Atomizer

Abstract

An atomizer is used for being connected with a storage tank of grinding fluid and comprises a cavity, a spray head, an atomizing head and a water collecting head. The cavity is provided with an upper convex wall part and a lower convex wall part, a ring part is arranged inside the upper convex wall part, the ring part is provided with a joint hole and at least two through holes, the through holes penetrate through the ring part to enable the upper convex wall part to be communicated with the lower convex wall part, the cavity is provided with an air inlet hole and a water inlet hole, and the air inlet hole and the water inlet hole are connected with an air inlet connector and a water inlet connector. The spray head is assembled in the joint hole and is provided with at least two spray holes and an injection hole communicated with the spray holes; and the atomizing head is assembled on the upper convex wall part. And the water collecting head is assembled on the lower convex wall part. After external air and water are injected into the air inlet connector and the water inlet connector, atomized water vapor is generated in the atomizing head through the spray head and is sent to the storage tank, so that a specific humidity is kept in the storage tank.

Description

Technical Field

[0001] This application relates to an atomizer, and more particularly to an atomizer for connection to a reservoir of grinding fluid, so as to maintain a specific humidity inside the reservoir. Background Technology

[0002] Modern slurry supply systems are commonly used in panel manufacturing, wafer recycling, and semiconductor manufacturing. Slurries are more than 80% water, with the remainder being abrasive particles.

[0003] During wafer fabrication, the slurry supply system delivers slurry to the Chemical-Mechanical Polishing (CMP) machine to thin or mirror-finish the wafer. During slurry use, pure water is continuously injected into the slurry supply system's reservoir to mix with the slurry. The slurry's moisture content easily decreases during operation or stagnation. Combined with the humidifier and exhaust pipes installed in the reservoir, moisture can be easily drawn out, preventing the slurry's humidity from maintaining above 95%. This causes water stains or droplets forming on the reservoir's inner wall to condense into crystals, which then fall into the slurry. If this slurry containing crystals is then extracted for wafer polishing, it can easily damage the wafer surface.

[0004] Therefore, how to prevent the humidity of the inner wall of the storage tank from decreasing and from condensing into crystals, so as to maintain the humidity of the grinding fluid at more than 95%, is the main issue of this application. Utility Model Content

[0005] Therefore, the main purpose of this application is to solve the shortcomings of the traditional method. This application has an atomizer connected to the storage tank, which generates atomized water vapor and delivers it to the storage tank to maintain a specific humidity, so that no crystals will form on the inner wall of the storage tank and the surface of the wafer will not be damaged during wafer grinding.

[0006] To achieve the above objectives, this application provides an atomizer connected via a pipeline to a storage tank for holding grinding fluid, comprising: a cavity, a nozzle, an atomizing head, and a water collecting head. The cavity has an upper protruding wall and a lower protruding wall. The upper protruding wall has an annular portion inside, with a connecting hole and at least two through holes penetrating the annular portion, allowing the upper and lower protruding walls to communicate. The cavity has an air inlet and a water inlet, which are respectively connected to an air inlet connector and a water inlet connector. The nozzle is connected to the connecting hole and has at least two spray holes and an injection hole communicating with the spray holes. The atomizing head is connected to the upper protruding wall. The water collecting head is connected to the lower protruding wall. The system injects external air and water through the air inlet and water inlet connectors, and then atomizes the water vapor in the atomizing head via the nozzle and sends it to the storage tank, thereby maintaining a specific humidity level inside the storage tank.

[0007] In one embodiment of this application, the outer surfaces of the upper protrusion and the lower protrusion each have an external threaded surface, which is used to engage the atomizing head and the water collecting head.

[0008] In one embodiment of this application, the inner wall of the mating hole has an internal thread surface, and the internal thread surface is used to assemble the nozzle.

[0009] In one embodiment of this application, the air inlet connector and the water inlet connector each have a channel that communicates with the connecting hole and are respectively connected to the external pipeline through the two channels of the air inlet connector and the water inlet connector.

[0010] In one embodiment of this application, the nozzle has a hemispherical head with the nozzle holes, and a connecting portion extends below the head. The connecting portion has an injection hole inside and an external threaded surface on its outer surface that connects to the internal threaded surface of the connecting hole.

[0011] In one embodiment of this application, the atomizing head includes a barrel-shaped or columnar atomizing chamber, a baffle plate, an airtight element, and an atomizing connector. One end of the atomizing chamber has an open opening, and the other end of the atomizing chamber has a closed surface with an interface for connecting the atomizing connector.

