Chemical supply device with filtering mechanism

Abstract

The utility model relates to the field of chemicals, in particular to a chemical supply device with a filtering mechanism, which comprises a supply box used for supplying chemicals; and the chemical storage tank is placed in the supply box. According to the chemical supply device with the filtering mechanism, through the arrangement of the filtering box, the filtering assembly, the servo motor, the transmission rod and the beating block, chemicals enter two sets of filtering plates in the filtering box through the feeding pipe, so that the conveyed chemicals are filtered, impurities and particulate matter are prevented from entering the chemical storage tank, and the chemical storage tank is prevented from being damaged. The surfaces of the filter plates are easily blocked when chemicals are conveyed for a long time, a servo motor switch above the filter box is turned on to drive a transmission rod and a beating block to rotate, and the beating block is in contact with the filter plates on the front side and the rear side to beat and shake when rotating, so that impurities on the surfaces of the filter plates fall off; meanwhile, the first springs outside the two sides of the fixing rod above the filter plate can be extruded and rebounded back and forth, and are matched with the beating block to beat all the time, so that the anti-blocking property is enhanced.

Description

Technical Field

[0001] This utility model relates to the field of chemicals, specifically to a chemical supply device with a filtration mechanism. Background Technology

[0002] Chemicals refer to pure substances and mixtures composed of various elements, whether natural or man-made. A chemical supply device is a system used for storing, mixing, distributing and managing chemicals, and is widely used in semiconductor manufacturing, LED production, solar energy manufacturing, MEMS (microelectromechanical systems) manufacturing and other fields.

[0003] Most existing chemical supply devices lack filtration mechanisms during chemical delivery, resulting in impurities and particles remaining in the chemicals as they enter the supply device, affecting subsequent use. While existing devices may have filtration structures, these are simple and prone to clogging, hindering the normal delivery of chemicals to the supply device.

[0004] Therefore, it is necessary to invent a chemical supply device with a filtration mechanism to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a chemical supply device with a filtration mechanism. Chemicals enter the filter box through a feed pipe and are filtered by two sets of filter plates, preventing impurities and particulate matter from entering the chemical storage tank. However, long-term chemical transport can easily cause clogging on the filter plate surface. By turning on the servo motor switch above the filter box, the transmission rod and striking block rotate. When the striking block rotates, it contacts the filter plates on both sides, causing them to shake and knock off impurities. Simultaneously, the first springs on both sides of the fixing rod above the filter plate repeatedly compress and rebound, working in conjunction with the striking block to enhance anti-clogging performance. This addresses the problem mentioned in the background art, where existing chemical supply devices often lack a filtration mechanism, leaving impurities and particles in the supply device, affecting subsequent use. While existing devices may have filtration structures, these are simple and prone to clogging, hindering the normal delivery of chemicals to the supply device.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a chemical supply device with a filtration mechanism, including a supply box for supplying chemicals;

[0007] A chemical storage tank, placed inside a supply box, is used to store chemicals. A drive controller is fixedly installed on the rear side of the supply box. A pressure sensor is fixedly connected to the outside of the chemical storage tank. A feed pipe is opened on the lower left side of the chemical storage tank. A leak detector is fixedly connected to the outside of the feed pipe. A filter box is fixedly connected to the other end of the feed pipe. A discharge port is opened on the lower right side of the chemical storage tank. An audible and visual alarm light is fixedly installed on the upper left side of the supply box.

[0008] A filter assembly, installed inside a filter box, is used to filter chemicals. The filter assembly includes a frame with limiting grooves on its upper two side surfaces. The frame has grooves at its upper and lower ends, and fixing rods are fixedly connected inside each groove. A connecting plate is sleeved on the outside of the fixing rod, and first springs are sleeved on both sides of the outside of the fixing rod. A filter plate is fixedly connected to the inner end of the connecting plate. A servo motor is fixedly installed on the top of the filter box, and a transmission rod is fixedly connected to the output end of the servo motor. A striking block, which is semi-circular, is fixedly connected to the lower end of the transmission rod.

[0009] Preferably, the supply box is hinged to outer doors on both sides, and the interior of the outer doors is sealed.

[0010] Preferably, the input terminals of the pressure sensor and the leak detector are electrically connected to the output terminal of the drive controller, and the input terminal of the drive controller is electrically connected to the output terminal of the audible and visual alarm light.

