Light path box and laser processing equipment

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a light path box and laser processing equipment, and solves the problem that the path precision of light emitted by the light path box is not high in the prior art. The light path box is applied to the laser processing equipment, the laser processing equipment can emit incident light of a first transmission path, the light path box comprises a box body, the box body is provided with a closed containing space, the two ends, in the first direction, of the box body are provided with a light inlet and a light outlet respectively, the containing space is filled with preset gas, and the density of the preset gas is smaller than that of air; the optical devices are sequentially arranged in the containing space in the first direction, and incident light enters through the light inlet, sequentially passes through the optical devices and then is emitted out of the light outlet through a second transmission path. According to the light path box and the laser processing equipment provided by the invention, the path of the light emitted by the light path box has relatively high precision and stability.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of semiconductor and photovoltaic, and particularly relates to a light path box and a laser processing device. BACKGROUND

[0002] In a solar cell processing process, different devices need to be used to perform different process processing. For example, in laser grooving, laser cutting and laser scribing process, different laser processing devices need to emit laser to perform corresponding process processing. The light path box, as one of the core components of the laser processing device, is used to control the transmission path of light, so that the finally emitted laser can complete the grooving, cutting and scribing work. However, when the laser processing device is used for process processing, the precision and stability of the emitted laser are low, which affects the precision of the process processing. CONTENT

[0003] Therefore, the present disclosure provides a light path box and a laser processing device to solve the problem of low path precision and poor stability of the light emitted by the light path box in the related art.

[0004] In a first aspect, an embodiment of the present disclosure provides a light path box applied to a laser processing device, the laser processing device being capable of emitting incident light of a first transmission path, the light path box comprising: a box body having a closed accommodation space, the box body being provided with a light inlet and a light outlet at two ends along a first direction, the accommodation space being filled with a preset gas, the density of the preset gas being less than the density of air; and a plurality of optical devices arranged in the accommodation space in sequence along the first direction, the incident light being emitted into the accommodation space through the light inlet and being emitted out of the light outlet in a second transmission path after sequentially passing through the plurality of optical devices.

[0005] In some embodiments, the box body is provided with a communication port communicating the accommodation space and an external environment, and the light path box further comprises: a gas charging pipeline having a gas inlet and a gas outlet, the gas charging pipeline extending through the communication port so that the gas outlet extends into the accommodation space, and the gas inlet is located outside the accommodation space to connect a gas inlet pipe, and the preset gas can enter the gas charging pipeline from the gas inlet and enter the accommodation space from the gas outlet.

[0006] In some embodiments, the communication port is located on the side wall of the box body on the side of the light inlet, the gas charging pipeline extends from the communication port to a position close to the light outlet in the accommodation space along the first direction, and the gas outlet is provided as a plurality of gas outlets, the plurality of gas outlets being arranged on the pipe wall of the gas charging pipeline in the first direction.

[0007] In some embodiments, the opening of the gas outlet faces the optical device, and the distance between any adjacent gas outlets is equal.

[0008] In some embodiments, the preset gas comprises at least one of nitrogen, helium and neon.

[0009] In some embodiments, further comprising: a heat dissipation member disposed in the box body, the heat dissipation member being configured to reduce the temperature in the accommodation space.

[0010] In some embodiments, the box body comprises a bottom wall enclosing the accommodation space, the optical device is disposed on the bottom wall, and the heat dissipation member is arranged on the bottom wall.

[0011] In some embodiments, the heat dissipation member comprises a heat exchange pipeline arranged on the bottom wall, the heat exchange pipeline has a water inlet and a water outlet in communication with the external environment, and the water inlet and the water outlet are located on the same side or different sides of the bottom wall.

[0012] In some embodiments, the heat dissipation member comprises a heat exchange pipeline arranged on the bottom wall, the heat exchange pipeline comprises a water cooling channel arranged in the bottom wall, and the water cooling channel is arranged in the interior of the bottom wall through multiple bends.

[0013] In a second aspect, the embodiments of the present disclosure further provide a laser processing device, comprising: a light emitting module configured to emit incident light of a first transmission path; a light path box configured to receive the incident light and convert the incident light of the first transmission path into outgoing light of a second transmission path; and a laser module connected to the light path box, the laser module comprising a galvanometer and a field lens, the laser module being configured to receive the outgoing light from the light path box and emit laser light through the galvanometer and the field lens in sequence for processing.