[0012] In one embodiment of this application, the spoiler is disposed inside the atomizing chamber, the spoiler has at least two screening holes, the airtight element is disposed inside the atomizing chamber and located below the spoiler, the inner wall of the opening of the atomizing chamber has an internal thread surface, the internal thread surface is connected to the external thread surface of the upper protrusion.

[0013] In one embodiment of this application, the water collecting head includes a water collecting chamber in the shape of a barrel or column and a leak-proof element.

[0014] In one embodiment of this application, one end of the water collection chamber has an open opening, the inner wall of the opening has an internal thread surface, the other end of the water collection chamber has a closed surface, the closed surface is connected to a pipe, the pipe is connected to the external pipeline, and the leak-proof element is disposed inside the water collection chamber, with the internal thread surface of the opening connected to the external thread surface of the lower protrusion.

[0015] In one embodiment of this application, the airtight element and the leak-proof element are rubber gaskets.

[0016] Compared with the existing technology, this application connects an atomizer to the storage tank, and the atomizer generates atomized water vapor which is delivered to the storage tank to maintain a specific humidity, so that no crystals will form on the inner wall of the storage tank, and the surface of the wafer will not be damaged during the grinding of the wafer. Attached Figure Description

[0017] The above and other objects, features, and advantages of this utility model will become clearer through the detailed description of the preferred embodiments shown in the accompanying drawings. The same reference numerals indicate the same parts throughout the drawings, and the drawings are not intentionally drawn to scale with actual dimensions; the focus is on illustrating the gist of this utility model.

[0018] Figure 1 This is a three-dimensional schematic diagram of the atomizer appearance of this application;

[0019] Figure 2 for Figure 1 A schematic diagram of the atomizer disassembled;

[0020] Figure 3 for Figure 2 Another perspective of the atomizer's exploded view;

[0021] Figure 4 This is a schematic side sectional view of the atomizer in this application;

[0022] Figure 5 This is a schematic diagram of the atomizer and grinding fluid cylinder assembly of this application.

[0023] Figure label:

[0024] 1: Cavity

[0025] 11: Upper convex wall part

[0026] 111, 121, 231: External thread surface

[0027] 12: Lower convex wall section

[0028] 13: Ring section

[0029] 131: Connecting hole

[0030] 1311, 314, 412: Internal thread surface

[0031] 132: Through hole

[0032] 14: Air intake

[0033] 15: Water inlet hole

[0034] 16: Air intake connector

[0035] 161, 171: Channels

[0036] 17: Water inlet connector

[0037] 2: Sprayer head

[0038] 21: Head

[0039] 22: Spray nozzle

[0040] 23: Assembly Section

[0041] 24: Injection Hole

[0042] 3: Atomizing head

[0043] 31: Nebulization Chamber

[0044] 311: Opening

[0045] 312: Closed surface

[0046] 313: Interface

[0047] 32: Spoiler

[0048] 321: Screening hole

[0049] 33: Airtight components

[0050] 34: Atomizing connector

[0051] 4: Water collection head

[0052] 41:Water collection room

[0053] 411: Opening

[0054] 413: Closed surface

[0055] 414: Takeover

[0056] 42: Leak-proof element

[0057] 5: Air

[0058] 6: Pure water

[0059] 61: Atomized water vapor

[0060] 62: Atomized water droplets

[0061] 7: Grinding fluid

[0062] 8: Storage tank

[0063] 81: Piping Detailed Implementation

[0064] Numerous specific details are provided in this specification to provide a thorough understanding of the specific embodiments of the present invention; however, those skilled in the art will recognize that the purpose of the present invention can still be achieved without one or more of these specific details; in other cases, well-known details have not been shown or described to avoid obscuring the main technical features of the present invention. A detailed description and technical content of the present invention are illustrated below with reference to the accompanying drawings; however, the drawings are provided for reference and illustration only and are not intended to limit the scope of the present invention.

[0065] Please see Figure 1-3 These are three-dimensional schematic diagrams of the atomizer appearance in this application; Figure 1 Atomizer disassembly diagram and Figure 2 An exploded view of the atomizer from another perspective. (See figure.)

[0066] The atomizer of this application includes: a cavity 1, a nozzle 2, an atomizing head 3, and a water collecting head 4. Air (not shown) and pure water (not shown) are introduced into the cavity 1, and then the nozzle 2 and atomizing head 3 generate a water mist gas which is delivered to a storage tank (not shown) containing wafer polishing slurry (not shown) to prevent crystal formation inside the polishing slurry storage tank.

