Single crystal clamping device for zone melting

Abstract

The utility model provides a single crystal clamping device for zone melting, which comprises a clamping molybdenum sheet, the clamping molybdenum sheet comprises a clamping part, two sides of the clamping part are provided with blocking parts, the clamping part is matched with a single crystal, the blocking parts are arranged along the circumferential direction of the single crystal, and when the clamping part clamps the single crystal, gaps are arranged between the blocking parts and the single crystal. The utility model has the beneficial effects that the single crystal can be stably clamped in the zone melting crystal pulling process, the stability in the crystal making process is improved, the single crystal can be effectively prevented from entering the inner part of the outer shaft after being melted, and the inner part of the outer shaft or the inner shaft is prevented from being scalded.

Description

Technical Field

[0001] This utility model belongs to the technical field of accessories used in zone melting single crystal furnaces, and in particular relates to a single crystal clamping device for zone melting. Background Technology

[0002] In the zone melting method for preparing single crystals, a polycrystalline silicon rod is fixed on the upper main shaft of the upper chamber of the zone melting single crystal furnace. A single crystal silicon rod clamping device is positioned on the outer shaft of the lower chamber of the zone melting single crystal furnace, and a seed crystal is fixed on the inner shaft of the lower chamber. The inner and outer shafts rotate and move up and down simultaneously to prepare the single crystal. During single crystal preparation, the clamping device holds and fixes the cone-shaped portion of the single crystal to support it during growth, preventing it from shaking during production and ensuring the stability of the single crystal growth. In existing technologies, such as... Figure 1 As shown, if the gap between the molybdenum sheets is too large, the single crystal can easily flow into the outer shaft from the gap between the molybdenum sheets after abnormal melting, burning the inner shaft or the inner shaft. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a single crystal clamping device for zone melting, which effectively solves the technical problem that the single crystal melt easily flows into the outer shaft and burns the outer shaft or inner shaft, thus overcoming the shortcomings of the prior art.

[0004] The technical solution adopted by this utility model is: a single crystal clamping device for zone melting, including a clamping molybdenum sheet, the clamping molybdenum sheet including a clamping part, the clamping part having blocking parts on both sides, the clamping part being adapted to the single crystal, the blocking parts being arranged along the circumference of the single crystal, and when the clamping part clamps the single crystal, a gap is provided between the blocking parts and the single crystal.

[0005] Furthermore, the gap is set to 3-4 mm.

[0006] Furthermore, the side of the clamping portion away from the single crystal is configured as an arc shape, the side of the blocking portion away from the single crystal is configured as a straight line tangent to the arc shape, and the side of the blocking portion away from the clamping portion is configured as a straight line.

[0007] Furthermore, a gap is provided between the blocking portions of adjacent molybdenum clamping sheets.

[0008] Furthermore, when the molybdenum clamping sheet clamps the single crystal, the interval is 2-3 mm.

[0009] Furthermore, the clamping part is configured as a first arc on the side near the single crystal, and the blocking part is configured as a second arc on the side near the single crystal, wherein the diameter of the second arc is greater than the diameter of the first arc.

[0010] Furthermore, the diameter of the first arc is 83–95 mm.

[0011] Furthermore, the clamping part is disposed on the clamping seat and is arranged along the circumference of the clamping seat. The clamping seat is provided with an inclined pin roller, and the clamping part is provided at the top of the pin roller. A pin lever is provided at the end of the pin roller away from the clamping part, and the pin lever can drive the clamping part to move closer to or away from the single crystal.

[0012] Furthermore, when the clamping part clamps the single crystal, the angle between the axis of the pin roller and the central axis of the clamping seat is 15-20°.

[0013] Furthermore, a support column is provided on the outer side of the clamping seat relative to the pin lever, and the top of the support column is hinged to the end of the pin lever away from the pin roller.

[0014] The advantages and positive effects of this utility model are as follows: by adopting the above technical solution, the single crystal is stably clamped during the zone melting crystal pulling process, which improves the stability of the crystal making process and can effectively reduce the amount of single crystal flowing into the outer shaft after melting, thus avoiding burning the inner shaft or the outer shaft. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of an existing clamping device.

[0016] Figure 2 This is a front view of a single crystal clamping device for zone melting according to an embodiment of this utility model.

[0017] Figure 3 This is a schematic diagram of a single crystal clamping device for zone melting of molybdenum sheet according to an embodiment of the present invention.

[0018] Figure 4 This is a schematic diagram of a single crystal clamping device for zone melting of molybdenum sheet according to an embodiment of the present invention.

