Separation jig and separation system

Abstract

The utility model provides a separation jig, the separation jig is used for being arranged on the second surface of a carrier plate, the separation jig comprises a body, and the body comprises a transmission channel arranged in the body; the abutting surface is used for abutting against the second surface, the abutting surface is provided with a plurality of air outlets, the multiple air outlets are used for corresponding to at least one air inlet channel, and the air outlets are located at the output end of the conveying channel; the air inlet is formed in the body and located at the input end of the conveying channel. According to the utility model, the acting force acting on the substrate can be more controllable and more uniform, the probability that the substrate is easy to damage in the separation process of the substrate and the support plate in the prior art can be reduced, and the production yield of substrate products is further improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to flexible substrate separation technical field especially, relate to a separation jig and separation system. BACKGROUND

[0002] Thin film circuit substrate is applied to some flexible electronic products, such as flexible display panel, when preparing thin film circuit substrate, need to make integrated circuit on substrate. For example, when making electronic device on ultrathin glass substrate or polyimide (PI) film, usually, substrate is attached to a carrier, after the electronic device on substrate is finished, substrate and carrier are separated, and subsequent operation is carried out.

[0003] But in prior art, because substrate is larger or thinner, when substrate and carrier are separated, substrate is easily damaged, and then product yield is reduced. UTILITY MODEL CONTENT

[0004] The utility model provides a separation jig for separating substrate arranged on a carrier, the carrier has opposite first surface and second surface, the first surface is used for bearing the substrate, the carrier is equipped with multiple gas inlet channels that pass through the carrier, the separation jig is arranged on the second surface of the carrier, and the separation jig includes a body, and the body includes:

[0005] Transmission channel arranged in the body interior;

[0006] Butt surface for abutting the second surface, the butt surface is equipped with multiple gas outlets, multiple gas outlets are used for corresponding with at least one gas inlet channel, and the gas outlet is located at the output end of the transmission channel.

[0007] Gas inlet arranged on the body and located at the input end of the transmission channel.

[0008] In an implementable mode, the body includes a funnel structure with gradually increasing diameter from the first end to the second end, the gas inlet is located at the first end, the butt surface is located at the second end, and the transmission channel is located in the interior of the funnel structure.

[0009] In an implementable mode, the body includes:

[0010] Funnel structure, the funnel structure gradually increases diameter from the first end to the second end, and the gas inlet is located at the first end;

[0011] Boss structure connected to the second end of the funnel structure, the butt surface is located on the side of the boss structure different from the funnel structure, the transmission channel passes through the funnel structure and the boss structure, and the transmission path of the transmission channel in the boss structure is perpendicular to the second surface.

[0012] In an embodiment, the body comprises a funnel structure integrated with the boss structure.

[0013] In an embodiment, the boss structure is provided with a detachable part, which is used to replace other adaptable parts for matching with different carrier plates.

[0014] In an embodiment, the edge of the abutting surface is provided with a sealing member, and when the abutting surface abuts against the second surface of the carrier plate, the second surface, the abutting surface and the sealing member enclose a closed space.

[0015] In an embodiment, the body further comprises a suction channel, a first suction port and a second suction port, the suction channel and the transmission channel are independently provided, the first suction port and the second suction port are located at two ends of the suction channel, the first suction port is located at the abutting surface and is used for suction of the carrier plate, and the second suction port is used for connection with an air suction device.

[0016] In an embodiment, the jig further comprises an air flow controller connected to the air inlet.

[0017] In an embodiment, the first suction port and the air outlet are arranged at intervals.

[0018] According to the second aspect of the present application, a separation system is provided, comprising the separation jig and the inflation device.

[0019] The separation jig and the separation system provided by the present application can inject gas into the air inlet of the separation jig, the gas is transmitted through the transmission channel provided in the body of the separation jig, and then is blown out through the air outlet of the abutting surface of the separation jig to enter the air inlet channel of the carrier plate, and then acts on the substrate carried on the carrier plate, so that the force acting on the substrate is more uniform, and the probability of damage to the substrate in the separation process of the substrate and the carrier plate in the prior art can be reduced, and the production yield of the substrate product is improved.

[0020] In addition, the present application can control the flow or flow rate of the gas entering the air inlet, and then control the pressure of the gas in the entire transmission channel, so that the pressure impacting the substrate is more controllable, and the reliability of separation is further improved.

