Steam generating device and wafer drying device

Abstract

The utility model discloses a steam generating device and a wafer drying device, the steam generating device comprises a shell, a liquid medium to be evaporated, a first heating piece and a microbubble generator, the shell is provided with a containing cavity and a first air outlet communicated with the containing cavity, the liquid medium to be evaporated is located in the containing cavity, and the first heating piece is located in the first air outlet. The first heating piece is used for heating the liquid to-be-evaporated medium in the containing cavity, and the microbubble generator is located in the liquid to-be-evaporated medium and used for generating microbubbles in the liquid to-be-evaporated medium. The micro-bubbles rise under the action of buoyancy, when the micro-bubbles rise to the surface of the liquid to-be-evaporated medium, due to unbalanced pressure and the action of surface tension, the micro-bubbles can be broken, energy generated by breaking of the micro-bubbles enables liquid to-be-evaporated medium molecules attached to the micro-bubbles to obtain additional kinetic energy, and the liquid to-be-evaporated medium molecules can be evaporated. The kinetic energy enables liquid to-be-evaporated medium molecules to overcome the attraction force between the molecules to be converted into a gas state from a liquid state, and therefore steam is formed. A large amount of steam can be generated without increasing the heating temperature.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a steam generator and a wafer drying device. Background Technology

[0002] After etching and other processes are completed, wafers need to be cleaned using a wet cleaning process to remove impurities and residues from the wafer surface. After the cleaning process is completed, the wafers need to be dried. During the wafer drying process, the Marangoni effect is generally used to dry the wafers using organic solvent vapor (commonly isopropanol, or IPA for short).

[0003] The method for generating isopropanol vapor in related technologies involves heating liquid isopropanol with a heating wire, causing the liquid isopropanol to evaporate and generate isopropanol vapor. Isopropanol is a flammable substance, and if the heating temperature is too high, it can easily lead to an explosion of isopropanol vapor. Therefore, it is impossible to increase the yield of isopropanol vapor by increasing the temperature, resulting in low efficiency in isopropanol vapor generation, which in turn leads to low wafer drying efficiency. Utility Model Content

[0004] In view of this, the present invention provides a dust filter and exhaust gas treatment system to solve the problem that isopropanol is a flammable substance, and if the heating temperature is too high, it is easy to cause isopropanol vapor explosion. Therefore, it is impossible to increase the production of isopropanol vapor by increasing the temperature, resulting in low efficiency of isopropanol vapor generation and thus low wafer drying efficiency.

[0005] This utility model provides a steam generating device, comprising:

[0006] The housing has a receiving cavity and an air outlet communicating with the receiving cavity;

[0007] The liquid medium to be evaporated is located inside the containment cavity;

[0008] The first heating element is used to heat the liquid medium to be evaporated in the receiving cavity;

[0009] A microbubble generator is located within the liquid medium to be evaporated and is used to generate microbubbles within the liquid medium to be evaporated.

[0010] Optionally, the steam generating device described above may further include;

[0011] The first detection element is used to obtain the temperature of the liquid medium to be evaporated;

[0012] The second detection element is used to obtain the temperature of the vapor generated by the liquid medium to be evaporated in the containment cavity;

[0013] The third detection element is used to obtain the liquid level of the liquid medium to be evaporated in the containment cavity.

[0014] Optionally, the steam generating device described above further includes:

[0015] A gas supply source is connected to the microbubble generator;

[0016] The second heating element is used to heat the gas medium in the gas supply source.

[0017] Optionally, in the above-mentioned steam generating device, the liquid medium to be evaporated is isopropanol liquid, and the gaseous medium is nitrogen gas.

[0018] Optionally, in the above-described steam generating device, the housing includes:

[0019] The main body has a groove;

[0020] A cover plate is connected to the main body and covers the groove, forming the receiving cavity with the groove;

[0021] The air outlet is located on the cover plate or the main body.

[0022] Optionally, the steam generating device described above also includes a seal disposed between the main body and the cover plate.

[0023] Optionally, the steam generating device described above further includes:

[0024] The liquid inlet is located on the cover plate or the main body;

[0025] The liquid outlet is located on the cover plate or the main body.

[0026] Optionally, the steam generating device described above further includes:

[0027] The protective shell is connected to the bottom of the main body;

[0028] The first heating element is located inside the protective shell;

[0029] Thermal insulation cotton is wrapped around the outer perimeter of the protective shell.

[0030] Optionally, in the steam generating device described above, the microbubble generator has an outlet hole with a diameter of less than 1 mm.

[0031] This utility model also provides a wafer drying apparatus, including the steam generating device described above.

