Matcher calibration clamp

Abstract

The utility model discloses a matcher calibration clamp which is used in cooperation with an output sensor of a radio frequency power supply matcher. Comprising a copper rod used for being connected with a connecting port of the output sensor in an inserted mode, a fixing copper cap used for being fixed to a copper sheet on the radio frequency power source matcher, a fixing cap used for being fixed to the copper sheet on the radio frequency power source matcher and a load connector used for being connected with a load. When the copper rod is detachably connected with the fixed copper cap, a short circuit calibration clamp is formed. After the load joint is detachably connected with the copper rod and the fixing cap respectively, a load calibration clamp is formed; when the copper bar is independently used, an open circuit calibration clamp is formed. According to the matcher calibration clamp provided by the utility model, the calibration consistency is better, and the measurement result is more accurate.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of radio frequency power matching, specifically relates to a matching device calibration fixture. BACKGROUND

[0002] In the application of radio frequency power matching, in order to realize the accurate monitoring of the working state of radio frequency power matching device, input sensor and output sensor are arranged on the radio frequency power matching device, these sensors have multiple key functions, can measure important parameters in the operation process of radio frequency power matching device, such as impedance, voltage, current, angle and power etc.. In these parameter measurement processes, open circuit, short circuit and 50Ω load calibration are essential key steps, and the calibration of output sensor is particularly important. Output sensor mainly obtains data through inductive voltage and current, and then provides basis for subsequent parameter calculation.

[0003] However, in the actual output sensor calibration operation process, the traditional copper skin connection output sensor is used to realize short circuit and load calibration, and there are obvious technical defects. Because the working environment of radio frequency power is often complex, and its own electrical characteristics are also special, in the operation process, voltage and current will inevitably fluctuate to a certain extent. Due to the fluctuation of voltage and current, the calibration value calculated by calibration algorithm is difficult to maintain high consistency, so that the calculated result is good or bad, which affects the measurement value. CONTENT OF THE UTILITY MODEL

[0004] In order to overcome the problem of poor calibration consistency and inaccurate measurement result in the prior art that short circuit and load calibration are realized by copper skin connection, the utility model provides a matching device calibration fixture.

[0005] The utility model technical scheme is as follows:

[0006] A kind of matching device calibration fixture, it is cooperated with the output sensor of radio frequency power matching device, including copper bar for being inserted with the connecting port of the output sensor, fixed copper cap for being fixed with copper skin on the radio frequency power matching device, fixed cap for being fixed with copper skin on the radio frequency power matching device and load connector for connecting load;

[0007] Wherein, when the copper bar is detachably connected with the fixed copper cap, short circuit calibration fixture is formed;When the load connector is detachably connected with the copper bar and the fixed cap respectively, load calibration fixture is formed;When the copper bar is used alone, open circuit calibration fixture is formed.

[0008] As one preferred scheme of the utility model, one end of the copper bar is provided with a plug-in part matched with the connecting port of the output sensor, and the other end of the copper bar is provided with a fixed part detachably connected with the fixed copper cap or the load connector.

[0009] As one preferred scheme of the utility model, the copper bar is provided with a limiting part at the tail end of the plug-in part.

[0010] As one preferred scheme of the utility model, the fixed part is provided with a first screw hole for connecting the load connector, the fixed copper cap or the lifting ring.

[0011] As one preferred scheme of the utility model, the load connector is provided with a threaded column matched with the first screw hole.

[0012] As one preferred scheme of the utility model, the middle part of the fixed cap is provided with a hollow cavity avoiding the fixed part of the copper bar and the threaded column of the load connector.

[0013] As one preferred scheme of the utility model, one end of the fixed copper cap is provided with a first fixed plate, the other end of the fixed copper cap is provided with a first gripping part, the fixed copper cap is provided with a second screw hole penetrating the first fixed plate and the first gripping part and matched with the first screw hole, and the first fixed plate is provided with a plurality of third screw holes for connecting the copper sheet.

[0014] As one preferred scheme of the utility model, one end of the fixed cap is provided with a second fixed plate, the other end of the fixed cap is provided with a second gripping part, and the second fixed plate is provided with a plurality of fourth screw holes for connecting the copper sheet.

