Output regulating circuit of impedance regulator

Abstract

The utility model belongs to the technical field of output regulation of impedance adjusters, and particularly relates to an output regulation circuit of an impedance adjuster, which comprises a radio frequency electrode, an input filter and at least two band-pass filters, and can regulate input impedances with different frequencies through the arrangement of the band-pass filters, so that radio frequency signals with different frequencies can pass through. The isolation filtering module is arranged to prevent the radio frequency signal from flowing back to the high-voltage direct current source to cause interference to the high-voltage direct current source; therefore, radio-frequency signal input of various different frequencies is provided for the electrostatic chuck of the plasma processing chamber through one output adjusting circuit, stable access is provided for the high-voltage direct-current source, the use cost is low, and the occupied volume of a single module is small.

Description

TECHNICAL FIELD

[0001] The utility model belongs to impedance adjuster output regulation technical field, specifically related to an impedance adjuster's output regulation circuit. BACKGROUND

[0002] In the plasma processing chamber, the electrostatic chuck is mainly composed of a dielectric layer, a DC electrode and a RF electrode, wherein the DC electrode is embedded in the dielectric layer and used for connecting a high-voltage DC power supply, and the RF electrode provides RF bias power required in a wafer processing process. In the prior art, when the RF electrode needs RF signals of different frequencies, a signal source with adjustable frequency or multiple signal sources with fixed frequencies are often used to provide signals of different frequencies, and then different impedance adjusters are matched to obtain high-frequency signal input, which has high use cost and large volume. SUMMARY

[0003] The utility model solves the technical problem in the prior art that the method for providing RF signals of different frequencies for the plasma processing chamber has high cost and large volume, and thus provides an output regulation circuit of an impedance adjuster.

[0004] The utility model discloses an impedance adjuster's output regulation circuit, including n RF electrode and with its matching use's isolation filter module, band pass filter module, isolation filter module, band pass filter module with RF electrode number is same, still include m high voltage DC source, n is the positive integer of <=2, m is the positive integer less than or equal to n, the output regulation circuit of impedance adjuster is provided.

[0005] The band pass filter module is connected with the RF electrode.

[0006] The band pass filter module includes at least two band pass filters, and each band pass filter passes different frequency ranges.

[0007] The isolation filter module is connected between the RF electrode and the high-voltage DC source, and is used for isolating the high-voltage DC source from the frequency signals flowing through the at least two band pass filters.

[0008] Further, the band pass filter includes an adjustable impedance filter and a notch filter, the adjustable impedance filter is connected with the RF electrode interface, and is used for adjusting the input impedance of the first frequency, the notch filter is connected with the RF electrode, and is used for passing the RF signal of the second frequency, and the isolation filter module is connected between the RF electrode and the high-voltage DC source, and is used for isolating the high-voltage DC source from the signals of the first frequency and the second frequency.

[0009] Further, n=1, m=1, the radio frequency electrode is connected to the positive pole of the high-voltage direct current power supply, and the negative pole of the high-voltage direct current power supply is grounded.

[0010] Further, n=1, m=1, the radio frequency electrode is connected to the negative pole of the high-voltage direct current power supply matched therewith, and the positive pole of the high-voltage direct current power supply is grounded.

[0011] Further, n=2, m=2, the radio frequency electrode is used in pairs with the high-voltage direct current power supply, the first electrode of the radio frequency electrode is connected to the positive pole of the first high-voltage direct current power supply matched therewith, and the negative pole of the first high-voltage direct current power supply is grounded; the second electrode is connected to the negative pole of the second high-voltage direct current power supply matched therewith, and the positive pole of the second high-voltage direct current power supply is grounded.

[0012] Further, n=2, m=1, the first electrode of the radio frequency electrode is connected to the positive pole of the high-voltage direct current power supply, and the second electrode of the radio frequency electrode is connected to the negative pole of the direct current power supply.