[0021] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present application, nor is it used to limit the scope of the present application. Other features of the present application will become apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0022] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description read in conjunction with the accompanying drawings. In the drawings, several embodiments of the present application are shown by way of example, and not limitation, in which:

[0023] In the drawings, identical or corresponding components are denoted by identical or corresponding reference numerals.

[0024] Figure 1 A structure schematic diagram of a separation jig and a carrier plate provided by an embodiment of the present application is shown;

[0025] Figure 2 A structure schematic diagram of another separation jig provided by an embodiment of the present application is shown;

[0026] Figure 3 An arrangement schematic diagram of an air outlet and a first adsorption port provided by an embodiment of the present application is shown; Figure 1 ;

[0027] Figure 4 An arrangement schematic diagram of an air outlet and a first adsorption port provided by an embodiment of the present application is shown; Figure 2 ;

[0028] Figure 5 A structure schematic diagram of a separation system provided by an embodiment of the present application is shown. DETAILED DESCRIPTION

[0029] In order to make the purpose, features and advantages of the present application more obvious and easy to understand, the technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0030] The separation jig provided by the embodiment of the present application is applied to the case that the thin film circuit substrate on the carrier plate is separated after the electronic device is completed on the thin film circuit substrate.

[0031] The structures of the separation jig provided by the embodiments of the present application, the positional relationship and connection relationship between the structures will be described in detail below in conjunction with the drawings.

[0032] Figure 1 A structure schematic diagram of a separation jig and a carrier plate provided by an embodiment of the present application is shown; Figure 1As shown, the separation jig 1 provided in the embodiment of the utility model is used for separating the substrate 3 arranged on the carrier plate 2, the carrier plate 2 has opposite first surface 21 and second surface 22, the first surface 21 is used for carrying the substrate 3, the carrier plate 2 is equipped with multiple air inlet channels 23 penetrating the carrier plate.

[0033] As shown, the separation jig 1 is arranged on the second surface 22 of the carrier plate 2. Figure 1 The separation jig 1 includes the body 10, and the body 10 includes: the transmission channel 11, the abutting surface 12 and the air inlet 13. Wherein, the transmission channel 11 is arranged inside the body 10; the abutting surface 12 is used for abutting the second surface 22, and the abutting surface 12 is equipped with multiple air outlets 120, the multiple air outlets 120 are used for corresponding to at least one air inlet channel 23, and the air outlet 120 is located at the output end of the transmission channel 11; the air inlet 13 is arranged on the body 10 and located at the input end of the transmission channel 11.

[0034] Wherein, the separation jig 1 in the embodiment is an auxiliary tool for separating the carrier plate 2 and the substrate 3, and the body 10 has the transmission channel 11, the abutting surface 12 and the air inlet 13, which are used for transmitting gas to the carrier plate 2.

[0035] Wherein, the carrier plate 2 in the embodiment is generally a plane structure and is used for carrying the substrate 3. The carrier plate 2 is equipped with multiple air inlet channels 23 for gas circulation. The transmission path of the air inlet channel 23 can be perpendicular to the surface of the carrier plate 2 or can be arranged at a preset angle with the surface of the carrier plate 2, and the number of the air inlet channels 23 can be related to the type and size of the substrate 3. In addition, the air inlet channels 23 arranged in the carrier plate 2 in the embodiment can correspond to the air outlets 120 arranged on the abutting surface 12 one by one, or can correspond to part of the air outlets 120.

[0036] Wherein, the substrate 3 in the embodiment can be a glass substrate, a flexible substrate, a substrate with conductive lines or electronic components formed on the surface, and the type and material of the substrate 3 are not limited in the embodiment.

[0037] Specifically, the separation jig 1 provided in the embodiment is applied to the scene of separating the thin film circuit substrate on the carrier plate 2 after the electronic components are completed on the thin film circuit substrate. The air charging device is arranged on the air inlet 13 of the separation jig 1, and the gas is injected through the air charging device. The gas can be air or a specific stripping gas. The gas is transmitted through the transmission channel 11 arranged in the body 10 of the separation jig 1, and then is blown out through the multiple air outlets 120 of the abutting surface 12 of the separation jig to enter the air inlet channels 23 of the carrier plate 2, and then acts on the substrate 3 carried on the carrier plate 2. Since the carrier plate 2 is equipped with multiple air inlet channels 23, the gas is blown out through the multiple air inlet channels 23, which can effectively divide the pressure of the gas, so that the pressure of the gas impacting the substrate is more uniform.

