Double-layer water channel

Abstract

The double-layer water channel comprises a water channel body, the water channel body comprises an upper-layer water channel body and a lower-layer water channel body, the upper-layer water channel body and the lower-layer water channel body are arranged in the water channel body in a layered mode, and the two ends of the upper-layer water channel body and the two ends of the lower-layer water channel body communicate with the two ends of the water channel body in the length direction correspondingly; the double-layer water channel is arranged, the water channel in the water channel body is arranged, flushing fluid can flow in a layered mode, the grinding disc is cleaned, and the flushing efficiency is improved. Specifically, the water channel body is provided with at least two layers of water channels in the length direction, the interior of the water channel body is optimized, the water outlet end of the water channel body can spray multiple cleaning water outlet holes at the same time, cleaning of the grinding disc is efficiently completed, and the water channels of different layers can be connected with water sources of different water pressures; and the grinding disc cleaning efficiency and the cleaning degree are further improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment technology, and more particularly to a double-layer waterway. Background Technology

[0002] In the semiconductor manufacturing industry, wafer surface planarity is crucial for subsequent processes and the performance of the final device. Chemical mechanical polishing (CMP) is a commonly used surface planarization technique in wafer manufacturing, used to remove excess material from the wafer surface to achieve the required surface roughness and thickness uniformity. The LOADCUP, as a key component of CMP equipment, performs important functions such as wafer loading, transfer, and cleaning. Summary of the Invention

[0003] In view of this, this application proposes a double-layer waterway.

[0004] According to one aspect of this application, a double-layered waterway is provided, comprising: a waterway body;

[0005] The waterway body includes an upper waterway and a lower waterway, which are arranged in layers within the waterway body. The two ends of the upper waterway and the lower waterway are respectively connected to the two ends of the length direction of the waterway body, so as to wash the grinding disc separately.

[0006] In one possible implementation, the upper waterway is connected to an upper water outlet at one end of the length direction of the waterway body, and the upper water outlet is a plurality of holes spaced apart along the circumferential direction, surrounding the inner circle of the waterway body.

[0007] The lower waterway is connected to the lower water outlet at one end of the length direction of the waterway body. The lower water outlet is a plurality of holes spaced apart along the circumferential direction and surrounds the outer ring of the waterway body.

[0008] In one possible implementation, the upper waterway is connected to an upper water inlet at the other end of the length direction of the waterway body, and the lower waterway is connected to a lower water inlet at the other end of the length direction of the waterway body. The upper water inlet and the lower water inlet are adjacent to each other and are suitable for connecting a water tank.

[0009] In one possible implementation, the main body of the waterway is a columnar structure.

[0010] In one possible implementation, the upper waterway includes an upper connecting waterway;

[0011] The upper connecting waterway is opened along the axial direction perpendicular to the main body of the waterway, and the sidewalls of the main body of the waterway are sealed.

[0012] There are multiple upper-level connecting waterways, and adjacent upper-level connecting waterways intersect and are connected;

[0013] The upper water outlet and the upper water inlet are opened along the axial direction of the waterway body and are respectively connected to the upper connecting waterway.

[0014] In one possible implementation, the upper connecting waterways are six, including a first upper connecting waterway, a second upper connecting waterway, a third upper connecting waterway, a fourth upper connecting waterway, a fifth upper connecting waterway, and a sixth upper connecting waterway.

[0015] The first upper-level connecting waterway is opened along an axis perpendicular to the main body of the waterway;

[0016] The second upper-level connecting waterway intersects with and is connected to the first upper-level connecting waterway;

[0017] The third upper-level connecting waterway is opened along an axis perpendicular to the main body of the waterway;

[0018] The fourth upper-level connecting waterway intersects and connects with the third upper-level connecting waterway, and is also connected with the first upper-level connecting waterway;

[0019] The fifth upper-level connecting waterway is opened along the axial direction perpendicular to the main body of the waterway and is connected to the upper-level water inlet;

[0020] The sixth upper waterway intersects and connects with the fifth upper connecting waterway, and is connected with the third upper connecting waterway.

[0021] In one possible implementation, the lower waterway includes a lower connecting waterway;

[0022] The lower connecting waterway is opened along the axial direction perpendicular to the main body of the waterway, and the sidewalls of the main body of the waterway are sealed.

[0023] The lower connecting waterway is multiple, and the ends of the multiple lower connecting waterways are connected to form a connected ring.

[0024] The lower water outlet and the lower water inlet are opened along the axial direction of the main body of the waterway and are respectively connected to the lower connecting waterway.