[0013] Further, a VI sensor is further included, and a detection end of the VI sensor is connected between the radio frequency electrode and the adjustable impedance filter, the notch filter and the input filter.

[0014] Further, the adjustable impedance filter includes a first inductor and a first capacitor; a first end of the first inductor is connected to the radio frequency electrode, and a second end thereof is connected to the first capacitor; a second end of the first capacitor is grounded; and the first capacitor is an adjustable capacitor.

[0015] Further, the notch filter includes a second inductor and a second capacitor; a first end of the second inductor is connected to the radio frequency electrode, and a second end thereof is connected to a first end of the second capacitor; and a second end of the second capacitor is grounded.

[0016] Further, the notch filter includes a fifth inductor, a fourth capacitor and a sixth inductor; a first end of the fifth inductor is connected to the radio frequency electrode, and a second end thereof is connected to a first end of the fourth capacitor; a second end of the fourth capacitor is connected to a first end of the sixth inductor; and a second end of the sixth inductor is grounded.

[0017] Further, the isolation filter module includes a fourth inductor and a third capacitor; a first end of the fourth inductor is connected to the radio frequency electrode, and a second end thereof is connected to a first end of the third capacitor; a second end of the third capacitor is grounded; and a second end of the fourth inductor is connected to the high-voltage direct current source.

[0018] The impedance adjuster comprises the output adjusting circuit of the impedance adjuster, and further comprises a master control module and a driving module, wherein the output end of a VI sensor is connected to the master control module, the master control module is used for inputting a detected detection signal into the master control module, the master control module is used for generating a corresponding control signal according to the detection signal, and the control end of the master control module is connected to the driving module, and the driving module is used for driving the impedance of the adjustable impedance filter to change according to the control signal of the master control module.

[0019] Beneficial effects: The utility model discloses an output adjusting circuit of impedance adjuster, including radio frequency electrode, input filter, and at least two band -pass filters, through the setting of band -pass filter, can adjust the input impedance of different frequency, make the radio frequency signal of different frequency pass through, and prevent radio frequency signal back flow to high voltage direct current source through the setting of isolation filter module and cause the interference of high voltage direct current source, thereby through an output adjusting circuit, provide a variety of different frequency radio frequency signal input for the electrostatic chuck of plasma processing chamber, provide stable access for high voltage direct current source simultaneously, and the use cost is lower, and the volume of single module is smaller. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creating labor.

[0021] Figure 1 It is a whole structure schematic diagram of the utility model;

[0022] Figure 2 It is a whole structure schematic diagram of some embodiments of the utility model;

[0023] Figure 3 It is a circuit schematic diagram of the utility model;

[0024] Figure 4 It is another circuit schematic diagram of the utility model.

[0025] Figure 5 It is an output adjusting circuit schematic diagram of the utility model;

[0026] Figure 6 It is another output adjusting circuit schematic diagram of the utility model;

[0027] Figure 7 It is another output adjusting circuit schematic diagram of the utility model;

[0028] Figure 8Another output adjusting circuit schematic view of the utility model.

[0029] Figure 9 The impedance adjuster structure schematic block diagram of the utility model.

[0030] The sign of reference numeral is explained: 1, adjustable impedance filter;2, wave trap filter;3, isolation filter module;L1, first inductance;L2, second inductance;L3, third inductance;L4, fourth inductance;L5, fifth inductance;C1, first capacitor;C2, second capacitor;C3, third capacitor;C4, fourth capacitor. Specific implementation

[0031] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below in conjunction with the drawings. In the following description, a lot of specific details are set forth in order to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application, therefore the present application is not limited by the specific embodiments disclosed below.

