Air knife splitting mechanism

Abstract

The utility model discloses an air knife splitting mechanism which comprises a machine frame, a working table is arranged on the machine frame, a pair of clamping pieces is arranged above the working table, and an adjusting assembly enabling the pair of clamping pieces to move oppositely is arranged on the working table. One end of the clamping piece extends to the outside of the workbench to form a discharging area, and a positioning assembly for positioning a product on the clamping piece is arranged on the clamping piece or the rack; an image assembly for conducting visual positioning on products in the discharging area is arranged on the machine frame, a movable air knife assembly in linkage with the image assembly is arranged below the discharging area, and an air knife capable of conducting splitting on the products is arranged on the movable air knife assembly. Through cooperative use of the adjusting assembly and the positioning assembly, wafer products of different sizes can be adapted and fixed on the clamping piece, visual positioning is carried out on the product position by means of the image assembly, and the air knife assembly is moved to carry out air knife splitting operation on the product according to visual positioning information, so that wafer splitting can be efficiently and stably carried out.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology and relates to a wind knife slicing mechanism. Background Technology

[0002] Wafer dicing is a critical step in semiconductor manufacturing, and the hidden dicing technique is widely used due to its specific advantages. However, the subsequent dicing process after hidden dicing faces many challenges. Currently, the wafer after hidden dicing needs to undergo multiple dicing processes to complete separation, which is not only cumbersome but also time-consuming, severely impacting production efficiency.

[0003] Meanwhile, manual dicing is highly unstable. Due to differences in operator skills and techniques, manual dicing can easily lead to quality problems such as wafer chipping and twinning, which can adversely affect subsequent processing and product performance.

[0004] In addition, while mechanical dicing can improve dicing efficiency, it has strict requirements on wafer size, which limits the applicability of mechanical dicing technology.

[0005] Therefore, it is necessary to improve existing technologies to overcome their shortcomings. Utility Model Content

[0006] The purpose of this invention is to provide a wind knife dicing mechanism that can perform wafer dicing efficiently and stably.

[0007] The objective of this utility model is achieved through the following technical solution:

[0008] A pneumatic knife slicing mechanism includes a frame, a worktable mounted on the frame, a pair of clamping members mounted above the worktable, and an adjustment component mounted on the worktable to move the pair of clamping members toward each other. One end of each clamping member extends outside the worktable to form a feeding area. A positioning component is mounted on the clamping member or the frame to position the product on the clamping member. An imaging component is mounted on the frame to visually position the product in the feeding area. A movable pneumatic knife assembly linked to the imaging component is mounted below the feeding area. The movable pneumatic knife assembly has pneumatic knives capable of slicing the product.

[0009] As a further improvement of one embodiment of the present invention, the clamping member has an "L" shaped structure, and the overlapping part of the clamping member that contacts the product is distributed horizontally.

[0010] As a further improvement of one embodiment of the present invention, the adjusting component includes a double-headed cylinder distributed along the X-axis direction, the two ends of the double-headed cylinder being fixedly connected to clamping members on both sides through receiving plates; the worktable is provided with a plurality of linear slide rails distributed along the X-axis direction, and the clamping members are slidably connected to the linear slide rails through sliders.

[0011] As a further improvement of one embodiment of the present invention, the double-headed cylinder is a double-headed double-rod cylinder, and the number of linear slide rails is four, which are symmetrically distributed on both sides of the double-headed cylinder in pairs.

[0012] As a further improvement of one embodiment of the present invention, the positioning component includes a positioning cylinder and a pressure plate. The piston end of the positioning cylinder is fixedly connected to the pressure plate through a connecting plate. The pressure plate is used to press against the upper surface of the product.

[0013] As a further improvement of one embodiment of the present invention, an elastic washer is provided on the lower end surface of the pressure plate.

[0014] As a further improvement of one embodiment of the present invention, the imaging component is electrically connected to the controller and includes a first lead screw module distributed along the Y-axis. The slider of the first lead screw module is connected to a second lead screw module. The second lead screw module is distributed along the X-axis and a camera bracket is provided on its slider. A vertically distributed CCD camera is provided on the camera bracket, and the CCD camera faces the feeding area.