[0015] As one preferred scheme of the utility model, the second gripping part is provided with a plurality of fifth screw holes for connecting the load connector, and the load connector is provided with a plurality of sixth screw holes matched with the fifth screw holes.

[0016] As one preferred scheme of the utility model, the load connector is a 7 / 16 connector.

[0017] Compared with the prior art, the utility model has the beneficial effects that:

[0018] The matching device calibration fixture provided by the utility model reduces the influence of unstable connection and external interference factors on the calibration process through the setting of standardized components (copper bar, fixed copper cap, fixed cap and load connector) and connection mode; meanwhile, the detachable connection design between various components makes it convenient and fast to switch between different calibration modes, and each connection can guarantee relatively stable and consistent electrical performance, thereby improving the stability and accuracy of calibration and providing reliable support for accurate monitoring of the radio frequency power supply matching device. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creative labor.

[0020] Figure 1 It is an exploded view of the matching device calibration fixture in an embodiment of the utility model;

[0021] Figure 2 It is a structural schematic view of the short circuit calibration fixture formed by the connection of the copper bar and the fixed copper cap in an embodiment of the utility model;

[0022] Figure 3 It is a structural schematic view of the load calibration fixture formed by the connection of the load connector with the copper bar and the fixed cap in an embodiment of the utility model;

[0023] Figure 4 It is a structural schematic view of the open circuit calibration fixture formed by the single use of the copper bar in an embodiment of the utility model;

[0024] Figure 5 It is a structural schematic view of the load connector in an embodiment of the utility model;

[0025] Figure 6 It is a structural schematic view of the radio frequency power supply matching device in an embodiment of the utility model;

[0026] Figure 7 It is a structural schematic view of the short circuit calibration fixture cooperating with the radio frequency power supply matching device for short circuit calibration in an embodiment of the utility model;

[0027] Figure 8 It is a structural schematic view of the load calibration fixture cooperating with the radio frequency power supply matching device for load calibration in an embodiment of the utility model;

[0028] Figure 9 It is a structural schematic view of the open circuit calibration fixture cooperating with the radio frequency power supply matching device for open circuit calibration in an embodiment of the utility model.

[0029] In the drawings,

[0030] 1, copper bar; 11, plug-in part; 12, fixed part; 13, limiting part; 14, first screw hole; 2, fixed copper cap; 21, first fixed plate; 22, first gripping part; 23, second screw hole; 24, third screw hole; 3, fixed cap; 31, hollow cavity; 32, second fixed plate; 33, second gripping part; 34, fourth screw hole; 35, fifth screw hole; 4, load connector; 41, threaded column; 42, sixth screw hole; 5, RF power matching device; 51, output sensor; 52, copper sheet. DETAILED DESCRIPTION

[0031] In order to make the technical problems, technical schemes and beneficial effects of the utility model to be solved more clear and obvious, the utility model will be further described in detail below in combination with the drawings and examples. It should be noted that similar signs and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. At the same time, it is declared that the following described examples are only used to explain the utility model, and are not used to limit the utility model.

[0032] It should be noted that the terms "mounting", "setting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements, unless otherwise specified. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the application is used, or the orientation or positional relationship commonly understood by those skilled in the art, or the orientation or positional relationship commonly placed when the product of the application is used, which is only for the convenience of describing the application and simplifying the description, and is not indicative or implied that the indicated device or element must have a specific orientation, structure and operation, therefore it cannot be understood as a limitation of the application.

[0033] Please refer to Figures 1 to 9The embodiment provides a matching device calibration clamp which is used in cooperation with an output sensor 51 of a radio frequency power supply matching device 5. The matching device calibration clamp comprises a copper rod 1, a fixed copper cap 2, a fixed cap 3 and a load connector 4. The copper rod 1 serves as a key bridge for connecting the output sensor 51 and other components, and can be inserted into a connecting port of the output sensor 51 to build a channel for signal transmission. The fixed copper cap 2 is mainly used for fixed connection with a copper sheet 52 on the radio frequency power supply matching device 5, and when the fixed copper cap 2 is connected with the copper rod 1, a stable low-resistance path is formed to simulate the electrical environment required in a short circuit state. The fixed cap 3 is mainly used for fixed connection with the copper sheet 52 on the radio frequency power supply matching device 5, and in a load calibration mode, the fixed cap 3 cooperates with the copper rod 1 and the load connector 4 to ensure the stability of load connection and ensure that the load can be stably connected to the calibration circuit. The load connector 4 is specially used for connecting a load, and different specifications of loads can be connected according to calibration requirements, such as a common 50Ω load, to provide an electrical signal of the output sensor 51 under specific load conditions. When the copper rod 1 is detachably connected with the fixed copper cap 2, a short circuit calibration clamp in a short circuit calibration mode is formed. When the load connector 4 is detachably connected with the copper rod 1 and the fixed cap 3, a load calibration clamp in a load calibration mode is formed. When the copper rod 1 is used alone, that is, the copper rod 1 is not connected with the fixed copper cap 2, the load connector 4 and the fixed cap 3, an open circuit calibration clamp in an open circuit calibration mode is formed.