[0019] Figure 5 This is a top view of a single crystal clamping device for zone melting according to an embodiment of this utility model.

[0020] Figure 6 This is a schematic diagram of a single crystal clamping device for zone melting of molybdenum sheet according to an embodiment of the present invention.

[0021] In the picture:

[0022] 10. Molybdenum sheet clamping part; 11. Clamping part; 12. Blocking part

[0023] 13. First arc; 14. Second arc; 20. Clamping seat

[0024] 21. Upper section 22, middle section 23, lower section

[0025] 30, pin roller; 40, pin lever; 50, support column

[0026] 60, base 70, single crystal Detailed Implementation

[0027] This utility model provides a single crystal clamping device for zone melting. The embodiments of this utility model will be described below with reference to the accompanying drawings.

[0028] In the description of the embodiments of this utility model, it should be understood that the terms "top," "bottom," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, it should be noted that unless otherwise expressly specified and limited, the terms "set" and "connected" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two elements. Those skilled in the art can understand the specific meaning of the above terms in this utility model through specific circumstances.

[0029] like Figure 2 , Figure 3 and Figure 4 As shown, this utility model embodiment discloses a single crystal clamping device for zone melting, including a plurality of clamping molybdenum sheets 10 arranged circumferentially along the single crystal 70. Each clamping molybdenum sheet 10 includes a clamping portion 11, and blocking portions 12 are provided on both sides of the clamping portion 11. The clamping portion 11 and the blocking portions 12 are integrally formed. To maintain the balance on both sides of the clamping portion 11, the blocking portions 12 are symmetrically arranged relative to the clamping portion 11. When the clamping molybdenum sheets 10 clamp the single crystal 70, the clamping portion 11 adapts to contact the single crystal 70, clamping the single crystal 70. To reduce contact with the single crystal 70 and prevent contamination, the blocking portions 12 are arranged circumferentially along the single crystal 70, and a gap d1 is provided between them. Figure 4 As shown. After the single crystal 70 melts, the blocking part 12 can block the melted single crystal 70 to a certain extent, effectively reducing the amount of melted single crystal 70 entering the outer shaft and burning the outer shaft or inner shaft. By adding the blocking part 12, the weight of the molybdenum sheet 10 is increased, which is more conducive to the stable clamping of the single crystal 70. Moreover, since the blocking part 12 does not contact the single crystal 70, it will not cause the single crystal 70 to shake too much during clamping.

[0030] Specifically, the gap d1 between the blocking part 12 and the single crystal 70 should not be too large. If the gap d1 is too large, it will not be able to block the flow-melting single crystal. Preferably, the gap d1 is set to 3-4 mm.

[0031] Specifically, such as Figure 3 and Figure 4 As shown, the side of the clamping part 11 away from the single crystal 70 is set in an arc shape, the side of the blocking part 12 away from the single crystal 70 is set in a straight line tangent to the arc shape, and the side of the blocking part 12 away from the clamping part 11 is set in a straight line shape.

[0032] Specifically, such as Figure 5 As shown, to prevent adjacent molybdenum sheets 10 from jamming, a gap d2 is provided between the blocking portions 12 of adjacent molybdenum sheets 10. When the molybdenum sheet 10 is not clamping the single crystal 70, the gap d2 between the blocking portions 12 of adjacent molybdenum sheets 10 is 5-6 mm; when the molybdenum sheet 10 is clamping the single crystal 70, the gap d2 between the blocking portions 12 of adjacent molybdenum sheets 10 is 2-3 mm.

[0033] Specifically, such as Figure 3 As shown, the clamping part 11 is configured with a first arc 13 on the side near the single crystal 70, and the blocking part 12 is configured with a second arc 14 on the side near the single crystal 70. The diameter of the second arc 14 is larger than the diameter of the first arc 13. The blocking part 12 is recessed in the direction away from the single crystal 70, so that when the clamping part 11 clamps the single crystal 70, there is a gap d1 between the blocking part 12 and the single crystal 70.

