Self-adaptive Hall measuring rod based on sample thermal deformation

Abstract

The utility model provides a self-adaptive Hall measuring rod based on thermal deformation of a sample, and belongs to the field of material testing. In the vacuum cavity of the Hall measuring rod, the free ends of the supporting rod, the movable electrode and the movable Hall probe are all arranged in the lead cavity and sequentially penetrate through the middle supporting piece to reach the test cavity. The movable electrode and the movable Hall probe are arranged in the threading cavity and respectively penetrate through the pressure spring and the force application fixing pieces, the force application fixing pieces are respectively fixed on the movable electrode and the movable Hall probe, and the upper ends of the force application fixing pieces are fixedly connected with the lower end of the pressure spring; the movable electrode penetrates through the sample table to be in contact with the horizontal plane of the inclined electrode wedge, and the inclined electrode wedge and the fixed electrode adjustably clamp a sample in the horizontal direction; the movable Hall probe penetrates through a central hole of the sample table to be opposite to the fixed Hall probe, and a sample is adjustably clamped in the vertical direction, so that sample clamping under thermal deformation is adaptively completed. According to the utility model, the accuracy and the stability of the electrical parameter measurement of the thermal deformation sample are improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to material test field especially relates to a kind of self-adapting hall measurement rod based on sample thermal deformation. BACKGROUND

[0002] The electrical transport performance is the key parameter of conductor / semiconductor material, and the electrical transport parameter of material needs to be tested when developing electronic components and devices by using conductor / semiconductor material, and the temperature will significantly affect the electrical transport parameter of material. On the one hand, the electrical transport parameter of conductor / semiconductor material sample at different temperatures will change with temperature, and on the other hand, the sample will expand and contract significantly when the temperature changes. When the conductor / semiconductor material needs to be continuously tested for electrical transport performance from low temperature to high temperature (70K-1300K), the sample that deforms thermally during testing needs to be kept in good contact with the probe at all times to accurately measure the electrical transport parameters such as carrier concentration and mobility.

[0003] In the prior art, the measurement method of electrical transport parameter for the sample with thermal deformation includes Hall measurement method and Van der Pauw measurement method, and in the two measurement methods, the contact method of sample and probe / electrode is adhesion or screw fixation. However, the adhesion is generally only suitable for use at lower temperature (<400K), and it is not easy to put and take sample; the screw fixation method is to fix the probe with certain elasticity and the sample together by screw, and due to the tightening force of different users, it is easy to cause poor contact of sample or crush the sample; and when measuring at high temperature, the sample may be crushed due to thermal expansion; when measuring at low temperature, the electrode / probe and the sample are not in good contact due to the contraction of sample and electrode / probe. UTILITY MODEL CONTENT

[0004] In view of the above defects or deficiencies in the prior art, the utility model aims to provide a self-adapting Hall measurement rod based on sample thermal deformation, which can measure the electrical transport parameter of sample with thermal deformation in the temperature range of 70K-1300K by structurally designing and optimizing the sample table, contact electrode and probe of Hall measurement rod, without damaging the sample, and can stably measure at full temperature range, thereby improving the accuracy and stability of electrical parameter measurement of sample with thermal deformation.

[0005] To achieve the above purpose, the utility model embodiment adopts the following technical solutions:

[0006] A self-adapting Hall measurement rod based on sample thermal deformation, the Hall measurement rod comprises: a vacuum cavity 1, a support rod 2, a sample table 3, an electrode 4, a Hall probe 5, a thermocouple 6, a compression spring 7 and a force applying fixture 8, wherein,

[0007] The vacuum cavity 1 is a sealed cavity, sequentially comprising a lead port 11, a lead cavity 12, a lead block 13, an upper lead column 14, a threading cavity 15, a ventilation hole 16, a lower lead column 17, a vacuum gauge pipe joint 18, and a test cavity 19 from top to bottom; the threading cavity 15 has a rectangular cross section, and an inner upper support plate 151 and an inner lower support plate 152 are symmetrically arranged on the upper side and the lower side inside the threading cavity 15; the test cavity 19 has a cylindrical shape; and the ventilation hole 16 is symmetrically arranged on both sides of the middle waist of the threading cavity 15.

[0008] The electrode 4 comprises a pair of movable electrodes 41, a pair of electrode bevels 42, and a fixed electrode 43; the Hall probe 5 comprises a pair of movable Hall probes 51 and a fixed Hall probe 52; the fixed Hall probe 52 is fixed to the bottom surface of the sample table 3 through a fixed probe mounting hole 36, the movable Hall probe 51 extends into the test cavity 19 from the lead cavity 12, passes through the lead block 13, the upper lead column 14, the threading cavity 15, the lower lead column 17, and the vacuum gauge pipe joint 18, and is opposite to the fixed Hall probe 52 through the movable probe through hole 33 of the sample table 3; the movable electrode 41 extends into the test cavity 19 from the lead cavity 12, passes through the lead block 13, the upper lead column 14, the threading cavity 15, the lower lead column 17, and the vacuum gauge pipe joint 18, and contacts the electrode bevel 42 arranged on the inclined surface of the sample table 3 through the movable electrode through hole 32 of the sample table 3; and the fixed electrode 43 is arranged on the opposite side of the electrode bevel 42.

