Degumming device and degumming system

Abstract

The utility model provides a degumming device and a degumming system. The degumming device comprises a degumming frame, a clamping assembly and a driving assembly; the linkage effect between the trigger part and the driving part is utilized, and the auxiliary effect of the reset part is combined, so that the first clamping rod and the second clamping rod are close to each other, and the first clamping rod and the second clamping rod are in a clamping state; or the first clamping rod and the second clamping rod are far away from each other, so that the first clamping rod and the second clamping rod are in a loosened state; the first clamping rod and the second clamping rod do not need to be manually opened or closed, the working efficiency is improved to a certain degree, and in addition, the safety of operators is guaranteed; in addition, compared with the prior art that the silicon wafer has unnecessary loss due to the fact that the first clamping rod and the second clamping rod are manually opened or closed and personnel easily forget, the automatic silicon wafer clamping device is all automatic, so that the problem that the personnel forget is avoided, and loss and waste of the silicon wafer are avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic technology, in particular to a degumming device and a degumming system. BACKGROUND

[0002] At present, the main process of wafer slicing in the photovoltaic silicon wafer industry is: silicon rod incoming - wafer bonding - slicing - degumming - cleaning - sorting - packaging and delivery. After the slicing process is completed, the silicon wafer that has not been degummed needs to be placed into a degumming device by AGV, and then degumming treatment is carried out in the degumming machine.

[0003] When the silicon wafer that has not been degummed is placed into the degumming device, the silicon wafer clamping rod in the degumming device must be manually clamped or released by personnel; once the personnel forget, it will cause the silicon wafer to fall due to not being clamped after degumming or directly discharge due to not being released, causing unnecessary loss.

[0004] Therefore, there is an urgent need for a degumming device and a degumming system to solve the technical problems existing in the prior art to some extent. Content of the utility model

[0005] The purpose of the present application is to provide a degumming device and a degumming system, which can automatically clamp or release the degumming device to some extent.

[0006] The present application provides a degumming device; comprising a degumming frame, a clamping assembly and a driving assembly;

[0007] The degumming frame is in a frame structure, and has oppositely arranged side plates at both ends along a first direction;

[0008] The clamping assembly comprises clamping rods arranged at intervals along a second direction and located in the degumming frame, and the clamping rods extend along the first direction;

[0009] The driving assembly comprises a trigger part, a driving part and a reset part; the clamping rods pass through the side plates along the first direction and are connected with the driving part and the reset part respectively; one end of the driving part away from the clamping rods is connected with the trigger part; one end of the reset part away from the clamping rods is fixed together;

[0010] The trigger part can move along a third direction, when the trigger part moves along the third direction, the trigger part can drive the driving part connected with the trigger part to move along the third direction; when the driving part moves along the third direction, one end of the driving part away from the trigger part moves in an arc trajectory, so as to stretch and open the clamping rods or reset and close the clamping rods.

[0011] Further, the number of the clamping rods is two, and the two clamping rods are arranged along the second direction and spaced apart from each other on the degumming frame.

[0012] The two clamping rods extend along the first direction and have ends penetrating the side plates, respectively.

[0013] Further, the trigger part comprises a trigger rod, a trigger block and a shaft sleeve.

[0014] The side plate is provided with a through hole extending along the third direction, and the shaft sleeve is arranged on the side plate and below the through hole.

[0015] The trigger rod comprises a first trigger segment and a second trigger segment connected with the first trigger segment in an L shape, the first trigger segment is arranged on the shaft sleeve, the second trigger segment penetrates the through hole, and the trigger block is arranged at a first preset position and below the first trigger segment.

[0016] In the initial state, the second trigger segment is located at the bottom end of the through hole, and when the first trigger segment triggers the trigger block, the second trigger segment can move to the top end of the through hole along the third direction.

[0017] Further, the driving part comprises a driving rod and a rotating shaft.

[0018] The number of the driving rods is two, and the driving rod comprises a first driving segment and a second driving segment connected with the first driving segment at a preset angle, one end of the first driving segment away from the second driving segment is provided with a redundant hole extending along the third direction, and the second trigger segment penetrates the redundant hole on the first driving segment of the two driving rods in sequence.

[0019] The part of the first driving segment except the redundant hole is connected to the side plate through the rotating shaft.

[0020] The side plate is provided with two arc-shaped motion track holes, the two arc-shaped motion track holes are symmetrically arranged about the axis of the through hole, the clamping rod penetrates the arc-shaped motion track hole, and the second driving segment away from the first driving segment is rotationally connected with one end of the clamping rod.

