Perovskite laser scribing machine based on film surface scribing

Abstract

The utility model provides a perovskite laser scribing machine based on film surface scribing. A fixed gantry type light path system of the device comprises an outer light path module, a light splitting box module and a laser focusing scribing head module, the outer light path module and the light splitting box module are fixed to a gantry shaft, and the laser focusing scribing head module is installed on the gantry shaft through a translation mechanism; a perovskite cell substrate can be adsorbed and fixed on the upper surface of the vacuum adsorption platform deck; and the substrate displacement mechanism translates the vacuum adsorption platform deck and the whole perovskite cell substrate adsorbed on the vacuum adsorption platform deck back and forth along a second direction. According to the device, external devices in two light splitting processes are fixed, so that the stability of a whole light path system of a laser light splitting device in a film surface scribing process is greatly ensured, the influence of instability caused by the fact that a laser focusing scribing head needs to move in a traditional light splitting process is avoided, and the stability of the light path system is greatly improved; and the risk of optical path quality reduction is effectively avoided.

Description

Technical Field

[0001] This utility model relates to a perovskite laser scribing machine based on film surface marking, belonging to the technical field of laser scribing equipment. Background Technology

[0002] As a representative of high-efficiency photovoltaic devices, perovskite solar cells require the fabrication process of dividing a large-area perovskite film into modular cell units to avoid current loss and improve energy conversion efficiency. Laser scribing technology has become the mainstream process for scribing the surface of perovskite cells due to its non-contact nature and high precision.

[0003] Laser scribing technology can employ film-surface scribing and glass-surface scribing. Film-surface scribing refers to the laser focusing on the film surface from top to bottom when the thin film surface of the battery substrate is facing upwards. Glass-surface scribing refers to the laser passing through the glass layer from bottom to top and focusing on the thin film surface. Each scribing process has its advantages and disadvantages. For example, film-surface scribing is prone to producing crater-like deposits on both sides of the scribing line, while glass-surface scribing requires passing through the glass layer, increasing the amount of medium the laser passes through and thus increasing interference. Generally, due to fewer interferences and lower implementation difficulty, film-surface scribing is the latest technology choice for scribing and minimizing the inherent process disadvantages of module scribing.

[0004] Existing laser scribing equipment for film surface marking, such as the laser scribing device and laser scribing method disclosed in patent CN202411989121.3, typically employs a moving scribing module, which is controlled at high speed to achieve rapid scribing on the substrate film surface of solar cells. As solar cells used in modern production become increasingly larger, with substrates on GW-level production lines reaching 2.4 meters by 1.2 meters, the moving scribing module needs to move 2.4 meters back and forth along the long side of the substrate. This long-distance, high-speed reciprocating movement poses a significant challenge to the stability of the laser optical path of the moving scribing module. Since the laser itself is stationary, after the laser scribing machine acquires a laser beam, it splits the beam into multiple beams through its external optical path module and beam splitter module, and then focuses the laser scribing head onto the substrate film of the solar cell to perform scribing operations. When the entire laser optical path of the moving scribing module needs to operate at high intensity and for extended periods over such a long distance and high speed, the increased optical path length will cause a series of problems such as widened beam divergence angle, power attenuation, loss of synchronization control, and dynamic focusing delay. These problems are not inevitable, but they place higher demands on the control of the optical path system and greatly increase the probability of these optical path problems occurring. Utility Model Content

[0005] To address the shortcomings of the existing technology, the purpose of this invention is to provide a perovskite laser scribing machine based on film surface marking.

[0006] According to the embodiments of this utility model, the first embodiment is provided as: a perovskite laser scribing machine based on film surface marking, comprising:

[0007] A fixed gantry optical path system includes an external optical path module, a beam splitter module, and a laser focusing scribing head module. The external optical path module and the beam splitter module are fixed on the gantry axis. The laser focusing scribing head module is installed on the gantry axis through a translation mechanism. The laser focusing scribing head module can be translated left and right along the gantry axis in a first direction through the translation mechanism to change the scribing path. The gantry axis is fixed on the base and is mounted at the center of the base.