[0009] A compression spring 7 and a force applying fixture 8 are arranged on the movable electrode 41 and the movable Hall probe 51 inside the threading cavity 15, respectively; one end of the compression spring 7 is supported on the lower surface of the inner upper support plate 151, the compression spring 7 is sleeved on the movable electrode 41 and the movable Hall probe 51, respectively, the other end of the compression spring 7 is fixed on the force applying fixture 8, and the force applying fixture 8 is fixed on the movable electrode 41 and the movable Hall probe 51, respectively.

[0010] As a specific embodiment of the utility model, the support rod 2 is arranged in the vacuum cavity 1, penetrates through the lead block 13, the upper lead column 14, the threading cavity 15, the lower lead column 17, and the vacuum gauge pipe joint 18 from the bottom of the lead cavity 12 to the lower end of the test cavity 19, and is provided with a tail end insulating piece 195 and a support rod adjusting nut 196 after penetrating through the sample table 3.

[0011] The sample table 3 is arranged inside the test cavity 19, has a cylindrical shape, and has an outer diameter smaller than the inner diameter of the test cavity 15; a pair of support column through holes 31 are arranged on the sample table 2, and a movable electrode through hole 32, a movable probe through hole 33, a thermocouple through hole 34, a fixed electrode mounting hole 35, a fixed probe mounting hole 36, and an inclined bevel surface 37 are symmetrically arranged with the center line of the two support column through holes as the axis of symmetry.

[0012] As a specific embodiment of the utility model, in the test cavity 19, the support rod 2 is sequentially provided with an adjusting spring 191, a spacer block 193, a sample table 3, a tail end insulation piece 195 and a support rod adjusting nut 196 from top to bottom.

[0013] As a specific embodiment of the utility model, the spacer block 193 is a cylinder, the outer diameter of which is smaller than the inner diameter of the test cavity 19, and the spacer block 193 is provided with a support rod through hole, a movable electrode through hole, a movable probe through hole and a thermocouple through hole.

[0014] As a specific embodiment of the utility model, when there are more than two spacer blocks 193, a support column 194 sleeved on the support rod 2 is arranged between every two spacer blocks 193.

[0015] As a specific embodiment of the utility model, in the region of the test cavity 19 provided with the adjusting spring 191, a handheld piece 192 is arranged on the movable electrode 41, the movable Hall probe 51 and the thermocouple 6.

[0016] As a specific embodiment of the utility model, the lead cavity 12 has an upper and lower detachable sealing flange, the upper side of which is provided with a lead port 11 for placing the support rod 2, the movable electrode 41, the movable Hall probe 51 and the thermocouple 6, the lower side of which is open and connected to a lead block 13, and the lead block 13 is connected to an upper lead column 14 in clamping position; the lead cavity 12 is left with the movable electrode lead, the movable Hall probe lead and the thermocouple lead after threading; from the lead block 13, the upper lead column 14, the cavity-in upper support plate 151 in the threading cavity 15, the cavity-in upper support plate 152, the lower lead column 17, the spacer block 193 and the sample table 3, the support column through hole, the contact electrode through hole, the probe through hole and the thermocouple through hole have the same position and hole diameter.

[0017] As a specific embodiment of the utility model, the lead block 13, the cavity-in upper support plate 151, the cavity-in lower support plate 152, the support rod 2, the spacer block 193, the support column 194 and the sample table 3 are all made of an insulating and heat insulating material with rigid shape.

[0018] When the Hall measurement rod is used for measurement, the process includes device installation, sample loading, sample testing and sample unloading; wherein,

[0019] When the device installation is performed:

[0020] Connect the lead block 13, the upper lead column 14, the threading cavity 15, the lower lead column 17, and the vacuum gauge joint 18 of the vacuum cavity 1; install the support rod 2, the movable electrode 41, the movable Hall probe 51, and the thermocouple 6; connect the lead cavity 12 and the lead port 11 on the lead block 13, so that the leads of the movable electrode, the movable Hall probe, and the thermocouple are placed in the lead cavity 12 and connected with external measuring equipment through the lead port 11 and sealed; at the lower end of the support rod, the tail end of the insulating piece 195 is sleeved on the lower side of the sample table, and the support rod adjusting nut 196 is connected at the end;

[0021] When loading the sample, the specific operation is as follows:

[0022] Clamp the sample between the movable Hall probe and the fixed Hall probe, so that the sample simultaneously contacts the fixed contact electrode on the front side and the vertical surface of the electrode bevel on the back side;

[0023] After loading the sample, before testing, the test cavity 19 is sleeved at the vacuum gauge joint 18, so that the connection part of the support rod below the vacuum gauge joint extends into the test cavity 19; the vacuum cavity 1 provides vacuum or protective atmosphere according to the testing requirements;

[0024] When testing the sample, the specific operation is as follows:

[0025] Connect the movable electrode lead, the movable Hall probe lead, and the thermocouple lead on the upper side of the lead cavity 12 to the test platform; place the test cavity 19 into the heating equipment to test the sample deformation at high temperature;

[0026] When unloading the sample, the specific operation is as follows:

[0027] After the test cavity is cooled, remove the vacuum or protective atmosphere, place the Hall measuring rod stably on the operation table, twist off the vacuum gauge joint, and remove the test cavity; move the movable electrode 41 and the movable Hall probe 51, and push the force applying fixture 8 to move a small distance to the compression spring 7, at this time the sample is no longer stressed, and the sample is removed with tweezers.

