High-precision lifting weighing device in vacuum environment

Abstract

The utility model provides a high-precision lifting weighing device in a vacuum environment. The high-precision lifting weighing device comprises a furnace lower cover and a mounting seat, the high-precision lifting weighing device in the vacuum environment is provided with a lifting module, a lifting corrugated pipe, a magnetic fluid, a crystal rod, a weighing mounting upper plate, a weighing sensor, a weighing mounting lower plate, a sealing element I, a sealing element II, a sealing element III, a sealing cavity and the like, and the lifting module is matched with the lifting corrugated pipe; the crystal rod is driven to accurately ascend and descend under stable supporting and guiding of the magnetic fluid, the working requirement is met, the weighing installation upper plate, the weighing sensor and the weighing installation lower plate form a stable weighing structure, weighing accuracy is ensured, the first sealing piece, the second sealing piece, the third sealing piece and the sealing cavity form a multiple sealing protection system, key components are protected, and the service life of the crystal rod is prolonged. External erosion is reduced, the overall performance is optimized, the vacuum environment in the device is maintained, the weighing precision and stability are improved, and normal operation of the device under complex working conditions is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide crystal growth weighing technology, and more specifically, to a high-precision lifting and weighing device in a vacuum environment. Background Technology

[0002] Silicon carbide, as an important wide-bandgap semiconductor material, has wide and crucial applications in modern electronics, energy, and other fields. Its crystal growth process has extremely stringent requirements for environmental and process control, typically requiring a vacuum environment. During silicon carbide crystal growth, real-time online monitoring of crystal weight changes is crucial for accurately controlling crystal quality and optimizing the growth process. By accurately measuring weight changes, the crystal growth rate can be understood in a timely manner, allowing for adjustments to process parameters to ensure the growth of high-quality, compliant silicon carbide crystals.

[0003] However, existing weighing equipment has the following problems when in use:

[0004] (1) Traditional weighing devices are difficult to ensure good sealing in a vacuum environment. In the vacuum environment of silicon carbide crystal growth, once gas or impurities enter the weighing system, it will not only interfere with the normal operation of the weighing sensor, causing a serious decrease in measurement accuracy and failing to accurately reflect the weight change of the crystal growth, but may also pollute the crystal growth environment and affect the crystal quality.

[0005] (2) The crystal growth process requires the lifting mechanism to lift slowly and stably according to specific process requirements in order to ensure the stability and uniformity of crystal growth. However, the existing lifting mechanism cannot accurately control the lifting speed and displacement, and is prone to vibration and fluctuation during the lifting process. This will not only affect the quality of crystal growth, but also cause additional interference to the weighing device, resulting in a large number of errors in the measured weight data, which cannot truly reflect the actual situation of crystal growth.

[0006] This invention enables high-precision lifting and accurate weighing in a vacuum environment. At the same time, through multiple sealing protections and a stable structural design, it protects key internal components and ensures that the device can operate normally and stably under complex working conditions. Utility Model Content

[0007] The present invention aims to solve the technical problems mentioned in the background art and provide a high-precision lifting and weighing device in a vacuum environment.

[0008] To achieve the above objectives, this utility model provides the following technical solution: a high-precision lifting and weighing device in a vacuum environment, comprising: a furnace bottom cover and a mounting base, wherein the furnace bottom cover is disposed on the left side of the mounting base, a magnetic fluid is disposed below the furnace bottom cover, a weighing sensor is disposed below the magnetic fluid, a lifting module is fixedly installed inside the mounting base, and a drive unit is fixedly installed at the upper end of the mounting base, the drive unit being configured in conjunction with the lifting module.

[0009] A further preferred embodiment: a weighing mounting plate is fixedly installed at the bottom of the magnetic fluid, the upper end of the weighing sensor is fixedly connected to the weighing mounting plate, a weighing mounting lower plate is fixedly installed at the bottom of the weighing sensor, and a corrugated pipe is fitted between the weighing mounting upper plate and the weighing mounting lower plate.

