High-power lens film temperature excursion test system

Abstract

The utility model belongs to the technical field of high-power lens film layers, and particularly relates to a high-power lens film layer temperature excursion test system, which comprises a computer, the computer is connected with an optical fiber laser through an RS232 serial port so as to adjust the output mode, frequency and power of the optical fiber laser, the right side of the optical fiber laser is provided with a laser collimating head, and the laser collimating head is connected with the computer. The right side of the optical fiber laser is provided with a bearing assembly used for supporting a sample, one side between the optical fiber laser and the bearing assembly is provided with a thermal imager, and the thermal imager is connected with a computer through a USB line, so that an infrared image can be uploaded to the computer; a concave mirror is arranged on the right side of the bearing assembly so that the effect of diffusing laser energy can be achieved. The system provided by the utility model not only is simple in structure and convenient to operate, but also is suitable for testing all lens film layers, and the cost investment is reduced to a certain extent.

Description

Technical Field

[0001] This utility model relates to the field of high-power lens coating technology, specifically a high-power lens coating temperature drift testing system. Background Technology

[0002] Currently, the development of the manufacturing industry has led to the widespread application of high-power lasers and corresponding optical systems, and the proportion of high-power laser processing equipment in the manufacturing industry is constantly increasing. In kilowatt and megawatt-level laser processing equipment, optical lenses and their surface coatings play a crucial role in the laser processing system. They ensure that the system achieves the corresponding high-power laser output and processing accuracy, and determine the overall system performance, service life, and environmental stability.

[0003] The manufacturing of processing heads and the protection lenses on laser processing machines place high demands on the absorption of thin films. Many researchers have conducted extensive studies on film absorption and damage, and have built laser damage testing devices. For many years, the weak absorption testing of optical lens films has been an important technology for high-power laser thin films, and numerous domestic and international publications have reported on this topic. Spectrophotometry or ellipsometrics are commonly used, with laser calorimetry and photothermal deflection methods being the two main approaches for weak absorption. Laser calorimetry uses a laser as a heating source to measure the temperature rise of the film; photothermal deflection also uses a laser as a heating source, measuring the amount of laser deflection caused by air disturbance on the film surface using a four-quadrant detector.

[0004] The advantages of the two methods mentioned above are high sensitivity, reaching the 0.1 ppm level. The disadvantage is that they use very low-power lasers, typically in the watt range, making it difficult to characterize the nonlinear absorption state of the film layer near the laser damage threshold. Therefore, a high-power lens film temperature drift testing system is invented. Utility Model Content

[0005] To solve the above-mentioned technical problems, according to one aspect of the present invention, the present invention provides the following technical solution:

[0006] A high-power lens coating temperature drift testing system includes a computer connected to a fiber laser via an RS232 serial port to adjust the output mode, frequency, and power of the fiber laser. A laser collimator is located on the right side of the fiber laser to collimate and parallelize the output laser beam. A support assembly for supporting the sample is located on the right side of the fiber laser. A thermal imager is located on one side between the fiber laser and the support assembly, and the thermal imager is connected to the computer via a USB cable to upload infrared images. A concave mirror is located on the right side of the support assembly to diffuse laser energy, and a light trap is located on the right side of the concave mirror to absorb the laser beam.

[0007] In a preferred embodiment of the high-power lens coating temperature drift testing system described in this utility model, the supporting component includes:

[0008] Sample stage;

[0009] Adjustment components used to adjust the position of the sample stage;

[0010] A clamping assembly for holding the sample, and the clamping assembly is located on top of the sample stage.

[0011] In a preferred embodiment of the high-power lens coating temperature drift testing system described in this utility model, the adjustment component includes:

[0012] Base plate;

[0013] The first linear motor is fixedly mounted on the top of the base plate.

[0014] In a preferred embodiment of the high-power lens coating temperature drift testing system described in this utility model, the adjustment component further includes:

[0015] The support plate is fixedly mounted on the moving part of the first linear motor;

[0016] The second linear motor is fixedly mounted on the top of the support plate, and the second linear motor and the first linear motor are arranged in a cross shape.