[0028] When loading and clamping the sample, the specific operation is as follows:

[0029] Step S1: move the movable electrode 41 and the movable Hall probe 51 through the hand-held piece 192 to compress the compression spring 7; temporarily fix the movable electrode 41 and the movable Hall probe 51 through the force applying fixture 8 to give the measured sample 9 more space;

[0030] Step S2: place the sample 9 so that the two samples are supported on the fixed Hall electrode 52, located between the two movable Hall probes 51 and the fixed Hall probe 52, and between the two electrode bevels 42 and the fixed electrode 43;

[0031] Step S3, respectively loosen the temporarily fixed movable electrode 41 and movable Hall probe 51, so that the movable electrode 41, electrode inclined wedge 42 and fixed electrode 43 clamp the sample 9 in the horizontal direction, while the movable Hall probe 51 and fixed Hall probe 52 clamp the sample 9 in the vertical direction;

[0032] Step S4, the test cavity 19 is sleeved to the vacuum gauge joint 18 from the adjusting nut 196 at the tail end of the support rod, the lead wire port 11 of the lead wire cavity 12 is sealed, and the movable electrode, the movable Hall probe and the thermocouple lead wire are connected; the air exchange port 16 is sealed, and the protective atmosphere or vacuum is connected.

[0033] When the sample deforms at high temperature during the sample test, in the vertical direction, the expansion of the sample 9 pushes the movable Hall probe 51 to move upwards, at this time, the force applying fixture 9 fixed on the movable Hall probe 51 in the lead wire cavity 15 compresses the compression spring 7, and the reaction force of the compression spring 7 makes the movable Hall probe 51 apply a reaction force on the sample 9, at this time, the movable Hall probe 51 and the fixed Hall probe 52 clamp the sample in the vertical direction; in the horizontal direction, the expansion of the sample 9 pushes the electrode inclined wedge 42 to slide upwards along the inclined side of the groove, so as to drive the movable electrode 41 in contact with the horizontal surface of the electrode inclined wedge 42 to move upwards, at this time, the force applying fixture 8 fixed on the movable electrode in the lead wire cavity 15 compresses the compression spring 7, and the reaction force of the compression spring 7 makes the movable electrode 41 apply a reaction force on the electrode inclined wedge 42 and transmit to the sample, at this time, the electrode inclined wedge 42 and the fixed electrode 43 clamp the sample 9 in the horizontal direction.

[0034] The technical scheme provided by the embodiment of the utility model has the following beneficial effects:

[0035] The utility model discloses a kind of self-adapting Hall measurement rods based on sample thermal deformation, when sample thermal deformation occurs in variable temperature environment, it can also maintain stable good contact with electrode / probe;After once pressure adjustment, even if different operators use, the force that each measured sample suffers will remain stable, improve the accuracy and precision of measurement;The sample step of the Hall measurement rod in the utility model is simple;Two samples can be measured simultaneously in one variable temperature, improve measurement efficiency.

[0036] Of course, any product or method implementing the utility model does not necessarily need to achieve all the advantages described above. BRIEF DESCRIPTION OF DRAWINGS

[0037] In order to more clearly illustrate the technical scheme in the embodiment of the utility model, the drawings needed in the embodiment description will be simply introduced as follows, and obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained according to these drawings without creative labor for those skilled in the art.

[0038] Figure 1 is the external and cross-section corresponding structure schematic view of the adaptive Hall measurement rod based on sample thermal deformation according to the embodiment of the present application;

[0039] Figure 2 is Figure 1 is the A part structure enlarged view of the adaptive Hall measurement rod shown in the figure;

[0040] Figure 3 is the sample table structure schematic view of the adaptive Hall measurement rod according to the embodiment of the present application;

[0041] Figure 4 is the sample installation schematic view of the adaptive Hall measurement rod according to the embodiment of the present application;

[0042] Figure 5 is the sample and electrode / probe contact force principle schematic view of the adaptive Hall measurement rod according to the embodiment of the present application.

[0043] Mark explanation:

[0044] 1-vacuum cavity;11-lead port;12-lead cavity;13-lead block;14-upper lead column;15-threading cavity;151-cavity upper support plate;152-cavity lower support plate;153-cover plate;16-vent hole;17-lower lead column;18-vacuum gauge tube joint;19-test cavity;191-adjusting spring;192-handpiece;193-isolation block;194-support column;195-tail end insulating piece;196-support rod adjusting nut;2-support rod;3-sample table;31-support column through hole;32-movable electrode through hole;33-movable probe through hole;34-thermocouple through hole;35-fixed electrode mounting hole;36-fixed probe mounting hole;37-inclined wedge surface;4-electrode;41-movable electrode;42-electrode inclined wedge;43-fixed electrode;5-Hall probe;51-movable Hall probe;52-fixed Hall probe;6-thermocouple;7-pressing spring;8-force fixing part;9-samples to be measured. DETAILED DESCRIPTION

[0045] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0046] It should be noted that similar reference numerals and letters refer to like items in the accompanying drawings, and therefore, once an item is defined in one drawing, it is not necessary to further define and explain it in subsequent drawings. In the description of the present application, the terms "first", "second", "third", "fourth" and the like are used only to distinguish descriptions, and cannot be understood as indicating or implying relative importance.