[0015] As a further improvement of one embodiment of the present invention, the movable air knife assembly is electrically connected to the controller and includes a third lead screw module distributed along the Y-axis. An air knife support is provided on the slider of the third lead screw module, and an air knife is provided on the air knife support.

[0016] The above technical solution has the following advantages: by using the adjustment component and the positioning component together, it can adapt to wafer products of different sizes and fix them on the clamping component. The image component is used to visually position the product. The moving air knife component performs air knife dicing operation on the product according to the visual positioning information, thereby enabling efficient and stable wafer dicing. Attached Figure Description

[0017] To more clearly illustrate the embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0018] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0019] Figure 1 A schematic diagram of the first state structure provided by this utility model.

[0020] Figure 2 This is a schematic diagram of the second state structure provided by the present invention.

[0021] In the picture:

[0022] 1. Workbench;

[0023] 2. Clamping components;

[0024] 3. Adjustment components;

[0025] 31. Double-ended cylinder;

[0026] 32. Receiving plate;

[0027] 33. Linear guide rail;

[0028] 4. Products;

[0029] 5. Positioning components;

[0030] 51. Positioning cylinder;

[0031] 52. Pressure plate components;

[0032] 53. Connecting plate;

[0033] 6. Imaging components;

[0034] 61. First lead screw module;

[0035] 62. Second lead screw module;

[0036] 63. Camera tripod;

[0037] 64. CCD camera;

[0038] 7. Mobile air knife assembly;

[0039] 71. Wind blade;

[0040] 72. Third lead screw module;

[0041] 73. Air knife support. Detailed Implementation

[0042] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0043] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0044] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model. Example

[0045] See Figures 1-2 As shown, a pneumatic blade flaking mechanism includes a frame with a worktable 1 securely mounted on it. A pair of clamping members 2 are positioned above the worktable 1. These clamping members 2 move towards each other via an adjustment assembly 3 on the worktable 1 to accommodate products of different sizes. One end of each clamping member 2 extends beyond the worktable 1, forming a feeding area for placing a product 4. To ensure stable positioning of the product 4 on the clamping members 2, a positioning assembly 5 is mounted on the clamping members 2 or the frame. Furthermore, an imaging assembly 6 is provided on the frame for precise visual positioning of the product 4 in the feeding area. Linked to the imaging assembly 6 is a moving pneumatic blade assembly 7, located below the feeding area. The pneumatic blade 71 mounted on this assembly enables efficient flaking of the product 4.

[0046] In this embodiment, the clamping member 2 is designed as an "L"-shaped structure, with one part fixed to the worktable 1 and the other part extending out to form an overlapping portion. This overlapping portion is distributed horizontally to ensure that the contact surface with the product 4 is stable and uniform, which is beneficial to the stable clamping of the product.

[0047] In this embodiment, the positioning component 5 consists of a positioning cylinder 51 and a pressure plate 52. The piston end of the positioning cylinder 51 is fixedly connected to the pressure plate 52 via a connecting plate 53. The design of the pressure plate 52 allows it to be tightly pressed against the upper surface of the product 4, ensuring the stability of the product during processing.

[0048] Furthermore, an elastic washer is provided on the lower end face of the pressure plate 52. This washer is used to increase the contact flexibility between the pressure plate and the product 4 and prevent damage to the product during the pressing process.

[0049] In this embodiment, the adjustment component 3 mainly includes a double-headed cylinder 31 arranged along the X-axis. Both ends of the cylinder are fixedly connected to the clamping members 2 on both sides via receiving plates 32. To ensure the stability and accuracy of the clamping members 2 during movement, the worktable 1 is provided with several linear slide rails 33 extending along the X-axis. The clamping members 2 are slidably connected to these linear slide rails 33 via sliders, ensuring smooth movement under the drive of the double-headed cylinder 31.

[0050] Furthermore, the double-headed cylinder 31 specifically adopts a double-headed, double-rod cylinder structure to ensure synchronous and stable output at both ends. To enhance the support and guiding effect of the clamping component 2 during movement, the number of linear slide rails 33 is set to four, and they are symmetrically distributed in pairs on both sides of the double-headed cylinder 31. This layout ensures the smooth sliding of the clamping component 2 in the X-axis direction.