[0014] The light path box and the laser processing device provided by the embodiments of the present disclosure can make the particulate dust in the enclosed space (especially around the optical lenses) float, without falling on the surface of the optical lenses, thereby avoiding the light path transmission direction between the optical lenses from being deviated and the spot shape from being slightly deformed due to the dust adhering to the optical lenses. That is, the preset gas can maintain the outgoing light of the light path box in the second transmission path, thereby improving the accuracy and stability of the light path box.

[0015] In addition, the filled preset gas can prevent the dust from adhering to the optical lenses, avoid damage to the optical device, and improve the service life of the light path box. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which like reference characters refer to like elements in the several views. The accompanying drawings provide illustration and a further understanding of the present disclosure, and form a part of the specification. The drawings, together with the description, serve to explain the present disclosure, and do not limit the present disclosure. In the drawings, like reference numerals refer to like elements or steps throughout.

[0017] Figure 1Fig. 1 shows a schematic diagram of a light path box in a laser processing device according to an embodiment of the present disclosure.

[0018] Figure 2 Fig. 2 shows a schematic diagram of a light path box with a top cover opened to expose the inside according to an embodiment of the present disclosure.

[0019] Figure 3 Fig. 3 shows a schematic diagram of a light path box with a top cover and a side wall opened to expose the inside according to an embodiment of the present disclosure.

[0020] Figure 4 Fig. 4 shows a schematic diagram of a bottom wall of a light path box with a heat dissipation member arranged according to an embodiment of the present disclosure.

[0021] Reference signs:

[0022] 100, laser processing device; 10, light path box; 10a, incident light; 101, light inlet; 102, light outlet; 1, box body; 11, accommodating space; 12, communication port; 13, bottom wall; 2, optical device; 21, bearing seat; 22, optical lens; 3, air charging pipeline; 31, air inlet; 32, air outlet; 4, heat dissipation member; 41, heat exchange pipeline; 411, water inlet; 412, water outlet; 20, light emitting module; 30, laser module; 301, galvanometer; 302, field lens; X, first direction. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present disclosure.

[0024] Figure 1 Fig. 1 shows a schematic diagram of a light path box in a laser processing device according to an embodiment of the present disclosure. Figure 2 Fig. 2 shows a schematic diagram of a light path box with a top cover opened to expose the inside according to an embodiment of the present disclosure. The direction indicated by arrow X is the first direction, and the first direction X is parallel to the horizontal plane.

[0025] The embodiments of the present disclosure provide a light path box, such as Figure 1 and Figure 2The light path box 10 is applied to the laser processing device 100, the laser processing device 100 can emit the incident light 10a of the first transmission path, and the incident light 10a can enter the light path box 10. The light path box 10 comprises a box body 1 and a plurality of optical devices 2, the box body 1 has a closed containing space 11, the box body 1 is respectively provided with a light inlet 101 and a light outlet 102 at both ends along the first direction X, and the plurality of optical devices 2 are arranged in the containing space 11 along the first direction X in sequence, the incident light 10a enters through the light inlet 101 and is sequentially passed through the plurality of optical devices 2 and then is emitted from the light outlet 102 in the second transmission path.

[0026] The optical device 2 comprises a bearing seat 21 and an optical lens 22, a plurality of bearing seats 21 are arranged in the containing space 11 of the box body 1 along the first direction X in sequence, and each bearing seat 21 is used for fixedly connecting the optical lens 22, so that the optical lenses 22 arranged along the first direction X in sequence are located between the light inlet 101 and the light outlet 102 in the horizontal direction. In addition, the plurality of optical lenses 22 can comprise magnifying lenses, shaping lenses, reflecting mirrors and the like, and the incident light 10a is sequentially passed through the plurality of optical lenses 22 to adjust the shape, path and the like of the light, so that the light is finally emitted from the light outlet 102, that is, the emergent light. It can be understood that the incident light 10a entering in the first transmission path can not only adjust the transmission direction of the light path after passing through the plurality of optical lenses 22, but also adjust the shape, size, focusing degree and the like of the light spot formed by the light path.

[0027] It can be understood that the shape, size and the like of the box body 1 can be adjusted according to actual conditions, for example, a cuboid, a cube, a cylinder and the like, and the containing space 11 arranged in the box body 1 can be matched with the shape of the outer surface of the box body 1. In the embodiment of the present disclosure, the box body 1 is arranged as a cuboid structure, and the top cover of the cuboid is arranged in a detachable connection structure, so that the plurality of optical devices 2 can be assembled into the interior of the box body 1 after the top plate is removed, thereby facilitating assembly.