[0025] In one possible implementation, the lower connecting waterways are thirteen, including:

[0026] The first lower connecting waterway is opened along the axial direction perpendicular to the main body of the waterway, and the end of the first lower connecting waterway is connected to the lower water inlet.

[0027] The second lower-level connecting waterway is opened along the axis perpendicular to the main body of the waterway;

[0028] The third lower-level connecting waterway intersects and connects with the first lower-level connecting waterway and the second lower-level connecting waterway, respectively;

[0029] The fourth lower-level connecting waterway connects to the second lower-level connecting waterway at its end;

[0030] The fifth lower-level connecting waterway connects to the second lower-level connecting waterway at its end;

[0031] The sixth lower-level connecting waterway is opened along the axis perpendicular to the main body of the waterway;

[0032] The seventh lower-level connecting waterway intersects with and connects with the sixth lower-level connecting waterway, and the end of the seventh lower-level connecting waterway connects with the end of the second lower-level connecting waterway.

[0033] The eighth lower-level connecting waterway connects to the sixth lower-level connecting waterway at its end.

[0034] The ninth lower-level connecting waterway connects to the sixth lower-level connecting waterway at its end.

[0035] The tenth lower-level connecting waterway is opened along the axis perpendicular to the main body of the waterway, and its end is connected to the first lower-level connecting waterway and the second lower-level connecting waterway;

[0036] The eleventh lower-level connecting waterway intersects with and connects to the tenth lower-level connecting waterway, and its end connects to the sixth lower-level connecting waterway.

[0037] The twelfth lower-level connecting waterway connects to the tenth lower-level connecting waterway at its end.

[0038] The thirteenth lower-level connecting waterway connects to the tenth lower-level connecting waterway at its end.

[0039] In one possible implementation, the waterway body has multiple through mounting holes along the axial direction.

[0040] In one possible implementation, the plurality of mounting holes are symmetrically arranged.

[0041] The beneficial effects of the double-layer water channel in this embodiment are as follows: By setting up a double-layer water channel and arranging the water channels within the main body of the water channel, the rinsing liquid can flow in layers to complete the cleaning of the grinding disc and improve rinsing efficiency. Specifically, the main body of the water channel has at least two layers of water channels along its length. By optimizing the interior of the main body of the water channel, multiple cleaning nozzles can be sprayed simultaneously at the water outlet of the main body of the water channel, efficiently completing the cleaning of the grinding disc. Furthermore, the water channels in different layers can be connected to water sources with different water pressures, further improving the efficiency and cleanliness of cleaning the grinding disc.

[0042] Other features and aspects of this application will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0043] The accompanying drawings, which are included in and form part of this specification, illustrate exemplary embodiments, features, and aspects of this application together with the specification and serve to explain the principles of this application.

[0044] Figure 1 A schematic diagram of the top main structure of the double-layer waterway according to an embodiment of this application is shown;

[0045] Figure 2 The bottom main structure and side sectional view of the double-layer waterway according to an embodiment of this application are shown.

[0046] Figure 3 A cross-sectional schematic diagram of a double-layer waterway according to an embodiment of this application is shown;

[0047] Figure 4 Another cross-sectional schematic diagram of a double-layer waterway according to an embodiment of this application is shown. Detailed Implementation

[0048] Various exemplary embodiments, features, and aspects of this application will now be described in detail with reference to the accompanying drawings. The same reference numerals in the drawings denote elements that have the same or similar functions. Although various aspects of the embodiments are shown in the drawings, they are not necessarily drawn to scale unless specifically indicated otherwise.

[0049] It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the present invention or simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0050] Furthermore, the terms "upper layer" and "lower layer" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "upper layer" or "lower layer" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0051] The term “exemplary” as used herein means “serving as an example, embodiment, or illustration.” Any embodiment illustrated herein as “exemplary” is not necessarily to be construed as superior to or better than other embodiments.

[0052] Furthermore, to better illustrate this application, numerous specific details are provided in the following detailed embodiments. Those skilled in the art should understand that this application can be implemented without certain specific details. In some instances, methods, means, components, and circuits well-known to those skilled in the art have not been described in detail in order to highlight the main points of this application.

[0053] like Figure 1 As shown, the double-layer water channel of this application embodiment includes: a water channel body 220, which includes an upper water channel and a lower water channel. The upper water channel and the lower water channel are opened in layers within the water channel body 220, and the two ends of the upper water channel and the lower water channel are respectively connected to the two ends of the length direction of the water channel body 220, so as to wash the grinding disc respectively.