[0010] A further preferred embodiment: a lifting bellows is installed below the weighing mounting plate, and a crystal rod is fixedly installed below the lifting bellows and assembled in a magnetic fluid.

[0011] A further preferred embodiment: A sealing element is provided below the weighing mounting plate, and a sealing cavity is fixedly connected to the sealing element below the weighing mounting plate. The sealing element is fixedly installed inside the sealing cavity, and the lower part of the sealing cavity is connected to the lifting bellows.

[0012] A further preferred embodiment: sealing element two and sealing element three are respectively fixedly installed at the upper and lower ends of the weighing mounting plate and the weighing mounting lower plate.

[0013] Beneficial effects:

[0014] 1. By incorporating a lifting module, lifting bellows, magnetofluid, and crystal rod, the lifting module, with its specific mechanical structure and transmission method, enables precise vertical lifting movements. Motion parameters can be precisely controlled to meet various operational requirements, providing a stable power source for the crystal rod's lifting and lowering, ensuring accurate lifting as needed. The lifting bellows connects the lifting module and the crystal rod, flexibly transmitting the lifting motion to the crystal rod. Its own expansion and contraction characteristics adapt to displacement changes during crystal rod lifting and lowering, while also buffering potential vibrations to a certain extent, ensuring the stability of motion transmission. The magnetofluid not only provides a sealing function, preventing external gas from entering the device and maintaining a vacuum environment, but also provides stable support and guidance for the crystal rod's lifting and lowering, ensuring the crystal rod remains vertical during lifting and lowering, avoiding swaying or deviation, thus guaranteeing the stability of the entire device's operation.

[0015] 2. By setting up a weighing mounting upper plate, a weighing sensor, and a weighing mounting lower plate, the weighing sensor, as the core weighing element, has the characteristics of high sensitivity and high precision. It can accurately convert the gravity applied by the weighing object into measurable signals such as electrical signals. The weighing mounting lower plate provides a stable support for the weighing sensor, ensuring that the weighing sensor maintains a stable state during operation. This makes the weighing data more accurate and reliable, meeting the requirements of high-precision weighing in vacuum environments. The weighing mounting upper plate is fixedly connected to the upper end of the weighing sensor, and the bottom of the weighing sensor is fixed to the weighing mounting lower plate. The three form a stable weighing structure system. This tight connection method not only ensures stability in physical structure, but also effectively and evenly transmits the gravity of the weighing object to the weighing sensor during the force transmission process, reducing the dispersion or offset of force caused by structural instability and avoiding weighing errors caused by it.

[0016] 3. By setting up sealing element one, sealing element two, sealing element three, and a sealing cavity, sealing element one is installed between the weighing mounting lower plate and the sealing cavity, which can effectively prevent external gas or impurities from entering the device and maintain the vacuum degree inside the device. Sealing element two and sealing element three are installed at the upper and lower ends of the weighing mounting upper plate and the weighing mounting lower plate, respectively, which further enhances the sealing performance of the entire weighing structure and blocks gas and impurities from entering from the gaps between them. Together with sealing element one and the sealing cavity, they form a multi-layer sealing protection system to comprehensively protect the vacuum environment inside the device. Sealing element two and sealing element three surround the weighing sensor, which can prevent external corrosive substances, dust, etc. from contacting the weighing sensor, reduce the damage caused by external factors, and extend the service life. The sealing cavity is connected to the lifting bellows, which can protect the lifting bellows and the crystal rod and other components connected to it, reduce external erosion, provide a stable working environment for internal components, ensure smooth and reliable crystal rod lifting action, and guarantee the stability and accuracy of the weighing process.

