Silicon wafer basket with anti-toppling function
By introducing support plates, fixing blocks, guide rails, sliders, elastic buffer components, and locking components into the silicon wafer basket, the problem of traditional silicon wafer baskets being prone to tipping over is solved, achieving higher stability and safety.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-07
- Publication Date
- 2026-03-27
AI Technical Summary
Traditional silicon wafer baskets are prone to tipping over during transportation or handling due to external impacts or unstable operation, resulting in damage to the silicon wafers.
A silicon wafer basket with anti-tipping function was designed, which adopts a support plate, fixing block, guide rail, slider, elastic buffer component and locking component. By increasing the contact area and buffer structure, the silicon wafer basket is stabilized and prevented from tipping over.
This improves the stability of the silicon wafer basket, preventing it from tipping over due to external impacts or unstable operation, thus protecting the silicon wafers.
Smart Images
Figure CN224054755U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of silicon wafer flower basket, especially to a silicon wafer flower basket with anti-toppling function. BACKGROUND
[0002] In the semiconductor manufacturing process, silicon wafer is one of the key materials. In order to ensure the safety and cleanliness of the silicon wafer during transmission, cleaning and storage, a silicon wafer flower basket is usually used to carry and protect the silicon wafer. However, the conventional silicon wafer flower basket does not have a corresponding anti-toppling structure. During transportation or operation, if the silicon wafer flower basket is impacted by external force or operated unstably, the conventional silicon wafer flower basket is prone to toppling, which may cause damage to the silicon wafer. Therefore, improvement is urgently needed. SUMMARY
[0003] In order to make the silicon wafer flower basket have an anti-toppling mechanism and improve the problem that the silicon wafer flower basket may topple during transportation or operation due to external impact or unstable operation, thereby causing damage to the silicon wafer, the present application provides a silicon wafer flower basket with anti-toppling function.
[0004] The silicon wafer flower basket with anti-toppling function provided by the present application adopts the following technical solution:
[0005] The silicon wafer flower basket with anti-toppling function comprises two base plates, a plurality of support rods arranged between the two base plates, and tooth grooves formed in the support rods for inserting silicon wafers. The silicon wafer flower basket further comprises support plates, fixing blocks, guide rails and sliding blocks. Two support plates are arranged on the base plates in correspondence with the base plates, and the two support plates are arranged in parallel with each other. The fixing blocks are connected to the support plates, and one fixing block is arranged at each end of the support plate. The guide rails are connected to the support plates, and the guide rails are arranged along the length direction of the support plates and located between the two fixing blocks. The sliding blocks are slidingly arranged on the guide rails, and two sliding blocks are arranged on the guide rail. An elastic buffer assembly is arranged between the fixing block and the sliding block. The base plate is inserted into the sliding block. An insertion slot is formed in the sliding block for inserting the base plate. A locking assembly for locking the base plate is further arranged on the sliding block.
[0006] Preferably, the elastic buffering assembly comprises a first mounting cylinder, a first cylinder cover, an extension rod, a first sliding plate, a first spring and a connecting plate, the first cylinder cover is connected to the cylinder opening of the first mounting cylinder, the extension rod is arranged in the first mounting cylinder through the first cylinder cover, the axis of the extension rod is arranged in line with the axis of the first mounting cylinder, the first sliding plate is connected to the end of the extension rod in the first mounting cylinder, the side wall of the first sliding plate is slidingly fitted to the inner wall of the first mounting cylinder, the first spring is arranged in the first mounting cylinder, one end of the first spring is connected to the cylinder bottom of the first mounting cylinder, and the other end is connected to the first sliding plate, the first mounting cylinder is filled with damping oil, the oil hole for the damping oil to pass through is arranged on the first sliding plate, a plurality of oil holes are uniformly arranged along the circumference of the first sliding plate, the cylinder bottom of the first mounting cylinder is connected to the fixed block, the connecting plate is connected to the end of the extension rod not penetrating into the first mounting cylinder, and the connecting plate is connected to the sliding block.
[0007] Preferably, the locking assembly comprises a second mounting cylinder, a second cylinder cover, a locking rod, a second sliding plate, a second spring and a pushing block, the second mounting cylinder is connected to the sliding block, the second cylinder cover is connected to the cylinder opening of the second mounting cylinder, the locking rod penetrates through the second cylinder cover, the second mounting cylinder and the sliding block in sequence, the through hole for the locking rod to penetrate through is arranged on the second cylinder cover, the second mounting cylinder and the sliding block, the locking hole for the locking rod to insert is arranged on the base plate, the pushing block is connected to the end of the locking rod not penetrating into the second mounting cylinder, the second sliding plate is connected to the rod body of the locking rod in the second mounting cylinder, and the second spring is sleeved on the rod body of the locking rod in the second mounting cylinder.
