receiving groove 320 and the two are connected by screws. The top of the air knife base 32 is provided with an air collecting groove 321. The side wall of the air knife base 32 is provided with an air inlet 322 that communicates with the air collecting groove 321. The valve 31 is connected to the input end of the air inlet 322. One side of the air knife base 32 is provided with an air outlet groove 323 that communicates with the air collecting groove 321. The air collecting groove 321 and the bottom of the air knife cover plate 33 surround each other to form an air collecting cavity 300. The air outlet groove 323 and the bottom of the air knife cover plate 33 surround each other to form an air outlet gap 301. Air is supplied to the air collection chamber 300 through valve 31, and an air curtain is blown out from the air outlet 301 to form on the bottom surface of the mounting hole 10. It has the advantages of simple structure and easy maintenance.

[0029] Based on the above embodiments, the interior of the dustproof glass mounting base 1 is provided with an annular cavity 101 centered on the center of the mounting hole 10. The bottom of the dustproof glass mounting base 1 is provided with an annular through groove 102 communicating with the annular cavity 101, centered on the center of the mounting hole 10. The top of the air knife base 32 is provided with an arc-shaped guide part 324 matching the annular through groove 102. The arc-shaped guide part 324 is movably disposed on the annular through groove 102. Several through holes 325 are provided through the air knife base 32. Several positioning nuts 326 are movably disposed in the annular cavity 101. Positioning screws 327 are connected between the through holes 325 and the positioning nuts 326. The air knife body 30 can be fixed to the bottom of the dustproof glass mounting base 1. The air knife body 30 can be fixed at any position in the annular circle where the dustproof glass mounting base 1 is located as needed, which is flexible and convenient for lens installation and use.

[0030] Based on the above embodiments, valve 31 is a throttle valve. The output end of valve 31 is connected to the input end of air inlet 322, which can adjust the airflow into air collection chamber 300, making it convenient to control the airflow supply and save air source.

[0031] Based on the above embodiments, an annular clearance groove 103 is provided on the top periphery of the dustproof glass mounting base 1, and an annular receiving groove 104 is provided on the top of the dustproof glass mounting base 1. A sealing ring 5 is provided on the annular receiving groove 104. An installation groove is provided on the inner edge of the bottom end of the lens barrel 60. During installation, the installation groove of the lens barrel 60 fits onto the annular clearance groove 103, and the sealing ring 5 abuts against the top of the installation groove of the lens barrel 60, improving the sealing performance between the dustproof glass mounting base 1 and the lens barrel 60. The sealing ring 5 can be made of silicone to improve UV resistance.

[0032] Based on the above embodiments, the outer ring of the glass pressure ring 4 is provided with an external thread, and the wall surface of the mounting hole 10 is provided with an internal thread that matches the external thread, so as to facilitate the clamping and positioning of the dustproof glass 2 and prevent the dustproof glass 2 from loosening.

[0033] The above embodiments are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Various modifications and improvements made to the technical solutions of the present utility model by those skilled in the art without departing from the spirit of the present utility model should fall within the protection scope defined by the claims of the present utility model.

Claims

1. An active anti-contamination device for the imaging lens of a DI lithography machine, characterized in that, The device includes a dustproof glass mounting base, a dustproof glass, and an air knife module. The dustproof glass mounting base has mounting holes that match the dustproof glass, and the dustproof glass is mounted on the mounting holes. The air knife module includes an air knife body mounted at the bottom of the dustproof glass mounting base and a valve. The air knife body includes an air collecting chamber and an air outlet gap communicating with the air collecting chamber. The valve communicates with the air collecting chamber and supplies air to the air collecting chamber. An air curtain that closes the bottom face of the mounting hole can be blown out from the air outlet gap.

2. The active anti-contamination device for the imaging lens of a DI lithography machine according to claim 1, characterized in that, It also includes a glass retaining ring that matches the mounting hole, the periphery of the mounting hole is provided with an annular limiting part, the bottom end face of the dustproof glass is adjacent to the top surface of the annular limiting part, and the bottom end face of the glass retaining ring abuts against the top surface of the dustproof glass.

3. The active anti-contamination device for the imaging lens of a DI lithography machine according to claim 2, characterized in that, The edge of the dustproof glass is coated with sealant between it and the inner wall of the mounting hole.

4. The active anti-contamination device for the imaging lens of a DI lithography machine according to claim 2 or 3, characterized in that, The air knife body includes an air knife base and an air knife cover plate fixedly connected to the bottom of the dustproof glass mounting base. The bottom of the air knife cover plate is provided with a positioning step, and the top of the air knife base is provided with a receiving groove that matches the positioning step. The positioning step is set on the receiving groove and the two are connected by screws. The top of the air knife base is provided with an air collecting groove, and the side wall of the air knife base is provided with an air inlet that communicates with the air collecting groove. The valve is connected to the input end of the air inlet. One side of the air knife base is provided with an air outlet groove that communicates with the air collecting groove. The air collecting groove and the bottom of the air knife cover plate surround each other to form the air collecting cavity, and the air outlet groove and the bottom of the air knife cover plate surround each other to form the air outlet gap.

5. The active anti-contamination device for the imaging lens of a DI lithography machine according to claim 4, characterized in that, The dustproof glass mounting base has an annular cavity centered on the center of the mounting hole. The bottom of the dustproof glass mounting base has an annular groove communicating with the annular cavity, also centered on the center of the mounting hole. The top of the air knife base has an arc-shaped guide portion matching the annular groove, which is movably mounted on the annular groove. Several through holes are provided through the air knife base. Several positioning nuts are movably mounted in the annular cavity. Positioning screws connect the through holes and the positioning nuts.

6. The active anti-contamination device for the imaging lens of a DI lithography machine according to claim 5, characterized in that, The valve is a throttle valve, and the output end of the valve is connected to the input end of the air inlet.

7. The active anti-contamination device for the imaging lens of a DI lithography machine according to claim 1, characterized in that, The top periphery of the dustproof glass mounting base is provided with an annular clearance groove, and the top of the dustproof glass mounting base is provided with an annular receiving groove, and a sealing ring is provided on the annular receiving groove.

8. The active anti-contamination device for the imaging lens of a DI lithography machine according to claim 2, characterized in that, The outer ring of the glass pressure ring is provided with an external thread, and the wall surface of the mounting hole is provided with an internal thread that matches the external thread.

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