[0032] The technical solution provided by this utility model has the following advantages:

[0033] 1. The steam generating device provided by this utility model includes a shell, a liquid medium to be evaporated, a first heating element, and a microbubble generator. The shell has a receiving cavity and a first gas outlet communicating with the receiving cavity. The liquid medium to be evaporated is located in the receiving cavity. The first heating element is used to heat the liquid medium to be evaporated in the receiving cavity. The microbubble generator is located in the liquid medium to be evaporated and is used to generate microbubbles in the liquid medium to be evaporated. The microbubbles rise under the action of buoyancy. As the microbubbles rise, the pressure on the microbubbles gradually decreases, while the pressure inside the microbubbles relatively increases. When the microbubbles rise to the surface of the liquid medium to be evaporated, due to the pressure imbalance and the effect of surface tension, the microbubbles will rupture. The energy generated by the rupture of the microbubbles will give the liquid medium molecules attached to the microbubbles additional kinetic energy. This kinetic energy will cause the liquid medium molecules to overcome the intermolecular attraction and change from a liquid state to a gas state, thereby forming steam. This steam generator can produce a large amount of steam without increasing the heating temperature, and steam is generated by the rupture of microbubbles, which shortens the steam generation time and thus improves the efficiency of steam generation from the medium to be evaporated, thereby improving the drying efficiency of the wafer. Attached Figure Description

[0034] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the steam generating device provided by this utility model;

[0036] Figure 2 This is a side view of the steam generating device provided by this utility model;

[0037] Figure 3 This is a cross-sectional view of the steam generating device provided by this utility model.

[0038] Explanation of reference numerals in the attached figures:

[0039] 101. Main body; 102. Cover plate; 103. Air outlet; 104. Receiving cavity; 105. Liquid outlet;

[0040] 201. First heating element;

[0041] 301. Microbubble generator; 302. Gas supply pipeline;

[0042] 401. First inspection piece; 402. Second inspection piece;

[0043] 500. Seals;

[0044] 600. Base. Detailed Implementation

[0045] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0046] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0047] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0048] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0049] Example 1

[0050] This embodiment provides a steam generating device, such as... Figures 1 to 3 As shown, the device includes a shell, a liquid medium to be evaporated (not shown in the figure), a first heating element 201, and a microbubble generator 301. The shell has a receiving cavity 104 and an outlet 103 communicating with the receiving cavity 104. The liquid medium to be evaporated is located inside the receiving cavity 104. The first heating element 201 is used to heat the liquid medium to be evaporated inside the receiving cavity 104. The microbubble generator 301 is located inside the liquid medium to be evaporated and is used to generate microbubbles inside the liquid medium to be evaporated.

[0051] Specifically, in the aforementioned steam generating device, the housing can be made of metal or other thermally conductive materials, or it can be made of non-thermally conductive materials. When the housing is made of a thermally conductive material, the first heating element 201 can be placed outside the housing to directly heat the housing. When the housing is made of a non-thermally conductive material, the first heating element 201 can be placed inside the receiving cavity 104 to directly heat the liquid medium to be evaporated inside the receiving cavity 104. Preferably, in this embodiment, the housing is made of stainless steel to prevent rusting and reduce corrosion. The liquid medium to be evaporated can be isopropanol liquid, or other liquids with high volatility, good miscibility with water, and low surface tension, such as methanol. It should be noted that isopropanol has a low surface tension. During the process of blowing isopropanol vapor onto the wafer, isopropanol can replace the residual moisture on the wafer surface. Isopropanol also has good volatility, so isopropanol vapor can be used to dry the wafer. The medium to be evaporated does not completely fill the receiving cavity 104. The receiving cavity 104 is divided into an upper space and a lower space. The upper space contains the liquid medium to be evaporated, and the lower space is used to contain the vapor generated by the liquid medium to be evaporated. The first heating element 201 can be one or more of electromagnetic heating, infrared heating, resistance heating, or other heating methods. Preferably, resistance heating is used in this embodiment. Resistance heating is simple and convenient to install and has a low cost. In this embodiment, the first heating element 201 is set at the bottom of the outer side of the shell, avoiding wiring in the liquid medium to be evaporated and reducing the complexity of wiring. Of course, the first heating element 201 can also be set inside the receiving cavity 104. The microbubble generator 301 can generate microbubbles by blowing gas into the liquid medium to be evaporated, or by the cavitation effect of ultrasound, or by other methods of generating microbubbles. In this embodiment, the method of blowing gas is preferred to generate bubbles, which is low in cost.