[0008] Preferably, the second sliding plate is a rectangular plate, the inner cavity of the second mounting cylinder is adapted to the second sliding plate, and the side wall of the second sliding plate is slidingly fitted to the inner wall of the second mounting cylinder.
[0009] Preferably, the cross section of the guide rail is arranged in a "T" shape, and the sliding groove adapted to the guide rail is arranged on the sliding block.
[0010] Preferably, the damping sheet is arranged on the sliding block and slidingly fitted to the supporting plate.
[0011] In summary, the present application has the following beneficial technical effects:
[0012] The utility model provides a kind of silicon wafer flower basket with anti-toppling function, by being provided with support plate, fixed block, guide rail, sliding block, elastic buffer component and locking assembly below base plate, the contact area of silicon wafer flower basket whole with ground can be improved using support plate, to improve the stability of placement, and base plate is set on sliding block, when silicon wafer flower basket main part is impacted by external force, impact force makes silicon wafer flower basket main part can slightly move along guide rail, and the reaction force is provided to impact force by elastic buffer component in moving process, to buffer the impact force, and by being provided with locking assembly, base plate can be quickly disassembled on sliding block, it is convenient for operator to load the silicon wafer flower basket main part, to reach the effect that silicon wafer flower basket has anti-toppling mechanism, improve the problem that silicon wafer flower basket is caused to dump due to external force impact or unstable operation in the process of transportation or operation, leading to silicon wafer damage. BRIEF DESCRIPTION OF DRAWINGS
[0013] Figure 1 It is the structure schematic diagram of silicon wafer flower basket with anti-toppling function in the embodiment of the application;
[0014] Figure 2 It is Figure 1 Enlarged view of A in
[0015] Figure 3 It is the schematic diagram for embodying elastic buffer component in the embodiment of the application;
[0016] Figure 4 It is the schematic diagram for embodying locking assembly in the embodiment of the application.
[0017] Mark explanation: 1, base plate;11, support rod;2, support plate;3, fixed block;4, guide rail;5, sliding block;51, damping piece;6, elastic buffer component;61, first installation cylinder;62, first cylinder cover;63, telescopic rod;64, first sliding plate;65, first spring;66, connecting plate;7, locking assembly;71, second installation cylinder;72, second cylinder cover;73, locking rod;74, second sliding plate;75, second spring;76, push block. DETAILED DESCRIPTION
[0018] In order to make the personnel of the prior art better understand the utility model scheme, below will combine the scheme in the embodiment of the utility model with the drawings to be described clearly and completely, obviously, the described embodiment is only a part of the embodiment of the utility model, not all, based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without doing creative labor should belong to the scope of the protection of the utility model.
[0019] In the description of the utility model, need explanation, the term "center", "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and so on indicate the orientation or position relation is based on the orientation or position relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply the device or element indicated must have a particular orientation and a particular orientation configuration and operation, therefore can not be understood as the limitation to the utility model;The term "first", "second", "third" is only for the purpose of description, and can not be understood as indicating or implying relative importance, in addition, unless otherwise explicitly specified and limited, the term "mounting", "connected", "connected" should be understood in a broad sense, for example, can be fixedly connected, can be detachably connected, or integrally connected;Can be mechanical connection, can be electrical connection;Can be directly connected, or indirectly connected through an intermediate medium, can be the communication between two elements inside. For ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific circumstances.
[0020] The embodiment of the application discloses a silicon wafer basket with anti-toppling function. Figure 1 、 Figure 2 、 Figure 3 And Figure 4 The silicon wafer basket with anti-toppling function comprises two base plates 1, a plurality of supporting rods 11 are arranged between the two base plates 1, tooth grooves for inserting silicon wafers are formed in the supporting rods 11, further comprising supporting plates 2, fixing blocks 3, guide rails 4 and sliding blocks 5, the two supporting plates 2 are arranged in parallel with each other and correspond to the base plates 1, the fixing blocks 3 are connected to the supporting plates 2, one fixing block 3 is arranged at each end of the supporting plate 2, the guide rail 4 is connected to the supporting plate 2, the guide rail 4 is arranged along the length direction of the supporting plate 2 and is located between the two fixing blocks 3, the sliding block 5 is slidingly arranged on the guide rail 4, two sliding blocks 5 are arranged on the guide rail 4, the elastic buffer assembly 6 is arranged between the fixing block 3 and the sliding block 5, the base plate 1 is inserted into the sliding block 5, the insertion slot for inserting the base plate 1 is formed in the sliding block 5, and the locking assembly 7 for locking the base plate 1 is further arranged on the sliding block 5.
