Micron-sized high-precision height adjusting mechanism and horizontal adjusting structure of horizontal plane

Abstract

The utility model relates to a micron-sized high-precision height adjusting mechanism and a horizontal adjusting structure of a horizontal plane, the height adjusting mechanism comprises a main body movement mechanism, and a horizontal inclined block adjusting mechanism and a vertical movement inclined block mechanism are arranged in the main body movement mechanism; the vertical movement inclined block mechanism comprises a bottom plate, a vertical inclined block is arranged on the bottom plate, spring guide limiting shafts are arranged on the two sides of the vertical inclined block, the spring guide limiting shafts are sleeved with downward pressing springs, limiting bosses are arranged at the tops of the spring guide limiting shafts and located above the downward pressing springs, and the horizontal inclined block adjusting mechanism comprises a horizontal inclined block. The slope of the vertical inclined block is the same as that of the horizontal inclined block, and the horizontal movement distance of the horizontal inclined block is equal to the screw pitch of the fine-thread screw when the fine-thread screw rotates by a circle. The vertical movement distance of the vertical inclined block is equal to the pitch of the fine-thread screw multiplied by the slope of the inclined block. Therefore, the adjusting sensitivity of the device is high enough.

Description

TECHNICAL FIELD

[0001] The utility model belongs to mechanical structure technical field relates to the high precision height adjusting mechanism of micron level and the horizontal adjustment structure of horizontal plane. BACKGROUND

[0002] At present, the product that can be applied to high precision height adjustment or horizontal adjustment relies on differential head adjustment, and the adjustment precision is not too high, and the bearing capacity of the product of common vertical direction adjustment is low. For example, the sensitivity of the common high-precision manual lifting slide of the size of 40*40mm is 2 microns, the resolution is 10 microns, and the maximum bearing weight is 2kg. SUMMARY

[0003] The utility model discloses a high precision height adjusting mechanism of micron level and the horizontal adjustment structure of horizontal plane can solve the above -mentioned problem, and the adjustment sensitivity is high enough.

[0004] According to the technical scheme provided by the utility model: a high precision height adjusting mechanism of micron level, height adjusting mechanism includes main body movement mechanism, and the horizontal inclined block adjusting mechanism and vertical movement inclined block mechanism are installed in main body movement mechanism;Vertical movement inclined block mechanism includes bottom plate, is equipped with vertical inclined block on bottom plate, and the both sides of vertical inclined block are equipped with spring guide limit shaft, and the lower pressure spring is covered on spring guide limit shaft, and the top of spring guide limit shaft is equipped with limit boss, and limit boss is located above lower pressure spring, and horizontal inclined block adjusting mechanism includes horizontal inclined block, and the upper part of horizontal inclined block is connected with adjusting screw, and the outer periphery of adjusting screw is covered with play adjusting nut, rotation shaft sleeve, rotation scale block in proper order, and the outer periphery of rotation shaft sleeve is covered with angular contact ball bearing, and play adjusting nut, rotation shaft sleeve, angular contact ball bearing inner ring, rotation scale block, adjusting screw head are in proper order and abut;Main body movement mechanism includes main body block, and the side surface of main body block is installed with scale pressing plate, and the lower part of main body block is installed with locking pressing plate.

[0005] As a further improvement of the utility model, the bottom of spring guide limit shaft is in threaded connection with bottom plate.

[0006] As a further improvement of the utility model, the number of angular contact ball bearings is two, and the two angular contact ball bearing inner rings abut.

[0007] As a further improvement of the utility model, the main body block is T-shaped, and the main body block and locking pressing plate are provided with a communicating accommodating cavity, the scale pressing plate is provided with a pressing plate hole, and the outer periphery of the pressing plate hole is annularly provided with a pressing plate scale, the horizontal inclined block adjusting mechanism and vertical inclined block are located in the accommodating cavity and the pressing plate hole, the top of the vertical inclined block is in contact with the bottom of the horizontal inclined block, the rotation scale block is located in the pressing plate hole in the scale pressing plate, and the end face of the rotation scale block is provided with a rotation scale matched with the pressing plate scale, and the lower pressure spring presses the locking pressing plate.

[0008] As a further improvement of the utility model, the slope of the vertical inclined block is the same as that of the horizontal inclined block.

[0009] As a further improvement of the utility model, the horizontal inclined block adjusting mechanism is installed in the accommodating cavity through an angular contact ball bearing, and the outer ring of the angular contact ball bearing is in contact with the inner wall of the accommodating cavity.

[0010] As a further improvement of the utility model, the accommodating cavity comprises a horizontal inclined block sliding groove, and the horizontal inclined block slides horizontally in the horizontal inclined block sliding groove.