[0034] Working principles of different calibration modes:

[0035] 1) Short circuit calibration mode

[0036] Please refer to Figure 2 , Figure 7 When short circuit calibration is needed, the copper rod 1 is connected with the fixed copper cap 2 to form a short circuit calibration clamp, then the copper rod 1 is inserted into the connecting port of the output sensor 51, and finally the fixed copper cap 2 is tightly fixed with the copper sheet 52 on the radio frequency power supply matching device 5 through a screw to ensure the stability of the whole connecting structure. The copper rod 1 has good conductivity, thereby forming a closed loop with extremely small resistance, which is similar to an ideal short circuit state. In this short circuit loop, the current is significantly increased, and the voltage tends to be zero. The output sensor 51 can sense the voltage and current signals in the short circuit state through connection with the copper rod 1, and transmit the signal data to subsequent calibration algorithms for processing, so as to calibrate the measurement error of the sensor in the short circuit state.

[0037] 2) Load calibration mode

[0038] Please refer to Figure 3 , Figure 8When load calibration is needed, the load connector 4 is connected with the copper rod 1 and the fixed cap 3 respectively to form a load calibration clamp, then the copper rod 1 is inserted into the connecting port of the output sensor 51, and the fixed cap 3 is tightly fixed with the copper sheet 52 on the RF power supply matching device 5 through a screw, so as to ensure the stability of the whole connecting structure, and finally the load connector 4 is connected with a specific load (such as a 50Ω load), so as to simulate the actual load working state in the circuit. At this time, the output sensor 51 can sense the voltage and current change in the circuit after the load is connected, and transmit these data to the calibration algorithm. Through the analysis and processing of these data, the calibration algorithm can adjust the measurement parameters of the sensor, so that the sensor can more accurately reflect the actual load condition when measuring different loads.

[0039] 3) Open circuit calibration mode

[0040] Please refer to Figure 4 , Figure 9 When open circuit calibration is needed, the copper rod 1 is used alone as an open circuit calibration clamp, and after the copper rod 1 is inserted into the connecting port of the output sensor 51, the circuit is in an open state, the current is almost zero, and the voltage will present a specific value according to the power supply. The output sensor 51 senses the voltage and current signals in the open circuit state and transmits them to the calibration algorithm, which is used to calibrate the measurement error of the sensor in the open circuit state, so as to ensure that the open circuit state can be accurately judged in actual measurement.

[0041] The matching device calibration clamp of the embodiment reduces the influence of unstable connection and external interference factors on the calibration process by setting standardized components (copper rod 1, fixed copper cap 2, fixed cap 3 and load connector 4) and connection mode; at the same time, the detachable connection design between each component makes it convenient and fast to switch between different calibration modes, and each connection can ensure relatively stable and consistent electrical performance, thereby improving the stability and accuracy of calibration, and providing reliable support for accurate monitoring of the RF power supply matching device 5.