[0038] The separation jig can effectively reduce the probability of substrate damage in the process of separating the substrate from the carrier plate in the prior art, thereby improving the production yield of the substrate product.

[0039] In an embodiment, the body 10 of the separation jig 1 comprises a funnel structure with a gradually increasing diameter from a first end to a second end, the air inlet 13 is located at the first end, the abutting surface 12 is located at the second end, and the transmission channel 11 is located inside the funnel structure.

[0040] As shown in the embodiment, the body 10 of the funnel structure, the transmission channel 11 of the funnel structure, and the gas flow distribution are schematically shown. Figure 1 The air entering from the air inlet 13 will also spread from the center to the periphery due to the characteristics of the funnel structure from narrow to wide, and the gas transmitted to the abutting surface 12 is more uniform.

[0041] Specifically, the number of air inlets 13 is only one, the number of transmission channels 11 is multiple, the input end of the transmission channel 11 is the air inlet 13, the gas (or liquid) passing through the air inlet 13 is dispersed through multiple transmission channels 11, and then discharged from the air outlet of the abutting surface and enters the air inlet channel on the carrier plate 2, thereby separating the substrate on the carrier plate.

[0042] It should be noted that, Figure 1 The body 10 in the embodiment is a funnel structure, which is only a schematic, and in other embodiments, the body 10 can also be a cylindrical structure, a cuboid structure, or any other structure that can have the above-mentioned transmission channel 11, abutting surface 12, and air inlet 13. Similarly, the transmission channel 11 can also be a funnel structure, a cylindrical structure, a cuboid structure, or any other channel that can transmit gas. The embodiment does not limit the specific shape of the body 10 and the transmission channel 11.

[0043] Figure 2 Another structure diagram of the separation jig provided by the embodiment of the utility model is shown in the figure. Figure 2 The separation jig body 10 provided by the embodiment of the utility model comprises a funnel structure 14 and a boss structure 15.

[0044] The funnel structure 14 gradually increases in diameter from a first end to a second end, and the air inlet 13 is located at the first end. The boss structure 15 is connected to the second end of the funnel structure 14, the abutting surface 12 is located on the side of the boss structure 15 different from the funnel structure 14, the transmission channel 11 passes through the funnel structure 14 and the boss structure 15, and the transmission path of the transmission channel 11 located in the boss structure 15 is perpendicular to the second surface 22.

[0045] The boss structure 15 is a structure with a certain thickness, and the transmission channel 11 can pass through the funnel structure 14 and the boss structure 15 and be perpendicular to the second surface 22 of the carrier plate 2. In this embodiment, one end of the boss structure 15 is provided with the abutting surface 12, and the other end is connected with the funnel structure 15, thereby forming another body structure of the separation jig.

[0046] Specifically, the gas flow in the transmission channel 11 in the funnel structure 14 can be unevenly distributed, which can cause the gas to be unevenly blown into the air inlet channel 23 of the carrier plate 2, and further cause the carrier plate 2 and the substrate 3 to be not completely separated, or the substrate 3 can be damaged due to excessive air pressure. Therefore, the boss structure 15 is provided in this embodiment, and the thickness of the boss structure 15 itself can adjust the direction of the gas entering the transmission channel 11 in the boss structure 15, so that the gas is blown out of the gas outlet perpendicular to the abutting surface 12, thereby the gas inlet direction can be perpendicular to the air inlet channel 23 of the carrier plate 2, and further more conducive to the separation of the substrate 2 and the carrier plate 3.

[0047] In another embodiment, the funnel structure 14 and the boss structure 15 provided in this embodiment can be integrally arranged, which is more conducive to enhancing the sealing of the transmission channel 11 and avoiding gas leakage.

[0048] In another embodiment, the boss structure 15 is provided with a separable component, and the separable component is used to replace other adaptable components which are used to match different carrier plates.

[0049] The separable component can be a component containing the abutting surface 12, that is, a component at one end of the boss structure 15 different from the funnel structure 14. The other adaptable components can be components containing different sizes and numbers of gas outlets. Since the separable component contains the abutting surface 12, and the abutting surface 12 is provided with a plurality of gas outlets 120, this embodiment can replace different types of other adaptable components according to the size and material of the carrier plate.