[0011] As a further improvement of the utility model, a locking mechanism is arranged between the horizontal inclined block adjusting mechanism and the vertical motion inclined block mechanism, the locking mechanism comprises a vertical inclined block screw hole, a waist hole and a locking bolt, the vertical inclined block screw hole is located in the middle of the vertical inclined block, the waist hole is located in the middle of the locking pressing plate, and the locking bolt is screwed into the vertical inclined block screw hole after passing through the waist hole.

[0012] A horizontal adjusting structure of a horizontal plane, comprising the height adjusting mechanism, three or more height adjusting mechanisms constitute an installation surface, and a carrier plate is installed on the three or more height adjusting mechanisms.

[0013] The positive progress effect of the application is that:

[0014] 1. The slope of the vertical inclined block is the same as that of the horizontal inclined block, and when the fine thread screw rotates one turn, the horizontal motion distance of the horizontal inclined block is equal to the pitch of the fine thread screw.

[0015] 2. The slope of the horizontal inclined block and the vertical inclined block should be smaller than the friction coefficient of the contact surface of the horizontal inclined block and the vertical inclined block, and the horizontal inclined block and the vertical inclined block are in contact under the pressure of the spring of the utility model, so that the horizontal inclined block and the vertical inclined block have a downward pressure in the vertical direction. Further, the motion of the vertical inclined block in the vertical direction has a self-locking function, and when the fine thread screw does not rotate, the utility model can withstand a large pressure in the vertical direction without causing the vertical inclined block to move in the vertical direction. Therefore, the utility model can have a large carrying capacity.

[0016] 3. The height adjustment precision of the utility model is high, so that the utility model has high precision in the application of the flatness adjustment of the plane.

[0017] 4. The inclined block self-locking function of the utility model enables the utility model to have more than ten times of carrying capacity in the same size height adjustment unit. When applied in high-precision equipment, a smaller size can carry a larger load, which is beneficial to the miniaturization of high-precision equipment.

[0018] 5. In this utility model, the main motion mechanism is fitted onto the vertical motion inclined block mechanism. When adjusting the height, the pressure plate, through the preload of the screws, presses the main motion mechanism and the vertical inclined block, ensuring stable guidance during vertical movement. When the height adjustment is complete, the pressure plate screws are tightened, achieving stability and secureness of the height adjustment mechanism.

[0019] 6. This utility model features a spherical adaptive structure installed at the top of the height adjustment mechanism. This structure ensures that when three or more height adjustment units adjust the flatness of the same carrier plate, the locking force at the locking point is perpendicular to the contact surface, and the contact surfaces of the three or more height adjustment units are parallel to the same carrier plate plane. This avoids stress deformation of the carrier plate caused by stress, thus guaranteeing its flatness. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the height adjustment mechanism in Embodiment 1 of this utility model.

[0021] Figure 2 This is a front view of the height adjustment mechanism in Embodiment 1 of this utility model.

[0022] Figure 3 for Figure 2 Sectional view along line AA.

[0023] Figure 4 This is a schematic diagram of the main motion mechanism of the height adjustment mechanism in Embodiment 1 of this utility model.

[0024] Figure 5 This is a schematic diagram of the horizontal inclined block adjustment mechanism of the height adjustment mechanism in Embodiment 1 of this utility model.

[0025] Figure 6 This is a schematic diagram of the vertical motion inclined block mechanism of the height adjustment mechanism in Embodiment 1 of this utility model.

[0026] Figure 7 It is a flatness adjustment assembly consisting of three sets of height adjustment mechanisms.

[0027] Figures 1-2 The components include: 100 height adjustment mechanism, 101 main body movement mechanism, 1011 main body block, 1012 locking pressure plate, 1013 spherical adaptive structure, 1014 carrier plate locking screw, 1015 scale pressure plate, 102 horizontal inclined block adjustment mechanism, 1021 adjustment screw, 1022 rotating bushing, 1023 rotating scale block, 1024 angular contact ball bearing, 1025 clearance adjustment nut, 1026 horizontal inclined block, 103 vertical movement inclined block mechanism, 1031 vertical inclined block, 1032 downward pressure spring, 1033 spring guide limit shaft, and 200 carrier plate. Detailed Implementation

[0028] It should be noted that the embodiments in the utility model and the features in the embodiments can be combined with each other without conflict. The utility model will be described in detail below with reference to the drawings and in combination with the embodiments.

[0029] In order to make the technical personnel in the art better understand the utility model scheme, the technical scheme in the utility model embodiment will be described clearly and completely below in combination with the drawings in the utility model embodiment. Obviously, the described embodiments are only a part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary technical personnel in the art without creative labor should belong to the protection scope of the utility model.

