Horizontal purification equipment for high-purity gas

Abstract

The utility model discloses horizontal purification equipment for high-purity gas, which realizes efficient removal of impurities, moisture and harmful components in the high-purity gas by integrating multi-stage purification procedures such as gas inlet, primary filtration, adsorption purification and catalytic purification. The equipment adopts a modular design, and each purification unit can be detached and replaced, so that the daily maintenance of the equipment and the updating of purification components are greatly facilitated, and the maintenance cost is reduced. Meanwhile, flange connection and embedded sealing rubber rings are adopted, so that the sealing performance and the connection stability among the purification units are ensured, gas leakage and secondary pollution caused by external impurities are effectively prevented, and the purification efficiency and the gas purity are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of gas purification, in particular to a horizontal purification device for high-purity gas. BACKGROUND

[0002] High-purity gas has a wide range of applications in high-tech fields such as semiconductor manufacturing, optical instruments, fine chemicals, and biomedicine. Its purity has a crucial impact on product quality and process stability. Currently, the common high-purity gas purification devices on the market mainly use adsorption, condensation, membrane separation, and catalysis to remove water, oxygen, nitrogen, and hydrocarbons from the gas. However, existing purification devices still have certain deficiencies in terms of purification efficiency and final purity, making it difficult to meet the production needs of ultra-high-purity gas.

[0003] Traditional gas purification methods can only achieve single or limited purification steps, such as single-stage adsorption or single-stage catalytic oxidation. This approach often cannot completely remove all impurities, limiting the purity of the final product gas. In addition, some existing devices are not reasonably designed, making it inconvenient to replace the purification agent, affecting the continuous operation of the equipment, and increasing maintenance costs. At the same time, some purification devices are relatively large in size and occupy more space, making them unsuitable for laboratory or small-scale production environments. In addition, existing devices are prone to performance degradation after long-term operation, affecting the stability of gas purification, and have high energy consumption, increasing operating costs.

[0004] To address the above problems, there is an urgent need for a horizontal high-purity gas purification device that can provide efficient, stable, and energy-saving purification, and is easy to disassemble and replace purification components, to improve gas purity, reduce operating costs, and improve the convenience of equipment maintenance. Invention content

[0005] To address the deficiencies of existing technology, the present application aims to provide a horizontal purification device for high-purity gas to solve the problems raised in the background.

[0006] According to an aspect of the present application, a horizontal purification device for high-purity gas includes an inlet tank cover, a primary filter tank body, an adsorption purification tank body, a catalytic purification tank body, and an outlet tank cover. An inlet pipe is fixed to the lower side of the outer side of the inlet tank cover and is in communication with the inner side of the inlet tank cover. The primary filter tank body is horizontally arranged and has an open edge at one end fixedly connected to the inner side edge of the inlet tank cover through a connecting flange. The inner side of the primary filter tank body is layered with a detachable impurity filter unit and a dehydration unit. The communication port of the inlet pipe is located below the impurity filter unit. The other end of the primary filter tank body is vertically fixed with a lower partition baffle on the inner side of the open edge. An upper flow channel is provided between the upper end of the lower partition baffle and the inner side wall of the primary filter tank body, and the upper flow channel is located above the dehydration unit. The adsorption purification tank body is horizontally arranged and has an open edge at one end fixedly connected to the open edge at the other end of the primary filter tank body through a connecting flange. The inner side of the adsorption purification tank body is layered with a detachable first adsorption purification unit and a second adsorption purification unit. The other end of the adsorption purification tank body is vertically fixed with an upper partition baffle on the inner side of the open edge. A lower flow channel is provided between the lower end of the upper partition baffle and the inner side wall of the adsorption purification tank body, and the lower flow channel is located below the second adsorption purification unit. The catalytic purification tank body is horizontally arranged and has an open edge at one end fixedly connected to the open edge at the other end of the adsorption purification tank body through a connecting flange. The catalytic purification tank body is internally provided with a catalytic purification unit. The catalytic purification unit is internally provided with a serpentine heat exchange pipe, and the inlet end and the outlet end of the serpentine heat exchange pipe are both arranged outside the catalytic purification tank body. The other end of the catalytic purification tank body is fixedly connected to the inner side edge of the outlet tank cover through a connecting flange. The inner side of the outlet tank cover is fixedly provided with an outlet pipe at the lower side, and the outlet pipe is in communication with the inner side of the outlet tank cover. A gas suction pump is installed in communication on the outlet pipe.