[0032] In the description of the present application, it should be understood that the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can be explicitly or implicitly included at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0033] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and other terms should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated;It can be mechanical connection, or electrical connection;It can be directly connected, or indirectly connected through intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] Example one:

[0035] Reference Figure 1As shown, the embodiment provides an output adjusting circuit of an impedance adjuster, comprising n radio frequency electrodes and an isolation filter module 3 and a band-pass filter module used in pairs, the isolation filter module 3 and the band-pass filter module are the same as the number of the radio frequency electrodes, further comprising m high-voltage direct current sources, n is a positive integer ≤ 2, m is a positive integer ≤ n; the band-pass filter module is connected to the radio frequency electrode; the band-pass filter module comprises at least two band-pass filters, each of the band-pass filters passes different frequency ranges; the isolation filter module 3 is connected between the radio frequency electrode and the high-voltage direct current source, used to isolate the high-voltage direct current source from the frequency signals flowing through at least two band-pass filters.

[0036] Referring to Figure 2 As shown, in some specific embodiments of the embodiment, the band-pass filter comprises an adjustable impedance filter 1 and a notch filter 2, the adjustable impedance filter 1 is connected to the radio frequency electrode interface, used to adjust the input impedance of the first frequency; the notch filter 2 is connected to the radio frequency electrode, used to pass the radio frequency signal of the second frequency; the isolation filter module 3 is connected between the radio frequency electrode and the high-voltage direct current source, used to isolate the high-voltage direct current source from the signals of the first frequency and the second frequency. The radio frequency electrode is marked as RF in the circuit schematic diagram, connected to the electrostatic chuck.

[0037] Referring to Figure 5 As shown, in some embodiments of the embodiment, n = 1, m = 1, the radio frequency electrode is connected to the positive pole of the high-voltage direct current source, and the negative pole of the high-voltage direct current source is grounded. In Figure 5 , the isolation filter module 3 is marked as IF, the band-pass filter module is marked as BPF, the high-voltage direct current source is marked as V1, and the radio frequency electrode is marked as E1.

[0038] Referring to Figure 6 As shown, in some other embodiments of the embodiment, n = 1, m = 1, the radio frequency electrode is connected to the negative pole of the high-voltage direct current source used in pairs, and the positive pole of the high-voltage direct current source is grounded. In Figure 6 , the isolation filter module 3 is marked as IF, the band-pass filter module is marked as BPF, the high-voltage direct current source is marked as V2, and the radio frequency electrode is marked as E2.

[0039] Referring to Figure 7 As shown, in some other embodiments of the embodiment, n = 2, m = 2, the radio frequency electrode is used in pairs with the high-voltage direct current source, the first electrode of the radio frequency electrode is connected to the positive pole of the first high-voltage direct current source used in pairs, and the negative pole of the first high-voltage direct current source is grounded; the second electrode is connected to the negative pole of the second high-voltage direct current source used in pairs, and the positive pole of the second high-voltage direct current source is grounded.Figure 7 In the figure, the first electrode is marked as E3, the isolation filter module 3 connected with the first electrode is marked as IF1, the band-pass filter module is marked as BPF1, and the high-voltage direct-current power supply is marked as V3; the second electrode is marked as E4, the isolation filter module 3 connected with the second electrode is marked as IF2, the band-pass filter module is marked as BPF2, and the high-voltage direct-current power supply is marked as V4.

[0040] Referring to Figure 8 In some embodiments of the present embodiment, n = 2, m = 1, the first electrode of the radio frequency electrode is connected with the positive electrode of the high-voltage direct-current power supply, and the second electrode of the radio frequency electrode is connected with the negative electrode of the direct-current power supply. Figure 8 In the figure, the first electrode is marked as E3, the second electrode is marked as E4, the isolation filter module 3 connected with the first electrode is marked as IF1, the band-pass filter module connected with the first electrode is marked as BPF1, the isolation filter module 3 connected with the second electrode is marked as IF2, the band-pass filter module connected with the second electrode is marked as BPF2, and the high-voltage direct-current power supply is marked as V5.