[0021] When the second trigger segment is located at the bottom end of the through hole, one end of the second driving segment away from the first driving segment is located at the top end of the arc-shaped motion track hole, so that the two clamping rods are in a clamping state.

[0022] When the second trigger link is located at the top end of the through hole, the end of the second driving link segment away from the first driving link segment is located at the bottom end of the arc-shaped movement trajectory hole, so that the two clamping rods are in a loosened state.

[0023] In the technical solution, further, the reset part comprises a reset spring and a fixing shaft.

[0024] The fixing shaft is arranged above the through hole and fixed to the side plate.

[0025] The two ends of the reset spring are connected to the fixing shaft and the end of the second driving link segment away from the first driving link segment respectively.

[0026] When the first trigger link triggers the trigger block, the reset spring is in a stretched state through the driving assembly; when the first trigger link is disengaged from the trigger block, the reset spring is in a reset state through the driving assembly.

[0027] In the technical solution, further, the trigger part is arranged on the inner side wall of the side plate, and the driving part and the reset part are arranged on the outer side wall of the side plate.

[0028] In the technical solution, further, the degumming device further comprises a limiting assembly.

[0029] The limiting assembly is arranged on the inner side wall of the side plate.

[0030] The limiting assembly has a limiting edge, which is located at a second preset position of the arc-shaped movement trajectory hole to adjust the movement trajectory of the clamping rod.

[0031] In the technical solution, further, the limiting assembly comprises a limiting block, a limiting seat, an adjusting bolt, a fixing bolt and a locking nut.

[0032] The limiting block has a plate structure, and two ends thereof along the third direction are respectively provided with a waist round hole extending along the second direction.

[0033] The fixing bolt passes through the waist round hole to fix the limiting block to the inner side wall of the side plate, and the edge of the limiting block facing the arc-shaped movement trajectory hole is the limiting edge.

[0034] The adjusting bolt passes through the locking nut and the limiting seat in sequence and abuts against the side edge of the limiting block away from the limiting edge.

[0035] Adjusting the adjusting screw can change the position of the limiting block in the third direction, so as to adjust the second preset position of the limiting edge on the arc-shaped movement track hole, and the movement track of the clamping rod is adjusted.

[0036] In the above technical solution, further, the degumming device further comprises a material fixing seat arranged on the upper part of the degumming frame.

[0037] The material fixing seat extends along the second direction and is fixed at both ends along the second direction on the upper part of the degumming frame; the material fixing seat has a material receiving part for fixing materials.

[0038] The number of the material fixing seats is two, and the two material fixing seats are arranged at intervals along the first direction.

[0039] The application further provides a degumming system comprising the degumming device.

[0040] The application further provides a degumming device; comprising a degumming frame, a clamping assembly and a driving assembly; the degumming frame is in a frame structure and has oppositely arranged side plates at both ends along a first direction; the clamping assembly comprises clamping rods arranged at intervals along a second direction and located in the degumming frame, and the clamping rods extend along the first direction; the driving assembly comprises a trigger part, a driving part and a reset part; the clamping rods pass through the side plates along the first direction and are connected with the driving part and the reset part respectively; one end of the driving part away from the clamping rods is connected with the trigger part; one end of the reset part away from the clamping rods is fixed together; the trigger part can move along a third direction; when the trigger part moves along the third direction, the trigger part can drive the driving part connected with the trigger part to move along the third direction; when the driving part moves along the third direction, one end of the driving part away from the trigger part moves in an arc-shaped track, so as to stretch and open the clamping rods or reset and close the clamping rods.

[0041] In summary, the linkage between the trigger part and the driving part is utilized, and the auxiliary function of the reset part is combined, so that the first clamping rod and the second clamping rod can be close to each other, and the first clamping rod and the second clamping rod are in a clamping state; or the first clamping rod and the second clamping rod can be away from each other, so that the first clamping rod and the second clamping rod are in a loosening state. In this way, the first clamping rod and the second clamping rod do not need to be manually opened or closed, which improves the work efficiency to a certain extent and ensures the safety of the operator. In addition, compared with the existing manual opening or closing of the first clamping rod and the second clamping rod, the silicon wafer is easily forgotten, which causes unnecessary loss. The present application is automatic, so there is no problem of forgetting, and the silicon wafer is not wasted.