[0007] Preferably, the inner wall of the primary filter tank is fixedly provided with two layers of first slides along its axial direction. Each layer of the first slide consists of two symmetrically arranged slide grooves. The impurity filtration unit is slidably inserted into the lower layer of the first slide, and the dewatering unit is slidably inserted into the upper layer of the first slide. The impurity filtration unit includes a first fixed frame, coarse filter cotton, and fine filter cotton. The first fixed frame is horizontally arranged and its two sides are slidably inserted into the lower layer of the first slide. The coarse filter cotton is horizontally fixed at the lower part of the inner channel of the first fixed frame, and the fine filter cotton is horizontally fixed at the upper part of its inner channel. The dewatering unit includes a second fixed frame, a primary filter screen, a secondary filter screen, and a primary molecular sieve. The second fixed frame is horizontally arranged and its two sides are slidably inserted into the upper layer of the first slide. The primary filter screen is horizontally fixed at the lower part of the inner channel of the second fixed frame, and the secondary filter screen is horizontally fixed at the upper part of its inner channel. The inner channel of the second fixed frame located between the primary filter screen and the secondary filter screen is filled with a primary molecular sieve.

[0008] Preferably, the inner wall of the adsorption purification tank is fixedly provided with two layers of second slides along its axial direction. Each layer of the second slide consists of two symmetrically arranged grooves. The first adsorption purification unit is slidably inserted into the upper layer of the second slide, and the second adsorption purification unit is slidably inserted into the lower layer of the second slide. The first adsorption purification unit includes a third fixing frame, a first filter screen, a second filter screen, and a secondary molecular sieve. The third fixing frame is horizontally arranged and its two sides are slidably inserted into the upper layer of the second slide. The first filter screen is horizontally fixed at the upper part of the inner channel of the third fixing frame, and the first filter screen is horizontally fixed at the lower part of the inner channel. The second fixed frame is provided with a second filter screen, and the inner channel of the third fixed frame located between the first filter screen and the second filter screen is filled with a secondary molecular sieve; the second adsorption purification unit includes a fourth fixed frame, a third filter screen, a fourth filter screen and activated carbon. The fourth fixed frame is horizontally arranged and its two sides are slidably inserted into the lower second slide. The third filter screen is horizontally fixed at the upper part of the inner channel of the fourth fixed frame and the fourth filter screen is horizontally fixed at the lower part of its inner channel. The inner channel of the fourth fixed frame located between the third filter screen and the fourth filter screen is filled with activated carbon.

[0009] Preferably, a first abutting sealing plate is horizontally fixed on the inner side of the air inlet cap at the positions corresponding to the first fixing frame and the second fixing frame. One end of the first fixing frame and the second fixing frame is in contact with one side of the lower partition baffle. A first sealing strip is embedded at the contact position between the first fixing frame and the second fixing frame and the first abutting sealing plate. A second abutting sealing plate is horizontally fixed on the other side of the lower partition baffle at the positions corresponding to the third fixing frame and the fourth fixing frame. One end of the third fixing frame and the fourth fixing frame is in contact with one side of the upper partition baffle. A second sealing strip is embedded at the contact position between the third fixing frame and the fourth fixing frame and the second abutting sealing plate.