[0047] For the problem of electrical transport parameter test of conductor / semiconductor material, the utility model embodiment provides a kind of adaptive Hall measuring rod based on sample thermal deformation.For keeping the stable contact of electrode and probe and sample in measurement, the utility model embodiment designs a kind of new Hall sample rod that can be adaptive to the thermal deformation of sample in variable temperature environment, based on the stress action principle between electrode and probe and sample, the structure design of sample table, the structure design of contact electrode and probe, on the premise of guaranteeing that the length of electrode and probe is long enough, the end far from sample is lead wire at normal temperature, while compression spring structure is added, and the compression amount of this spring can make electrode / probe and sample closely contact.The temperature range that the Hall measuring rod of the utility model can measure is 70K~1300K, and in this temperature range, electrode / probe and sample are kept in sufficient contact, and stable measurement can be carried out in full temperature zone.

[0048] As Figures 1-4 The adaptive Hall measuring rod based on sample thermal deformation described in the utility model embodiment, including: vacuum cavity 1, support rod 2, sample table 3, electrode 4, Hall probe 5, thermocouple 6, compression spring 7 and force applying fastener 8.

[0049] The vacuum cavity 1 is a whole sealed cavity, and from top to bottom, it includes lead wire port 11, lead wire cavity 12, lead wire block 13, upper lead wire column 14, threading cavity 15, air exchange hole 16, lower lead wire column 17, vacuum gauge pipe joint 18 and test cavity 19.

[0050] The lead cavity 12 has detachable sealing flanges on the upper and lower sides, the upper side is provided with a lead port 11 for inserting the support rod 2, movable electrode 41, movable Hall probe 51 and thermocouple 6, the lower side is open to connect with the lead block 13, and then the upper lead column 14 is connected to realize clamping and docking. The lead port 11, lead cavity 12, lead block 13, upper lead column 14, air exchange hole 16, lower lead column 17, vacuum gauge tube joint 18 and test cavity 19 are cylindrical in shape. The lead port 11 is used for the introduction of the support rod 2, movable electrode 41, movable Hall probe 51 and thermocouple 6; the lead cavity 12 is used for the movable electrode lead, movable Hall probe lead and thermocouple lead after threading; from the lead block 13, upper lead column 14, cavity-in upper support plate 151 and cavity-in upper support plate 152 in the threading cavity 15, to the lower lead column 17, and the isolation block 193 and sample stage 3, the support column through hole, contact electrode through hole, probe through hole and thermocouple through hole have the same position and aperture.

[0051] The threading cavity 15 has a rectangular cross section, the front and back are sealed by detachable cover plates 153, and the air exchange hole 16 is arranged on the side of the threading cavity 15; preferably, the air exchange hole 16 is symmetrically arranged at the middle waist of the threading cavity 15, and a protective gas such as helium, argon or nitrogen can be introduced to provide the required atmosphere for the entire vacuum cavity 1. Preferably, the cavity-in upper support plate 151 and cavity-in lower support plate 152 are symmetrically arranged on the inside upper side and lower side of the threading cavity 15 to provide support for the support rod 2, movable electrode 41, movable Hall probe 51 and thermocouple 6 passing through. When the device is assembled before testing, the cover plates 153 are opened, the support rod 2, movable electrode 41, movable Hall probe 51 and thermocouple 6 are introduced into the test cavity 19 through the threading cavity 15, and the threading operation is completed; after threading is completed, the cover plates 153 are sealed and closed.

[0052] The movable electrode 41 and movable Hall probe 51 inside the threading cavity 15 are respectively provided with a compression spring 7 and a force applying fixture 8, one end of the compression spring 7 is supported on the lower surface of the cavity-in upper support plate 151, the compression spring 7 is sleeved on the movable electrode 41 and movable Hall probe 51 respectively, the other end of the compression spring 7 is fixed on the force applying fixture 8, and the force applying fixture 8 is fixed on the movable electrode 41 and movable Hall probe 51 respectively. When the movable electrode 41 and / or movable Hall probe 51 rises or falls due to thermal deformation of the sample 9, the force applying fixture 8 applies different forces to the compression spring 7, the reaction force of the compression spring 7 is transmitted to the movable electrode 41 and / or movable Hall probe 51 and the sample 9, so that the movable electrode 41 and / or movable Hall probe 51 and the sample 9 always maintain a contact state, thereby completing the test. Preferably, the force applying fixture 8 is fixed on the movable electrode 41 or movable Hall probe 51 by means of fastening screws, glue or the like.

[0053] The support rod 2 is arranged in the vacuum cavity 1, and penetrates the lead block 13, the upper lead column 14, the threading cavity 15, the lower lead column 17, the vacuum gauge joint 18, and the lower end of the test cavity 19 from the bottom of the lead cavity 12.