[0011] Preferably, the fixing rod is slidably connected to the connecting plate, and the fixing rod is evenly distributed within the frame.

[0012] Preferably, the filter box is slidably connected to both sides with insert rods, and a top block is fixedly connected to the outside of the insert rod. A second spring is provided on the rear side of the top block and the outside of the insert rod. The insert rod is movably engaged with the limiting grooves on both sides of the frame.

[0013] Preferably, exhaust fans are fixedly installed on both sides of the upper part of the supply box, and dust covers are threadedly connected to the upper part of the exhaust fans.

[0014] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0015] 1. The filter box, filter components, servo motor, transmission rod, and striking block are designed to not only filter chemicals but also prevent clogging. Chemicals enter the filter box through the feed pipe and are filtered by two sets of filter plates, preventing impurities and particulate matter from entering the chemical storage tank. However, long-term chemical transport can easily cause clogging on the filter plate surface. By turning on the servo motor switch on top of the filter box, the transmission rod and striking block are rotated. When the striking block rotates, it contacts the filter plates on the front and back sides, causing them to shake and knock off impurities. At the same time, the first springs on both sides of the fixing rod on top of the filter plate can be squeezed and rebounded back and forth, which, together with the striking block, enhances the anti-clogging effect.

[0016] 2. By configuring the drive controller, chemical storage tank, pressure sensor, feed pipe, leak detector, and audible and visual alarm lights, the system can promptly detect the internal pressure of the chemical storage tank and any leaks. The external pressure sensor can detect excessive internal pressure, and the external leak detector on the feed pipe can monitor for leaks in real time. When excessive pressure or leakage occurs, the pressure sensor and leak detector will transmit signals to the drive controller, which will then transmit the signals to the audible and visual alarm lights to alert nearby personnel to check the situation promptly and prevent major accidents. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the chemical storage tank structure of this utility model;

[0020] Figure 3 This is a schematic diagram of the filter box structure of this utility model;

[0021] Figure 4 This is a schematic diagram of the filter assembly structure of this utility model;

[0022] Figure 5 This is a schematic diagram of the exhaust fan structure of this utility model;

[0023] Figure 6 For the present utility model Figure 4 Enlarged view of the structure at point A in the middle;

[0024] Figure 7 This is the system control flowchart of this utility model.

[0025] Explanation of reference numerals in the attached figures:

[0026] 1. Supply box; 2. Outer door; 3. Seal; 4. Drive controller; 5. Chemical storage tank; 6. Pressure sensor; 7. Feed pipe; 8. Leak detector; 9. Filter box; 10. Filter assembly; 1001. Frame; 1002. Limiting groove; 1003. Groove; 1004. Fixing rod; 1005. Connecting plate; 1006. First spring; 1007. Filter plate; 11. Insert rod; 12. Top block; 13. Second spring; 14. Servo motor; 15. Transmission rod; 16. Knocking block; 17. Discharge port; 18. Exhaust fan; 19. Dust cover; 20. Audible and visual alarm light. Detailed Implementation

[0027] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0028] This utility model provides, for example Figure 1-7 The chemical supply device shown includes a supply tank 1 for supplying chemicals;

[0029] A chemical storage tank 5 is placed inside the supply box 1 for storing chemicals. A drive controller 4 is fixedly installed on the rear side of the inside of the supply box 1. A pressure sensor 6 is fixedly connected to the outside of the chemical storage tank 5. A feed pipe 7 is opened on the lower left side of the chemical storage tank 5. A leak detector 8 is fixedly connected to the outside of the feed pipe 7. A filter box 9 is fixedly connected to the other end of the feed pipe 7. A discharge port 17 is opened on the lower right side of the chemical storage tank 5. An audible and visual alarm light 20 is fixedly installed on the upper left side of the supply box 1.

