Laser processing system based on acousto-optic deflector

Abstract

The laser processing system based on the acousto-optic deflector comprises an XYZ motion platform, a laser, an acousto-optic deflection assembly, a galvanometer and a focusing field lens are arranged above the XYZ motion platform, the acousto-optic deflection assembly, the galvanometer and the XYZ motion platform are sequentially arranged along an emergent light path of the laser, and the acousto-optic deflection assembly, the galvanometer and the XYZ motion platform are all electrically connected with a controller. The controller controls the acousto-optic deflection assembly to compensate the movement speed and precision of the galvanometer and the XYZ movement platform in real time. The position of a workpiece to be machined is controlled through the XYZ motion platform, meanwhile, the machining path of a laser beam is modulated through the acousto-optic deflection assembly and the galvanometer, and by means of linkage control among the acousto-optic deflection assembly, the galvanometer and the XYZ motion platform, the acousto-optic deflection assembly compensates the motion speed and motion precision of the XYZ motion platform and the galvanometer in real time; therefore, high-speed and high-precision laser processing without frequent start and stop of the XYZ motion platform and the galvanometer is realized, and the fault rate and the wear rate of frequent start and stop of the XYZ motion platform and the galvanometer are reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to laser processing technical field, concretely relates to a kind of laser processing systems based on acoustooptic deflector. BACKGROUND

[0002] At present, the method for realizing the exit of circularly polarized light of laser optical system includes acoustooptic, electro-optic, wave plate and other modulation methods.For example, Chinese patent CN119237966A discloses a method for adjusting light and then cooperating with a galvanometer to punch holes using one or more sets of rotating wave plate groups;However, this method uses a mechanical lens to deflect laser because the galvanometer is driven by the lens, which has slow response speed, low precision and cannot modulate laser beam in real time according to processing requirements and combined with platform motion trajectory, so it cannot meet the increasingly complex and higher precision laser processing requirements.Chinese patent CN117500629A discloses the control method and principle of acoustooptic deflector (AOD);But this method cannot be linked with the existing laser punching platform to realize high-speed and efficient uninterrupted laser processing requirements. UTILITY MODEL CONTENT

[0003] The utility model aims to provide a kind of laser processing systems based on acoustooptic deflector, at least can solve the partial defects existing in prior art.

[0004] To achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A kind of laser processing systems based on acoustooptic deflector, including XYZ motion platform, controller, laser and acoustooptic deflection component, galvanometer and focusing field lens sequentially arranged along the light path of the laser;Wherein, the XYZ motion platform is used to carry workpiece and drive workpiece to move below the processing width of the galvanometer, the acoustooptic deflection component and the galvanometer are used to modulate the processing path of laser beam, the acoustooptic deflection component, galvanometer, XYZ motion platform are electrically connected with the controller, the controller controls the acoustooptic deflection component to compensate the motion speed and precision of the galvanometer and XYZ motion platform in real time.

[0006] Further, the above-mentioned laser processing system based on acoustooptic deflector further includes a paraxial positioning CCD for positioning the position of workpiece, the paraxial positioning CCD is located on the side of the galvanometer, and the paraxial positioning CCD is electrically connected with the controller.

[0007] Further, the XYZ motion platform is provided with a suction jig for vacuum adsorbing workpiece, the flatness of the suction jig is ≤5 μm, and the parallelism between the suction jig and the focusing field lens is ≤10 μm.

[0008] Further, the XYZ motion platform is provided with position sensors in three motion directions of X, Y and Z, and the position sensors are electrically connected with the controller.

[0009] Further, the acousto-optic deflection assembly comprises, in sequence along an outgoing light path of the laser, a beam expander, an acousto-optic deflector and a light barrier; the beam expander is used to expand the diameter of the laser beam to the required spot size for entering the acousto-optic deflector; the acousto-optic deflector controls the deflection angle of the laser beam so that a primary diffracted beam in the laser beam passes through the light barrier.

[0010] Further, the acousto-optic deflection assembly further comprises a power detection device for detecting the outgoing light power of the laser, and the power detection device is located on the laser light path between the laser and the beam expander.