[0051] In this embodiment, the imaging component 6 is electrically connected to the controller to receive control signals and perform corresponding actions. The imaging component mainly includes a first lead screw module 61 distributed along the Y-axis. A second lead screw module 62 is further connected to the slider of the first lead screw module 61, enabling two-dimensional movement adjustment. The second lead screw module 62 is distributed along the X-axis, and a camera bracket 63 is mounted on its slider. A vertically distributed CCD camera 64 is fixed on the camera bracket 63, facing the feeding area, for capturing image information of the products within the feeding area.

[0052] The movable air knife assembly 7 is electrically connected to the controller to achieve precise control and coordination. This assembly mainly includes a third lead screw module 72 distributed along the Y-axis, which is responsible for driving the movement of the air knife 71 in the Y-axis direction. An air knife bracket 73 is securely mounted on the slider of the third lead screw module 72, and the air knife bracket 73 is used to support and fix the air knife 71.

[0053] In use, the mobile air knife assembly 7 accurately performs air knife splitting operation on the product based on the positioning information provided by the vision system.

[0054] The air knife dicing mechanism proposed in this invention is an indispensable part of the entire wafer processing equipment. Its power supply unit, air supply unit, and control unit are all provided uniformly by the entire machine, ensuring the coordination and consistency of the entire system. This air knife dicing mechanism can flexibly change the position of the clamping member 2 by adjusting the adjustment component 3, and with the stable pressing of the positioning component 5, wafer products of different sizes can be firmly fixed on the clamping member 2. Furthermore, the use of the imaging component 6 achieves precise visual positioning of the product, providing a reliable basis for subsequent dicing operations. The moving air knife component 7 then performs air knife dicing operations on the product quickly and accurately based on the visual positioning information. The entire dicing process is efficient and stable, greatly improving the efficiency and quality of wafer processing.

[0055] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0056] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0057] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0058] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A wind knife slicing mechanism, characterized in that: The device includes a frame, on which a worktable is mounted. A pair of clamping members are mounted above the worktable, and an adjustment component is mounted on the worktable to move the pair of clamping members toward each other. One end of each clamping member extends outside the worktable to form a feeding area. A positioning component is mounted on the clamping member or the frame to position the product on the clamping member. An imaging component is mounted on the frame to visually position the product in the feeding area. A movable air knife assembly linked to the imaging component is mounted below the feeding area. The movable air knife assembly has an air knife capable of slicing the product.

2. The air knife slicing mechanism according to claim 1, characterized in that: The clamping member has an "L" shaped structure, and the overlapping part of the clamping member that contacts the product is distributed horizontally.

3. The air knife slicing mechanism according to claim 1, characterized in that: The adjustment assembly includes a double-headed cylinder distributed along the X-axis, with both ends of the double-headed cylinder being fixedly connected to clamping members on both sides via receiving plates; the worktable is provided with several linear slide rails distributed along the X-axis, and the clamping members are slidably connected to the linear slide rails via sliders.

4. The air knife slicing mechanism according to claim 3, characterized in that: The double-headed cylinder is a double-headed double-rod cylinder, and the number of linear slide rails is four, which are symmetrically distributed in pairs on both sides of the double-headed cylinder.

5. The air knife slicing mechanism according to claim 1, characterized in that: The positioning assembly includes a positioning cylinder and a pressure plate. The piston end of the positioning cylinder is fixedly connected to the pressure plate via a connecting plate. The pressure plate is used to press against the upper surface of the product.

6. The air knife slicing mechanism according to claim 5, characterized in that: An elastic washer is provided on the lower end face of the pressure plate.

7. The air knife slicing mechanism according to claim 1, characterized in that: The imaging component is electrically connected to the controller and includes a first lead screw module distributed along the Y-axis. A second lead screw module is connected to the slider of the first lead screw module. The second lead screw module is distributed along the X-axis and has a camera bracket on its slider. A vertically distributed CCD camera is mounted on the camera bracket, and the CCD camera faces the feeding area.

8. The air knife slicing mechanism according to claim 6, characterized in that: The movable air knife assembly is electrically connected to the controller and includes a third lead screw module distributed along the Y-axis. An air knife support is provided on the slider of the third lead screw module, and an air knife is provided on the air knife support.

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