[0030] A filter assembly 10, installed inside a filter box 9, is used to filter chemicals. The filter assembly 10 includes a frame 1001. Limiting grooves 1002 are formed on the upper two sides of the frame 1001. Grooves 1003 are formed at the upper and lower ends of the frame 1001. Fixing rods 1004 are fixedly connected inside each groove 1003. Connecting plates 1005 are sleeved on the outside of the fixing rods 1004. First springs 1006 are sleeved on both sides of the outside of the fixing rods 1004. A filter plate 1007 is fixedly connected to the inner end of the connecting plate 1005. A servo motor 14 is fixedly installed above the filter box 9. A transmission rod 15 is fixedly connected to the output end of the servo motor 14. A striking block 16 is fixedly connected to the lower end of the transmission rod 15. The striking block 16 is semi-circular. Chemicals enter the filter box 9 through the feed pipe 7 and are filtered by two sets of filter plates 1007 inside. This prevents impurities and particulate matter from entering the chemical storage tank 5. However, the surface of the filter plates 1007 is prone to clogging due to long-term chemical transport. By turning on the servo motor 14 switch above the filter box 9, the transmission rod 15 and the striking block 16 are driven to rotate. When the striking block 16 rotates, it contacts the filter plates 1007 on both sides and knocks and shakes them, causing impurities on the surface of the filter plates 1007 to fall off. At the same time, the first springs 1006 on both sides of the fixing rod 1004 above the filter plates 1007 can squeeze and rebound back and forth, which, together with the continuous knocking of the striking block 16, enhances the anti-clogging effect.

[0031] like Figure 1 As shown, the supply box 1 is hinged to the outer door 2 on both sides. The outer door 2 has a sealing element 3 pasted inside. The sealing element 3 can achieve the sealing effect and also prevent external dust from entering the supply box 1.

[0032] like Figure 1 , Figure 2 and Figure 7 As shown, the input terminals of pressure sensor 6 and leak detector 8 are electrically connected to the output terminal of drive controller 4. The input terminal of drive controller 4 is electrically connected to the output terminal of audible and visual alarm light 20. The pressure sensor 6 outside the chemical storage tank 5 can detect whether the internal pressure is too high. At the same time, a leak detector 8 is also installed outside the feed pipe 7 to monitor for leaks in real time. When excessive pressure or leakage occurs, pressure sensor 6 and leak detector 8 will transmit signals to drive controller 4, which will then transmit the signals to audible and visual alarm light 20 to alert nearby personnel to check in time and avoid major accidents.

[0033] like Figure 3 , Figure 4 and Figure 6As shown, the fixed rod 1004 is slidably connected to the connecting plate 1005. The fixed rod 1004 is evenly distributed within the frame 1001. When the filter plate 1007 is struck by the striking block 16, it moves within the fixed rod 1004 through the connecting plates 1005 on the upper and lower sides of the filter plate 1007. The fixed rod 1004 is fitted with a first spring 1006 to provide a rebound effect. This back-and-forth movement can prevent clogging on the surface of the filter plate 1007.

[0034] like Figure 3 As shown, insert rods 11 are slidably connected to both sides of the filter box 9. A top block 12 is fixedly connected to the outside of the insert rod 11. A second spring 13 is provided on the rear side of the top block 12 and the outside of the insert rod 11. The insert rod 11 is movably engaged with the limiting grooves 1002 on both sides of the frame 1001. When it is necessary to replace or clean the filter plate 1007, by pulling the insert rods 11 on both sides of the filter box 9 and squeezing the second spring 13, the insert rods 11 are disengaged from the limiting grooves 1002 on both sides of the frame 1001. In this way, the frame 1001 can be pulled away from the filter box 9, which is faster and more convenient than the traditional threaded disassembly method.

[0035] like Figure 1 and Figure 6 As shown, exhaust fans 18 are fixedly installed on both sides of the upper part of the supply box 1. A dust cover 19 is threadedly connected to the upper part of the exhaust fan 18. The exhaust fan 18 can ventilate the air inside the supply box 1 and also has a cooling effect. The dust cover 19 is used to prevent dust from entering the supply box 1.