[0008] A vacuum adsorption stage, which can adsorb and fix the perovskite battery substrate on its upper surface;

[0009] The substrate displacement mechanism moves the entire perovskite battery substrate adsorbed on the vacuum adsorption stage and the vacuum adsorption stage back and forth along the second direction.

[0010] The laser focusing scribing head module focuses the laser vertically along the third direction onto the thin film layer of the perovskite solar cell substrate. The perovskite solar cell substrate is pushed back and forth along the second direction by the substrate displacement mechanism, so that the focused laser scribing is performed on the thin film layer.

[0011] Furthermore, the base includes a long side direction, a short side direction, and a vertical direction. The long side direction is the Y-axis direction in which the substrate displacement mechanism controls the vacuum adsorption stage to translate back and forth. The short side direction is the X-axis direction in which the translation mechanism translates along the gantry axis in a first direction. The vertical direction is the third direction in which the focused laser is projected onto the thin film layer.

[0012] Furthermore, the gantry shaft is fixedly mounted above the center of the base along the X-axis direction.

[0013] Furthermore, the laser focusing scribing head module has multiple laser focusing scribing heads mounted on the gantry shaft along the X-axis direction.

[0014] Furthermore, the external optical path module obtains a laser beam from the laser and outputs two first split laser beams after splitting the beam. The beam splitter module includes a left beam splitter and a right beam splitter. The left beam splitter obtains one first split laser beam, splits it, and outputs N second split laser beams. The right beam splitter obtains one first split laser beam, splits it, and outputs N second split laser beams, where N is a positive integer greater than or equal to 1.

[0015] Alternatively, the external optical path module can acquire one laser beam from each of the two lasers and output two first-splitting laser beams.

[0016] Furthermore, the laser focusing scribing head module includes S laser focusing scribing heads, each laser focusing scribing head includes M laser focusing units, where S is a positive even number greater than or equal to 2, M is a positive integer greater than or equal to 1, and 2N=M×S.

[0017] Furthermore, S / 2 laser focusing scribing heads correspond to the left beam splitter, and the remaining S / 2 laser focusing scribing heads correspond to the right beam splitter.

[0018] Furthermore, the laser focusing scribing head module includes a first laser focusing scribing head, a second laser focusing scribing head, a third laser focusing scribing head, and a fourth laser focusing scribing head with identical structures. When the first laser focusing scribing head includes 2 sets of laser focusing units, this scribing machine is an 8-channel laser scribing machine; when the first laser focusing scribing head includes 3 sets of laser focusing units, this scribing machine is a 12-channel laser scribing machine; when the first laser focusing scribing head includes 4 sets of laser focusing units, this scribing machine is a 16-channel laser scribing machine; when the first laser focusing scribing head includes 6 sets of laser focusing units, this scribing machine is a 24-channel laser scribing machine; when the first laser focusing scribing head includes 9 sets of laser focusing units, this scribing machine is a 36-channel laser scribing machine; and when the first laser focusing scribing head includes 12 sets of laser focusing units, this scribing machine is a 48-channel laser scribing machine.

[0019] Furthermore, a beam linear motor module is provided on the gantry shaft, and each laser focusing scribing head of the laser focusing scribing head module is set on a linear module transfer platform. The laser focusing scribing head module is connected to the beam linear motor module through S laser module transfer platforms via a translation mechanism, where S is a positive even number greater than or equal to 2. The beam linear motor module controls the laser module transfer platform to translate left and right along the first direction through the translation mechanism to realize the track-changing scribing of the laser focusing scribing head module.

[0020] Furthermore, the substrate displacement mechanism includes an air-floating linear motor platform, which translates the entire perovskite battery substrate adsorbed on the vacuum adsorption stage along the second direction.