[0034] Specifically, such as Figure 2 and Figure 6As shown, the clamping part 11 is disposed on the clamping seat 20 and is arranged circumferentially along the clamping seat 20. The clamping seat 20 is provided with an inclined pin roller 30. The top of the pin roller 30 is provided with the clamping part 11. The end of the pin roller 30 away from the clamping part 11 is provided with a pin lever 40. The pin lever 40 can drive the clamping part 11 to move closer to or away from the single crystal 70. The clamping seat 20 is disposed on the base 60 at the top of the outer shaft and is cylindrical in shape, including an integrally disposed upper section 21, middle section 22 and lower section 23. The outer diameters of the upper section 21 and the lower section 23 are the same, while the outer diameter of the middle section 22 is smaller than that of the upper section 21 and the lower section 23. The tops of the upper section 21 and the lower section 23 are inclined surfaces. The pin roller 30 is inclinedly disposed on the inclined surface of the upper section 21 and is inserted into the middle section 22 at an inclined angle through the upper section 21. The top of the pin roller 30 is fixedly connected to the clamping part 11 by a nut. One end of the pin lever 40 passes through the middle section 22 and connects to the end of the pin roller 30 away from the clamping part 11. The specific connection method is not limited and is existing technology, so it will not be described in detail here. A support column 50 is fixed to the outer side of the clamping seat 20 relative to the pin lever 40. The top of the support column 50 is hinged to the end of the pin lever 40 away from the pin roller 30. A steel wire rope and a traction device are connected to the end of the pin lever 40 away from the pin roller 30. The steel wire rope and traction device are existing technology and are not shown in the figure; their specific structure will not be described in detail here. The traction device can drive the pin lever 40 to rotate via the steel wire rope, causing the pin roller 30 to move upwards or downwards, thereby causing the clamping part 11 to move away from or towards the single crystal 70.

[0035] Specifically, during the zone melting pulling process, before achieving the same diameter, the silicon rod needs to undergo sequential processes of crystal pulling, shoulder formation, and shoulder rotation. This process requires gradient heating to form the cone-shaped head. The angle and width of the shoulder formation significantly affect the defects after shoulder rotation. In some embodiments, the shoulder diameter is 83-95 mm at the junction of the shoulder formation and rotation, and the cone angle is 30-40°. To better clamp the single crystal 70 and ensure its stability, the structure is optimized, with the diameter of the first arc 13 set to 83-95 mm. When the clamping part 11 clamps the single crystal 70, the angle between the axis of the pin roller 30 and the central axis of the clamping seat 20 is 15-20°, allowing the clamping part 11 to perfectly fit the outer circle of the cone-shaped head of the single crystal 70 silicon rod.

[0036] Workflow: Before clamping, the traction device pulls the end of the pin lever 40 away from the pin roller 30 downwards via a steel wire rope. The pin lever 40 drives the pin roller 30 and the clamping molybdenum sheet 10 to tilt upwards, causing the clamping molybdenum sheet 10 to open. When the head of the single crystal 70 cone slowly moves downwards and approaches the clamping molybdenum sheet 10, the traction device reduces the tension of the steel wire rope. The end of the pin lever 40 away from the pin roller 30 rotates upwards, and the pin roller 30 and the clamping molybdenum sheet 10 tilt downwards. The clamping part 11 of the clamping molybdenum sheet 10 contacts the head of the single crystal 70 cone, clamping the single crystal 70. During clamping, if abnormal melting occurs in the single crystal 70, the blocking part 12 of the clamping molybdenum sheet 10 can provide a certain degree of obstruction, preventing the melting single crystal 70 from burning the inner part of the outer shaft.