[0042] The present application also provides a degumming system comprising the degumming device described above. Therefore, the degumming device has all the beneficial effects described above, which will not be described in detail here. BRIEF DESCRIPTION OF DRAWINGS

[0043] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the specific embodiments or prior art description will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0044] Figure 1 Structure schematic diagram of the degumming device provided by the present application in the first perspective view;

[0045] Figure 2 Structure schematic diagram of the degumming device provided by the present application in the first perspective view; Figure 1 Enlarged view of A in the above figure;

[0046] Figure 3 Structure schematic diagram of the degumming device provided by the present application in the first perspective view and hiding the clamping rod;

[0047] Figure 4 Structure schematic diagram of the degumming device provided by the present application in the first perspective view and hiding the clamping rod; Figure 3 Enlarged view of B in the above figure;

[0048] Figure 5 Structure schematic diagram of the degumming device provided by the present application in the second perspective view;

[0049] Figure 6 Structure schematic diagram of the degumming device provided by the present application in the second perspective view; Figure 5 Enlarged view of C in the above figure;

[0050] Figure 7 Structure schematic diagram of the inner side wall of the side plate in the degumming device provided by the present application;

[0051] Figure 8Structure schematic diagram of the degumming device provided in the present application in a loosened state;

[0052] Figure 9 Structure schematic diagram of the degumming device provided in the present application in a loosened state;

[0053] Figure 10 Structure schematic diagram of the degumming device provided in the present application in a loosened state.

[0054] Fig. 1 is a degumming frame; 101 is a side plate; 2 is a clamping assembly; 201 is a first clamping rod; 202 is a second clamping rod; 3 is a driving assembly; 301 is a trigger part; 302 is a driving part; 303 is a reset part; 304 is a trigger rod; 305 is a trigger block; 306 is a shaft sleeve; 307 is a through hole; 308 is a first trigger link rod; 309 is a second trigger link rod; 310 is a driving rod; 311 is a rotating shaft; 312 is a first driving link rod segment; 313 is a second driving link rod segment; 314 is a redundant hole; 315 is an arc-shaped motion trajectory hole; 316 is a reset spring; 317 is a fixed shaft; 4 is a first direction; 5 is a second direction; 6 is a third direction; 7 is a limiting assembly; 701 is a limiting edge; 702 is a limiting block; 703 is a limiting seat; 704 is an adjusting bolt; 705 is a fixed bolt; 706 is a locking nut; 707 is a waist round hole; 8 is a material fixing seat; 801 is a material receiving part; 802 is a platform; 803 is a protruding tooth; 9 is a silicon wafer. DETAILED DESCRIPTION

[0055] The following detailed description is presented to aid the reader in gaining a comprehensive understanding of the methods, apparatuses, and / or systems described herein. However, various changes, modifications, and equivalents can be used, and the

[0056] The features described herein can be implemented in different forms and should not be construed as limited to the examples described herein. Rather, these examples have been provided so that this disclosure will be thorough and complete, and will fully convey the scope of the methods, apparatuses, and / or systems to those skilled in the art. Further, the description should not be interpreted as a general abatement of equivalents or other claims not specifically described herein.

[0057] Throughout the specification, when an element (such as a layer, region or substrate) is referred to as being "on" another element, "connected to" another element, "coupled to" another element, "adjacent to" another element, "on top of" another element, or "covering" another element, it can be directly on, connected to, coupled to, adjacent to, on top of, or covering the other element, or one or more other elements can be interposed therebetween. In contrast, when an element is referred to as being "directly on", "directly connected to", "directly coupled to", "directly adjacent to", "directly on top of", or "directly covering" another element, there are no other elements interposed therebetween.

[0058] As used herein, the term "and / or" includes any one of the listed items and any combination of two or more of the listed items.

[0059] Although terms such as "first", "second", and "third" can be used herein to describe various components, assemblies, regions, layers or sections, these components, assemblies, regions, layers or sections are not limited by these terms. Rather, these terms are only used to distinguish one component, assembly, region, layer or section from another component, assembly, region, layer or section. Thus, a component, assembly, region, layer or section referred to as a first component, assembly, region, layer or section in one example described herein can also be referred to as a second component, assembly, region, layer or section in another example without departing from the teachings of the examples.