[0067] The cavity 1 has an upper protrusion 11 and a lower protrusion 12. The outer surfaces of the upper protrusion 11 and the lower protrusion 12 each have an external threaded surface 111 and 121, respectively, which engage with the atomizing head 3 and the water collecting head 4. Furthermore, the upper protrusion 11 has an annular portion 13 inside, which has a connecting hole 131 and at least two through holes 132. The inner wall of the connecting hole 131 has an internal threaded surface 1311, which engages with the nozzle 2. The through holes 132 penetrate the annular portion 13, allowing the upper protrusion 11 and the lower protrusion 12 to communicate with each other. Furthermore, the cavity 1 has an air inlet 14 and a water inlet 15, which are respectively connected to an air inlet connector 16 and a water inlet connector 17. Each of the air inlet connector 16 and the water inlet connector 17 has a channel 161 and 171, which communicate with the connecting hole 131. In addition, an air inlet pipe (not shown in the figure) is connected to the air inlet connector 16 through the channel 161 to input air, and another pure water inlet pipe (not shown in the figure) is connected to the channel 171 of the water inlet connector 17, so that both gas and pure water can be injected into the cavity 1.

[0068] The nozzle 2 has a hemispherical head 21 with at least two nozzle holes 22. A connecting portion 23 extends below the head 21, and the outer surface of the connecting portion 23 has an external thread surface 231, which is engaged with the internal thread portion 1311 of the connecting hole 131. Furthermore, the connecting portion 23 has an injection hole 24 that communicates with the nozzle holes 22 of the head 21.

[0069] The atomizing head 3 includes a barrel-shaped or columnar atomizing chamber 31, a baffle plate 32, an airtight element 33, and an atomizing connector 34. One end of the atomizing chamber 31 has an open opening 311, and the other end has a closed surface 312. The closed surface 312 has an interface 313 for connecting to the atomizing connector 34. The baffle plate 32 is disposed inside the atomizing chamber 31 and has at least two filtering holes 321. These filtering holes allow small water molecule vapor to pass through, while large water molecule vapor cannot pass through. Furthermore, an airtight element 33 is disposed inside the atomizing chamber 31 and located below the baffle 32. The internal thread surface 314 of the opening 311 of the atomizing chamber 31 is connected to the external thread surface 111 of the upper protrusion 11, so that the airtight element 33 is clamped between the atomizing chamber 31 and the upper protrusion 11 to prevent leakage of atomized water vapor. In this drawing, the airtight element 33 is a rubber gasket.

[0070] The water collection head 4 includes a bucket-shaped or columnar water collection chamber 41 and a leak-proof element 42. One end of the water collection chamber 41 has an open opening 411 with an internally threaded surface 412 on its inner wall. The other end of the water collection chamber 41 has a closed surface 413 connected to a connecting pipe 414 for connecting to external pipelines (not shown). A leak-proof element 42 is disposed inside the water collection chamber 41. The internally threaded surface 412 of the opening 411 of the water collection chamber 41 connects to the externally threaded surface 121 of the lower protrusion 12, thus clamping the leak-proof element 42 between the water collection chamber 41 and the lower protrusion 12 to prevent water leakage. In this drawing, the leak-proof element 42 is a rubber gasket.

[0071] Please see Figure 4 This is a side sectional view of the atomizer in this application; see also: Figure 1-3As shown in the figure; when the atomizer of this application is in use, the air inlet connector 16 is connected to the external pipeline (not shown), air valve (not shown) and pump (not shown), and the water inlet connector 17 is also connected to the external pipeline (not shown), water valve (not shown) and pump (not shown). At the same time, air 5 is sent into the engagement hole 131 of the ring portion 13 through the channel 161 of the air inlet connector 16 and pure water 6 is sent into the engagement hole 131 of the ring portion 17 through the channel 171 of the water inlet connector 17.

[0072] After air and pure water are simultaneously introduced into the junction hole 131 of the ring 13, the rapid flow of air 5 pressurized by an external pump drives pure water 6 to be rapidly injected through the injection hole 24 of the nozzle 2. The water is then atomized and sprayed out from at least two nozzles 22 on the head 21 of the nozzle 2 into the atomization chamber 31 of the atomizing head 3. Excess water is then blocked by the baffle 32 (e.g., allowing small-molecule atomized water vapor 61 to pass through while preventing large-molecule atomized water droplets 62 from passing through), preventing excessive moisture from causing a shift in the concentration of the medicine (grinding slurry) in the storage tank. The passing small-molecule atomized water vapor 61 is then delivered to the storage tank (not shown in the figure) via the atomizing connector 34, maintaining a specific humidity level inside the storage tank.

[0073] When the atomized water droplets 62 of large molecules cannot pass through the baffle plate 32, they will drip onto the ring 13 and then flow into the water collection head 4 connected to the lower protrusion 12 through at least two through holes 132 on the ring 13. The pure water 6 will then be discharged through the pipe 414 of the water collection head 4.