[0037] Example: A single crystal clamping device for zone melting includes three molybdenum sheets 10 arranged circumferentially along a single crystal 70. Each molybdenum sheet 10 includes a clamping portion 11, and blocking portions 12 are provided on both sides of the clamping portion 11. The clamping portion 11 and the blocking portions 12 are integrally formed. The blocking portions 12 are symmetrically arranged with respect to the clamping portion 11. The blocking portions 12 are arranged circumferentially along the single crystal 70. When the clamping portion 11 clamps the single crystal 70, a gap d1 is provided between the blocking portion 12 and the single crystal 70. The gap d1 is set to 3mm. The side of the clamping portion 11 away from the single crystal 70 is arc-shaped, the side of the blocking portion 12 away from the single crystal 70 is a straight line tangent to the arc shape, and the side of the blocking portion 12 away from the clamping portion 11 is a straight line. A gap d2 is provided between the blocking portions 12 of adjacent molybdenum sheets 10. When the molybdenum sheet 10 is not clamped with the single crystal 70, the interval d2 between the blocking portions 12 of adjacent molybdenum sheets 10 is 6 mm. When the molybdenum sheet 10 is clamped with the single crystal 70, the interval d2 between the blocking portions 12 of adjacent molybdenum sheets 10 is 3 mm. The side of the clamping portion 11 near the single crystal 70 is configured as a first arc 13, and the side of the blocking portion 12 near the single crystal 70 is configured as a second arc 14. The diameter of the second arc 14 is larger than the diameter of the first arc 13, and the blocking portion 12 is recessed in the direction away from the single crystal 70. The clamping portion 11 is disposed on the clamping base 20 and is disposed along the circumference of the clamping base 20. The clamping base 20 is provided with an inclined pin roller 30. The top of the pin roller 30 is provided with the clamping portion 11, and the end of the pin roller 30 away from the clamping portion 11 is provided with a pin lever 40. The clamping seat 20 is mounted on the base 60 at the top of the outer shaft and is cylindrical in shape, comprising an integrally formed upper section 21, middle section 22, and lower section 23. The outer diameters of the upper section 21 and lower section 23 are the same, while the outer diameter of the middle section 22 is smaller than that of the upper section 21 and lower section 23. The tops of the upper section 21 and lower section 23 are provided with inclined surfaces. The pin roller 30 is inclinedly mounted on the inclined surface of the upper section 21 and is inserted into the middle section 22 through the upper section 21. The top of the pin roller 30 is fixedly connected to the clamping part 11 with a nut. One end of the pin lever 40 passes through the middle section 22 and is connected to the end of the pin roller 30 away from the clamping part 11. Three support columns 50 are fixed on the outer side of the clamping seat 20 relative to the pin lever 40, and the tops of the support columns 50 are hinged to the end of the pin lever 40 away from the pin roller 30. The end of the pin lever 40 away from the pin roller 30 is connected to a wire rope and a traction device. The diameter of the first arc 13 is set to 86 mm. When the clamping part 11 clamps the single crystal 70, the angle between the axis of the pin roller 30 and the central axis of the clamping seat 20 is set to 18°.

[0038] The advantages and positive effects of this utility model are:

[0039] 1. It achieves stable clamping of single crystals during zone melting crystal pulling, thus improving the stability of the crystal making process.

[0040] 2. By setting up a blocking part, the amount of single crystal melt entering the outer shaft can be effectively reduced, thus avoiding burns to the outer shaft or inner shaft.

[0041] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made in accordance with the claims of this utility model should still fall within the patent coverage of this utility model.

Claims

1. A single crystal clamping device for zone melting, comprising clamping a molybdenum sheet, characterized in that: The molybdenum sheet clamping device includes a clamping part, and blocking parts are provided on both sides of the clamping part. The clamping part is adapted to the single crystal, and the blocking parts are arranged along the circumference of the single crystal. When the clamping part clamps the single crystal, there is a gap between the blocking parts and the single crystal. The side of the clamping part away from the single crystal is set as an arc shape, the side of the blocking part away from the single crystal is set as a straight line tangent to the arc shape, and the side of the blocking part away from the clamping part is set as a straight line.

2. The single crystal clamping device for zone melting according to claim 1, characterized in that: The gap is set to 3-4 mm.

3. The single crystal clamping device for zone melting according to claim 1, characterized in that: A gap is provided between the blocking portions of adjacent molybdenum sheets.

4. The single crystal clamping device for zone melting according to claim 3, characterized in that: When the molybdenum clamping sheet clamps the single crystal, the interval is 2-3 mm.

5. A single crystal clamping device for zone melting according to any one of claims 1-4, characterized in that: The clamping part is configured with a first arc on the side closest to the single crystal, and the blocking part is configured with a second arc on the side closest to the single crystal, wherein the diameter of the second arc is greater than the diameter of the first arc.

6. A single crystal clamping device for zone melting according to claim 5, characterized in that: The diameter of the first arc is 83–95 mm.

7. A single crystal clamping device for zone melting according to any one of claims 1-4 and 6, characterized in that: The clamping part is disposed on the clamping seat and is arranged along the circumference of the clamping seat. The clamping seat is provided with an inclined pin roller. The top of the pin roller is provided with the clamping part. The end of the pin roller away from the clamping part is provided with a pin lever. The pin lever can drive the clamping part to move closer to or away from the single crystal.

8. A single crystal clamping device for zone melting according to claim 7, characterized in that: When the clamping part clamps the single crystal, the angle between the axis of the pin roller and the central axis of the clamping seat is 15-20°.

9. A single crystal clamping device for zone melting according to claim 7, characterized in that: A support column is provided on the outer side of the clamping seat relative to the pin lever, and the top of the support column is hinged to the end of the pin lever away from the pin roller.

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