[0041] As a further improvement of the present embodiment, a VI sensor is further included, and a detection end of the VI sensor is connected between the radio frequency electrode and the adjustable impedance filter 1, the notch filter 2, and the input filter. The VI sensor is marked as VI Sensor in the circuit schematic diagram.

[0042] Specifically, the adjustable impedance filter 1 includes a first inductor L1 and a first capacitor C1; a first end of the first inductor L1 is connected with the radio frequency electrode, and a second end thereof is connected with the first capacitor C1; a second end of the first capacitor C1 is grounded; and the first capacitor C1 is an adjustable capacitor.

[0043] In some embodiments of the present embodiment, referring to Figure 3 In the figure, the notch filter 2 includes a second inductor L2 and a second capacitor C2; a first end of the second inductor L2 is connected with the radio frequency electrode, and a second end thereof is connected with a first end of the second capacitor C2; and a second end of the second capacitor C2 is grounded.

[0044] In some embodiments of the present embodiment, referring to Figure 4 In the figure, the notch filter 2 includes a fourth inductor L4, a fourth capacitor C4, and a fifth inductor L5; a first end of the fourth inductor L4 is connected with the radio frequency electrode, and a second end thereof is connected with a first end of the fourth capacitor C4; a second end of the fourth capacitor C4 is connected with a first end of the fifth inductor L5; and a second end of the fifth inductor L5 is grounded.

[0045] Specifically, the isolation filter module 3 comprises a third inductor L3 and a third capacitor C3; a first end of the third inductor L3 is connected to the radio frequency electrode, a second end of the third inductor L3 is connected to a first end of the third capacitor C3; a second end of the third capacitor C3 is grounded; a second end of the third inductor L3 is connected to a high-voltage direct current source. The high-voltage direct current source is marked as DC in the circuit schematic diagram.

[0046] As a preferred embodiment of the present embodiment, the first frequency is 13.56 MHz and the second frequency is 400 KHz.

[0047] Embodiment two:

[0048] Referring to Figure 9 As shown in the figure, the present embodiment provides an impedance adjuster, which comprises an output adjusting circuit of the above-mentioned impedance adjuster, and further comprises a master control module, a driving module, an output end of a VI sensor is connected to the master control module, for inputting a detected detection signal to the master control module, the master control module is used for generating a corresponding control signal according to the detection signal, a control end of the master control module is connected to the driving module, and the driving module is used for driving to change the impedance of the adjustable impedance filter 1 according to the control signal of the master control module.

[0049] Working principle: In the present embodiment, the main power source connected to the plasma processing chamber works at 13.56 MHz or 400 KHz, and the radio frequency signal is automatically switched to the corresponding branch to ground in the output adjusting circuit at a specific working frequency. When the main power source works at 13.56 MHz, the impedance can be adjusted by adjusting the first capacitor C1, and the current is kept in the preset current range.

[0050] The technical features of the above-mentioned embodiments can be combined arbitrarily, and in order to make the description simple, all possible combinations of the technical features in the above-mentioned embodiments are not described, however, as long as the combination of the technical features does not exist contradictory, it should be considered that it is within the scope of the present application.

[0051] The above-mentioned embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. An output conditioning circuit for an impedance adjuster, characterized by, The application relates to a radio frequency electrode device, which comprises n radio frequency electrodes, isolation filter modules and band-pass filter modules matched with the radio frequency electrodes, the isolation filter modules and the band-pass filter modules are the same in number as the radio frequency electrodes, m high-voltage direct current sources, n is a positive integer less than or equal to 2, and m is a positive integer less than or equal to n. The band-pass filter modules are connected to the radio frequency electrodes. The band-pass filter modules comprise at least two band-pass filters, and each band-pass filter has a different frequency range. The isolation filter modules are connected between the radio frequency electrodes and the high-voltage direct current sources, and are used for isolating the high-voltage direct current sources from frequency signals flowing through the at least two band-pass filters.