[0042] Please refer to Figure 1 , Figure 4In one embodiment, one end of the copper rod 1 is provided with a plug-in part 11 matched with the connection port of the output sensor 51, and the plug-in part 11 establishes a stable and reliable physical connection between the calibration fixture and the output sensor 51. The other end of the copper rod 1 is provided with a fixed part 12 detachably connected with the fixed copper cap 2 or the load connector 4, and the detachable design of the fixed part 12 enables the copper rod 1 to be flexibly switched between different calibration modes. In the short-circuit calibration mode, the fixed part 12 is connected with the fixed copper cap 2 to form a short-circuit loop; in the load calibration mode, the fixed part 12 is connected with the load connector 4 to access the load for calibration. In addition, the copper rod 1 is provided with a limiting part 13 at the tail end of the plug-in part 11, and the limiting part 13 is used to limit the insertion length of the copper rod 1. In actual calibration operation, the limiting part 13 can ensure that the length of the copper rod 1 inserted into the connection port of the output sensor 51 remains consistent, which can reduce the measurement error caused by the difference in insertion length and improve the accuracy and reliability of calibration.

[0043] Please refer to Figure 1 , Figure 4 In one embodiment, the fixed part 12 is provided with a first screw hole 14 for connecting the fixed copper cap 2 or the load connector 4, and the first screw hole 14 enables the copper rod 1 to be stably connected with the fixed copper cap 2 and the load connector 4 through screws, thereby providing convenience for the use of the matcher calibration fixture in different calibration modes. In addition, when the copper rod 1 is used alone as an open-circuit calibration fixture, it may not be easy to pull out after being inserted into the connection port of the output sensor 51 due to tight connection. A pull ring can be installed through the first screw hole 14 to provide an easy force point for the operator.

[0044] Please refer to Figure 5 In one embodiment, the load connector 4 is provided with a threaded column 41 matched with the first screw hole 14. In the load calibration process, the threaded column 41 and the first screw hole 14 form a screw connection mode, which can ensure that the load connector 4 and the copper rod 1 are tightly and stably connected. The stable connection can avoid the problem of poor contact caused by looseness and ensure that the current and voltage signals can be accurately and correctly transmitted from the load to the output sensor 51, thereby improving the accuracy and reliability of the calibration data. At the same time, the matching mode of the threaded column 41 and the first screw hole 14 makes the installation and disassembly process of the load connector 4 simple and fast.

[0045] Please refer to Figure 1In one embodiment, the middle part of the fixed cap 3 is provided with a hollow cavity 31 for avoiding the fixed part 12 of the copper bar 1 and the threaded column 41 of the load connector 4. In the load calibration mode, when the load connector 4 is connected with the first screw hole 14 of the fixed part 12 of the copper bar 1 through the threaded column 41, the fixed cap 3 needs to be fixed with the copper sheet 52 on the radio frequency power source adapter 5 to ensure the stability of the whole connection structure. The hollow cavity 31 provides enough space for the fixed part 12 of the copper bar 1 and the threaded column 41 of the load connector 4, avoids the interference between the fixed cap 3 and these components during the installation of the fixed cap 3, ensures the correct installation of each component, and thus maintains the integrity and stability of the calibration fixture.

[0046] Please refer to Figure 1 In one embodiment, one end of the fixed copper cap 2 is provided with a first fixed plate 21, and the other end of the fixed copper cap 2 is provided with a first gripping part 22. The first gripping part 22 facilitates the operator to hold and operate the fixed copper cap 2, and facilitates the insertion or removal of the short circuit calibration fixture formed by connecting the fixed copper cap 2 with the copper bar 1 from the connection port of the output sensor 51. The fixed copper cap 2 is provided with a second screw hole 23 penetrating through the first fixed plate 21 and the first gripping part 22 and matched with the first screw hole 14. The second screw hole 23 and the first screw hole 14 are connected through the screw connection, so that a stable mechanical connection and good electrical conduction are formed between the fixed copper cap 2 and the copper bar 1. The first fixed plate 21 is provided with a plurality of third screw holes 24 for connecting the copper sheet 52. The design of the plurality of third screw holes 24 can realize the multi-point fixation between the fixed copper cap 2 and the copper sheet 52, increase the stability and reliability of the connection, ensure the smooth transmission of the electrical signal between the fixed copper cap 2 and the copper sheet 52, and further improve the effect of the short circuit calibration.