[0060] For ease of description, spatial relationship terms, such as "on", "upper", "beneath", and "lower", can be used herein to describe one element's relationship to another element as illustrated in the figures. Such spatial relationship terms can be intended to encompass different orientations of the device in use or operation, in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, a component described as on "top" or the "upper" of another component would then be oriented on the "bottom" or "lower" of the other component. Accordingly, the term "on" encompasses both a "on" and "under" orientation in accordance with the spatial orientation of the device. The device can be oriented in other ways (e.g., rotated 90 degrees or at other orientations) and an appropriate modification to the spatial relationship terminology would be made to accommodate those orientations.

[0061] The terminology used herein is for the purpose of describing various examples only and is not intended to limit this disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0062] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0063] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.

[0064] Example 1

[0065] In existing debonding devices, the silicon wafer clamping rods must be manually tightened or loosened. If personnel forget, this can lead to unnecessary losses, such as wafers tipping over after debonding due to improper clamping or being directly discharged due to improper clamping. To address this technical problem, this application provides a debonding device, which is described below in conjunction with… Figures 1-7 This application provides a detailed description of a degumming device.

[0066] The degumming device includes a degumming frame 1, a clamping assembly 2, and a driving assembly 3; the specific structures of the degumming frame 1, the clamping assembly 2, and the driving assembly 3 will be further explained below.

[0067] Specifically, in combination Figure 1 As shown, the degumming frame 1 has a frame structure and has side plates 101 arranged opposite to each other at both ends along the first direction 4; the first direction 4 here refers to... Figure 1 In the de-adhesion rack 1, side plates 101 are respectively provided at both ends along its length direction, and the two side plates 101 are connected by a connecting plate (the connecting plate is in... Figure 1 (Although not shown, it can be understood and clearly known by those skilled in the art) Connection. An installation space is provided between the two side plates 101 and the connecting plate.

[0068] Specifically, the clamping assembly 2 includes clamping rods spaced apart along the second direction 5 and located within the debonding frame 1, with the clamping rods extending along the first direction 4. Figure 1As shown, the second direction 5 in the figure refers to the width direction of the degumming frame 1; further, the number of clamping rods is two, and the two clamping rods are respectively a first clamping rod 201 and a second clamping rod 202, the first clamping rod 201 and the second clamping rod 202 are arranged in the mounting space of the degumming frame 1 along the width direction of the degumming frame 1, and the first clamping rod 201 and the second clamping rod 202 extend along the length direction of the degumming frame 1, and the ends thereof respectively pass through the side plate 101.

[0069] Specifically, the driving assembly 3 comprises a trigger part 301, a driving part 302 and a reset part 303; wherein the first clamping rod 201 and the second clamping rod 202 both pass through the side plate 101 along the first direction 4 and are respectively connected with the driving part 302 and the reset part 303; the end of the driving part 302 away from the clamping rod is connected with the trigger part 301; and the end of the reset part 303 away from the clamping rod is fixed together.

[0070] In actual use, the trigger part 301 can move along the third direction 6, when the trigger part 301 moves along the third direction 6, the trigger part 301 can drive the driving part 302 connected with the trigger part 301 to move along the third direction 6; when the driving part 302 moves along the third direction 6, the end of the driving part 302 away from the trigger part 301 moves in an arc trajectory, so as to make the reset part 303 stretch and open the clamping rod or make the reset part 303 reset and close the clamping rod.

[0071] In summary, the linkage action between the trigger part 301 and the driving part 302 is utilized, and the auxiliary action of the reset part 303 is combined, so that the first clamping rod 201 and the second clamping rod 202 can approach each other, so that the first clamping rod 201 and the second clamping rod 202 are in a clamping state; or the first clamping rod 201 and the second clamping rod 202 can move away from each other, so that the first clamping rod 201 and the second clamping rod 202 are in a loosening state, so that the first clamping rod 201 and the second clamping rod 202 do not need to be manually opened or closed, which improves the work efficiency to a certain extent and ensures the safety of the operator; in addition, compared with the existing manual opening or closing of the first clamping rod 201 and the second clamping rod 202, which is easy to be forgotten by personnel, the present application is automatic, so that the problem of forgetting by personnel does not occur, and thus the loss of the silicon wafer 9 is avoided.