[0028] Optionally, the box body 1 is respectively provided with through holes on the two side walls along the first direction X, the through holes are covered with lenses, thereby forming the light inlet 101 and the light outlet 102, and the size, shape and specific position of the through holes arranged on the side wall of the box body 1 can be adaptively adjusted according to actual conditions, without specific limitation.

[0029] The laser processing device 100 further comprises a light emitting module 20 and a laser module 30. The light emitting module 20 is located at the side of the box body 1 facing the light inlet 101, and the light emitting module 20 is configured to emit incident light 10a of the first transmission path, which can enter the enclosed space of the box body 1 from the light inlet 101. The laser module 30 is located at the side of the box body 1 facing the light outlet 102, and the laser module 30 comprises a galvanometer 301 and a field lens 302, and the galvanometer 301 is located between the box body 1 and the field lens 302. The outgoing light of the second transmission path emitted from the light outlet 102 enters the galvanometer 301.

[0030] It can be understood that the laser processing device 100 can be a device used in the processing process of a solar cell wafer, for example, a laser cutting device, a laser slotting device, and a laser scribing device, etc. In the embodiment of the present disclosure, a laser cutting device for cutting a whole silicon wafer into two half silicon wafers is taken as an example for description.

[0031] When the laser cutting device emits laser along the cutting line of the whole silicon wafer for cutting, the swing of the galvanometer 301 can make the laser focused by the field lens move along the cutting line, thereby realizing the cutting of the silicon wafer. It can be understood that the precision and stability of the outgoing light emitted from the light path box 10 can affect whether the laser can move precisely along the cutting line, thereby obtaining a half silicon wafer with high precision size. The stability and transmission precision of the light path box 10 can affect the cutting precision, which requires that the plurality of optical lenses 22 in the light path box 10 always stably maintain in the initial matching state. The structure for determining the transmission path of the outgoing light in the light path box 10 is mainly the relative position relationship of the plurality of optical lenses 22 arranged in the enclosed accommodating space 11 and the matching thereof.

[0032] It should be emphasized that the first transmission path and the second transmission path do not represent unique transmission paths, but can represent different transmission paths within a certain range. That is, the second transmission path can be different according to the different first transmission paths. In the process of cutting along the cutting line by laser, the control system of the laser processing device 100 will control the path of the incident light 10a of the first transmission path emitted by the light emitting module 20 to change within a certain range, and the second transmission path will also change within a certain range through the conversion of the light path box 10. The second transmission path can be adaptively adjusted according to the required cutting path by the control system, and is not specifically limited.

[0033] In order to ensure that the light emitted by the light path box 10 can stably exit along the required second transmission path, the accommodation space 11 is filled with a preset gas, the density of the preset gas is less than that of air, and the preset gas at least surrounds the optical device 2. By filling the preset gas in the accommodation space 11, the particulate dust in the closed space (especially around the optical lens 22) can be in a floating state, and the dust will not fall on the surface of the optical lens 22, thereby avoiding the situation that the optical lens 22 is adhered with dust, and the light transmission direction between the optical lens 22 is deviated, the spot shape is slightly deformed, and the like. That is, by setting the preset gas, the light emitted by the light path box 10 can maintain the second transmission path, and the accuracy and stability of the light path box 10 are improved.

[0034] In addition, the filled preset gas can avoid the dust adhering to the optical lens 22, can avoid the damage of the optical device 2, and improves the service life of the light path box 10.

[0035] It can be understood that the preset gas filled in the accommodation space 11 can include nitrogen, helium, neon and the like, as long as the air density of the preset gas is less than that of air, colorless and odorless, and has high thermal stability and is not easy to dissolve in water. In other examples, the preset gas can also be a mixed gas, a noble gas, an inert gas and the like that meet the above conditions, and can be selected according to requirements, and is not specifically limited. In the embodiment of the present disclosure, the preset gas filled in the accommodation space 11 is nitrogen.

[0036] Figure 3 Fig. 1 shows a schematic view of a light path box provided by an embodiment of the present disclosure, which shows the opening of the top cover and the exposure of the internal side wall of one side. Figure 4 Fig. 2 shows a schematic view of the bottom wall of the light path box provided by an embodiment of the present disclosure, which shows the arrangement of the heat dissipation member.