[0017] 4. In summary, this high-precision lifting and weighing device in a vacuum environment comprises a lifting module, a lifting bellows, a magnetic fluid, a crystal rod, an upper weighing mounting plate, a weighing sensor, a lower weighing mounting plate, seals one, two, three, and a sealing cavity. The lifting module and the lifting bellows work together to drive the crystal rod to move precisely up and down under the stable support and guidance of the magnetic fluid, meeting operational requirements. The upper weighing mounting plate, the weighing sensor, and the lower weighing mounting plate form a stable weighing structure, ensuring accurate weighing. Seals one, two, three, and the sealing cavity construct a multi-layered sealing protection system, protecting key components, reducing external corrosion, optimizing overall performance, maintaining the internal vacuum environment of the device, improving weighing accuracy and stability, and ensuring the device operates normally under complex conditions. Attached Figure Description

[0018] Figure 1This is a schematic diagram of the overall structure of this utility model.

[0019] Figure 2 This is a side view of the structure of this utility model.

[0020] Figure 3 This is a schematic diagram of the internal sealing structure of this utility model.

[0021] Figure 1-3 In the middle section: 1. Furnace bottom cover; 2. Magnetic fluid; 3. Weighing mounting upper plate; 4. Weighing sensor; 5. Bellows; 6. Weighing mounting lower plate; 7. Lifting bellows; 8. Crystal rod; 9. Lifting module; 10. Mounting base; 11. Drive unit; 12. Seal 1; 13. Seal 2; 14. Seal 3; 15. Sealing cavity. Detailed Implementation

[0022] The following will refer to the appendix in the embodiments of this utility model. Figures 1-3 The technical solutions in the embodiments of this utility model will be clearly and completely described.

[0023] Please see Figure 1-3In this embodiment of the present invention, a high-precision lifting and weighing device in a vacuum environment includes: a furnace bottom cover 1 and a mounting base 10. The furnace bottom cover 1 is located on the left side of the mounting base 10. A magnetic fluid 2 is disposed below the furnace bottom cover 1, and a weighing sensor 4 is disposed below the magnetic fluid 2. A lifting module 9 is fixedly installed inside the mounting base 10. A drive unit 11 is fixedly installed on the upper end of the mounting base 10. The drive unit 11 is matched with the lifting module 9. A weighing mounting plate 3 is fixedly installed at the bottom of the magnetic fluid 2. The upper end of the weighing sensor 4 is connected to the weighing mounting plate 3. The upper plate 3 is fixedly connected, and the bottom of the weighing sensor 4 is fixedly installed with the lower weighing mounting plate 6. A bellows 5 is fitted between the upper weighing mounting plate 3 and the lower weighing mounting plate 6. A lifting bellows 7 is installed below the lower weighing mounting plate 6, and a crystal rod 8 is fixedly installed below the lifting bellows 7 and assembled in the magnetic fluid 2. The drive unit 11 is started and works according to the preset instructions, driving the lifting module 9 to move. The lifting module 9 realizes vertical lifting action according to a specific mechanical structure and transmission method. The lifting action of module 9 is transmitted to crystal rod 8, which in turn causes the lifting bellows 7 to move up and down. Crystal rod 8 is fixedly installed below the lifting bellows 7, so it moves up and down with the lifting bellows 7. Crystal rod 8 performs a stable lifting action in the magnetic fluid 2. If it is necessary to weigh an object during the lifting of crystal rod 8, when the object is placed on the weighing mounting plate 3, the weighing sensor 4 starts to work. The gravity of the object is transmitted to the weighing sensor 4 through the weighing mounting plate 3. The weighing sensor 4 converts the sensed gravity signal into a measurable signal such as an electrical signal. The signal output by the weighing sensor 4 is transmitted to the corresponding signal processing equipment. The signal processing equipment analyzes, converts and calculates the received signal to obtain accurate weight data, which can be displayed, stored or further transmitted as needed. After completing one lifting and weighing process, drive unit 11 works in reverse, causing lifting module 9 to drive crystal rod 8 and other components back to the initial position, preparing for the next work cycle.