[0072] In this embodiment, further, in combination with Figure 2 and Figure 3 As shown, the trigger part 301 comprises a trigger rod 304, a trigger block 305 and a shaft sleeve 306. Wherein the side plate 101 is provided with a through hole 307 extending along the third direction 6; further, in combination with Figure 1As shown, the third direction 6 in the figure refers to the height direction of the degreasing frame 1. Further, the through hole 307 is a waist round hole 707. The shaft sleeve 306 is arranged on the side plate 101 and below the through hole 307. Further, the shaft sleeve 306 is fixed to the inner side wall of the side plate 101 by a bolt. The trigger rod 304 includes a first trigger link 308 and a second trigger link 309 connected with the first trigger link 308 in an L shape. The first trigger link 308 is arranged in the shaft sleeve 306 and can move in the third direction 6 in the shaft sleeve 306. The second trigger link 309 passes through the through hole 307. The trigger block 305 is arranged at the first preset position and at the lower end of the first trigger link 308.

[0073] Further, the shape of the trigger block 305 is not limited in the present application, which is illustrated in combination with Figure 4 As shown, the trigger block 305 is a block with a ladder-shaped cross section.

[0074] It is worth noting that, as described above, the trigger rod 304 in the trigger part 301 and the shaft sleeve 306 are arranged on the degreasing frame 1, and the trigger block 305 is not arranged on the degreasing frame 1. In actual use, the trigger block 305 is placed on any plane, for example, on a vehicle, and the vehicle is the first preset position.

[0075] In actual use, when the degreasing frame 1 is in an unused state, under the action of gravity, the second trigger link 309 is located at the bottom of the through hole 307, and the top of the first trigger link 308 is located on the shaft sleeve 306. When the degreasing frame 1 is placed on the trigger block 305, the first trigger link 308 abuts against the trigger block 305 at this time, based on the relationship between the force and the reaction force, the first trigger link 308 is slowly pushed to move in the vertical upward direction. Since the second trigger link 309 is fixedly connected with the first trigger link 308, the second trigger link 309 moves from the bottom of the through hole 307 to the top of the through hole 307 at this time.

[0076] In this embodiment, in combination with Figure 1 and Figure 2 As shown, the driving part 302 includes a driving rod 310 and a rotating shaft 311. Specifically, the number of the driving rod 310 is two, and the two driving rods 310 are a first driving rod 310 and a second driving rod 310. The first driving rod 310 is connected with the first clamping rod 201, and the second driving rod 310 is connected with the second clamping rod 202.

[0077] Further, the driving rod 310 includes a first driving link segment 312 and a second driving link segment 313 connected with the first driving link segment 312 at a preset angle. Preferably, the preset angle is 135°. When the degreasing device is in Figure 2When the second trigger link 309 is in the open state, the first driving link segment 312 is parallel to the third direction 6, and an end of the first driving link segment 312 away from the second driving link segment 313 is provided with a redundancy hole 314 extending along the third direction 6; preferably, the redundancy hole 314 is a waist round hole 707. In actual use, the first driving link segment 312 of the first driving rod 310 is close to the first driving link segment 312 of the second driving rod 310, and the second trigger link 309 sequentially passes through the redundancy hole 314 on the first driving link segment 312 of the first driving rod 310 and the redundancy hole 314 on the first driving link segment 312 of the second driving rod 310.

[0078] Specifically, the part of the first driving link segment 312 except the redundancy hole 314 is connected to the side plate 101 through the rotating shaft 311; that is, the first driving link segment 312 is fixed to the side plate 101 through the rotating shaft 311.

[0079] Specifically, the side plate 101 is provided with two arc-shaped motion trajectory holes 315, which are symmetrically arranged about the axis of the through hole 307 and located on the two sides above the through hole 307; in addition, the two arc-shaped motion trajectory holes 315 are curved towards the opposite sides. Further, the clamping rod passes through the arc-shaped motion trajectory hole 315 and is rotationally connected to an end of the second driving link segment 313 away from the first driving link segment 312.

[0080] When the second trigger link 309 is located at the bottom end of the through hole 307, the end of the second driving link segment 313 away from the first driving link segment 312 is located at the top end of the arc-shaped motion trajectory hole 315, so that the first clamping rod 201 and the second clamping rod 202 are in the clamping state; when the second trigger link 309 is located at the top end of the through hole 307, the end of the second driving link segment 313 away from the first driving link segment 312 is located at the bottom end of the arc-shaped motion trajectory hole 315, so that the first clamping rod 201 and the second clamping rod 202 are in the loosening state.