2. An output conditioning circuit for an impedance matching network as recited in claim 1, wherein: The band-pass filters comprise adjustable impedance filters and notch filters, the adjustable impedance filters are connected to the radio frequency electrode interfaces and are used for adjusting input impedance of a first frequency, and the notch filters are connected to the radio frequency electrodes and are used for passing radio frequency signals of a second frequency. The isolation filter modules are connected between the radio frequency electrodes and the high-voltage direct current sources, and are used for isolating the high-voltage direct current sources from signals of the first frequency and the second frequency.

3. An output conditioning circuit for an impedance matching network as recited in claim 1, wherein, n=1, m=1, the radio frequency electrode is connected to the positive pole of the high-voltage direct current source, and the negative pole of the high-voltage direct current source is grounded.

4. An output conditioning circuit for an impedance matching network as recited in claim 1, wherein, n=1, m=1, the radio frequency electrode is connected to the negative pole of the high-voltage direct current source matched with the radio frequency electrode, and the positive pole of the high-voltage direct current source is grounded.

5. The output conditioning circuit of an impedance adjuster of claim 1, wherein, n=2, m=2, the radio frequency electrodes are matched with the high-voltage direct current sources, the first electrode of the radio frequency electrode is connected to the positive pole of the first high-voltage direct current source matched with the radio frequency electrode, the negative pole of the first high-voltage direct current source is grounded, the second electrode of the radio frequency electrode is connected to the negative pole of the second high-voltage direct current source matched with the radio frequency electrode, and the positive pole of the second high-voltage direct current source is grounded.

6. An output conditioning circuit for an impedance matching network as recited in claim 1, wherein, n=2, m=1, the first electrode of the radio frequency electrode is connected to the positive pole of the high-voltage direct current source, and the second electrode of the radio frequency electrode is connected to the negative pole of the high-voltage direct current source.

7. An output conditioning circuit for an impedance matching network as recited in claim 2, wherein: The VI sensor is further arranged between the radio frequency electrode and the adjustable impedance filter, the notch filter and the input filter.

8. An output conditioning circuit for an impedance matching network as defined in claim 2, wherein: The adjustable impedance filter comprises a first inductor and a first capacitor, the first end of the first inductor is connected to the radio frequency electrode, the second end of the first inductor is connected to the first capacitor, the second end of the first capacitor is grounded, and the first capacitor is an adjustable capacitor.

9. An output conditioning circuit for an impedance matching network as defined in claim 2, wherein: The notch filter comprises a second inductor and a second capacitor, the first end of the second inductor is connected to the radio frequency electrode, the second end of the second inductor is connected to the first end of the second capacitor, and the second end of the second capacitor is grounded.

10. The output conditioning circuit of an impedance adjuster of claim 2, wherein, The notch filter comprises a fifth inductor, a fourth capacitor and a sixth inductor, the first end of the fifth inductor is connected to the radio frequency electrode, the second end of the fifth inductor is connected to the first end of the fourth capacitor, the second end of the fourth capacitor is connected to the first end of the sixth inductor, and the second end of the sixth inductor is grounded.

11. The output conditioning circuit of an impedance adjuster of claim 1, wherein, The isolation filter module comprises a fourth inductor and a third capacitor, the first end of the fourth inductor is connected to the radio frequency electrode, the second end of the fourth inductor is connected to the first end of the third capacitor, the second end of the third capacitor is grounded, and the second end of the fourth inductor is connected to the high-voltage direct current source.

12. An impedance adjuster comprising an output adjustment circuit of an impedance adjuster as claimed in any one of claims 2 and 7-10, characterized in that, The application also comprises a main control module and a driving module, the output end of the VI sensor is connected to the main control module, for inputting the detected detection signal to the main control module, the main control module is used for generating a corresponding control signal according to the detection signal, the control end of the main control module is connected to the driving module, and the driving module is used for driving the change of the impedance of the adjustable impedance filter according to the control signal of the main control module.

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