[0017] In a preferred embodiment of the high-power lens coating temperature drift testing system described in this utility model, the adjustment component further includes:

[0018] A servo motor is fixedly mounted on the moving part of the second linear motor;

[0019] The first cylinder is fixedly mounted on the output shaft of the servo motor via a flange, and the piston rod of the first cylinder is fixedly mounted on the sample stage.

[0020] In a preferred embodiment of the high-power lens coating temperature drift testing system described in this utility model, the clamping assembly includes:

[0021] Side panels: Several side panels are fixedly installed on the top of the sample stage;

[0022] The second cylinder is fixedly mounted on the outer side of the side plate;

[0023] The extrusion plate is fixedly mounted on the piston rod of the second cylinder.

[0024] Compared with existing technologies:

[0025] The system designed in this invention is not only simple in structure and easy to operate, but also applicable to all lens coating tests, thus reducing costs to a certain extent. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the process of this utility model;

[0027] Figure 2 This is a front view schematic diagram of the load-bearing component of this utility model;

[0028] Figure 3 This is a top view of the clamping assembly of this utility model;

[0029] Figure 4 This is a top view of a partial structure of the adjustment component of this utility model;

[0030] Figure 5 This is a schematic diagram of the data processing of this utility model.

[0031] In the diagram: 1. Computer; 2. Fiber laser; 3. Laser collimator; 4. Thermal imager; 5. Placement assembly; 50. Base plate; 51. First linear motor; 52. Support plate; 53. Second linear motor; 54. First cylinder; 55. Sample stage; 56. Side plate; 57. Second cylinder; 58. Extrusion plate; 6. Concave mirror; 7. Light trap. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0033] This invention provides a high-power lens coating temperature drift testing system. Please refer to [link / reference]. Figures 1-5 The system includes a computer 1 connected to a fiber laser 2 via an RS232 serial port, allowing adjustment of the fiber laser 2's output mode (continuous or pulsed), frequency, and power. A laser collimator 3 is located on the right side of the fiber laser 2 to collimate and parallelize the output laser. A support assembly for sample support is also located on the right side of the fiber laser 2. A thermal imager 4 is located between the fiber laser 2 and the support assembly, connected to the computer 1 via a USB cable to upload infrared images. A concave mirror 6 is located on the right side of the support assembly to diffuse laser energy and prevent high-energy-density laser light from directly entering the light trap 7. The light trap 7 is located on the right side of the concave mirror 6 to absorb the laser light. In actual operation, the fiber laser 2 and laser collimator 3 can be cooled by a water-cooling system, and a protective cover can be installed on the right side of the support assembly to prevent laser glare from escaping.

[0034] Among them, the fiber laser 2 is the YLLS-2000-W single-mode laser from Guanghui (Shanghai) Laser Technology Co., Ltd., with a wavelength of 1080±10nm, a maximum continuous output of 2KW laser, and a power stability of <5%; the thermal imager is the Hikvision DS-2TP31-3AUF model, with a resolution of 240*320 and a thermal sensitivity of 0.05℃.

[0035] The support assembly includes: a sample stage 55; an adjustment assembly for adjusting the position of the sample stage 55; and a clamping assembly for clamping the sample, wherein the clamping assembly is located on the top of the sample stage 55.

[0036] The adjustment components include: a base plate 50, a first linear motor 51, a support plate 52, a second linear motor 53, a first cylinder 54, and a servo motor;

[0037] The first linear motor 51 is fixedly mounted on the top of the base plate 50. The moving part of the first linear motor 51 is fixedly mounted on the support plate 52. The second linear motor 53 is fixedly mounted on the top of the support plate 52, and the second linear motor 53 and the first linear motor 51 are arranged in a cross shape. The moving part of the second linear motor 53 is fixedly mounted on the servo motor. The output shaft of the servo motor is fixedly mounted on the first cylinder 54 through a flange, and the piston rod of the first cylinder 54 is fixedly mounted on the sample stage 55. By setting the first linear motor 51, the second linear motor 53 and the first cylinder 54, the X, Y and Z positions of the sample stage 55 can be adjusted. In addition, the horizontal angle of the sample stage 55 can be adjusted by the servo motor. The first cylinder 54 is preferably the cylinder in patent CN105402197A.