[0010] Preferably, the catalytic purification unit includes an inlet filter, an outlet filter, and a purifying agent. The inlet filter is vertically fixed inside the opening at one end of the catalytic purification tank facing the adsorption purification tank, and the outlet filter is vertically fixed inside the opening at one end of the catalytic purification tank facing the outlet tank cover. The interior of the catalytic purification tank located between the inlet filter and the outlet filter is filled with a purifying agent, and the serpentine heat exchange tube passes through the purifying agent filled between the inlet filter and the outlet filter.

[0011] Preferably, a transition tank is fixedly connected to each of the two openings of the catalytic purification tank via a connecting flange, and the transition tanks at both ends are fixedly connected to the adsorption purification tank and the gas outlet cover respectively via connecting flanges.

[0012] Preferably, sealing rings are embedded between the connecting flange of the air inlet tank cover and the primary filter tank, between the connecting flange of the primary filter tank and the adsorption purification tank, between the connecting flange of the transition tank and the adsorption purification tank and the air outlet tank cover, and between the connecting flange of the transition tank and the catalytic purification tank.

[0013] The advantages of this application compared to existing technologies are as follows: This application provides a horizontal purification device for high-purity gases, which achieves efficient removal of impurities, moisture, and harmful components from high-purity gases through multi-stage purification processes including gas inlet, primary filtration, adsorption purification, and catalytic purification. The device adopts a modular design, allowing each purification unit to be disassembled and replaced, greatly facilitating daily maintenance and component updates, and reducing maintenance costs. Simultaneously, the use of flange connections and embedded sealing rings ensures the sealing and connection stability between purification units, effectively preventing gas leakage and secondary contamination from external impurities, thereby improving purification efficiency and gas purity. Attached Figure Description

[0014] Figure 1This is a perspective view of a horizontal purification apparatus for high-purity gases according to an embodiment of this application.

[0015] Figure 2 This is a cross-sectional view of the internal structure of a horizontal purification device for high-purity gases according to an embodiment of this application.

[0016] Figure 3 This is a cross-sectional view of the internal structure of the primary filter tank and the adsorption purification tank of a horizontal purification device for high-purity gases according to an embodiment of this application.

[0017] Figure 4 This is a side sectional view of the primary filter tank of a horizontal purification device for high-purity gases according to an embodiment of this application.

[0018] Figure 5 This is a side sectional view of the adsorption purification tank of a horizontal purification device for high-purity gases according to an embodiment of this application.

[0019] Figure 6 This is a perspective view of a primary filter tank and an adsorption purification tank of a horizontal purification device for high-purity gases according to an embodiment of this application.

[0020] Figure 7 This is another perspective view of a primary filter tank and an adsorption purification tank of a horizontal purification device for high-purity gases according to an embodiment of this application.

[0021] Figure 8 This is a perspective view of the inner side of the inlet tank cover of a horizontal purification device for high-purity gases according to an embodiment of this application.

[0022] Reference numerals: 1. Inlet tank cover; 2. Primary filter tank; 21. Impurity filtration unit; 211. First fixing frame; 212. Coarse filter cotton; 213. Fine filter cotton; 22. Dehydration unit; 221. Second fixing frame; 222. Primary filter screen; 223. Secondary filter screen; 224. Primary molecular sieve; 3. Adsorption and purification tank; 31. First adsorption and purification unit; 311. Third fixing frame; 312. First filter screen; 313. Second filter screen; 314. Secondary molecular sieve; 32. Second adsorption and purification unit; 321. Fourth fixing frame; 322. 3. Three filters; 323. Fourth filter; 324. Activated carbon; 4. Catalytic purification tank; 41. Catalytic purification unit; 411. Inlet filter; 412. Outlet filter; 413. Purifying agent; 5. Outlet tank cover; 6. Inlet pipe; 7. Lower partition baffle; 8. Upper partition baffle; 9. Serpentine heat exchange tube; 10. Outlet pipe; 11. Vacuum pump; 12. First slide rail; 13. Second slide rail; 14. First contact sealing plate; 15. First sealing strip; 16. Second contact sealing plate; 17. Second sealing strip; 18. Transition tank; 19. Sealing ring. Detailed Implementation

[0023] To make the content of this application easier to understand, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. It should be noted that the terms "front," "rear," "left," "right," "upper," and "lower" used in the following description refer to the accompanying drawings. Figure 2 In this context, the terms "inner" and "outer" refer to directions toward or away from the geometric center of a specific component, respectively. Furthermore, terms such as "first," "second," etc., are used for descriptive purposes only and should not be interpreted as indicating or implying relative importance.