[0074] Please see Figure 5 This is a schematic diagram of the atomizer and grinding fluid cylinder assembly of this application; see also the following: Figure 1-4 As shown: In the conventional method, polishing slurry 7 is placed in a storage tank 8. When polishing a wafer (not shown in the figure), water is continuously injected into the storage tank 8 to mix with the polishing slurry 7. When water is injected, water stains or droplets are easily generated on the inner wall of the storage tank 8. Once the water vapor in the storage tank 8 is removed and the humidity drops and cannot be maintained above 95%, the water stains or droplets formed on the inner wall of the storage tank 8 are prone to crystallization. When the crystals fall into the polishing slurry 7, the surface of the wafer is easily damaged when the polishing slurry 7 is extracted to clean the wafer.

[0075] Therefore, when the atomizer of this application is connected to the storage tank 8, after air 5 and pure water 6 are injected into the atomizer, the atomized water vapor 61 will be sent to the storage tank 8 through the pipeline 81 connected to the atomizer connector 34, so that the inside of the storage tank 8 maintains a specific humidity (above 95%), so that no crystals will be generated on the inner wall of the storage tank 8, ensuring that the wafer surface will not be damaged when the polishing fluid 7 is extracted to clean the wafer.

[0076] The above description is merely a preferred embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. All equivalent variations and modifications made according to the claims of this utility model should still fall within the scope of protection intended by this utility model. The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments have been described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. This utility model may also have other embodiments. Without departing from the spirit and essence of this utility model, those skilled in the art can make various corresponding changes and modifications based on this utility model, but these corresponding changes and modifications should all fall within the protection scope of the claims of this utility model.

Claims

1. An atomizer to be placed in a pipe connecting a tank for holding a polishing liquid, characterized by, The utility model relates to a humidifier, comprising: a cavity with an upper convex wall part and a lower convex wall part, the upper convex wall part has a ring part inside, the ring part has a joint hole and at least two through holes, the through holes pass through the ring part, the upper convex wall part and the lower convex wall part form a communicating state, the cavity has an air inlet hole and a water inlet hole, the air inlet hole and the water inlet hole are respectively connected with an air inlet connector and a water inlet connector; a nozzle connected with the joint hole, the nozzle has at least two spray holes and an injection hole communicating with the spray holes; an atomizing head connected with the upper convex wall part; a water collecting head connected with the lower convex wall part; wherein, after the air inlet connector and the water inlet connector inject external air and water, the nozzle generates atomized water vapor in the atomizing head and sends it to the storage tank, so that the storage tank maintains a certain humidity.

2. The atomizer of claim 1, wherein, The outer surface of the upper convex wall part and the lower convex wall part respectively has an outer thread surface, the outer thread surface engages with the atomizing head and the water collecting head.

3. The atomizer of claim 2, wherein, The inner wall of the joint hole has an inner thread surface, the inner thread surface connects with the nozzle.

4. The atomizer of claim 2, wherein, The air inlet connector and the water inlet connector respectively have a channel, the channel communicates with the joint hole, and the two channels of the air inlet connector and the water inlet connector are connected with external pipelines.

5. The atomizer of claim 3, wherein, The nozzle has a hemispherical head with the spray holes, a connecting part extends below the head, the connecting part has the injection hole inside and an outer surface with the outer thread surface connected with the inner thread surface of the joint hole.

6. The atomizer of claim 2, wherein, The atomizing head includes a barrel-shaped or columnar atomizing chamber, a spoiler, an air-tight element and an atomizing connector, one end of the atomizing chamber has an open opening, the other end of the atomizing chamber has a closed surface, the closed surface has a joint for connecting the atomizing connector.

7. The atomizer of claim 6, wherein, The spoiler is arranged inside the atomizing chamber, the spoiler has at least two screening holes, the air-tight element is arranged inside the atomizing chamber below the spoiler, the inner wall of the opening of the atomizing chamber has an inner thread surface, and the inner thread surface connects with the outer thread surface of the upper convex wall part.

8. The atomizer of claim 7, wherein, The water collecting head includes a barrel-shaped or columnar water collecting chamber and a leakage prevention element.

9. The atomizer of claim 8, wherein, One end of the water collecting chamber has an open opening, the inner wall of the opening has an inner thread surface, the other end of the water collecting chamber has a closed surface, the closed surface is connected with a connecting pipe connected with external pipelines, the leakage prevention element is arranged inside the water collecting chamber, and the inner thread surface of the opening connects with the outer thread surface of the lower convex wall part.

10. The atomizer of claim 9, wherein, The air-tight element and the leakage prevention element are rubber gaskets.

Images