[0054] In the test cavity 19, the support rod 2 is sequentially provided with the adjusting spring 191, the isolation block 193, the sample table 3, the tail end insulation 195, and the support rod adjusting nut 196 from top to bottom. The isolation block 193 is a cylinder, and the outer diameter is smaller than the inner diameter of the test cavity 19. The isolation block 193 is provided with a support rod through hole, a movable electrode through hole, a movable probe through hole, a thermocouple through hole, so that the test element reaches the sample table, and at the same time, when the sample table 2 and the sample are heated, the isolation block 193 plays a heat insulation role. When the number of isolation blocks 193 is more than two, a support column 194 sleeved on the support rod 2 is arranged between every two isolation blocks 193. By arranging multiple isolation blocks 193, an isolation mode of multiple isolation blocks and air layers between the isolation blocks is formed, the heat of the sample table area is better insulated, the sample table area forms a nearly independent space, and the test under the sample heating state is completed.

[0055] In the test cavity 19, the region provided with the adjusting spring 191 is provided with a handheld piece 192 on the corresponding movable electrode 41, the movable Hall probe 51, and the thermocouple 6. Since the movable electrode 41, the movable Hall probe 51, and the thermocouple 6 are all slender and precise elements, they need to pass through a super-long distance. In order to facilitate the installation, the handheld piece 192 is arranged here, so that the movable electrode 41, the movable Hall probe 51, and the thermocouple 6 smoothly pass through the isolation block 193 and reach the sample table, and at the same time, the state of the movable electrode 41, the movable Hall probe 51, and the thermocouple 6 is not affected. The support rod adjusting nut 196 is used to adjust the effective length of the support rod 2 in the test cavity 19.

[0056] The sample table 3 is arranged in the test cavity 19, and is a cylinder with an outer diameter smaller than the inner diameter of the test cavity 15. The sample table 2 is provided with a pair of support column through holes 31, and a center line of the two support column through holes is a symmetric axis. The movable electrode through hole 32, the movable probe through hole 33, the thermocouple through hole 34, the fixed electrode mounting hole 35 (not shown in the figure), the fixed probe mounting hole 36, and the inclined wedge surface 37 are symmetrically arranged. The middle of the sample table 3 is a reserved positioning hole.

[0057] The bottom surface of the sample stage 3 is connected with the fixed Hall probe 52 through the fixed probe mounting hole 36, so that the free end of the fixed Hall probe 52 extends out of the groove on the bottom surface of the sample stage 3 and is opposite to the movable Hall probe 51 which extends out through the upper side of the groove; the inclined side of the groove is in sliding contact with the bottom surface of the electrode inclined wedge 52, and the other end of the groove which is opposite to the vertical surface of the electrode inclined wedge 52 is a vertical surface, and a fixed electrode 53 is arranged on the vertical surface opposite to the electrode inclined wedge 52 through the fixed electrode mounting hole 35. The electrode inclined wedge 52 is a triangular body including an inclined surface, a horizontal surface and a vertical surface. The horizontal surface of the electrode inclined wedge 52 is in contact with the end of the movable electrode 51.

[0058] The electrode 4 includes a pair of movable electrodes 41, a pair of electrode inclined wedges 42 and a fixed electrode 43; the Hall probe 5 includes a pair of movable Hall probes 51 and a fixed Hall probe 52. The fixed Hall probe 52 is fixed to the bottom surface of the sample stage 3 through the fixed probe mounting hole 36, and the movable Hall probe 51 extends into the test cavity 19 from the lead block 13, the upper lead column 14, the threading cavity 15, the lower lead column 17 and the vacuum gauge joint 18 in the lead cavity 12, passes through the movable probe through hole 33 of the sample stage 3 and is opposite to the fixed Hall probe 52; the movable electrode 41 extends into the test cavity 19 from the lead block 13, the upper lead column 14, the threading cavity 15, the lower lead column 17 and the vacuum gauge joint 18 in the lead cavity 12, passes through the movable electrode through hole 32 of the sample stage 3 and is in contact with the electrode inclined wedge 42 arranged on the inclined surface of the sample stage 3; the fixed electrode 43 is arranged on the opposite side of the electrode inclined wedge 42.

[0059] The movable Hall probe 51 passes through the movable probe through hole 33 and is opposite to the fixed Hall probe 52, and the sample 9 is loaded in a clamping manner therebetween; when the sample 9 is loaded, the upper side of the sample 9 is against the movable Hall probe 51, the lower side is against the fixed Hall probe 52, the front side is against the fixed electrode 43, and the rear side is against the vertical surface of the electrode inclined wedge 42. In general, a pair of samples 9 are symmetrically loaded on the sample stage 3, the samples can be the same or different, the two samples correspond to the pair of movable electrodes 41, and then simultaneously contact the fixed electrode 43, so as to form an electrode test loop, and then correspond to the pair of movable Hall probes 51, and then simultaneously contact the fixed Hall probe 52, so as to form a Hall probe test loop. One of the samples 9 can also be replaced by a standard sample, which can ensure the formation of the electrode test loop and the Hall probe test loop.