[0050] In another embodiment, the edge of the abutting surface 12 is provided with a sealing member, and when the abutting surface 12 abuts against the second surface 22 of the carrier plate 2, the second surface 22, the abutting surface 12 and the sealing member form a closed space.

[0051] Specifically, since the carrier plate 2 and the separation fixture 1 are two independent structures, this embodiment can provide a sealing element at the edge of the contact surface 120. The sealing element can tightly fit the separation fixture 1 and the second surface 22 of the carrier plate 2, or when the contact surface 12 contacts the second surface 22 of the carrier plate 2, the second surface 22, the contact surface 12 and the sealing element can form a sealed space, thereby preventing gas leakage during the process of gas being transmitted from the air outlet 120 of the contact surface 12 to the air inlet channel 23 of the carrier plate 2, and improving the separation efficiency of the substrate 3.

[0052] In addition, in this embodiment, when the separation fixture is working, by using external force to fix the separation fixture 1 and the carrier plate 2, the force of the rushing gas can be prevented from acting on the carrier plate 2, thereby causing the carrier plate 2 to separate from the separation fixture 1.

[0053] In another embodiment, the body 10 further includes an adsorption channel, a first adsorption port, and a second adsorption port. The adsorption channel and the transmission channel 11 are independently configured. The first adsorption port and the second adsorption port are located at both ends of the adsorption channel. The first adsorption port is located on the contact surface 12. The first adsorption port is used to adsorb the carrier plate 2, and the second adsorption port is used to connect to an external air extraction device. Figure 3 As shown in the figure, this embodiment only illustrates the air outlet 120 and the first adsorption port 130 provided on the contact surface 12.

[0054] In this process, the gas flow direction in the adsorption channel is opposite to that in the transmission channel 11. The adsorption channel is used to extract the gas in the adsorption channel so that the first adsorption port can adsorb the carrier plate 2, thereby making the carrier plate 2 and the separation fixture 1 fit tightly together.

[0055] like Figure 3 As shown, in this embodiment, the contact surface 12 not only has an air outlet 120, but also a first adsorption port 130. The size of the air outlet 120 and the first adsorption port 130 can be the same or different. Since the first adsorption port 130 is used to adsorb the carrier plate 2, the first adsorption port 130 cannot be set to correspond to the air inlet channel 23 of the carrier plate 2. For example, the first adsorption port 130 and the air outlet 120 can be arranged alternately. By arranging them alternately, the adsorption force of the first adsorption port 130 on the carrier plate 2 can be uniform, and the gas pressure of the separated gas in the air outlet 120 acting on the substrate 3 can be more uniform. Furthermore, since the first adsorption port 130 adsorbs the carrier plate 2, in order to improve the adsorption force, in this embodiment, the first adsorption port 130 can be arranged more closely.

[0056] In addition, the first adsorption port 130 and the gas outlet 120 in the embodiment can also be arranged in other forms, for example, the first adsorption port 130 can be arranged in a manner of surrounding the gas outlet 120, so that the adsorption channel is also arranged in a manner of surrounding the transmission channel, as shown in Figure 4 In addition, the first adsorption port 130 and the gas outlet 120 can be arranged irregularly according to the characteristics of the substrate structure.

[0057] In another embodiment, the separation jig 1 further comprises a gas flow controller connected to the gas inlet 13.

[0058] Specifically, the gas flow controller in the embodiment can adjust the size of the gas flow according to the characteristics of the substrate material. For example, the gas flow controller in the embodiment can also be internally provided with a gas flow sensor for monitoring the gas flow at the position of the gas inlet 13, so that the amount of gas can be adjusted according to the monitoring result. Not only can the damage to the substrate 3 caused by excessive gas pressure during the separation process be avoided, but also the substrate 3 can be provided with a suitable amount of gas to separate it from the carrier plate 2 smoothly, and the waste of gas can be avoided.

[0059] The embodiment can control the flow or flow rate of the gas entering the gas inlet 13, and further control the pressure of the gas in the entire transmission channel 11, so that the pressure impacting the substrate 3 is more controllable, and the reliability of the separation is further improved.

[0060] In addition, the carrier plate 2 and the substrate 3 in the embodiment can be connected through an adhesive layer, and the gas supplied by the inflation device can be a gas for stripping the adhesive layer. The adhesive layer loses the adhesion effect through the chemical reaction between the stripping gas and the adhesive layer, and then the carrier plate 2 and the substrate 3 are separated smoothly.