[0011] Further, a first lens is arranged on the laser light path between the acousto-optic deflector and the light barrier, and a second lens is arranged on the laser light path between the light barrier and the galvanometer.

[0012] Further, the acousto-optic deflection assembly further comprises a plurality of turnaround mirrors for changing the transmission direction of the laser.

[0013] Further, the acousto-optic deflector is one or more.

[0014] Further, the above-mentioned laser processing system based on the acousto-optic deflector further comprises a rack, and the XYZ motion platform, the controller, the laser, the acousto-optic deflection assembly, the galvanometer and the focusing field lens are all mounted on the rack.

[0015] Compared with the prior art, the laser processing system based on the acousto-optic deflector has the following beneficial effects:

[0016] The laser processing system based on the acousto-optic deflector provided by the utility model realizes high-speed and high-precision laser processing of the XYZ motion platform without frequent start and stop, and can effectively reduce the failure rate and wear rate of the XYZ motion platform and the galvanometer due to frequent start and stop.

[0017] The utility model will be further described in detail below with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is the structure schematic diagram of the laser processing system based on the acousto-optic deflector of the utility model;

[0019] Figure 2 is a structural schematic view of the acousto-optic deflection assembly in the utility model;

[0020] Figure 3 is a control schematic view of the laser processing system based on the acousto-optic deflector in the utility model;

[0021] Figure 4 is a processing width relative position schematic view of the XYZ motion platform, acousto-optic deflection assembly and galvanometer in the utility model.

[0022] Mark explanation: 1, rack; 2, XYZ motion platform; 3, suction jig; 4, off-axis positioning CCD; 5, laser; 6, acousto-optic deflector; 7, controller; 8, power detection device; 9, beam expander; 10, first lens; 11, diaphragm; 12, second lens; 13, return mirror; 14, galvanometer; 15, focusing field lens. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0024] In the description of the utility model, it is understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the utility model.

[0025] In the description of the utility model, it should be explained that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, can also be detachable connection, can also be abutting connection or integrally connected, for those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0026] The terms "first", "second", "third", etc. are used only for descriptive purposes and should not be construed as implying or suggesting relative importance or an indicated number of technical features. Thus, features defined with "first", "second", etc. can explicitly or implicitly include one or more of the features; in the description of the present application, unless otherwise stated, the meaning of "a plurality" is two or more.

[0027] As shown in Figure 1 , Figure 2 , Figure 3 and Figure 4 , the embodiment provides a laser processing system based on an acousto-optic deflector, comprising an XYZ motion platform 2, a controller 7, a laser 5, and an acousto-optic deflection assembly, a galvanometer 14 and a focusing field lens 15 arranged in sequence along the light path of the laser 5; wherein the XYZ motion platform 2 is used to carry and move the workpiece to be processed, the acousto-optic deflection assembly and the galvanometer 14 are used to modulate the processing path of the laser beam, the focusing field lens 15 is used to focus the modulated laser beam to the processing area, and according to the processing requirements, adjust the size, shape and energy distribution uniformity of the spot and other parameters, the acousto-optic deflection assembly, the galvanometer 14 and the XYZ motion platform 2 are electrically connected with the controller 7, and the laser processing is carried out by the relative motion mode of the laser light path and the XYZ motion platform 2, since the XYZ motion platform 2 and the galvanometer 14 are driven by the motor to move, and the moment of inertia of the motor itself will make it unable to respond immediately after receiving the signal to change the speed or direction of movement, thereby affecting the processing accuracy, in the embodiment, the controller 7 can be used to control the acousto-optic deflection assembly to compensate the speed and accuracy of the galvanometer 14 and the XYZ motion platform 2 in real time, and preferably, the speed of the galvanometer 14 and the XYZ motion platform 2 can be dynamically compensated and the compensated information can be output to the controller 7 in real time.

[0028] Preferably, the laser processing system based on the acousto-optic deflector further comprises a paraxial positioning CCD 4 for positioning the position of the workpiece to be processed, the paraxial positioning CCD 4 is located on one side of the galvanometer 14, and the paraxial positioning CCD 4 is electrically connected with the controller 7.