[0021] Compared with the prior art, the unique advantages of the technical solution provided in this application are as follows: This device breaks through the existing mode of stationary perovskite cell stage and moving laser focusing scribing head. It adopts a fixed gantry optical path system, that is, after a laser beam is obtained from the laser module, the external optical path module and the beam splitter module for the two beam splitting processes are fixed on the gantry axis. Since the external components for the two beam splitting processes are fixed, the stability of the entire optical path system is greatly guaranteed during the laser beam splitting process of film surface scribing. This avoids the instability caused by the traditional beam splitting process requiring the movement of the laser focusing scribing head, greatly improves the stability of the optical path system, and effectively avoids the risk of optical path quality degradation. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] in:

[0024] Figure 1 This is a schematic diagram (front right) of a perovskite laser scribing machine based on film surface marking.

[0025] Figure 2 A schematic diagram (front left) of a perovskite laser scribing machine based on film surface marking.

[0026] Figure label:

[0027] 10-Laser; 11-External optical path module; 12-Base; 20-Right beam splitter; 21-Left beam splitter; 31-First laser focusing scribing head; 32-Second laser focusing scribing head; 33-Third laser focusing scribing head; 34-Fourth laser focusing scribing head; 40-Crossbeam linear motor module; 41-Linear module transfer stage; 50-Dust extraction assembly; 70-Air-floating linear motor platform; 71-Vacuum adsorption stage. Detailed Implementation

[0028] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] Example 1

[0030] The technical problem solved by this embodiment is that existing laser scribing equipment for film surface marking usually adopts a scheme of moving scribing module, that is, the stage (perovskite cell) is stationary and the laser scribing head is moving. The goal is to achieve rapid scribing on the substrate film surface of solar cells by controlling the high-speed motion of the moving scribing module. As solar cells used in modern production become increasingly larger, with substrates on GW-level production lines reaching 2.4 meters by 1.2 meters, the moving scribing module needs to move 2.4 meters back and forth along the long side of the substrate. This long-distance, high-speed reciprocating movement poses a significant challenge to the stability of the laser optical path of the moving scribing module. Since the laser 10 itself is stationary, after the laser scribing machine acquires a laser beam from the laser 10, it splits the laser beam into multiple beams through its external optical path module 11 and beam splitter module, and then focuses the laser scribing head onto the substrate film surface of the solar cell to perform scribing operations. When the entire laser optical path of the moving scribing module needs to operate at high intensity and for extended periods over such a long distance and high speed, the increased optical path length will cause a series of problems such as increased beam divergence angle, power attenuation, loss of synchronization control, and dynamic focusing delay.

[0031] To address the aforementioned technical problems, this embodiment provides a perovskite laser scribing machine based on film surface marking, comprising at least three main modules, such as... Figure 1 , Figure 2 As shown:

[0032] A fixed gantry optical path system includes an external optical path module 11, a beam splitter module, and a laser focusing scribing head module. The external optical path module 11 and the beam splitter module are fixed on the gantry shaft. The laser focusing scribing head module is installed on the gantry shaft through a translation mechanism. The laser focusing scribing head module can be translated left and right along the gantry shaft in a first direction through the translation mechanism to change the scribing path. The gantry shaft is fixed on the base 12 and is mounted at the center of the base 12.

[0033] The fixed gantry optical path system is mainly used to acquire a laser beam from the laser 10 and to split and focus the acquired laser beam, and finally output the focused laser to perform laser marking on the thin film layer on the surface of the perovskite solar cell.

[0034] Vacuum adsorption stage 71, which can adsorb and fix the perovskite battery substrate on its upper surface.

[0035] The vacuum adsorption stage 71 is mainly used to fix the perovskite solar cell substrate. The fixing function includes not only the conventional stable adsorption of the perovskite solar cell on the upper surface of the vacuum adsorption stage 71, but also controlling the perovskite solar cell to prevent it from shifting during high-speed movement.