[0037] As shown in Figs. 1 and 2, the light path box 10 comprises a box body 1, an optical device 2, and a light path cover 4. Figure 3 and Figure 4 The box body 1 is provided with a communication port 12 which communicates the accommodation space 11 with the external environment, and the light path box 10 further comprises a gas filling pipeline 3, the gas filling pipeline 3 has a gas inlet 31 and a gas outlet 32, the gas filling pipeline 3 passes through the communication port 12 so that the gas outlet 32 extends into the accommodation space 11, and the gas inlet 31 is located outside the accommodation space 11 to connect a gas inlet pipe. The preset gas can enter the gas filling pipeline 3 from the gas inlet 31 and enter the accommodation space 11 from the gas outlet 32. By setting the gas filling pipeline 3 which communicates from the external environment to the accommodation space 11, nitrogen gas can be filled into the accommodation space 11.

[0038] Optionally, a sealing member is arranged between the inflation pipe 3 and the communication port 12 of the box body 1, so that most of the inflation pipe 3 can extend into the accommodation space 11, and the air inlet 31 is located outside the box body 1, while ensuring that the accommodation space 11 is in a closed state. It can be understood that the sealing member can be, for example, a bellows, rubber, etc., and is not limited in particular.

[0039] It can be understood that the inflation pipe 3 extending into the accommodation space 11 can be detachably connected to the inner bottom wall 13 or the side wall of the box body 1 by a snap connection.

[0040] It should be emphasized that the shape, cross-sectional area, etc. of the inflation pipe 3 can be adaptively adjusted according to requirements, and is not limited in particular. In addition, the air inlet 31 is used to connect an external inflation pipe containing a predetermined gas, and the cross-sectional area of the air inlet 31 can be matched according to the size of the inflation pipe, and is not limited in particular.

[0041] Optionally, the communication port 12 is located on the side wall of the box body 1 on the side of the light inlet 101, and the inflation pipe 3 extends from the communication port 12 to a position close to the light outlet 102 in the accommodation space 11 along the first direction X. Further, the communication port 12 is arranged at the lower corner of the side wall. In other examples, the communication port 12 can also be arranged on the side wall of the box body 1 on the side of the light outlet 102, or can also be arranged on other side walls of the box body 1, and is not limited in particular.

[0042] In some embodiments, the air outlet 32 is provided in a plurality of air outlets 32, and the plurality of air outlets 32 are arranged at intervals along the first direction X on the pipe wall of the inflation pipe 3. By arranging the plurality of air outlets 32 at intervals along the first direction X, the nitrogen gas can be more uniformly dispersed into the accommodation space 11.

[0043] Optionally, the opening of the air outlet 32 faces the optical device 2, and the distance between any two adjacent air outlets 32 is equal. In the process of inflating nitrogen gas into the accommodation space 11, the uniformly arranged air outlets 32 can directly diffuse the nitrogen gas towards the optical device 2, so as to further improve the uniformity of the nitrogen gas diffusion, and at the same time, the nitrogen gas can be preferentially distributed on the circumferential side of the optical device 2, so as to avoid dust adhering to the optical lens 22. In other examples, the opening of the air outlet 32 can also be arranged on the side away from the optical device 2, i.e. the opening of the air outlet 32 faces the side wall of the box body 1, so as to avoid directly blowing the optical device 2 and causing the optical device 2 to deviate from the position, and is not limited in particular.

[0044] It can be understood that the size of the plurality of air outlets 32 arranged at intervals along the first direction X can be adaptively adjusted according to requirements, and the distance between the adjacent air outlets 32 is not greater than the distance between the adjacent optical lenses 22, and is not limited in particular.

[0045] Optionally, the gas outlet 32 can include a plurality of sub-openings arranged circumferentially around the gas filling pipe 3 to further disperse the filling of nitrogen gas into the accommodation space 11. The specific arrangement, number, size, etc. of the gas outlet 32 on the gas filling pipe 3 can be selected according to actual conditions, and is not specifically limited.