[0030] It should be noted that the terms "first", "second" and the like in the specification and claims of the utility model and the above drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the utility model described herein. In addition, "including" and "having" and similar terms mean that in addition to those listed in "including" and "having", other contents not yet listed can also be "including" and "having"; for example, a process, method, system, product or device that can include a series of steps or units, does not have to be limited to those steps or units that have been clearly listed, but can include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0031] Due to the angle of the drawing, some parts may not be drawn, but their positions and connection relationships can be understood according to the textual expression part.

[0032] As shown in Figure 1 and Figure 2 The utility model is a micron level high-precision height adjusting mechanism, referring to Figure 1 in combination with Figure 2 The height adjusting mechanism 100 comprises a main body movement mechanism 101, a horizontal inclined block adjusting mechanism 102 and a vertical movement inclined block mechanism 103 are installed in the main body movement mechanism 101.

[0033] As shown in Figure 5 The vertical movement inclined block mechanism 103 comprises a bottom plate, a vertical inclined block 1031 is arranged on the bottom plate, spring guide limiting shafts 1033 are arranged on the both sides of the vertical inclined block 1031, lower pressure springs 1032 are sleeved on the spring guide limiting shafts 1033, the bottom of the spring guide limiting shaft 1033 is screw-connected with the bottom plate, a limiting boss is arranged on the top of the spring guide limiting shaft 1033, the limiting boss is located above the lower pressure spring 1032, and the lower pressure spring 1032 is limited to move upwards.

[0034] As shown in Figure 6 , the horizontal inclined block adjusting mechanism 102 includes a horizontal inclined block 1026, the upper part of which is threadedly connected with an adjusting screw 1021, the outer periphery of which is sequentially sleeved with a play adjusting nut 1025, a rotating shaft sleeve 1022, and a rotating scale block 1023. The outer periphery of the rotating shaft sleeve 1022 is sleeved with an angular contact ball bearing 1024. The inner ring of the play adjusting nut 1025, the rotating shaft sleeve 1022, the angular contact ball bearing 1024, the rotating scale block 1023, and the head of the adjusting screw 1021 are sequentially abutted.

[0035] The number of the angular contact ball bearings 1024 is two, and the inner rings of the two angular contact ball bearings 1024 are abutted.

[0036] As shown in Figure 4 , the main body moving mechanism 101 includes a main body block 1011, the side surface of which is provided with a scale pressing plate 1015, and the lower part of which is provided with a locking pressing plate 1012.

[0037] The main body block 1011 is in a T shape, and the main body block 1011 and the locking pressing plate 1012 are provided with a communicating accommodating cavity. The scale pressing plate 1015 is provided with a pressing plate hole, and the outer periphery of the pressing plate hole is annularly provided with a pressing plate scale. The horizontal inclined block adjusting mechanism 102 and the vertical inclined block 1031 are located in the accommodating cavity and the pressing plate hole. The top of the vertical inclined block 1031 is in contact with the bottom of the horizontal inclined block. The rotating scale block 1023 is located in the pressing plate hole in the scale pressing plate 1015, and the end surface of the rotating scale block 1023 is provided with a rotating scale 10231 which is matched with the pressing plate scale. The locking pressing plate 1012 is pressed by a pressing spring 1032.

[0038] In this example, referring to Figure 3 and Figure 5 , the slope of the vertical inclined block 1031 is the same as that of the horizontal inclined block 1026. When the horizontal inclined block adjusting mechanism 102 controls the relative horizontal movement of the horizontal inclined block 1026, the vertical inclined block 1031 which cooperates with the slope of the horizontal inclined block 1026 will move vertically. The pressing spring 1032 is sleeved on the spring guide limiting shaft 1033, so that the relative spring pressure between the main body moving mechanism 101 and the vertical moving inclined block mechanism 103 is caused. This spring pressure makes the slopes of the vertical inclined block 1031 and the horizontal inclined block 1026 always in the state of being in contact, so that no gap is generated during the adjustment. In addition, since the slope of the vertical inclined block 1031 and the horizontal inclined block 1026 is smaller than the friction coefficient of the contact surface, the structure is always in a self-locking state, and the vertical inclined block 1031 and the horizontal inclined block 1026 will not move relatively when the adjusting screw 1021 does not rotate.

[0039] The horizontal inclined block adjusting mechanism 102 is installed in the accommodating cavity through the angular contact ball bearing 1024, and the outer ring of the angular contact ball bearing 1024 is in contact with the inner wall of the accommodating cavity.