[0036] The substrate displacement mechanism moves the vacuum adsorption stage 71 and the perovskite battery substrate adsorbed on the vacuum adsorption stage 71 back and forth along the second direction.

[0037] The substrate displacement mechanism is a mechanism that drives the vacuum adsorption stage 71 to move. The direction of this movement is the long side of the base 12, and the form of this movement is usually a linear reciprocating motion.

[0038] The laser focusing scribing head module focuses the laser perpendicularly to the thin film layer of the perovskite solar cell substrate along a third direction. The perovskite solar cell substrate is pushed back and forth along a second direction by the substrate displacement mechanism, so that the focused laser scribing is performed on the thin film layer. That is, if the spatial structure of this device is expressed by the XYZ coordinate axis, the vacuum adsorption stage 71 is located on the XY plane. Similarly, the plane of the perovskite solar cell substrate is parallel to the XY plane, and the focused laser is focused and projected onto the thin film layer of the perovskite solar cell substrate along the Z-axis direction perpendicular to the XY plane.

[0039] This device breaks through the existing mode of stationary perovskite cell stage and moving laser focusing and scribing head. It adopts a fixed gantry optical path system. After acquiring a laser beam from the laser module, the external optical path module 11 and the beam splitter module for both beam splitting processes are fixed on the gantry axis. Since the external components for both beam splitting processes are fixed, the stability of the entire optical path system is greatly ensured during the laser beam splitting process and the scribing of the film surface. This avoids the instability caused by the traditional beam splitting process requiring the laser focusing and scribing head to move, greatly improves the stability of the optical path system, and effectively avoids the risk of optical path quality degradation.

[0040] Example 2

[0041] This embodiment specifically provides a perovskite laser scribing machine based on film surface marking, including:

[0042] A fixed gantry optical path system includes an external optical path module 11, a beam splitter module, and a laser focusing scribing head module. The external optical path module 11 and the beam splitter module are fixed on the gantry shaft. The laser focusing scribing head module is installed on the gantry shaft through a translation mechanism. The laser focusing scribing head module can be translated left and right along the gantry shaft in a first direction through the translation mechanism to change the scribing path. The gantry shaft is fixed on the base 12 and is mounted at the center of the base 12.

[0043] Specifically, the base 12 can be a marble base, which ensures the overall stability of the laser scribing machine with its heavy weight and rigid structure. A gantry shaft is set in the middle of the marble base. The gantry shaft is used to support the fixed gantry optical path system and suspend the laser focusing scribing head above the vacuum adsorption stage 71.

[0044] Specifically, the base 12 includes a long side direction, a short side direction, and a vertical direction. The long side direction is the Y-axis direction in which the substrate displacement mechanism controls the vacuum adsorption stage 71 to translate back and forth. The short side direction is the X-axis direction in which the translation mechanism translates along the gantry axis in a first direction. The vertical direction is the third direction in which the focused laser is projected onto the thin film layer. The gantry axis is fixedly mounted above the center position of the base 12 along the X-axis direction. Multiple laser focusing scribing heads of the laser focusing scribing head module are mounted on the gantry axis along the X-axis direction.

[0045] Specifically, the fixed gantry optical path system can be configured with 8, 12, 16, 24, 36, or 48 laser channels. Taking 48 laser channels as an example:

[0046] The external optical path module 11 obtains a laser beam from the laser 10, splits it, and outputs two first split laser beams. The beam splitter module includes a left beam splitter 21 and a right beam splitter 20. The left beam splitter 21 obtains one first split laser beam, splits it, and outputs two second split laser beams. The right beam splitter 20 obtains one first split laser beam, splits it, and outputs two second split laser beams. The laser focusing scribing head module includes a first laser focusing scribing head 31, a second laser focusing scribing head 32, a third laser focusing scribing head 33, and a fourth laser focusing scribing head 34 with identical structures. The first laser focusing scribing head 31 includes 12 sets of laser focusing units, outputting a total of 48 focused laser beams. One linear motion scribing scribes 48 straight lines on the thin film layer of the perovskite solar cell substrate, and one round-trip linear motion scribing scribes 56 straight lines on the thin film layer of the perovskite solar cell substrate.