[0081] That is, in actual use, when the degumming frame 1 is in an idle state, under the action of gravity, the second trigger rod 309 will be located at the bottom of the through hole 307, and the top of the first trigger rod 308 will be located on the shaft sleeve 306. Since the second trigger rod 309 passes through the redundant holes 314 on the first driving rod segment 312 of the first driving rod 310 and the redundant holes 314 on the first driving rod segment 312 of the second driving rod 310 in turn, the second trigger rod 309 will drive the first driving rod segment 312 in the first driving rod 310 and the first driving rod segment 312 in the second driving rod 310 to move downward simultaneously. At the same time, the first driving rod segment 312 of the first driving rod 310 and the first driving rod segment 312 of the second driving rod 310 rotate around the rotating shaft 311, and the second driving rod segment 313 in the first driving rod 310 and the second driving rod segment 313 in the second driving rod 310 move to the bottom end of the arc-shaped motion track hole 315 simultaneously. Since the end of the second driving rod segment 313 away from the first driving rod segment 312 is connected to the clamping rod, the clamping rod will move to the bottom end of the arc-shaped motion track hole 315. At this time, the first clamping rod 201 and the second clamping rod 202 are away from each other, and are in a loosened state as shown in FIG. 1. Figure 10

[0082] ​When the degumming frame 1 is placed on the trigger block 305, at this time the first trigger link 308 will abut on the trigger block 305, based on the relationship between the force and the reaction, it will slowly push the first trigger link 308 to move in the vertical upward direction, and since the second trigger link 309 is fixedly connected with the first trigger link 308, at this time the second trigger link 309 will move from the bottom of the through hole 307 to the top of the through hole 307. Since the second trigger link 309 passes through the redundant hole 314 on the first driving link segment 312 of the first driving rod 310 and the redundant hole 314 on the first driving link segment 312 of the second driving rod 310 in turn, the second trigger link 309 will drive the first driving link segment 312 in the first driving rod 310 and the first driving link segment 312 in the second driving rod 310 to move upward at the same time. At this time, the first driving link segment 312 of the first driving rod 310 and the first driving link segment 312 of the second driving rod 310 rotate around the rotating shaft 311 at the same time, and the second driving link segment 313 in the first driving rod 310 and the second driving link segment 313 in the second driving rod 310 move to the top end of the arc-shaped motion track hole 315 at the same time. Since the end of the second driving link segment 313 away from the first driving link segment 312 is connected with the clamping rod, it will drive the clamping rod to move to the top end of the arc-shaped motion track hole 315 (the top end of this side does not mean the top end, according to the design of the arc-shaped motion track hole 315, it can also be the top end) ; At this time, the first clamping rod 201 and the second clamping rod 202 are close to each other, and are in a clamping state as shown in Figure 9 .

[0083] In this embodiment, as shown in Figure 5 and Figure 6 , the reset part 303 includes a reset spring 316 and a fixed shaft 317; the fixed shaft 317 is arranged above the through hole 307 and fixed to the side plate 101; the two ends of the reset spring 316 are connected to the fixed shaft 317 and the end of the second driving link segment 313 away from the first driving link segment 312, respectively.

[0084] In actual use, when the first trigger link 308 triggers the trigger block 305, the reset spring 316 is in a stretched state through the driving assembly 3; when the first trigger link 308 is separated from the trigger block 305, the reset spring 316 is in a reset state through the driving assembly 3.

[0085] It is worth noting that the trigger part 301 is arranged on the inner side wall of the side plate 101, and the driving part 302 and the reset part 303 are arranged on the outer side wall of the side plate 101. In addition, if the conditions permit, the trigger part 301, the driving part 302 and the reset part 303 are arranged on the outer side wall of the side plate 101.

[0086] In this embodiment, further, in combination with Figure 7 As shown, the degumming device further comprises a limiting assembly 7; the limiting assembly 7 is arranged on the inner side wall of the side plate 101; the limiting assembly 7 has a limiting edge 701, which is located at the second preset position of the arc-shaped movement track hole 315, so as to adjust the movement track of the clamping rod.

[0087] Specifically, the limiting assembly 7 comprises a limiting block 702, a limiting seat 703, an adjusting bolt 704, a fixing bolt 705 and a locking nut 706. The limiting block 702 is in a plate-shaped structure, and two ends thereof along the third direction 6 are respectively provided with a waist round hole 707 extending along the second direction 5; the fixing bolt 705 passes through the waist round hole 707 respectively, so as to fix the limiting block 702 on the inner side wall of the side plate 101, and the edge of the limiting block 702 facing the arc-shaped movement track hole 315 is the limiting edge 701, which is located at the second preset position of the arc-shaped movement track hole 315. The adjusting bolt 704 passes through the locking nut 706 and the limiting seat 703 in sequence and abuts against the side edge of the limiting block 702 away from the limiting edge 701. By adjusting and screwing the adjusting bolt 704, the length of the adjusting bolt 704 passing through the limiting block 702 can be changed, so as to adjust the second preset position of the limiting edge 701 on the arc-shaped movement track hole 315, so that the movement track of the clamping rod is adjusted. In other words, the clamping rod can finally move to the limiting edge 701 under the reset action of the reset spring 316.