[0036] The working principle of this utility model is as follows: First, an external power supply is connected. Then, the chemicals are pumped from the feed pipe 7 into the filter box 9 via a delivery pump. Two sets of filter plates 1007 inside the filter box 9 filter impurities and particulate matter from the chemicals. However, during long-term chemical transport, the surface of the filter plates 1007 is prone to clogging. At this time, the servo motor 14 switch on top of the filter box 9 is turned on, driving the transmission rod 15 and the striking block 16 to rotate. The striking block 16 is semi-circular. When the striking block 16 rotates, it contacts the filter plates 1007 on both sides, causing them to be struck and pushed, dislodging impurities from the surface of the filter plates 1007. The fixing rod 1004 on the upper exterior of the filter plates 1007 and the first springs 1006 on both sides can repeatedly squeeze and rebound, working in conjunction with the striking block 16 to prevent clogging. The filtered chemicals then enter the chemical storage tank 5 through the feed pipe 7 for storage. The pressure sensor 6 on the outside of the chemical storage tank 5 can detect whether the internal pressure is too high. At the same time, a leak detector 8 is also installed on the outside of the feed pipe 7 to monitor for leaks in real time. When excessive pressure or leakage occurs, the pressure sensor 6 and the leak detector 8 will transmit signals to the drive controller 4. The drive controller 4 will then transmit the signals to the audible and visual alarm light 20 to alert the surrounding personnel to check in time and avoid major accidents. During storage, turning on the exhaust fan 18 on top of the supply box 1 can ventilate the air inside the supply box 1 and also has a cooling effect. With the dust cover 19, dust is prevented from entering the supply box 1. Finally, when chemicals need to be supplied, the solenoid valve on the outlet 17 is opened to discharge the chemicals from the chemical storage tank 5. In this way, the use of the chemical supply device with the filtration mechanism is completed.

[0037] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A chemical supply device with a filtration mechanism, characterized in that: Includes a supply box (1) for chemical supply; A chemical storage tank (5) is placed inside a supply box (1) for storing chemicals. A drive controller (4) is fixedly installed on the rear side of the inside of the supply box (1). A pressure sensor (6) is fixedly connected to the outside of the chemical storage tank (5). A feed pipe (7) is opened on the lower left side of the chemical storage tank (5). A leak detector (8) is fixedly connected to the outside of the feed pipe (7). A filter box (9) is fixedly connected to the other end of the feed pipe (7). A discharge port (17) is opened on the lower right side of the chemical storage tank (5). An audible and visual alarm light (20) is fixedly installed on the upper left side of the supply box (1). A filter assembly (10) is installed inside a filter box (9) for filtering chemicals. The filter assembly (10) includes a frame (1001). Limiting grooves (1002) are opened on the upper two sides of the frame (1001). Grooves (1003) are opened at the upper and lower ends of the frame (1001). Fixing rods (1004) are fixedly connected inside the grooves (1003). A connecting plate (1005) is sleeved on the outside of the fixing rods (1004). First springs (1006) are sleeved on both sides of the outside of the fixing rods (1004). A filter plate (1007) is fixedly connected to the inner end of the connecting plate (1005). A servo motor (14) is fixedly installed on the top of the filter box (9). A transmission rod (15) is fixedly connected to the output end of the servo motor (14). A striking block (16) is fixedly connected to the lower end of the transmission rod (15). The striking block (16) is semi-circular.

2. A chemical supply device with a filtration mechanism according to claim 1, characterized in that: The supply box (1) is hinged to two outer doors (2), and the inside of the outer doors (2) is sealed with a seal (3).

3. A chemical supply device with a filtration mechanism according to claim 1, characterized in that: The input terminals of the pressure sensor (6) and the leak detector (8) are electrically connected to the output terminal of the drive controller (4), and the input terminal of the drive controller (4) is electrically connected to the output terminal of the audible and visual alarm light (20).

4. A chemical supply device with a filtration mechanism according to claim 1, characterized in that: The fixing rod (1004) is slidably connected to the connecting plate (1005), and the fixing rod (1004) is evenly distributed within the frame (1001).

5. A chemical supply device with a filtration mechanism according to claim 1, characterized in that: The filter box (9) is slidably connected to both sides of the insert rod (11), and a top block (12) is fixedly connected to the outside of the insert rod (11). A second spring (13) is provided on the rear side of the top block (12) and the outside of the insert rod (11). The insert rod (11) is movably engaged with the limiting grooves (1002) on both sides of the frame (1001).

6. A chemical supply device with a filtration mechanism according to claim 1, characterized in that: Exhaust fans (18) are fixedly installed on both sides of the upper part of the supply box (1), and a dust cover (19) is threadedly connected to the upper part of the exhaust fan (18).

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