[0052] The steam generator provided in this embodiment utilizes microbubbles that rise under buoyancy. As the microbubbles rise, the pressure on them gradually decreases, while the pressure inside the microbubbles relatively increases. When the microbubbles reach the surface of the liquid medium to be evaporated, they rupture due to pressure imbalance and surface tension. The energy released by the rupture of the microbubbles gives the molecules of the liquid medium attached to the microbubbles additional kinetic energy. This kinetic energy allows the liquid medium molecules to overcome intermolecular attraction and transform from a liquid to a gaseous state, thus forming steam. This steam generator can produce a large amount of steam without increasing the heating temperature, and steam is generated immediately upon the rupture of microbubbles, shortening the steam generation time and thus improving the efficiency of steam generation from the medium to be evaporated, thereby improving the drying efficiency of the wafer.

[0053] like Figure 1 and Figure 2As shown, the steam generating device provided in this embodiment also includes a first detection element 401, a second detection element 402, a third detection element, and a control element. Both the first detection element 401 and the second detection element 402 are temperature sensors. Specifically, both the first detection element 401 and the second detection element 402 are temperature-sensing rods. The detection end of the first detection element 401 is inserted into the receiving cavity 104 and is located within the liquid medium to be evaporated. The first detection element 401 is used to obtain the temperature of the liquid medium to be evaporated in the receiving cavity 104 to prevent the temperature of the medium to be evaporated from being too high. The second detection element 402 is located above the first detection element 401. The detection end of the second detection element 402 is inserted into the receiving cavity 104 and is located within the space within the receiving cavity 104 excluding the liquid medium to be evaporated. The second detection element 402 is used to obtain the temperature of the steam generated by the liquid medium to be evaporated in the receiving cavity 104 to prevent the steam temperature from being too high. The third detection element is a liquid level sensor. The detection end of the third detection element is inserted into the liquid medium to be evaporated to measure the liquid level of the medium, enabling real-time acquisition of the liquid level in the receiving cavity 104 and preventing the liquid medium from evaporating completely or exceeding the specified level. The control element can be a microcontroller, such as a single-chip microcomputer or a central control platform. The control element is electrically connected to the first detection element 401, the second detection element 402, and the third detection element via cables or wireless communication. Preferably, in this embodiment, the control element is electrically connected to the first detection element 401, the second detection element 402, and the third detection element via cables, and the cables are explosion-proof to increase safety. The control element is also electrically connected to the first heating element 201 via cables. When the temperature value detected by the first detection element 401 is lower than a first set value (which can be set according to actual conditions), the power of the first heating element 201 can be increased. When the temperature value detected by the second detection element 402 is higher than a second set value, the power of the first heating element 201 can be reduced.

[0054] like Figure 2 and Figure 3As shown, the steam generating device provided in this embodiment also includes a gas supply source and a second heating element. The gas supply source stores a gas medium, which can be nitrogen, or other gases. Preferably, nitrogen is used in this embodiment. Nitrogen can uniformly carry isopropanol vapor to the wafer surface, ensuring that all points on the wafer surface are effectively dried. This uniform distribution helps to reduce drying time and improve production efficiency. Moreover, nitrogen is an inert gas with stable chemical properties and does not easily react with other substances. During the drying process, nitrogen can isolate oxygen and moisture in the air, preventing the wafer surface from being oxidized or contaminated. The gas supply source includes a gas supply body and a gas supply pipeline 302. The gas supply body can be a nitrogen cylinder, an industrial nitrogen supply system, or other equipment that provides nitrogen. The gas supply body is connected to the microbubble generator 301 through the gas supply pipeline 302 to supply nitrogen to the microbubble generator 301. The second heating element can be one or more of electromagnetic heating, infrared heating, resistance heating, or other heating methods. Preferably, the second heating element is an electric heating wire. The second heating element can heat the gas supply pipeline 302 to provide nitrogen at a set temperature, thereby increasing the amount of steam generated by a single microbubble, thereby improving the steam generation efficiency and thus improving the wafer drying efficiency.

[0055] like Figures 1 to 3 As shown, the steam generator provided in this embodiment includes a housing comprising a main body 101, a cover plate 102, and a sealing element 500. The main body 101 is welded from stainless steel sheet and has a groove, which can be rectangular. Those skilled in the art can adjust the shape of the groove as needed. The cover plate 102 is also made of stainless steel sheet and is detachably connected to the upper surface of the main body 101 by bolts. The cover plate 102 and the inner wall of the groove enclose a receiving cavity 104. The sealing element 500 is disposed between the cover plate 102 and the main body 101 to ensure the sealing of the receiving cavity 104. An outlet 103 is provided on the cover plate 102. As an alternative embodiment, the cover plate 102 can also be provided on the main body 101. The outlet 103 is used to output a mixture of steam and nitrogen gas.