[0040] The accommodating cavity comprises a horizontal inclined block sliding groove, and the horizontal inclined block 1026 slides horizontally in the horizontal inclined block sliding groove.

[0041] The locking press plate 1012 is provided with through holes on both sides, the spring guide limiting shaft 1033 passes through the through holes, and the lower pressing spring 1032 presses the upper end surface of the through hole.

[0042] A locking mechanism is arranged between the horizontal inclined block adjusting mechanism 102 and the vertical movement inclined block mechanism 103, the locking mechanism comprises a vertical inclined block screw hole 10311, a waist hole 10121 and a locking bolt, the vertical inclined block screw hole 10311 is located in the middle part of the vertical inclined block 1031, the waist hole 10121 is located in the middle part of the locking press plate 1012, the locking bolt is screwed into the vertical inclined block screw hole 10311 after passing through the waist hole 10121 until being screwed tightly, and the fixing of the locking press plate 1012 and the vertical inclined block 1031 is completed.

[0043] The working process of the utility model is as follows:

[0044] The horizontal relative displacement of the horizontal inclined block 1026 can be driven after the adjusting screw 1021 is rotated. The vertical movement inclined block mechanism 103 has the vertical inclined block 1031, the inclined surface of the vertical inclined block 1031 is matched with the inclined surface of the horizontal inclined block 1026, and therefore the rotary motion of the adjusting screw 1021 is converted into the relative vertical motion of the vertical inclined block 1031. When the adjusting screw 1021 rotates one circle, the relative vertical motion distance of the vertical inclined block 1031 is the pitch of the adjusting screw 1021 multiplied by the slope of the horizontal inclined block 1026 and the vertical inclined block 1031.

[0045] In the present example, with reference to Figure 3 and Figure 6 , in the horizontal inclined block adjusting mechanism 102, the adjusting screw 1021 is fixed in the rotating shaft sleeve 1022, the rotating shaft sleeve 1022 is matched with the angular contact ball bearing 1024 and the rotating scale block 1023. The angular contact ball bearing 1024 ensures the longitudinal position of the adjusting screw 1021, and the rotating scale block 1023 can be used for identifying the screw adjusting angle. The play adjusting nut 1025 axially locks the angular contact ball bearing 1024 on the rotating shaft sleeve 1022 and adjusts the play of the angular contact ball bearing 1024, and then ensures the position fixation of the adjusting screw 1021 in the axial direction. Therefore, the rotation of the adjusting screw 1021 in the horizontal inclined block adjusting mechanism 102 is converted into the relative horizontal motion of the horizontal inclined block 1026.

[0046] In the present example, with reference to Figure 1 / Figure 3 and Figure 4The main body block 1011 of the main body moving mechanism 101 is sleeved with the vertical inclined block 1031 and the horizontal inclined block 1026, and the main body block 1011 moves vertically relative to the vertical inclined block 1031 when the adjusting screw 1021 rotates, so as to adjust the vertical height. The locking pressing plate 1012 presses the vertical inclined block 1031 in the main body block 1011 during the adjustment of the vertical height, so that the vertical inclined block 1031 is attached and guided. When the locking pressing plate 1012 is completely locked after the adjustment of the height is completed, the relative height of the height adjusting mechanism 100 is stable.

[0047] In the embodiment, the pitch of the adjusting screw 1021, the slope of the vertical inclined block 1031 and the slope of the horizontal inclined block 1026 are not limited. The following is an example to illustrate the adjustment accuracy of the height adjusting mechanism 100 in the embodiment. When the pitch of the adjusting screw 1021 is 0.5 mm, the horizontal inclined block 1026 moves horizontally by 0.5 mm when the adjusting screw 1021 rotates one round. When the slope of the vertical inclined block 1031 and the slope of the horizontal inclined block 1026 are 0.1, the vertical inclined block 1031 moves 50 microns relative to the vertical direction. The scale pressing plate 1015 has 50 scales, and the height of the height adjusting mechanism 100 changes by 1 micron when the adjusting screw rotates one scale. Therefore, the minimum reading of the height adjustment in the embodiment can reach 1 micron, and the adjustment sensitivity can reach one fifth of the minimum reading, that is, 0.2 micron.

[0048] The embodiment provides a horizontal adjusting structure of a horizontal plane. Three or more height adjusting mechanisms 100 can constitute an installation plane, and the carrier plate 200 is installed on the three or more height adjusting mechanisms 100. The horizontal plane of the carrier plate 200 can be adjusted by adjusting the height of the three or more height adjusting mechanisms 100.