[0088] In this embodiment, further, in combination with Figure 1 As shown, the degumming device further comprises a material fixing seat 8 arranged on the upper portion of the degumming frame 1 (the material fixing seat 8 is mainly used for fixing the silicon wafer 9); the material fixing seat 8 extends along the second direction 5 and is fixed on the upper portion of the degumming frame 1 at two ends along the second direction 5; the material fixing seat 8 has a material receiving part 801 for fixing the material; the number of the material fixing seat 8 is two, and the two material fixing seats 8 are arranged at intervals along the first direction 4.

[0089] Further, the material receiving part 801 comprises a platform 802 and a protruding tooth 803; the platform 802 is provided with the protruding tooth 803 at two ends along the second direction 5, and a material bearing area is surrounded between the two protruding teeth 803.

[0090] In summary, in combination with Figure 10As shown, in actual use, first, the trigger block 305 is placed at a designated position; then the degumming frame 1 is transferred to above the trigger block 305 by the mechanical hand, so that the trigger rod 304 triggers the trigger block 305, and then the first clamping rod 201 and the second clamping rod 202 are away from each other, reaching the loosened state as shown; then, the silicon wafer 9 is placed between the first clamping rod 201 and the second clamping rod 202, and finally the degumming frame 1 is transferred to other processes together with the silicon wafer 9 by the mechanical hand. During the transfer process, the trigger rod 304 is separated from the trigger block 305, and under the reset action of the reset part 303, the first clamping rod 201 and the second clamping rod 202 are close to each other, and the clamping state as shown is reached. Figure 9 As shown, in actual use, first, the trigger block 305 is placed at a designated position; then the degumming frame 1 is transferred to above the trigger block 305 by the mechanical hand, so that the trigger rod 304 triggers the trigger block 305, and then the first clamping rod 201 and the second clamping rod 202 are away from each other, reaching the loosened state as shown; then, the silicon wafer 9 is placed between the first clamping rod 201 and the second clamping rod 202, and finally the degumming frame 1 is transferred to other processes together with the silicon wafer 9 by the mechanical hand. During the transfer process, the trigger rod 304 is separated from the trigger block 305, and under the reset action of the reset part 303, the first clamping rod 201 and the second clamping rod 202 are close to each other, and the clamping state as shown is reached. Figure 8 As shown, in actual use, first, the trigger block 305 is placed at a designated position; then the degumming frame 1 is transferred to above the trigger block 305 by the mechanical hand, so that the trigger rod 304 triggers the trigger block 305, and then the first clamping rod 201 and the second clamping rod 202 are away from each other, reaching the loosened state as shown; then, the silicon wafer 9 is placed between the first clamping rod 201 and the second clamping rod 202, and finally the degumming frame 1 is transferred to other processes together with the silicon wafer 9 by the mechanical hand. During the transfer process, the trigger rod 304 is separated from the trigger block 305, and under the reset action of the reset part 303, the first clamping rod 201 and the second clamping rod 202 are close to each other, and the clamping state as shown is reached.

[0091] Embodiment Two

[0092] The application also provides a degumming system comprising the degumming device described above. Therefore, the degumming system has all the beneficial effects of the degumming device described above, which will not be elaborated here.

[0093] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the application, and not to limit them; although the application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding

Claims

1. A debonding apparatus; characterized by, The degumming frame, the clamping assembly and the driving assembly are included. The degumming frame is in a frame structure and has oppositely arranged side plates at two ends along a first direction. The clamping assembly includes clamping rods arranged at intervals along a second direction and located in the degumming frame, and the clamping rods extend along the first direction. The driving assembly includes a trigger part, a driving part and a reset part; the clamping rods pass through the side plates along the first direction and are connected with the driving part and the reset part respectively. One end of the driving part, which is away from the clamping rods, is connected with the trigger part; one end of the reset part, which is away from the clamping rods, is fixed together. The trigger part can move along a third direction; when the trigger part moves along the third direction, the trigger part can drive the driving part connected with the trigger part to move along the third direction; when the driving part moves along the third direction, one end of the driving part, which is away from the trigger part, moves in an arc trajectory to make the reset part stretch and open the clamping rods or to make the reset part reset and close the clamping rods.