[0024] In this embodiment of the invention, a sealing element 12 is provided below the weighing mounting lower plate 6. A sealing cavity 15 is fixedly connected to the sealing element 12 below the weighing mounting lower plate 6. The sealing element 12 is fixedly installed inside the sealing cavity 15. The lower part of the sealing cavity 15 is connected to the lifting bellows 7. The sealing element 12 is installed between the weighing mounting lower plate 6 and the sealing cavity 15, effectively preventing external gas or impurities from entering the device. In vacuum environment applications, this sealing structure is crucial, as it helps maintain the vacuum level inside the device and prevents the intrusion of external air or impurities from affecting the weighing accuracy and normal operation of the equipment. For example, if dust or other impurities enter, they may adhere to key components such as the crystal rod 8 and the weighing sensor 4, leading to increased measurement errors and even affecting the service life of the components. The sealing cavity 15 is connected to the lifting bellows 7, and under certain conditions... To a certain extent, it protects the lifting bellows 7 and the connected crystal rod 8 and other components. It can reduce the corrosion of these components by external factors, such as corrosive gases and humidity, and extend the service life of the components. At the same time, the sealing cavity 15 can also provide a relatively stable working environment for the internal components, reduce the interference caused by changes in the external environment, and make the lifting action of the crystal rod 8 more stable and reliable, thereby ensuring the stability and accuracy of the weighing process. The setting of these sealing structures makes the structure of the entire device more compact and reasonable, and the connection between various components is tighter. The cooperation between the sealing element 12 and the sealing cavity 15 not only improves the sealing performance of the device, but also enhances the overall mechanical strength and stability of the device. During the operation of the device, it can better withstand various forces from the inside and outside, ensuring that the device can work normally under complex working conditions.

[0025] In this embodiment of the invention, sealing elements 2 13 and 3 14 are fixedly installed at the upper and lower ends of the weighing mounting upper plate 3 and the weighing mounting lower plate 6, respectively. The fixed installation of sealing elements 2 13 and 3 14 further enhances the sealing performance of the entire weighing structure. They effectively block gas and impurities that may enter through the gap between the weighing mounting upper plate 3 and the weighing mounting lower plate 6, forming a multi-layered sealing protection system with the previous sealing element 1 12 and sealing cavity 15. This better maintains the vacuum environment inside the device, providing more reliable vacuum protection for components such as the weighing sensor 4, thereby ensuring that the weighing accuracy is not affected by external factors. Sealing elements 2 13 and 3 14 directly surround the mounting position of the weighing sensor 4, providing more targeted protection for the weighing sensor 4 and preventing external corrosive substances, dust, etc., from contacting it, thus reducing the impact of external factors. The sealing environment helps maintain the performance stability of the load cell 4, making the measurement data more accurate and reliable. The presence of these two seals can reduce the flow and fluctuation of airflow inside the device. During the operation of the device, especially when the crystal rod 8 is raised or lowered, the internal airflow may change. The seals 13 and 14 can limit the range of airflow influence, prevent the airflow from generating additional force on the load cell 4, prevent the resulting weighing error, and improve the accuracy and stability of weighing. Their installation makes the connection between the upper weighing mounting plate 3 and the lower weighing mounting plate 6 tighter and more stable, enhancing the overall integrity of this local structure. When the device is subjected to external forces such as vibration and impact, it can better maintain the integrity of the structure, ensuring that the weighing device can work normally under various complex working conditions and will not affect the weighing effect due to structural loosening.