[0046] In some embodiments, the light path box 10 further includes a heat dissipation member 4 arranged on the box body 1, and the heat dissipation member 4 is configured to be able to reduce the temperature in the accommodation space 11. The accommodation space 11 of the light path box 10 is in a closed state, and when the light path box 10 is used for light path propagation, the temperature in the accommodation space 11 will rise. The carrier seat 21 of the optical device 2 will be micro-deformed due to the temperature rise, and then the position or angle of the optical lens 22 carried will be offset, and then the precision of the outgoing light will be low. By arranging the heat dissipation member 4, the temperature in the accommodation space 11 can be reduced, so that the deformation of the carrier seat 21 due to heat is avoided, thereby ensuring that the outgoing light is maintained to be emitted in the second transmission path, and the precision and stability of the light path box 10 are ensured.

[0047] Optionally, the box body 1 includes a bottom wall 13 surrounding the accommodation space 11, the bottom wall 13 is opposite to the top cover, the optical device 2 is arranged on the bottom wall 13, and the heat dissipation member 4 is arranged on the bottom wall 13. By arranging the optical device 2 and the heat dissipation member 4 on the bottom wall 13, the heat dissipation member 4 can carry the heat of the optical device 2 to the external environment by contact heat dissipation, so as to avoid the temperature rise of the carrier seat 21, thereby avoiding the micro-deformation of the carrier seat 21.

[0048] In some embodiments, the heat dissipation member 4 includes a heat exchange pipe 41 arranged on the bottom wall 13, the heat exchange pipe 41 has a water inlet 411 and a water outlet 412 in communication with the external environment, and the liquid entering from the water inlet 411 can carry the heat of the bottom wall 13 to flow out from the water outlet 412. The water inlet 411 and the water outlet 412 are respectively connected to a water inlet pipe and a water outlet pipe of the external environment, the water inlet pipe transports cold water to enter the heat exchange pipe 41 from the water inlet 411, and since the carrier seat 21 is connected to the bottom wall 13, the temperature of the carrier seat 21 can be conducted to the bottom wall 13. The heat exchange pipe 41 can carry the heat of the bottom wall 13 to make the cold water warm up and then flow out from the water outlet 412 to the water outlet pipe, so as to realize the heat dissipation of the accommodation space 11 by such water cooling, which has a good heat dissipation effect while avoiding affecting the relative positional relationship between the plurality of optical devices 2 in the accommodation space 11.

[0049] Optionally, the heat exchange pipeline 41 can include a water cooling channel arranged in the bottom wall 13, the water cooling channel is arranged in the interior of the bottom wall 13 through multiple bending. Alternatively, the bottom wall 13 can also be provided with a recess through multiple bending, the heat exchange pipeline 41 is arranged in the recess, the upper surface of the heat exchange pipeline 41 is flush with the upper surface of the bottom wall 13, so that the heat exchange pipeline 41 can be directly in contact with the bearing seat 21 or arranged around the bearing seat 21, thereby improving the heat dissipation efficiency.

[0050] It can be understood that the specific shape of the bending of the water cooling channel arranged on the bottom wall 13 can be adaptively adjusted according to requirements, for example, can be arranged as S-shaped, back-shaped, etc., and the water inlet 411 and the water outlet 412 can be arranged on the same side of the bottom wall 13, or can be arranged on different sides, without specific limitation.

[0051] Optionally, the shape, size, etc. of the cross-sectional area of the heat exchange pipeline 41 can be adaptively adjusted according to the thickness of the bottom wall 13 and the required processing technology, without specific limitation.

[0052] In some optional embodiments, the heat dissipation member 4 can also be provided with a wind-cooled heat dissipation structure, for example, a wind channel is arranged in the bottom wall 13, the wind channel is provided with an air inlet and an air outlet communicating with the outside, and a heat dissipation fan is arranged in the wind channel, the rotation of the heat dissipation fan can suck cold air into the air inlet, the cold air carries the heat of the bottom wall 13 to form hot air during the flow in the wind channel, and the hot air flows out of the air outlet, thereby realizing the cooling of the bottom wall 13. Alternatively, the heat dissipation member 4 can also be provided as a combination of water cooling and air cooling, which will not be described here.

[0053] The present disclosure also provides a laser processing device, the laser processing device 100 includes a light emitting module 20, the light emitting module 20 is configured to emit incident light 10a of a first transmission path; a light path box 10, the light path box 10 is configured to receive the incident light 10a and convert the incident light 10a of the first transmission path into outgoing light of a second transmission path, a laser module 30 connected to the light path box 10, the laser module 30 includes a galvanometer 301 and a field lens 302, the laser module 30 is used for receiving outgoing light from the light path box 10, and sequentially emitting laser through the galvanometer 301 and the field lens 302 for laser processing.