[0047] Specifically, a beam linear motor module 40 is provided on the gantry shaft, and each laser focusing scribing head of the laser focusing scribing head module is set on a linear module transfer stage 41. The laser focusing scribing head module is connected to the beam linear motor module 40 through four laser module transfer stages via a translation mechanism. The beam linear motor module 40 controls the laser module transfer stage to translate left and right along the first direction through the translation mechanism to realize the track-changing scribing of the laser focusing scribing head module.

[0048] Specifically, the translation mechanism includes a slide rail or slide track set on the gantry shaft, and a slider set on the back of the linear module transfer stage 41 that cooperates with the slide rail or slide track. The beam linear motor module 40 controls the linear module transfer stage 41 to translate through the translation mechanism and realizes the slide track scribing of the laser focusing scribing head.

[0049] Vacuum adsorption stage 71, which can adsorb and fix the perovskite battery substrate on its upper surface.

[0050] The vacuum adsorption stage 71 is connected to a vacuum pumping device, which creates a negative pressure at the adsorption port of the vacuum adsorption stage 71 and adsorbs and fixes the perovskite solar cell substrate.

[0051] Each laser focusing scribing head in the fixed gantry optical path system is also equipped with a corresponding dust extraction component 50. The air extraction port of the dust extraction component 50 also forms a negative pressure with the air extraction system to suck away the tiny dust generated during the laser scribing process. It should be noted that the air extraction system of the dust extraction component 50 and the vacuum air extraction device of the vacuum adsorption stage 71 are not the same system and are usually not shared.

[0052] The substrate displacement mechanism moves the vacuum adsorption stage 71 and the perovskite battery substrate adsorbed on the vacuum adsorption stage 71 back and forth along the second direction.

[0053] The substrate displacement mechanism includes an air-floating linear motor platform 70, which moves the vacuum adsorption stage 71 and the perovskite battery substrate adsorbed on the vacuum adsorption stage 71 back and forth along the second direction.

[0054] The basic displacement mechanism may also include other forms of linear motor platforms.

[0055] The laser focusing scribing head module focuses the laser vertically along the third direction onto the thin film layer of the perovskite solar cell substrate. The perovskite solar cell substrate is pushed back and forth along the second direction by the substrate displacement mechanism, so that the focused laser scribing is performed on the thin film layer.

[0056] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. The above embodiments only illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this application's patent. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the concept of this application, and these all fall within the protection scope of this application.

[0057] It should be noted that when an element is referred to as being "fixed to" or "set on" another component, it can be directly or indirectly set on the other component; when a component is referred to as being "connected to" another component, it can be directly or indirectly connected to the other component. It should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0058] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" or "several" means two or more, unless otherwise explicitly specified.

[0059] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

Claims

1. A perovskite laser scribe machine based on film surface scribing, characterized in that, The application relates to a perovskite solar cell laser scribing device. The device comprises a fixed gantry optical path system, a vacuum adsorption platform, a substrate displacement mechanism and a laser focusing scribing head module. The fixed gantry optical path system comprises an outer optical path module, a light splitting box module and a laser focusing scribing head module. The outer optical path module and the light splitting box module are fixed on a gantry shaft, and the laser focusing scribing head module is installed on the gantry shaft through a translation mechanism. The laser focusing scribing head module can be translated left and right along the gantry shaft in a first direction through the translation mechanism to change lanes and scribe.

2. The film-surface-scribing based perovskite laser ruling machine according to claim 1, wherein, The gantry shaft is fixed on a base, and the gantry shaft is erected above the center position of the base.

3. The film-surface-scribing based perovskite laser dicing machine according to claim 1, wherein, The vacuum adsorption platform can adsorb and fix a perovskite solar cell substrate on the upper surface thereof.