[0029] The specific process of laser processing by the laser processing system based on the acousto-optic deflector of the embodiment is as follows: the workpiece to be processed is placed on the XYZ motion platform 2, the processing template and parameters are set according to the requirements, the laser processing system is started, the XYZ motion platform 2 drives the workpiece to be processed to move below the paraxial positioning CCD 4, the paraxial positioning CCD 4 positions one or more feature MARK points on the workpiece to be processed and calculates the accurate positioning coordinates of the workpiece to be processed, the XYZ motion platform 2 drives the workpiece to be processed to move below the galvanometer 14 processing range, the galvanometer 14 range is divided into several small ranges according to the processing range of the acousto-optic deflection assembly, and when processing, the galvanometer 14 deflects to the several small ranges in turn, and the acousto-optic deflection assembly performs laser processing in the small range. In order to completely describe the processing process, the movements of the XYZ motion platform 2, the galvanometer 14 and the acousto-optic deflection assembly are respectively divided into X and Y direction movements, the acousto-optic deflection assembly can compensate the movement speed and movement accuracy of the XYZ motion platform 2 and the galvanometer 14 in the X and Y directions in real time, so as to realize high-speed and high-precision laser processing of the XYZ motion platform 2 without frequent start and stop, and meanwhile, the failure rate and wear rate of the XYZ motion platform 2 and the galvanometer 14 due to frequent start and stop can be effectively reduced.

[0030] In an optional embodiment, the XYZ motion platform 2 is provided with a suction jig 3, a plurality of vacuum suction holes are arranged on the suction jig 3, and the suction jig 3 is used for vacuum suction of the workpiece to be processed. Meanwhile, a plurality of fine tooth leveling screws are arranged on the suction jig 3 to adjust the flatness of the suction jig 3. During laser processing, the flatness of the suction jig 3 needs to be controlled to be ≤5μm, the parallelism between the suction jig 3 and the focusing field lens 15 needs to be controlled to be ≤10μm, and the vacuum negative pressure range after suction of the workpiece to be processed is-65-90kPa.

[0031] Preferably, high-precision position sensors are arranged in the X, Y and Z movement directions of the XYZ motion platform 2, and the three position sensors can dynamically compensate each other and output the compensated position information to the controller in real time.

[0032] In an optional embodiment, as shown in Figure 1 and Figure 2 The acousto-optic deflection assembly includes, in sequence along the outgoing light path of the laser 5, a beam expander 9, an acousto-optic deflector (AOD) 6 and a diaphragm 11. The beam expander 9 is used to expand the diameter of the laser beam to the required spot size entering the acousto-optic deflector 6. In the embodiment, the input spot size entering the acousto-optic deflector 6 is designed to be 4±1mm. The acousto-optic deflector 6 controls the deflection angle of the laser beam, so that the first-order diffracted beam of the laser beam passes through the diaphragm 11, and at the same time, the diaphragm 11 blocks other orders of diffracted beams of the laser beam.

[0033] Optimally, the beam expander 9 and the acousto-optic deflector 6 are arranged close to the laser 5, which facilitates the laser beam to enter the acousto-optic deflector 6 for subsequent processing after being generated, reduces the energy loss and the risk of optical path deviation in the laser beam transmission process, and ensures the stability and accuracy of the system operation. The acousto-optic deflector 6 can adjust the deflection direction and angle of the laser beam in a two-dimensional plane to realize scanning of the laser beam in one-dimensional and two-dimensional directions; the acousto-optic deflector 6 can be arranged one or more, and when the acousto-optic deflector 6 is two, the two acousto-optic deflectors 6 are arranged on the laser light path axis, and the directions of the effective deflected light rays of the two acousto-optic deflectors 6 are arranged perpendicular to each other.

[0034] Further, since the laser power size affects the laser processing effect, the acousto-optic deflection assembly further includes a power detection device 8 for detecting the output light power of the laser 5, and the power detection device 8 is located on the laser light path between the laser 5 and the beam expander 9, which ensures the stability and accuracy of the laser power.