[0060] In a specific application example, all fixed parts and support parts, including the lead block 13, the cavity-in upper support plate 151, the cavity-in lower support plate 152, the support rod 2, the isolation block 193, the support column 194 and the sample stage 3, are made of a material with a rigid shape, such as ceramic.

[0061] In this embodiment, the movable electrode 41, the electrode bevel 42 and the fixed electrode 43 are clamping the sample 9 in horizontal direction, and the movable Hall probe 51 and the fixed Hall probe 52 are clamping the sample 9 in vertical direction, so the sample 9 is in the best test state of cuboid shape.

[0062] When measuring by using the self-adaptive Hall measurement rod based on sample thermal deformation as described above, the measuring process includes equipment installation, sample loading, sample testing and sample unloading.

[0063] When installing the equipment, the following steps are taken:

[0064] First, connect the lead block 13, the upper lead post 14, the threading cavity 15, the lower lead post 17 and the vacuum gauge joint 18 of the vacuum cavity 1;

[0065] Pass the support rod 2 through the lead block 13, the upper lead post 14, the upper cavity support plate 151, the threading cavity 15, the lower cavity support plate 152, the lower lead post 17, the vacuum gauge joint 18, the adjusting spring 191, the isolation block 193, the support column 194, the sample stage 3 and the tail end insulation 195 in sequence, and then connect the support rod 2 with the support rod adjusting nut 196 at the end of the support rod 2; then pass the movable electrode 41 and the movable Hall probe 51 through the lead block 13, the upper lead post 14, the upper cavity support plate 151, the compression spring 7, the force applying fixture 8, the threading cavity 15, the lower cavity support plate 152, the lower lead post 17, the vacuum gauge joint 18, the handpiece 192, the isolation block 193 and the support column 194 in sequence to the sample stage 3, and then pass the movable Hall probe 51 through the sample stage 3 to face the fixed Hall probe 52 fixed on the bottom surface of the sample stage 3, and pass the movable electrode 41 through the sample stage 3 to contact the horizontal surface of the electrode bevel 53 slidingly connected to the sample stage 3, so that the vertical surface of the electrode bevel 52 faces the fixed electrode 53 fixed on the opposite side of the sample stage 3, and then pass the thermocouple through the lead block 13, the upper lead post 14, the upper cavity support plate 151, the threading cavity 15, the lower cavity support plate 152, the lower lead post 17, the vacuum gauge joint 18, the handpiece 192, the isolation block 193 and the support column 194 in sequence to the sample stage 3;

[0066] Connect the lead cavity 12 and the lead port 11 to the lead block 13, so that the leads of the movable electrode, the movable Hall probe and the thermocouple are placed in the lead cavity 12 and connected with the external measuring equipment through the lead port 11 and sealed; connect the tail end insulation 195 to the lower end of the support rod and the lower side of the sample stage, and then connect the support rod adjusting nut 196 to the end;

[0067] After the sample is clamped by the sample stage 3, the test cavity 19 is connected to the vacuum gauge joint 18, so that the connecting parts of the support rods below the vacuum gauge joint extend into the test cavity 19; and the required atmosphere or vacuum pump is connected to the air exchange hole 16 according to the atmosphere requirement.

[0068] When the sample is loaded or clamped, the following specific operations are performed:

[0069] In step S1, the movable electrode 41 and the movable Hall probe 51 are moved by the hand-held piece 192, so that the compression spring 7 is compressed; the movable electrode 41 and the movable Hall probe 51 are temporarily fixed by the force applying fixture 8, and more space is left for the sample 9 to be measured;

[0070] In step S2, the sample 9 is placed, so that two samples (or one sample and one standard sample) are supported on the fixed Hall electrode 52, located between the two movable Hall probes 51 and the fixed Hall probe 52, and between the two electrode inclined wedges 42 and the fixed electrode 43;

[0071] In step S3, the temporarily fixed movable electrode 41 and the movable Hall probe 51 are loosened, so that the movable electrode 41, the electrode inclined wedge 42 and the fixed electrode 43 clamp the sample 9 in the horizontal direction, and the movable Hall probe 51 and the fixed Hall probe 52 clamp the sample 9 in the vertical direction;

[0072] In step S4, the test cavity 19 is connected to the vacuum gauge joint 18 from the adjusting nut 196 at the tail end of the support rod, so that the lead port 11 of the lead cavity 12 is sealed, and the movable electrode, the movable Hall probe and the thermocouple lead are connected; the air exchange hole 16 is sealed or connected to the corresponding gas cylinder or connected to the vacuum pump.

[0073] Through the above steps, the sample loading is completed.

[0074] When the sample is tested:

[0075] The movable electrode lead, the movable Hall probe lead and the thermocouple lead on the upper side of the lead cavity 12 are connected to the test platform; the test cavity 19 is placed in the heating equipment, and the sample deformation test under high temperature is performed. The test platform is an external signal acquisition device, and the external signal acquisition device includes a voltmeter, a power meter and a computer, etc.