4. The film-surface-scribing based perovskite laser ruling machine according to claim 1, wherein, The substrate displacement mechanism translates the vacuum adsorption platform and the perovskite solar cell substrate adsorbed on the vacuum adsorption platform as a whole along a second direction.

5. The film-face scribing based perovskite laser dicing machine according to claim 1, wherein, The focusing laser of the laser focusing scribing head module is vertically focused on the thin film layer of the perovskite solar cell substrate along a third direction. The perovskite solar cell substrate is translated back and forth along the second direction under the pushing of the substrate displacement mechanism, so that the focusing laser performs film surface scribing on the thin film layer.

6. The film-surface scribing based perovskite laser ruling machine according to claim 5, characterized in that, The base comprises a long edge direction, a short edge direction and a vertical direction.

7. The film-face scribing based perovskite laser ruling machine according to claim 6, wherein, The long edge direction is the Y-axis direction in which the substrate displacement mechanism controls the vacuum adsorption platform to translate back and forth. The short edge direction is the X-axis direction in which the translation mechanism translates along the gantry shaft in the first direction. The vertical direction is the third direction in which the focusing laser projects towards the thin film layer. The gantry shaft is fixed and erected above the center position of the base along the X-axis direction. A plurality of laser focusing scribing heads of the laser focusing scribing head module are installed on the gantry shaft along the X-axis direction. The outer optical path module obtains a laser beam from a laser and outputs two first split lasers after splitting. The light splitting box module comprises a left light splitting box and a right light splitting box. The left light splitting box obtains one first split laser and outputs N second split beams after splitting. The right light splitting box obtains one first split laser and outputs N second split beams after splitting. N is a positive integer greater than or equal to 1. Alternatively, the outer optical path module obtains one laser beam from two lasers and outputs two first split lasers. The laser focusing scribing head module comprises S laser focusing scribing heads, each of which comprises M laser focusing units. S is a positive even number greater than or equal to 2. M is a positive integer greater than or equal to 1, and 2N=MxS. S / 2 laser focusing scribing heads correspond to the left light splitting box, and the remaining S / 2 laser focusing scribing heads correspond to the right light splitting box.

8. The film-face scribing based perovskite laser ruling machine according to claim 5, wherein, The laser focusing scribing head module comprises a first laser focusing scribing head, a second laser focusing scribing head, a third laser focusing scribing head and a fourth laser focusing scribing head which are structurally identical, the first laser focusing scribing head comprises 2 groups of laser focusing units, and the scribing machine is an 8-channel laser scribing machine, the first laser focusing scribing head comprises 3 groups of laser focusing units, and the scribing machine is a 12-channel laser scribing machine, the first laser focusing scribing head comprises 4 groups of laser focusing units, and the scribing machine is a 16-channel laser scribing machine, the first laser focusing scribing head comprises 6 groups of laser focusing units, and the scribing machine is a 24-channel laser scribing machine, the first laser focusing scribing head comprises 9 groups of laser focusing units, and the scribing machine is a 36-channel laser scribing machine, and the first laser focusing scribing head comprises 12 groups of laser focusing units, and the scribing machine is a 48-channel laser scribing machine.

9. The film-face scribing based perovskite laser dicing machine according to claim 1, wherein, The gantry shaft is provided with a beam linear motor module, each laser focusing scribing head of the laser focusing scribing head module is arranged on a linear module transfer table, the laser focusing scribing head module is connected with the beam linear motor module through S laser module transfer tables and a translation mechanism, S is a positive even number greater than or equal to 2, and the beam linear motor module controls the laser module transfer table to translate left and right along a first direction through the translation mechanism and realizes lane changing scribing of the laser focusing scribing head module.

10. The film-face scribing based perovskite laser ruling machine according to claim 1, wherein, The substrate displacement mechanism comprises an air floating linear motor platform, and the air floating linear motor platform translates the vacuum adsorption table and the perovskite battery substrate adsorbed on the vacuum adsorption table as a whole along a second direction.

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