[0054] In this embodiment, by setting up a double-layer waterway system, the waterways within the main waterway body 220 are arranged to allow the rinsing liquid to flow in layers, thus cleaning the grinding disc and improving rinsing efficiency. Specifically, the main waterway body 220 has at least two layers of waterways along its length. Optimizing the interior of the main waterway body 220 allows multiple cleaning nozzles to be sprayed simultaneously from the outlet end, efficiently cleaning the grinding disc. Furthermore, different layers of waterways can be connected to water sources with different pressures, further improving the efficiency and cleanliness of cleaning the grinding disc.

[0055] The water channel body 220 includes an upper water channel and a lower water channel. Each water channel is designed with water inlets, and the impurities ground off by the CMP equipment are rinsed through 12 water outlets on the outer ring and 9 water outlets on the inner ring, which are distributed on the large plate. Specifically, both the upper and lower water channels are equipped with water inlets. The washing solution enters the upper and lower water channels through the water inlets, flows in the internal channels, and is then evenly sprayed onto the wafer surface through the water outlets on the outer and inner rings to achieve efficient rinsing.

[0056] In one specific embodiment, the upper water channel is connected to an upper water outlet 120 at one end along the length of the water channel body 220. Multiple upper water outlets 120 are spaced apart along the circumferential direction and surround the inner ring of the water channel body 220. Similarly, the lower water channel is connected to a lower water outlet 220 at one end along the length of the water channel body 220. Multiple lower water outlets 220 are spaced apart along the circumferential direction and surround the outer ring of the water channel body 220. Specifically, to more effectively rinse the grinding disc, the upper water channel has multiple circumferentially spaced upper water outlets 120 at one end of the water channel body 220, which surround the inner ring of the water channel body 220. Likewise, the lower water channel also has multiple circumferentially spaced lower water outlets 220 at one end of the water channel body 220, but these are located on the outer ring of the water channel body 220. This not only increases the rinsing coverage but also enhances the uniformity of rinsing the grinding disc.

[0057] In one specific embodiment, the upper water channel is connected to the upper water inlet 110 at the other end of the length direction of the water channel body 220, and the lower water channel is connected to the lower water inlet 210 at the other end of the length direction of the water channel body 220. The upper water inlet 110 and the lower water inlet 210 are adjacent to each other and are suitable for connecting to a water tank. The water channel body 220 connects to a water pump and a water tank through the water inlet to pump the cleaning fluid and then clean the grinding disc.

[0058] In this specific embodiment, the waterway body 220 with a double-layer waterway can pump different cleaning liquids or clean water to clean the same area of ​​the grinding disc.

[0059] In one specific embodiment, the main body 220 of the waterway is a columnar structure, and the two ends in the length direction are convenient for opening water inlet holes and water outlet holes.

[0060] In one specific embodiment, the upper waterway includes upper connecting waterways that are axially oriented along the vertical waterway body 220. The sidewalls of the waterway body 220 are sealed. There are multiple upper connecting waterways, and adjacent upper connecting waterways intersect and connect. Upper water outlet 120 and upper water inlet 110 are axially oriented along the waterway body 220 and connect to the upper connecting waterways respectively. The upper waterway internally contains multiple upper connecting waterways, which are axially oriented along the vertical waterway body 220, and the sidewalls of the waterway body 220 are sealed to ensure that the cleaning water does not leak. These upper connecting waterways are arranged in an intersecting and interconnected manner, thereby improving the flow efficiency and coverage of the cleaning water.

[0061] Furthermore, in this specific embodiment, there are six upper-level connecting waterways, including a first upper-level connecting waterway 141, a second upper-level connecting waterway 142, a third upper-level connecting waterway 143, a fourth upper-level connecting waterway 144, a fifth upper-level connecting waterway 145, and a sixth upper-level connecting waterway 146. Specifically, the first upper-level connecting waterway 141 is opened along the axial direction of the vertical waterway body 220; the second upper-level connecting waterway 142 intersects with and connects to the first upper-level connecting waterway 141; the third upper-level connecting waterway 143 is opened along the axial direction of the vertical waterway body 220; the fourth upper-level connecting waterway 144 intersects with and connects to the third upper-level connecting waterway 143, and is also connected to the first upper-level connecting waterway 141; the fifth upper-level connecting waterway 145 is opened along the axial direction of the vertical waterway body 220 and is connected to the upper-level water inlet; the sixth upper-level connecting waterway intersects with and connects to the fifth upper-level connecting waterway 145, and is also connected to the third upper-level connecting waterway 143. The upper connecting water channels are opened along the axial direction of the vertical water channel body 220, and the side walls of the water channel body 220 are sealed to ensure that the cleaning water does not leak. These upper connecting water channels are arranged in a cross-connected manner, thereby improving the flow efficiency and coverage of the cleaning water. Taking six upper connecting water channels as an example, they form a complex cleaning water flow network through the cross-connected design.