[0035] Optimally, a first lens 10 is arranged on the laser light path between the acousto-optic deflector 6 and the diaphragm 11, which focuses the laser beam output by the acousto-optic deflector 6 into the diaphragm 11; and a second lens 12 is arranged on the laser light path between the diaphragm 11 and the galvanometer 14, which focuses the laser beam passing through the diaphragm 11, so that the laser beam has a higher energy density when passing through the galvanometer 14, and by adjusting the position and focal length of the second lens 12, the diameter, divergence angle and other parameters of the laser beam can also be changed to adapt to the specifications and application requirements of different galvanometers 14.

[0036] Optionally, the acousto-optic deflection assembly further includes several turnaround mirrors 13 for changing the transmission direction of the laser, which can adjust the spatial layout of each optical element on the laser light path to save the occupied space of the laser processing system; for example, as shown in Figure 2 The acousto-optic deflection assembly of the embodiment includes five turnaround mirrors 13 arranged at five turning angles of the laser light path.

[0037] Optionally, the laser processing system of the embodiment further includes a rack 1, and the XYZ motion platform 2, the controller 7, the laser 5, the acousto-optic deflection assembly, the galvanometer 14 and the focusing field lens 15 are all carried on the rack 1 to ensure the stability of the laser processing system.

[0038] The above examples are only illustrative of the present application and do not constitute a limitation on the protection scope of the present application, and any design identical or similar to the present application falls within the protection scope of the present application.

Claims

1. A laser processing system based on an acousto-optic deflector, characterized by: The application relates to a laser processing device, which comprises an XYZ motion platform for carrying and moving a workpiece, a laser device arranged above the XYZ motion platform, an acousto-optic deflection assembly, a galvanometer and a focusing field lens arranged along an outgoing light path of the laser device in sequence, and the acousto-optic deflection assembly, the galvanometer and the XYZ motion platform are electrically connected with a controller.

2. The acousto-optic deflector-based laser processing system of claim 1, wherein: The application also comprises a side-axis positioning CCD for positioning the position of the workpiece, which is arranged on one side of the galvanometer and is electrically connected with the controller.

3. The acousto-optic deflector-based laser processing system of claim 1, wherein: The XYZ motion platform is provided with a suction jig for vacuum-suctioning the workpiece, the flatness of the suction jig is less than or equal to 5 mu m, and the parallelism between the suction jig and the focusing field lens is less than or equal to 10 mu m.

4. The acousto-optic deflector-based laser processing system of claim 1, wherein: Position sensors are arranged in the X, Y and Z motion directions of the XYZ motion platform, and the position sensors are electrically connected with the controller.

5. The acousto-optic deflector-based laser processing system of claim 1, wherein: The acousto-optic deflection assembly comprises an expander mirror, an acousto-optic deflector and a diaphragm arranged along the outgoing light path of the laser device in sequence; the expander mirror is used for expanding the diameter of the laser beam to the required spot size for entering the acousto-optic deflector; the acousto-optic deflector controls the deflection angle of the laser beam, so that a primary diffraction beam in the laser beam passes through the diaphragm.

6. The acousto-optic deflector-based laser processing system of claim 5, wherein: The acousto-optic deflection assembly further comprises a power detection device for detecting the outgoing light power of the laser device, which is arranged on the laser light path between the laser device and the expander mirror.

7. The acousto-optic deflector-based laser processing system of claim 5, wherein: A first lens is arranged on the laser light path between the acousto-optic deflector and the diaphragm, and a second lens is arranged on the laser light path between the diaphragm and the galvanometer.

8. The acousto-optic deflector-based laser processing system of claim 5, wherein: The acousto-optic deflection assembly further comprises a plurality of turn-back mirrors for changing the transmission direction of the laser.

9. The acousto-optic deflector-based laser processing system of claim 5, wherein: The acousto-optic deflector is one or more.

10. The acousto-optic deflector-based laser processing system of claim 1, wherein: The application further comprises a rack, and the XYZ motion platform, the controller, the laser device, the acousto-optic deflection assembly, the galvanometer and the focusing field lens are all mounted on the rack.

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