[0021] The elastic buffering assembly 6 comprises a first mounting cylinder 61, a first cylinder cover 62, an extension rod 63, a first sliding plate 64, a first spring 65 and a connecting plate 66. The first cylinder cover 62 is connected to the cylinder opening of the first mounting cylinder 61. The extension rod 63 is arranged in the first mounting cylinder 61 through the first cylinder cover 62. The axis of the extension rod 63 is arranged in line with the axis of the first mounting cylinder 61. The first sliding plate 64 is connected to the end of the extension rod 63 located in the first mounting cylinder 61. The side wall of the first sliding plate 64 is slidably attached to the inner wall of the first mounting cylinder 61. The first spring 65 is arranged in the first mounting cylinder 61. One end of the first spring 65 is connected to the cylinder bottom of the first mounting cylinder 61, and the other end is connected to the first sliding plate 64. The first mounting cylinder 61 is filled with damping oil. The first sliding plate 64 is provided with oil holes for the damping oil to pass through. The oil holes are evenly arranged along the circumference of the first sliding plate 64. The cylinder bottom of the first mounting cylinder 61 is connected to the fixed block 3. The connecting plate 66 is connected to the end of the extension rod 63 that is not inserted into the first mounting cylinder 61. The connecting plate 66 is connected to the sliding block 5.
[0022] The locking assembly 7 comprises a second mounting cylinder 71, a second cylinder cover 72, a locking rod 73, a second sliding plate 74, a second spring 75 and a pushing block 76. The second mounting cylinder 71 is connected to the sliding block 5. The second cylinder cover 72 is connected to the cylinder opening of the second mounting cylinder 71. The locking rod 73 passes through the second cylinder cover 72, the second mounting cylinder 71 and the sliding block 5 in sequence. The second cylinder cover 72, the second mounting cylinder 71 and the sliding block 5 are all provided with through holes for the locking rod 73 to pass through. The base plate 1 is provided with a locking hole for the locking rod 73 to insert into. The pushing block 76 is connected to the end of the locking rod 73 that is not inserted into the second mounting cylinder 71. The second sliding plate 74 is connected to the rod body of the locking rod 73 located in the second mounting cylinder 71. The second spring 75 is sleeved on the rod body of the locking rod 73 located in the second mounting cylinder 71. One end of the second spring 75 abuts against the second cylinder cover 72, and the other end abuts against the second sliding plate 74.
[0023] When disassembling the wafer basket body, the pushing block 76 is directly pulled outward to make the locking rod 73 exit the locking hole, and then the base plate 1 can be directly pulled out upward. When installing the wafer basket body, the pushing block 76 is first pulled outward to avoid the influence of the locking rod 73 on the installation of the base plate 1, and then the base plate 1 is inserted into the insertion slot of the sliding block 5, and then the pushing block 76 is slowly released. The second spring 75 pushes the second sliding plate 74 to make the locking rod 73 inserted into the locking hole.
[0024] The second sliding plate 74 is a rectangular plate. The inner cavity of the second mounting cylinder 71 is adapted to the second sliding plate 74. The side wall of the second sliding plate 74 is slidably attached to the inner wall of the second mounting cylinder 71. In this way, the locking rod 73 is prevented from rotating when moving, which is conducive to improving the stability of the locking rod 73 when moving.
[0025] The guide rail 4 is provided in a "T" shape in cross section, and the sliding block 5 is provided with a sliding groove matched with the guide rail 4, so that the stability of the sliding block 5 moving on the guide rail 4 is improved.
[0026] The damping piece 51 is attached to the sliding block 5 and is in sliding fit with the support plate 2, so that the impact force can be further buffered by the damping piece 51.
[0027] The implementation principle of the silicon wafer basket with the anti-toppling function is that when the silicon wafer basket main body is impacted, the impact force can drive the silicon wafer basket main body to reciprocate on the guide rail 4, in the reciprocating process, the sliding block 5 drives the telescopic rod 63, so that the first sliding plate 64 compresses the first spring 65, the elastic force generated by the first spring 65 counteracts the impact force, buffers the impact force, and blocks and slows down the reciprocating movement. In the movement process of the first sliding plate 64, the damping oil flows from one side of the first sliding plate 64 to the other side, and the resistance generated in the process buffers part of the impact force and blocks the elastic movement of the first spring 65, so that the first spring 65 can quickly tend to be stable, thereby facilitating the silicon wafer basket main body to quickly recover to be stable.