[0056] The steam generating device provided in this embodiment, such as Figure 1 and Figure 3 As shown, it also includes an inlet and an outlet 105, both of which are located on the main body 101. The inlet is connected to an inlet valve, which, when opened, delivers the liquid medium to be evaporated into the receiving cavity 104. The outlet 105 is connected to a storage valve, which, when opened, discharges the liquid medium to be evaporated from the receiving cavity 104.

[0057] The steam generator provided in this embodiment also includes a protective shell (not shown in the figure), insulation cotton (not shown in the figure), and a heat insulation shell. The protective shell is made of stainless steel, but other heat-resistant materials can also be used. The protective shell is fixedly connected to the bottom outer side of the main body 101. The fixed connection can be welding, bolting, snap-fitting, bonding, or other fixing methods. The first heating element 201 is located inside the protective shell. The insulation cotton is wrapped around the outer periphery of the protective shell to reduce heat loss. Alternatively, insulation cotton can be wrapped around the outer periphery of the shell to further reduce heat dissipation, thereby reducing the working time of the first heating element 201 and thus reducing energy consumption. The heat insulation shell is wrapped around the protective shell and the outer periphery of the shell. The heat insulation shell is made of heat-insulating materials, such as fiberglass, asbestos, or other heat-insulating materials, to prevent heat from being rapidly transferred to the external environment.

[0058] The steam generating device provided in this embodiment has a microbubble generator 301 as a gas container and a microbubble as a box. The bottom is connected to the gas supply source through a gas supply pipe 302. The top of the box has several air outlets with a diameter of less than 1 mm, so that the air outlet 103 can generate microbubbles. During the bursting process of the microbubbles, not only can steam be generated, but the thrust generated by the microbubble explosion also causes the liquid medium to be evaporated to flow, thereby causing the liquid medium to be evaporated at different positions to be exchanged, which is conducive to the uniform temperature of the liquid medium to be evaporated in the containment cavity 104.

[0059] The steam generating device provided in this embodiment, such as Figure 1 As shown, it also includes a base 600, which is a frame structure formed by plates. The base 600 can be made of stainless steel or other materials. The bottom of the main body 101 of the housing is mounted on the base 600 to support the main body 101 and to leave space for installing the second heater.

[0060] Example 2

[0061] This embodiment provides a wafer drying apparatus, including the steam generator described above. By using the steam generator, the steam generation time is shortened and the steam generation rate is increased, thereby improving the wafer drying efficiency.

[0062] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A steam generating device, characterized in that, include: The housing has a receiving cavity (104) and an air outlet (103) communicating with the receiving cavity (104); The liquid medium to be evaporated is located in the receiving cavity (104); The first heating element (201) is used to heat the liquid medium to be evaporated in the receiving cavity (104); A microbubble generator (301) is located within the liquid medium to be evaporated and is used to generate microbubbles within the liquid medium to be evaporated.

2. The steam generating device according to claim 1, characterized in that, Also includes: The first detection element (401) is used to obtain the temperature of the liquid medium to be evaporated; The second detection element (402) is used to obtain the temperature of the vapor generated by the liquid medium to be evaporated in the containment cavity (104); The third detection element is used to obtain the liquid level of the liquid medium to be evaporated in the containment cavity (104).

3. The steam generating device according to claim 2, characterized in that, Also includes: An air supply source is connected to the microbubble generator (301); The second heating element is used to heat the gas medium in the gas supply source.

4. The steam generating apparatus according to claim 3, characterized in that, The liquid medium to be evaporated is isopropanol liquid, and the gaseous medium is nitrogen gas.

5. The steam generating apparatus according to any one of claims 1-4, characterized in that, The housing includes: The main body (101) has a groove; A cover plate (102) is connected to the main body (101) and covers the groove, forming the receiving cavity (104) with the groove; The air outlet (103) is located on the cover plate (102) or the main body (101).

6. The steam generating apparatus according to claim 5, characterized in that, It also includes a seal (500) disposed between the body (101) and the cover plate (102).

7. The steam generating apparatus according to claim 6, characterized in that, Also includes: The liquid inlet is located on the cover plate (102) or the main body (101); The liquid outlet (105) is provided on the cover plate (102) or the main body (101).

8. The steam generating apparatus according to claim 7, characterized in that, Also includes: A protective shell is connected to the bottom of the main body (101); The first heating element (201) is located inside the protective shell; Thermal insulation cotton is wrapped around the outer perimeter of the protective shell.

9. The steam generating apparatus according to claim 8, characterized in that, The microbubble generator (301) has an air outlet with a diameter of less than 1 mm.

10. A wafer drying apparatus, characterized in that, The steam generating apparatus includes any one of claims 1-9.

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