[0076] When the sample deforms at high temperature, in the vertical direction, the expansion of sample 9 pushes the movable Hall probe 51 upward. At this time, the force-applying fastener 9 fixed to the movable Hall probe 51 in the threading cavity 15 compresses the compression spring 7. The reaction force of the compression spring 7 causes the movable Hall probe 51 to apply a reaction force to the sample 9. At this time, the movable Hall probe 51 and the fixed Hall probe 52 clamp the sample in the vertical direction. In the horizontal direction, the expansion of sample 9 pushes the electrode wedge 42 to slide upward along the inclined side of the groove, thereby causing the movable electrode 41, which is in contact with the horizontal surface of the electrode wedge 42, to move upward. At this time, the force-applying fastener 8 fixed to the movable electrode in the threading cavity 15 compresses the compression spring 7. The reaction force of the compression spring 7 causes the movable electrode 41 to apply a reaction force to the electrode wedge 42 and transmit it to the sample. At this time, the electrode wedge 42 and the fixed electrode 43 clamp the sample 9 in the horizontal direction. This ensures the stable clamping of the sample during the high-temperature measurement process.

[0077] Before replacing the vacuum or inert gas environment, place the Hall measuring rod on the corresponding support, place the sample stage 3 on the Hall measuring rod in the heating furnace, and make the plane of the sample stage on which the sample is placed perpendicular to the strong magnetic field; after replacing the vacuum or inert gas environment, connect the external device to control the heating furnace temperature, magnetic field direction, current direction, and collect Hall signals, etc.

[0078] When changing or unloading samples:

[0079] After the test chamber 19 has cooled down, remove the vacuum or protective atmosphere, place the Hall measuring rod stably on the operating table, unscrew the vacuum gauge connector 18, and remove the test chamber 19. Move the movable electrode 41 and the movable Hall probe 51 to push the force-applying fastener 8 a short distance towards the compression spring 7. At this point, the sample 9 is no longer under force, and the sample can be removed using tweezers or other tools. If the sample is to be replaced, the sample loading process should be followed; or if the sample is unloaded after the test is completed, a standard shim should be placed at the sample location, the test chamber should be reattached, and the Hall measuring rod should be retracted.

[0080] The principle behind maintaining stable contact between the sample and the electrode / probe during continuous temperature measurement is as follows:

[0081] First, the compression spring 7 is kept in a compressed state, and both the movable electrode 41 and the movable Hall probe 51 maintain pressure toward the sample stage 3;

[0082] On the one hand, the pressure of the movable electrode 41 is transmitted to the electrode wedge 42; due to the cooperation of the electrode wedge 42 with the angled structure on the sample stage, a portion of the pressure is decomposed, forming a lateral pressure that acts on the sample 9. The sample under test moves laterally and contacts the fixed electrode 43, so that the sample under test is subjected to lateral force and remains stable.

[0083] On the other hand, the pressure of the movable Hall probe 51 directly acts on one side of the measured sample, and makes the measured sample move longitudinally and contact the fixed Hall probe 52, so that the measured sample is longitudinally stressed and kept stable;

[0084] Finally, the electrode wedge 42, the fixed electrode 43, the movable Hall probe 51, the fixed Hall probe 52 and the sample are in square contact, and the frictional force is kept, so that the sample is stably fixed on the sample table 3; the pressure acting on the movable electrode 41 and the movable Hall probe 51 by the compression spring 7 is basically unchanged, when the measured sample, the ceramic sample table and the like are deformed by heat, the corresponding electrodes, probes and measured samples automatically adjust the position to keep stable contact.

[0085] In the continuous temperature change process, the principle of keeping the measured sample and the electrode / probe in stable contact is as shown in the figure: Figure 5 The structure of the electrode / probe matches the sample table, so that the electrode wedge 42, the fixed electrode 43, the movable Hall probe 51 and the fixed Hall probe 52 exert pressure on the measured sample in four directions, so that the sample is kept stable, respectively F 12 ,F 12 * ,F2,F2 * . Among them, the relative positions of the force points F 12 and F2 on the sample table can be automatically adjusted according to the thermal deformation of the measured sample.

[0086] As can be seen from the above technical scheme, the utility model provides a self-adaptive Hall measurement rod based on sample thermal deformation, so that the sample can also keep stable and good contact with the electrode / probe when the sample is deformed by heat in the temperature change environment; after one pressure adjustment, even if different operators use it, the force on each measured sample will be kept stable, which ensures the accuracy and high precision of the test; the sample placing step of the Hall measurement rod in the utility model is simple; two samples can be measured at the same time in one temperature change, which improves the test efficiency.

[0087] The above description is only the preferred embodiment of the utility model and the explanation of the applied technical principles, and is not intended to limit the scope of the claimed utility model, but only represents the preferred embodiment of the utility model. Those skilled in the art should understand that the utility model range involved in the utility model is not limited to the technical solutions formed by the specific combination of the above technical features, and should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the utility model concept. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor are within the scope of the utility model protection.