[0028] Finally, it should be noted that: the above only is the preferred implementation manner of the present application, the protection scope of the present application is not limited to the above-mentioned embodiments, any technical solution under the idea of the present application belongs to the protection scope of the present application. It should be pointed out that, for ordinary skilled in the art, some improvements and decorations without departing from the principle of the present application, these improvements and decorations should also be considered as the protection scope of the present application.
Claims
1. A silicon wafer basket with anti-toppling function, comprising two base plates (1), a plurality of supporting rods (11) are arranged between the two base plates (1), and a tooth groove for inserting a silicon wafer is formed on the supporting rod (11), characterized in that: Also include support plate (2), fixed block (3), guide rail (4) and sliding block (5), the support plate (2) is provided with two corresponding base plate (1), two support plates (2) are arranged parallel to each other, the fixed block (3) is connected to support plate (2), the fixed block (3) is provided with one at both ends of support plate (2), the guide rail (4) is connected to support plate (2), the guide rail (4) is arranged along the length direction of support plate (2) and is located between two fixed blocks (3), the sliding block (5) is slidably arranged on the guide rail (4), the sliding block (5) is provided with two on the guide rail (4), the fixed block (3) and the sliding block (5) are provided with elastic buffer assembly (6) between, the base plate (1) is inserted into the sliding block (5), the sliding block (5) is provided with a slot for inserting the base plate (1), the sliding block (5) is further provided with locking assembly (7) for locking the base plate (1).
2. The silicon wafer basket with anti-toppling function according to claim 1, characterized in that: The elastic buffer assembly (6) includes a first mounting cylinder (61), a first cylinder cover (62), a telescopic rod (63), a first sliding plate (64), a first spring (65) and a connecting plate (66), the first cylinder cover (62) is connected to the cylinder opening of the first mounting cylinder (61), the telescopic rod (63) is arranged in the first mounting cylinder (61) through the first cylinder cover (62), the axis of the telescopic rod (63) is arranged in line with the axis of the first mounting cylinder (61), the first sliding plate (64) is connected to the end of the telescopic rod (63) in the first mounting cylinder (61), the side wall of the first sliding plate (64) is slidably attached to the inner wall of the first mounting cylinder (61), the first spring (65) is arranged in the first mounting cylinder (61), one end of the first spring (65) is connected with the cylinder bottom of the first mounting cylinder (61), the other end is connected with the first sliding plate (64), the first mounting cylinder (61) is filled with damping oil, the oil hole is provided on the first sliding plate (64) for damping oil to pass through, the oil hole is uniformly arranged on the circumference of the first sliding plate (64), the cylinder bottom of the first mounting cylinder (61) is connected with the fixed block (3), the connecting plate (66) is connected to the end of the telescopic rod (63) not penetrating into the first mounting cylinder (61), the connecting plate (66) is connected with the sliding block (5).
3. The silicon wafer basket with anti-toppling function according to claim 1, characterized in that: The locking assembly (7) comprises a second mounting cylinder (71), a second cylinder cover (72), a locking rod (73), a second sliding plate (74), a second spring (75) and a knob (76), the second mounting cylinder (71) is connected to the sliding block (5), the second cylinder cover (72) is connected to the cylinder opening of the second mounting cylinder (71), the locking rod (73) passes through the second cylinder cover (72), the second mounting cylinder (71) and the sliding block (5) in sequence, the second cylinder cover (72), the second mounting cylinder (71) and the sliding block (5) are all provided with through holes for the locking rod (73) to pass through, the base plate (1) is provided with a locking hole for the locking rod (73) to insert, the knob (76) is connected to the end of the locking rod (73) which does not penetrate into the second mounting cylinder (71), the second sliding plate (74) is connected to the rod of the locking rod (73) located in the second mounting cylinder (71), the second spring (75) is sleeved on the rod of the locking rod (73) located in the second mounting cylinder (71), one end of the second spring (75) abuts against the second cylinder cover (72), and the other end abuts against the second sliding plate (74).
4. The silicon wafer basket with anti-toppling function according to claim 3, characterized in that: The second sliding plate (74) is a rectangular plate, the inner cavity of the second mounting cylinder (71) is matched with the second sliding plate (74), and the side wall of the second sliding plate (74) is slidably attached to the inner wall of the second mounting cylinder (71).
5. The silicon wafer basket with anti-toppling function according to claim 1, wherein: The cross section of the guide rail (4) is provided in a "T" shape, and the sliding block (5) is provided with a sliding groove matched with the guide rail (4).
6. The silicon wafer basket with anti-toppling function according to claim 1, characterized in that: The sliding block (5) is attached with a damping piece (51), and the damping piece (51) is slidably attached to the supporting plate (2).