[0038] The clamping assembly includes: a side plate 56, a second cylinder 57, and a pressing plate 58;

[0039] Several side plates 56 are fixedly installed on the top of the sample stage 55. A second cylinder 57 is fixedly installed on the outside of the side plates 56. A pressing plate 58 is fixedly installed on the piston rod of the second cylinder 57. The second cylinder 57 is configured to enable the pressing plate 58 to fix the sample.

[0040] The operating steps of this utility model are as follows:

[0041] Thermal imager adjustment

[0042] The thermal imager has a temperature resolution of 0.05℃ and is sensitive to changes in ambient temperature. Experiments revealed that the laser light passing through the lens heats the air, causing the optical bench to heat up, especially the screws and knobs without matte finish, reducing the contrast of the infrared image and affecting temperature judgment. After multiple experiments, the position of the thermal imager was adjusted, setting the imaging focus at 180mm to avoid the rapidly heating screws in the field of view. The remaining area was fitted with a black rubber aperture to block most stray light, resulting in better infrared image contrast. During the experiment, even after laser irradiation for more than 40 minutes, the ambient temperature around the sample remained below 35℃, generally around 30℃.

[0043] Sample stage

[0044] By adjusting the components, the sample surface normal can be made to form an angle of approximately 7° with the incident direction of the laser beam. The position adjustment is based on the indicator red light of the fiber laser, thus preventing reflected light from returning to the collimator.

[0045] Experimental and test results

[0046] Sample preparation

[0047] All substrates used are polished and made of JGS1 quartz. All film systems were deposited using Xingnan Technology's ZZS-900 coating machine, which is a dual-molecular pump high-vacuum system equipped with dual guns and an SQC-310 quartz film thickness control system. The main film systems include a double-layer HfO2 / SiO2 1065nm single-wavelength antireflection film, 15 layers of HfO2 / SiO2 1065nm, 808nm, and 632nm three-wavelength antireflection films, and 6 layers of TiO2 / SiO2 visible light antireflection films.

[0048] Testing process

[0049] The entire testing platform was placed in a temperature-stable environment, with the ambient temperature set at 23±0.1 degrees Celsius. The sample was placed on the sample stage and clamped, and waited for about 10 minutes to allow the temperature of the substrate holder and the sample to stabilize, with the temperature difference in the thermal image being less than 3 degrees Celsius. The fiber laser was then started at 30% of its maximum power, and the power was gradually increased according to the temperature rise in the thermal image, observing the temperature stability. If the film layer heated up too quickly, the laser output was stopped to avoid damaging the film layer.

[0050] Test Results and Analysis

[0051] Test results for the JGS1 substrate and several antireflective coatings are shown in [the table below]. Figure 5 .

[0052] Figure 5The image is an infrared thermogram of the JSG1 coating. After the substrate was irradiated with a 100% power laser for 5 minutes, the substrate area turned dark purple. Compared with the corresponding pseudo-color temperature bar, it remained almost at the ambient temperature of xx, with no obvious temperature change. This indicates that the absorption of the substrate is extremely small. At this power density, the absorption of the material can hardly cause any observable change in the surface temperature. The influence of the substrate can be ruled out in the subsequent film system experiments.

[0053] The lens is now wiped with a special solution to check the smoothness of the lens surface.

[0054] Install the sample to be tested on the fixture and wait 10 minutes to allow the sample to reach the same temperature as the environment.

[0055] Adjust the position of the thermal imager to ensure accurate capture of temperature changes in the lens.

[0056] Turn on the fiber laser, first use the indicator lights to adjust it, and carefully observe the overall optical path to ensure there is no stray light leakage.

[0057] After confirming everything is correct, record the initial temperature. Turn on the fiber laser to emit laser light and start timing simultaneously.

[0058] The temperature of the thermal imager was recorded every 5 minutes for 10 sets, for a total of 50 minutes.

[0059] The collected temperature data was compiled into a table. The data was then analyzed.