[0049] Specifically, when the carrier plate 200 is installed on the three or more height adjusting mechanisms 100, the upper part of the main body block 1011 is provided with a through hole, and the carrier locking screw 1014 passes through the through hole to connect the carrier plate 200. In order to avoid the locking stress and stress deformation caused by the locking force, the spherical adaptive structure 1013 is installed on the top of the main body block 1011. In the embodiment, the spherical adaptive structure 1013 is a spherical gasket. The upper and lower ends of the spherical gasket are in contact with the carrier plate 200 and the main body block 1011 respectively.

[0050] It can be understood that the above embodiments are only exemplary embodiments for illustrating the principle of the utility model, and the utility model is not limited to this. For ordinary skilled persons in the art, various modifications and improvements can be made without departing from the spirit and essence of the utility model, and these modifications and improvements are also regarded as the protection scope of the utility model.

Claims

1. A high-precision height adjustment mechanism of micrometer scale, characterized by comprising: The height adjusting mechanism (100) comprises a main body movement mechanism (101), a horizontal inclined block adjusting mechanism (102) and a vertical movement inclined block mechanism (103) are installed in the main body movement mechanism (101); the vertical movement inclined block mechanism (103) comprises a bottom plate, a vertical inclined block (1031) is arranged on the bottom plate, spring guide limiting shafts (1033) are arranged on the two sides of the vertical inclined block (1031), lower pressure springs (1032) are sleeved on the spring guide limiting shafts (1033), limiting bosses are arranged at the top of the spring guide limiting shafts (1033) and are located above the lower pressure springs (1032), the horizontal inclined block adjusting mechanism (102) comprises a horizontal inclined block (1026), an adjusting screw (1021) is threadedly connected to the upper portion of the horizontal inclined block (1026), a play adjusting nut (1025), a rotating shaft sleeve (1022) and a rotating scale block (1023) are sequentially sleeved on the outer periphery of the adjusting screw (1021), an angular contact ball bearing (1024) is sleeved on the outer periphery of the rotating shaft sleeve (1022), and the play adjusting nut (1025), the rotating shaft sleeve (1022), the inner ring of the angular contact ball bearing (1024), the rotating scale block (1023) and the head of the adjusting screw (1021) are sequentially abutted.

2. The high-precision height adjustment mechanism of claim 1, wherein The bottom of the spring guide limiting shaft (1033) is threadedly connected with the bottom plate.

3. The high-precision height adjustment mechanism of claim 1, wherein The number of the angular contact ball bearings (1024) is two, and the inner rings of the two angular contact ball bearings (1024) abut.

4. The high-precision height adjustment mechanism of claim 1, wherein The main body block (1011) is in a T shape, the main body block (1011) and the locking pressing plate (1012) are provided with a communicating accommodating cavity, the scale pressing plate (1015) is provided with a pressing plate hole, and a pressing plate scale is annularly arranged on the outer periphery of the pressing plate hole; the horizontal inclined block adjusting mechanism (102) and the vertical inclined block (1031) are located in the accommodating cavity and the pressing plate hole, the top of the vertical inclined block (1031) is in contact with the bottom of the horizontal inclined block, the rotating scale block (1023) is located in the pressing plate hole in the scale pressing plate (1015), and a rotating scale (10231) matched with the pressing plate scale is arranged on the end face of the rotating scale block (1023); and the lower pressure spring (1032) presses the locking pressing plate (1012).

5. The high-precision height adjustment mechanism of claim 4, wherein The slope of the vertical inclined block (1031) is the same as that of the horizontal inclined block (1026).

6. The high-precision height adjustment mechanism of claim 4, wherein The horizontal inclined block adjusting mechanism (102) is installed in the accommodating cavity through the angular contact ball bearing (1024), and the outer ring of the angular contact ball bearing (1024) is in contact with the inner wall of the accommodating cavity.

7. The high-precision height adjustment mechanism of claim 4, wherein The accommodating cavity comprises a horizontal inclined block sliding groove, and the horizontal inclined block (1026) horizontally slides in the horizontal inclined block sliding groove.

8. The high-precision height adjustment mechanism of claim 1, wherein The locking mechanism is arranged between the horizontal inclined block adjusting mechanism (102) and the vertical movement inclined block mechanism (103), and comprises a vertical inclined block screw hole (10311), a waist hole (10121) and a locking bolt.

9. A horizontal adjustment structure of a horizontal surface, characterized by comprising: The height adjusting mechanism (100) comprises a vertical movement inclined block mechanism (103) and a horizontal inclined block adjusting mechanism (102), the vertical movement inclined block mechanism (103) is arranged on the horizontal inclined block adjusting mechanism (102), and the horizontal inclined block adjusting mechanism (102) is arranged on the base (1000).

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