[0062] There are six upper-level water inlets 110, including a first upper-level water inlet 110, a second upper-level water inlet 110, a third upper-level water inlet 110, a fourth upper-level water inlet 110, a fifth upper-level water inlet 110, and a sixth upper-level water inlet 110. The first upper-level water inlet 110 is located on the first upper-level connecting waterway 141, the second and third upper-level water inlets 110 are located on the second upper-level connecting waterway 142, and the fourth upper-level water inlet 110 is located on the first upper-level connecting waterway 142. The connection position of the upper connecting waterway 141 and the fourth upper connecting waterway 144; the fifth upper water inlet 110 is opened on the fourth upper connecting waterway 144; the sixth upper water inlet 110 is opened on the third upper connecting waterway 143; the seventh upper water inlet 110 is opened at the connection position of the third connecting waterway and the sixth upper connecting waterway 146; the eighth upper water inlet 110 is opened on the fifth connecting waterway; and the ninth upper water inlet 110 is opened at the end of the fifth connecting waterway.

[0063] In one specific embodiment, the lower waterway includes lower connecting waterways, which are axially oriented along the vertical waterway body 220. The sidewalls of the waterway body 220 are sealed. There are multiple lower connecting waterways, and their ends are connected to form a connected annulus. Lower water outlets 220 and lower water inlets 210 are axially oriented along the waterway body 220 and communicate with the lower connecting waterways. The lower waterway also includes multiple lower connecting waterways, which are also axially oriented along the vertical waterway body 220. The sidewalls of the waterway body 220 are sealed. Unlike the upper waterway, the ends of these multiple lower connecting waterways are connected to form a connected annulus.

[0064] Furthermore, in this specific embodiment, there are thirteen lower-level connecting waterways, including: a first lower-level connecting waterway 131 opened along the axial direction of the vertical waterway body 220, and the end of the first lower-level connecting waterway 131 is connected to the lower-level water inlet 210; a second lower-level connecting waterway 132 opened along the axial direction of the vertical waterway body 220; a third lower-level connecting waterway 133 intersects and connects with the first lower-level connecting waterway 131 and the second lower-level connecting waterway 132 respectively; the end of the fourth lower-level connecting waterway 134 is connected to the second lower-level connecting waterway 132; the end of the fifth lower-level connecting waterway 135 is connected to the second lower-level connecting waterway 132; a sixth lower-level connecting waterway 136 opened along the axial direction of the vertical waterway body 220; and a seventh lower-level connecting waterway 137 is connected to the sixth lower-level connecting waterway 131. The lower-level connecting waterway 137 and 138 intersect and connect, with the end of the seventh lower-level connecting waterway 137 connected to the end of the second lower-level connecting waterway 132. The end of the eighth lower-level connecting waterway 138 connects to the sixth lower-level connecting waterway. The end of the ninth lower-level connecting waterway 139 connects to the sixth lower-level connecting waterway. The tenth lower-level connecting waterway 1310 is opened along the axial direction of the vertical waterway body 220, and its end connects to the first lower-level connecting waterway 131 and the second lower-level connecting waterway 132. The eleventh lower-level connecting waterway 1311 intersects and connects to the tenth lower-level connecting waterway 1310, and its end connects to the sixth lower-level connecting waterway 136. The end of the twelfth lower-level connecting waterway 1312 connects to the tenth lower-level connecting waterway 1310. The end of the thirteenth lower-level connecting waterway 1313 connects to the tenth lower-level connecting waterway 1310. The twelve lower-level water outlets 220 are arranged in a ring on the multiple lower-level connecting waterways, distributed on the outer ring of the waterway body 220.

[0065] In one specific embodiment, the waterway body 220 has multiple through mounting holes along the axial direction to facilitate the installation and fixation of the double-layer waterway. The waterway body 220 also has multiple through mounting holes along the axial direction to facilitate connection with the grinding disc or other equipment, thereby enhancing the stability and reliability of the structure.

[0066] Furthermore, in this specific embodiment, multiple mounting holes are symmetrically arranged, which facilitates installation and disassembly and also helps to improve the overall performance of the double-layer waterway structure.

[0067] The various embodiments of this application have been described above. These descriptions are exemplary and not exhaustive, nor are they limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principles, practical application, or improvement of the technology in the market, or to enable others skilled in the art to understand the embodiments disclosed herein.

Claims

1. A double-layer waterway, characterized in that, include: main body of waterway; The waterway body includes an upper waterway and a lower waterway, which are arranged in layers within the waterway body. The two ends of the upper waterway and the lower waterway are respectively connected to the two ends of the length direction of the waterway body, enabling them to rinse the grinding disc separately.