[0054] It should be emphasized that the light path box 10 can refer to the related description in the above embodiments, which will not be described here.

[0055] Optionally, the laser processing device 100 can be, for example, a laser slicing device, a laser grooving device, a laser scribing device, etc. used for solar cell processing, without specific limitation.

[0056] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be detachable connection in the form of bolt and nut, screw, buckle, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable connection, it can be connected in a non-detachable manner by welding, bonding, etc.

[0057] The above describes the basic principles of the present disclosure in combination with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present disclosure are only examples and are not limiting, and these advantages, advantages, effects, etc. cannot be considered as necessary for each embodiment of the present disclosure. In addition, the above specific details of the disclosure are only for the purpose of example and for the purpose of understanding, and are not limiting, and the above details do not limit the present disclosure to the above specific details.

[0058] The block diagrams of the devices, apparatuses, equipment, systems involved in the present disclosure are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration shown in the block diagram. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have", etc. are open-ended words, which mean "include but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0059] It should also be noted that in the devices, equipment and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombination should be considered as equivalent solutions of the present disclosure.

[0060] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present disclosure. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0061] The above description has been given for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain modifications, alterations, changes, additions and sub-combinations thereof.

Claims

1. An optical path box applied to a laser processing apparatus capable of emitting incident light of a first transmission path, characterized by, The light path box comprises: a box body having a closed accommodation space, the box body being provided with a light inlet and a light outlet at two ends along a first direction respectively, the accommodation space being filled with a preset gas, the density of the preset gas being less than the density of air; a plurality of optical devices arranged in the accommodation space in sequence along the first direction, the incident light being incident through the light inlet and being sequentially transmitted through the plurality of optical devices and then being emitted from the light outlet along a second transmission path.

2. The lightpath box of claim 1, wherein, The box body is provided with a communication port communicating the accommodation space with an external environment, and the light path box further comprises: a gas charging pipeline having a gas inlet and a gas outlet, the gas charging pipeline extending through the communication port so that the gas outlet extends into the accommodation space, and the gas inlet is located outside the accommodation space to connect a gas inlet pipe, and the preset gas can enter the gas charging pipeline from the gas inlet and enter the accommodation space from the gas outlet.

3. The lightpath box of claim 2, wherein, The communication port is located on a side wall of the box body on the side of the light inlet, and the gas charging pipeline extends from the communication port to a position close to the light outlet in the accommodation space along the first direction, the gas outlets are arranged in multiple numbers and are arranged in the pipe wall of the gas charging pipeline in the first direction.

4. The lightpath box of claim 2, wherein, The openings of the gas outlets are directed towards the optical devices, and the distance between any two adjacent gas outlets is equal.

5. The lightpath box of claim 1, wherein, The preset gas comprises at least one of nitrogen, helium and neon.

6. The lightpath box according to any of claims 1-5, characterized in that, Further comprising: a heat dissipation member arranged in the box body, the heat dissipation member being configured to reduce the temperature in the accommodation space.

7. The lightpath box of claim 6, wherein, The box body comprises a bottom wall enclosing the accommodation space, the optical devices are arranged on the bottom wall, and the heat dissipation member is arranged on the bottom wall.

8. The lightpath box of claim 7, wherein, The heat dissipation member comprises a heat exchange pipeline arranged on the bottom wall, the heat exchange pipeline having a water inlet and a water outlet communicating with an external environment; The water inlet and the water outlet are located on the same side or different sides of the bottom wall.

9. The lightpath box of claim 7, wherein, The heat dissipation member comprises a heat exchange pipeline arranged on the bottom wall, the heat exchange pipeline comprising a water cooling channel arranged in the bottom wall, the water cooling channel being arranged in the interior of the bottom wall through multiple bends.

10. A laser processing apparatus characterized by comprising: Comprising: a light emitting module configured to emit incident light along a first transmission path; the light path box according to any one of claims 1 to 9, the light path box being configured to receive the incident light and convert the incident light along the first transmission path into emitted light along a second transmission path; a laser module connected to the light path box, the laser module comprising a galvanometer and a field lens, the laser module being configured to receive the emitted light from the light path box and emit laser light through the galvanometer and the field lens in sequence for machining.

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