[0060] Although the present invention has been described above with reference to embodiments, various modifications can be made and components can be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the features in the embodiments disclosed in this invention can be combined with each other in any way. The lack of an exhaustive description of these combinations in this specification is merely for the sake of brevity and resource conservation. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A high power lens film layer temperature drift test system, comprising a computer (1), characterized in that, The computer (1) is connected with the fiber laser (2) through the RS232 serial port, so as to adjust the output mode, frequency and power of the fiber laser (2), the right side of the fiber laser (2) is provided with a laser collimation head (3), so as to collimate and emit the output laser in parallel, the right side of the fiber laser (2) is provided with a bearing assembly for supporting the sample, one side between the fiber laser (2) and the bearing assembly is provided with a thermal imager (4), and the thermal imager (4) is connected with the computer (1) through a USB line, so as to upload the infrared image to the computer (1), the right side of the bearing assembly is provided with a concave mirror (6), so as to diffuse the laser energy, and the right side of the concave mirror (6) is provided with a light trap (7), so as to absorb the laser.

2. The high power lens film layer temperature drift test system of claim 1, wherein, The bearing assembly comprises: a sample table (55); an adjusting assembly for adjusting the position of the sample table (55); a clamping assembly for clamping the sample, and the clamping assembly is arranged on the top of the sample table (55).

3. The high power lens film layer temperature drift test system of claim 2, wherein, The adjusting assembly comprises: a bottom plate (50); a first linear motor (51) fixedly installed on the top of the bottom plate (50).

4. The high power lens film layer temperature drift test system of claim 3, wherein, The adjusting assembly further comprises: a support plate (52), a mover seat on the first linear motor (51) fixedly installs the support plate (52); a second linear motor (53) fixedly installed on the top of the support plate (52), and the second linear motor (53) and the first linear motor (51) are arranged in a cross shape.

5. The high power lens film layer temperature drift test system of claim 4, wherein, The adjusting assembly further comprises: a servo motor, a mover seat on the second linear motor (53) fixedly installs the servo motor; a first air cylinder (54), an output shaft of the servo motor is fixedly installed with the first air cylinder (54) through a flange, and a piston rod of the first air cylinder (54) is fixedly installed with the sample table (55).

6. The high power lens film layer temperature drift test system of claim 2, wherein, The clamping assembly comprises: a side plate (56), a plurality of side plates (56) are fixedly installed on the top of the sample table (55); a second air cylinder (57) fixedly installed on the outside of the side plate (56); a pressing plate (58), a piston rod of the second air cylinder (57) is fixedly installed with the pressing plate (58). The computer (1) is connected with the fiber laser (2) through the RS232 serial port, so as to adjust the output mode, frequency and power of the fiber laser (2), the right side of the fiber laser (2) is provided with a laser collimation head (3), so as to collimate and emit the output laser in parallel, the right side of the fiber laser (2) is provided with a bearing assembly for supporting the sample, one side between the fiber laser (2) and the bearing assembly is provided with a thermal imager (4), and the thermal imager (4) is connected with the computer (1) through a USB line, so as to upload the infrared image to the computer (1), the right side of the bearing assembly is provided with a concave mirror (6), so as to diffuse the laser energy, and the right side of the concave mirror (6) is provided with a light trap (7), so as to absorb the laser. The bearing assembly comprises: a sample table (55); an adjusting assembly for adjusting the position of the sample table (55); a clamping assembly for clamping the sample, and the clamping assembly is arranged on the top of the sample table (55). The adjusting assembly comprises: a bottom plate (50); a first linear motor (51) fixedly installed on the top of the bottom plate (50). The adjusting assembly further comprises: a support plate (52), a mover seat on the first linear motor (51) fixedly installs the support plate (52); a second linear motor (53) fixedly installed on the top of the support plate (52), and the second linear motor (53) and the first linear motor (51) are arranged in a cross shape. The adjusting assembly further comprises: a servo motor, a mover seat on the second linear motor (53) fixedly installs the servo motor; a first air cylinder (54), an output shaft of the servo motor is fixedly installed with the first air cylinder (54) through a flange, and a piston rod of the first air cylinder (54) is fixedly installed with the sample table (55). The clamping assembly comprises: a side plate (56), a plurality of side plates (56) are fixedly installed on the top of the sample table (55); a second air cylinder (57) fixedly installed on the outside of the side plate (56); a pressing plate (58), a piston rod of the second air cylinder (57) is fixedly installed with the pressing plate (58).

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