[0047] Please refer to Figure 1 In one embodiment, one end of the fixed cap 3 is provided with a second fixed plate 32, and the other end of the fixed cap 3 is provided with a second gripping part 33. The second fixed plate 32 is provided with a plurality of fourth screw holes 34 for connecting the copper sheet 52. The second gripping part 33 facilitates the operator to hold and operate the fixed cap 3, and facilitates the insertion or removal of the load calibration fixture formed by connecting the load connector 4 with the fixed cap 3 and the copper bar 1 from the connection port of the output sensor 51. The fixed cap 3 and the copper sheet 52 are fixed together through the fourth screw holes 34 on the second fixed plate 32, which can stabilize the load connection structure and ensure that the connection between the load and the adapter will not be loose during the load calibration process, thereby ensuring the accuracy of the calibration data.

[0048] Please refer to Figure 1In one embodiment, the second gripping part 33 is provided with a plurality of fifth screw holes 35 for connecting the load connector 4, and the load connector 4 is provided with a plurality of sixth screw holes 42 matched with the fifth screw holes 35. The fifth screw holes 35 on the second gripping part 33 are matched with the sixth screw holes 42 on the load connector 4, and the connection between the load connector 4 and the fixing cap 3 is further strengthened by screw connection, and the load connector 4 is convenient to install and disassemble.

[0049] In one embodiment, the load connector 4 is a 7 / 16 connector. The 7 / 16 connector is a standardized connector widely used in the field of radio frequency, and has unified size and electrical performance standards. Using the 7 / 16 connector as the load connector 4 makes the matching calibrator clamp better compatible with other devices and components conforming to the standard, and helps to improve the versatility of the calibrator clamp, and facilitates the use in different radio frequency systems.

[0050] It should be understood that the above description can be improved or changed by those skilled in the art, and all these improvements and changes shall fall within the protection scope of the appended claims of the utility model.

[0051] The above has exemplarily described the utility model patent in combination with the drawings, and it is obvious that the implementation of the utility model patent is not limited by the above manner. Any improvement or change of the method concept and technical scheme of the utility model patent, or direct application of the concept and technical scheme of the utility model patent to other occasions without improvement, shall fall within the protection scope of the utility model.

Claims

1. A matching unit calibration fixture, used in conjunction with the output sensor of an RF power matching unit, characterized in that, include: A copper rod for connecting to the output sensor, a fixing copper cap for fixing to the copper foil on the RF power supply matcher, a fixing cap for fixing to the copper foil on the RF power supply matcher, and a load connector for connecting the load. Specifically, when the copper rod is detachably connected to the fixed copper cap, a short-circuit calibration fixture is formed; when the load connector is detachably connected to both the copper rod and the fixed cap, a load calibration fixture is formed; and when the copper rod is used alone, an open-circuit calibration fixture is formed.

2. The matching device calibration fixture according to claim 1, characterized in that, One end of the copper rod is provided with a plug-in portion that mates with the connection port of the output sensor, and the other end of the copper rod is provided with a fixing portion that can be detachably connected to the fixed copper cap or the load connector.

3. The matching device calibration fixture according to claim 2, characterized in that, The copper rod has a limiting part at the tail end of its insertion part.

4. The matching device calibration fixture according to claim 2, characterized in that, The fixing part has a first screw hole for connecting the load connector, the fixing copper cap, or the lifting ring.

5. The matching device calibration fixture according to claim 4, characterized in that, The load connector is provided with a threaded post that mates with the first screw hole.

6. The matching device calibration fixture according to claim 5, characterized in that, The fixing cap has a hollow cavity in the middle that avoids the fixing part of the copper rod and the threaded post of the load joint.

7. The matching device calibration fixture according to claim 4, characterized in that, One end of the fixed copper cap is provided with a first fixing plate, and the other end of the fixed copper cap is provided with a first gripping part. The fixed copper cap is provided with a second screw hole that passes through the first fixing plate and the first gripping part and mates with the first screw hole. The first fixing plate is provided with a plurality of third screw holes for connecting the copper sheet.

8. The matching device calibration fixture according to claim 1, characterized in that, One end of the fixing cap is provided with a second fixing plate, and the other end of the fixing cap is provided with a second gripping part. The second fixing plate is provided with a plurality of fourth screw holes for connecting the copper sheet.

9. The matching device calibration fixture according to claim 8, characterized in that, The second gripping part has a plurality of fifth screw holes for connecting the load connector, and the load connector has a plurality of sixth screw holes that mate with the fifth screw holes.

10. The matching device calibration fixture according to claim 1, characterized in that, The load connector is a 7 / 16 connector.

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