[0026] Working Principle: Based on actual work requirements, the operator inputs a start command at the control terminal. Upon receiving the command, the drive unit 11 starts operating according to a preset program and parameters, providing power to the lifting module 9. The drive unit 11 drives the lifting module 9 to move, achieving precise vertical lifting motion. During the lifting process, the motion parameters of the lifting module 9 (such as speed and displacement) are precisely controlled by the drive unit 11 to meet different work requirements. The lifting motion of the lifting module 9 transmits the motion to the crystal rod 8. The movement of the lifting module 9 causes the lifting bellows 7 to move vertically. Because the crystal rod 8 is fixedly installed below the lifting bellows 7... Therefore, the crystal rod 8 moves up and down with the lifting bellows 7. The crystal rod 8 stably lifts and lowers within the magnetofluid 2. The magnetofluid 2 not only acts as a seal to prevent external gas from entering the device, but also provides stable support and guidance for the lifting and lowering of the crystal rod 8, ensuring that the crystal rod 8 remains vertical during the lifting and lowering process and avoiding swaying or deviation, thereby ensuring the stability of the entire device. After the crystal rod 8 is lifted and lowered to the appropriate position, the object to be weighed is placed on the weighing mounting plate 3. The weight of the object is transmitted to the weighing sensor 4 through the weighing mounting plate 3. After sensing the gravity, the sensitive element inside the weighing sensor 4 converts it into electrical current. Measurable signals such as load cells are transmitted through a circuit. During this process, seals 13 and 14 surround the load cell 4, effectively reducing interference from internal airflow and external impurities, ensuring the load cell 4 can accurately sense gravity signals. The electrical signal output by the load cell 4 is transmitted to the corresponding signal processing equipment (such as a data acquisition card or controller) via a connection line. The signal processing equipment analyzes, converts, and calculates the received signal. First, it filters the signal to remove noise interference. Then, based on the calibration data and characteristic parameters of the load cell 4, it converts the electrical signal into a corresponding weight value. The processed precise weight data is displayed on a display device (such as a screen, computer terminal, etc.) for operators to view in real time. At the same time, the data is also stored in a storage device (such as a hard drive, memory card, etc.) for subsequent query and analysis. In addition, depending on actual needs, the weight data can also be transmitted to other devices or systems via the network to achieve data sharing and further processing. After completing one lifting and weighing process, the operator inputs a reset command at the control terminal. After receiving the command, the drive unit 11 reverses its operation, driving the lifting module 9 to move in the opposite direction, so that components such as the crystal rod 8 return to their initial positions, preparing for the next work cycle.

Claims

1. A high-precision lifting weighing device in a vacuum environment, comprising: The furnace lower cover (1) and the mounting seat (10) are characterized in that: the furnace lower cover (1) is arranged on the left side of the mounting seat (10), a magnetic fluid (2) is arranged below the furnace lower cover (1), a weighing sensor (4) is arranged below the magnetic fluid (2), a lifting module (9) is fixedly arranged in the mounting seat (10), a driving unit (11) is fixedly arranged on the upper end of the mounting seat (10), and the driving unit (11) is arranged in a matched mode with the lifting module (9).

2. The high-precision lifting and weighing device in a vacuum environment according to claim 1, characterized in that: The bottom of the magnetic fluid (2) is fixedly provided with a weighing installation upper plate (3), the upper end of the weighing sensor (4) is fixedly connected with the weighing installation upper plate (3), the bottom of the weighing sensor (4) is fixedly provided with a weighing installation lower plate (6), and the weighing installation upper plate (3) and the weighing installation lower plate (6) are sleeved with a bellows (5) in the middle.

3. The high-precision lifting and weighing device in a vacuum environment according to claim 2, characterized in that: The bottom of the weighing installation lower plate (6) is provided with a lifting bellows (7), the bottom of the lifting bellows (7) is fixedly provided with a crystal rod (8), and the crystal rod (8) is assembled in the magnetic fluid (2).

4. The high-precision lifting and weighing device in a vacuum environment according to claim 3, characterized in that: The bottom of the weighing installation lower plate (6) is provided with a sealing element one (12), the bottom of the weighing installation lower plate (6) is fixedly connected with a sealing cavity (15), the sealing element one (12) is fixedly arranged in the sealing cavity (15), and the bottom of the sealing cavity (15) is connected with the lifting bellows (7).

5. The high-precision lifting and weighing device in a vacuum environment according to claim 2, characterized in that: The weighing installation upper plate (3) and the weighing installation lower plate (6) are respectively fixedly provided with a sealing element two (13) and a sealing element three (14) at the upper and lower ends.

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