Claims

1. A self-adapting Hall measurement rod based on thermal deformation of a sample, characterized in that, The Hall measurement rod comprises a vacuum cavity (1), a support rod (2), a sample table (3), an electrode (4), a Hall probe (5), a thermocouple (6), a compression spring (7) and a force applying fixture (8); wherein, The vacuum cavity (1) is a sealed cavity, comprising in order from top to bottom a lead port (11), a lead cavity (12), a lead block (13), an upper lead post (14), a threading cavity (15), a ventilation hole (16), a lower lead post (17), a vacuum gauge tube joint (18) and a test cavity (19); the threading cavity (15) has a rectangular cross section, and an inner upper support plate (151) and an inner lower support plate (152) are symmetrically arranged on the inner upper side and lower side; the test cavity (19) has a cylindrical shape; the ventilation hole (16) is symmetrically arranged on both sides of the middle waist of the threading cavity (15); The electrode (4) comprises a pair of movable electrodes (41), a pair of electrode bevels (42) and a fixed electrode (43); the Hall probe (5) comprises a pair of movable Hall probes (51) and a fixed Hall probe (52); the fixed Hall probe (52) is fixed to the bottom surface of the sample table (3) through a fixed probe mounting hole (36), the movable Hall probe (51) passes through the lead block (13), the upper lead post (14), the threading cavity (15), the lower lead post (17), the vacuum gauge tube joint (18) and extends into the test cavity (19) from inside the lead cavity (12) and downward, passes through the movable probe through hole (33) of the sample table (3) and is opposite to the fixed Hall probe (52); the movable electrode (41) passes through the lead block (13), the upper lead post (14), the threading cavity (15), the lower lead post (17), the vacuum gauge tube joint (18) and extends into the test cavity (19) from inside the lead cavity (12) and downward, passes through the movable electrode through hole (32) of the sample table (3) and contacts the electrode bevel (42) arranged on the inclined surface of the sample table (3); the fixed electrode (43) is arranged on the opposite side of the electrode bevel (42); The compression spring (7) and the force applying fixture (8) are respectively arranged on the movable electrode (41) and the movable Hall probe (51) inside the threading cavity (15), one end of the compression spring (7) is supported on the lower surface of the inner upper support plate (151), the compression spring (7) is respectively sleeved on the movable electrode (41) and the movable Hall probe (51), the other end of the compression spring (7) is fixed on the force applying fixture (8), and the force applying fixture (8) is respectively fixed on the movable electrode (41) and the movable Hall probe (51).

2. The self-adapting Hall measurement rod based on thermal deformation of a sample according to claim 1, characterized in that, The support rod (2) is arranged in the vacuum cavity (1), passes through the lead block (13), the upper lead post (14), the threading cavity (15), the lower lead post (17) and the vacuum gauge tube joint (18) from the bottom of the lead cavity (12) to the lower end of the test cavity (19), and is provided with a tail end insulating piece (195) and a support rod adjusting nut (196) after passing through the sample table (3). The sample stage (3) is arranged inside the test cavity (19) and is cylindrical with an outer diameter smaller than the inner diameter of the test cavity (19); a pair of support column through holes (31) are arranged on the sample stage (3), and movable electrode through holes (32), movable probe through holes (33), thermocouple through holes (34), fixed electrode mounting holes (35), fixed probe mounting holes (36) and inclined wedge surfaces (37) are symmetrically arranged with the center line of the two support column through holes as the axis of symmetry.

3. The self-adapting Hall measurement rod based on thermal deformation of a sample according to claim 1, characterized in that, In the test cavity (19), the support rod (2) is sequentially provided from top to bottom with an adjusting spring (191), a spacer block (193), a sample stage (3), a tail end insulating part (195) and a support rod adjusting nut (196).

4. The self-adapting Hall measurement rod based on thermal deformation of a sample according to claim 3, characterized in that, The spacer block (193) is cylindrical with an outer diameter smaller than the inner diameter of the test cavity (19) and is provided with support rod through holes, movable electrode through holes, movable probe through holes and thermocouple through holes.

5. The self-adapting Hall measurement rod based on thermal deformation of a sample according to claim 3, characterized in that, When there are more than two spacer blocks (193), a support column (194) is arranged between every two spacer blocks (193) and is sleeved on the support rod (2).

6. The self-adapting Hall measurement rod based on thermal deformation of a sample according to claim 3, characterized in that, In the region of the test cavity (19) where the adjusting spring (191) is arranged, a handheld part (192) is arranged on the movable electrode (41), the movable Hall probe (51) and the thermocouple (6).

7. The self-adapting Hall measurement rod based on thermal deformation of a sample according to claim 3, characterized in that, The lead cavity (12) has an upper and lower detachable sealing flange, the upper side is provided with a lead port (11) for placing the support rod (2), the movable electrode (41), the movable Hall probe (51) and the thermocouple (6), and the lower side is open to butt joint a lead block (13), which is in turn butt jointed with an upper lead column (14) to realize clamping; the lead cavity (12) is left with movable electrode leads, movable Hall probe leads and thermocouple leads after threading; from the lead block (13), the upper lead column (14), the cavity-in upper support plate (151) and the cavity-in lower support plate (152) in the threading cavity (15), the lower lead column (17), the spacer block (193) and the sample stage (3), the support column through holes, the contact electrode through holes, the probe through holes and the thermocouple through holes have the same positions and hole diameters.

8. The self-adapting Hall measurement rod based on thermal deformation of a sample according to claim 7, characterized in that, The lead block (13), the cavity-in upper support plate (151), the cavity-in lower support plate (152), the support rod (2), the spacer block (193), the support column (194) and the sample stage (3) are all made of insulating and heat insulating materials with rigid shapes.

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