[0061] In another embodiment, the present embodiment can also be provided with an electric heater in the transmission channel 11 of the separation jig body 10 and / or the gas inlet channel 23 of the carrier plate 2, so as to heat the gas flowing through the transmission channel 11 and / or the gas inlet channel 23 of the carrier plate, especially for the stripping gas, so as to accelerate the chemical reaction between the stripping gas and the adhesive layer, and improve the separation efficiency.

[0062] Figure 5 A structure schematic diagram of a separation system provided by the embodiment of the utility model is shown in Figure 5 The separation system 50 comprises a separation jig 510 and an inflation device 520.

[0063] The inflation device 520 is connected to the gas outlet of the separation jig, and is used for transmitting the gas into the transmission channel. The inflation device 520 can be a gas pump, a compressor or a blower, etc.

[0064] In addition, the separation system can further comprise an air suction device connected to the second suction port of the separation jig, and the air suction device is configured to suck the air in the suction channel so that the first suction port can suck the carrier plate, and the carrier plate is tightly attached to the separation jig to work normally.

[0065] The embodiment provides a complete separation system for separating the substrate from the carrier plate, and the air is injected into the air inlet of the separation jig through the air injection device, the air is transmitted through the transmission channel arranged in the separation jig body, and then is blown out through the air outlet of the abutting surface of the separation jig to enter the air inlet channel of the carrier plate, and then acts on the substrate carried on the carrier plate. The embodiment separates the substrate from the carrier plate by injecting air, can reduce the probability of substrate damage caused by the prior art in the process of separating the substrate from the carrier plate, and thus improves the production yield of the substrate product.

[0066] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example" or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, the skilled in the art can combine and combine the different embodiments or examples described in the present specification and the features of the different embodiments or examples without contradiction.

[0067] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one feature. In the description of the present application, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0068] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A separation fixture for separating a substrate disposed on a carrier plate, the carrier plate having opposing first and second surfaces, the first surface for supporting the substrate, the carrier plate having a plurality of air inlet channels penetrating the carrier plate, characterized in that, The separation fixture is disposed on the second surface of the carrier plate, and the separation fixture includes a body, the body comprising: The transmission channel is located inside the main body; A contact surface is provided for contacting the second surface. The contact surface is provided with a plurality of air outlets, which correspond to at least one of the air inlet channels. The air outlets are located at the output end of the transmission channel. An air inlet is located on the main body and at the input end of the transmission channel.

2. The fixture according to claim 1, wherein, The body includes a funnel structure with a diameter that gradually increases from a first end to a second end. The air inlet is located at the first end, the contact surface is located at the second end, and the transmission channel is located inside the funnel structure.

3. The fixture according to claim 1, wherein, The body includes: A funnel structure, wherein the diameter of the funnel structure gradually increases from the first end to the second end, and the air inlet is located at the first end; A boss structure is connected to the second end of the funnel structure. The abutment surface is located on the side of the boss structure that is different from the funnel structure. The transmission channel passes through the funnel structure and the boss structure, and the transmission path of the transmission channel located in the boss structure is perpendicular to the second surface.

4. The fixture according to claim 3, wherein, The main body includes an integrated funnel structure and a boss structure.

5. The fixture according to claim 4, wherein, The boss structure includes a separable component, which is used to replace other adaptable components, and the other adaptable components are used to match different carrier plates.

6. The fixture according to claim 5, wherein, The edge of the contact surface is provided with a sealing element. When the contact surface abuts against the second surface of the carrier plate, the second surface, the contact surface, and the sealing element form a sealed space.

7. The fixture according to claim 1, wherein, The main body also includes an adsorption channel, a first adsorption port and a second adsorption port. The adsorption channel and the transmission channel are independently set. The first adsorption port and the second adsorption port are located at both ends of the adsorption channel. The first adsorption port is located on the contact surface. The first adsorption port is used to adsorb the carrier plate, and the second adsorption port is used to connect to an external air extraction device.

8. The fixture according to claim 7, wherein, The fixture also includes an airflow controller connected to the air inlet.

9. The fixture according to claim 8, wherein, The first adsorption port and the air outlet are arranged alternately.

10. A separation system, characterized in that, Includes the separation fixture and inflation device as described in any one of claims 1-9.

Images