2. The debonding apparatus of claim 1, wherein The number of the clamping rods is two; the two clamping rods are arranged at intervals along the second direction in the degumming frame. The two clamping rods extend along the first direction and their end portions pass through the side plates respectively.

3. The debonding apparatus of claim 2, wherein The trigger part includes a trigger rod, a trigger block and a shaft sleeve. The side plates are provided with through holes extending along the third direction; the shaft sleeve is arranged on the side plates and below the through holes. The trigger rod includes a first trigger section and a second trigger section connected with the first trigger section in an L shape; the first trigger section is arranged on the shaft sleeve, the second trigger section passes through the through hole; the trigger block is arranged at a first preset position and below the first trigger section. In an initial state, the second trigger section is at the bottom end of the through hole; when the first trigger section triggers the trigger block, the second trigger section can move to the top end of the through hole along the third direction.

4. The debonding apparatus of claim 3, wherein The driving part includes a driving rod and a rotating shaft. The number of the driving rods is two; the driving rods include a first driving section and a second driving section connected with the first driving section at a preset angle. One end of the first driving section, which is away from the second driving section, is provided with a redundant hole extending along the third direction; the second trigger section passes through the redundant holes on the first driving sections of the two driving rods in sequence. The part of the first driving section, except the redundant hole, is connected with the side plates through the rotating shaft. The side plates are provided with two arc movement trajectory holes; the two arc movement trajectory holes are arranged symmetrically about the axis of the through hole; the clamping rods pass through the arc movement trajectory holes and are rotationally connected with one end of the second driving section, which is away from the first driving section. When the second trigger section is at the bottom end of the through hole, one end of the second driving section, which is away from the first driving section, is at the top end of the arc movement trajectory hole, so that the two clamping rods are in a clamping state. When the second trigger link is located at the top end of the through hole, the end of the second driving link segment away from the first driving link segment is located at the bottom end of the arc-shaped movement track hole, so that the two clamping rods are in a loosened state.

5. The debonding apparatus of claim 4, wherein The reset part comprises a reset spring and a fixing shaft; The fixing shaft is arranged above the through hole and fixed to the side plate; The two ends of the reset spring are connected to the fixing shaft and the end of the second driving link segment away from the first driving link segment, respectively; When the first trigger link triggers the trigger block, the reset spring is in a stretched state through the driving assembly; when the first trigger link is disengaged from the trigger block, the reset spring is in a reset state through the driving assembly.

6. The debonding apparatus according to any one of claims 1 to 5, characterized in that, The trigger part is arranged on the inner side wall of the side plate, and the driving part and the reset part are arranged on the outer side wall of the side plate.

7. The debonding apparatus of claim 5, wherein The degumming device further comprises a limiting assembly; The limiting assembly is arranged on the inner side wall of the side plate; The limiting assembly has a limiting edge, which is located at a second preset position of the arc-shaped movement track hole to adjust the movement track of the clamping rod.

8. The debonding apparatus of claim 7, wherein The limiting assembly comprises a limiting block, a limiting seat, an adjusting bolt, a fixing bolt and a locking nut; The limiting block has a plate structure, and two ends thereof along the third direction are respectively provided with a waist round hole extending along the second direction; The fixing bolt passes through the waist round hole to fix the limiting block to the inner side wall of the side plate, and the edge of the limiting block facing the arc-shaped movement track hole is the limiting edge; The adjusting bolt passes through the locking nut and the limiting seat in sequence and abuts against the side edge of the limiting block away from the limiting edge; Adjusting the adjusting bolt can change the position of the limiting block along the third direction to adjust the second preset position of the limiting edge on the arc-shaped movement track hole, so as to adjust the movement track of the clamping rod.

9. The debonding apparatus of claim 1, wherein The degumming device further comprises a material fixing seat arranged on the upper part of the degumming frame; The material fixing seat extends along the second direction and is fixed to the upper part of the degumming frame at two ends along the second direction; the material fixing seat has a material receiving part for fixing materials; The number of the material fixing seats is two, and the two material fixing seats are arranged at intervals along the first direction.

10. A debonding system characterized by, The degumming device comprises the degumming device according to any one of claims 1-9.

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