2. The double-layer waterway according to claim 1, characterized in that, The upper waterway is connected to the upper water outlet at one end of the length direction of the waterway body. The upper water outlet is a plurality of holes spaced apart along the circumferential direction and surrounds the inner circle of the waterway body. The lower waterway is connected to the lower water outlet at one end of the length direction of the waterway body. The lower water outlet is a plurality of holes spaced apart along the circumferential direction and surrounds the outer ring of the waterway body.

3. The double-layer waterway according to claim 2, characterized in that, The upper waterway is connected to the upper water inlet at the other end of the length direction of the waterway body, and the lower waterway is connected to the lower water inlet at the other end of the length direction of the waterway body. The upper water inlet and the lower water inlet are adjacent to each other and are suitable for connecting a water tank.

4. The double-layer waterway according to claim 3, characterized in that, The main body of the waterway is a columnar structure.

5. The double-layer waterway according to claim 4, characterized in that, The upper waterway includes an upper connecting waterway; The upper connecting waterway is opened along the axial direction perpendicular to the main body of the waterway, and the sidewalls of the main body of the waterway are sealed. There are multiple upper-level connecting waterways, and adjacent upper-level connecting waterways intersect and are connected; The upper water outlet and the upper water inlet are opened along the axial direction of the waterway body and are respectively connected to the upper connecting waterway.

6. The double-layer waterway according to claim 5, characterized in that, The upper connecting waterway consists of six channels, including the first upper connecting waterway, the second upper connecting waterway, the third upper connecting waterway, the fourth upper connecting waterway, the fifth upper connecting waterway, and the sixth upper connecting waterway. The first upper-level connecting waterway is opened along an axis perpendicular to the main body of the waterway; The second upper-level connecting waterway intersects with and is connected to the first upper-level connecting waterway; The third upper-level connecting waterway is opened along an axis perpendicular to the main body of the waterway; The fourth upper-level connecting waterway intersects and connects with the third upper-level connecting waterway, and is also connected with the first upper-level connecting waterway; The fifth upper-level connecting waterway is opened along an axis perpendicular to the main body of the waterway; The sixth upper-level connecting waterway intersects and connects with the fifth upper-level connecting waterway, and is connected with the third upper-level connecting waterway.

7. The double-layer waterway according to claim 4, characterized in that, The lower waterway includes a lower connecting waterway; The lower connecting waterway is opened along the axial direction perpendicular to the main body of the waterway, and the sidewalls of the main body of the waterway are sealed. The lower connecting waterway is multiple, and the ends of the multiple lower connecting waterways are connected to form a connected ring. The lower water outlet and the lower water inlet are opened along the axial direction of the main body of the waterway and are respectively connected to the lower connecting waterway.

8. The double-layer waterway according to claim 7, characterized in that, The lower-level connecting waterways consist of thirteen channels, including: The first lower connecting waterway is opened along the axial direction perpendicular to the main body of the waterway, and the end of the first lower connecting waterway is connected to the lower water inlet. The second lower-level connecting waterway is opened along the axis perpendicular to the main body of the waterway; The third lower-level connecting waterway intersects and connects with the first lower-level connecting waterway and the second lower-level connecting waterway, respectively; The fourth lower-level connecting waterway connects to the second lower-level connecting waterway at its end; The fifth lower-level connecting waterway connects to the second lower-level connecting waterway at its end; The sixth lower-level connecting waterway is opened along the axis perpendicular to the main body of the waterway; The seventh lower-level connecting waterway intersects with and connects with the sixth lower-level connecting waterway, and the end of the seventh lower-level connecting waterway connects with the end of the second lower-level connecting waterway. The eighth lower-level connecting waterway connects to the sixth lower-level connecting waterway at its end. The ninth lower-level connecting waterway connects to the sixth lower-level connecting waterway at its end. The tenth lower-level connecting waterway is opened along the axis perpendicular to the main body of the waterway, and its end is connected to the first lower-level connecting waterway and the second lower-level connecting waterway; The eleventh lower-level connecting waterway intersects with and connects to the tenth lower-level connecting waterway, and its end connects to the sixth lower-level connecting waterway. The twelfth lower-level connecting waterway connects to the tenth lower-level connecting waterway at its end. The thirteenth lower-level connecting waterway connects to the tenth lower-level connecting waterway at its end.

9. The double-layer waterway according to claim 1, characterized in that, The main body of the waterway has multiple through mounting holes along the axial direction.

10. The double-layer waterway according to claim 9, characterized in that, The mounting holes are arranged symmetrically.

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