[0024] like Figure 1 and Figure 2As shown, a horizontal purification device for high-purity gases includes an inlet tank cover 1, a primary filter tank 2, an adsorption purification tank 3, a catalytic purification tank 4, and an outlet tank cover 5. An inlet pipe 6 is fixedly installed on the lower outer side of the inlet tank cover 1, and the inlet pipe 6 is connected to the inner side of the inlet tank cover 1. The primary filter tank 2 is horizontally positioned, and one end of its opening edge is fixedly connected to the inner edge of the inlet tank cover 1 via a connecting flange. The inlet tank cover 1 is located at the equipment inlet, and the inlet pipe 6 is fixedly installed on its lower outer side, serving to guide the external high-purity gas into the equipment. The connection between the inlet pipe 6 and the inner side of the tank cover ensures that the gas smoothly enters the primary filtration stage, while also providing initial sealing and protection for the internal structure. The primary filtration tank 2 has a detachable impurity filtration unit 21 and a dehydration unit 22 arranged in layers inside. The inlet of the air inlet pipe 6 is located below the impurity filtration unit 21. A lower partition baffle 7 is vertically fixed inside the opening at the other end of the primary filtration tank 2. An upper flow channel is provided between the upper end of the lower partition baffle 7 and the inner wall of the primary filtration tank 2. The upper flow channel is located above the dehydration unit 22. The adsorption purification tank 3 is arranged horizontally, and the edge of one end of its opening is fixedly connected to the edge of the other end of the primary filtration tank 2 through a connecting flange. The adsorption purification tank 3 has a detachable first adsorption purification unit 31 and a second adsorption purification unit 32 arranged in layers inside. The other end of the adsorption purification tank 3... An upper partition baffle 8 is vertically fixed inside the end opening. A downward flow channel is provided between the lower end of the upper partition baffle 8 and the inner wall of the adsorption purification tank 3. The downward flow channel is located below the second adsorption purification unit 32. The catalytic purification tank 4 is arranged horizontally, and the edge of one end opening is fixedly connected to the edge of the other end opening of the adsorption purification tank 3 by a connecting flange. A catalytic purification unit 41 is provided inside the catalytic purification tank 4. A serpentine heat exchange tube 9 is provided inside the catalytic purification unit 41, and the inlet and outlet ends of the serpentine heat exchange tube 9 are both located outside the catalytic purification tank 4. The edge of the other end opening of the catalytic purification tank 4 is fixedly connected to the inner edge of the gas outlet tank cover 5 by a connecting flange. The inner side of the gas outlet tank cover 5 is located at the lower position. A gas outlet pipe 10 is fixedly installed at the location, and the gas outlet pipe 10 is connected to the inside of the gas outlet tank cover 5. A vacuum pump 11 is connected and installed on the gas outlet pipe 10. The gas outlet tank cover 5 is installed at the end of the system. This design ensures that the high-purity gas after multi-stage purification can be discharged smoothly. At the same time, the vacuum pump 11 helps to maintain the negative pressure state in the system and improves the overall working efficiency. In general, this horizontal purification equipment achieves efficient removal of impurities, moisture and harmful components from high-purity gas through multi-stage purification processes such as primary filtration, adsorption purification and catalytic purification. The equipment adopts a modular design, and each purification unit can be disassembled and replaced, which greatly facilitates the daily maintenance of the equipment and the replacement of purification components, and reduces maintenance costs.

[0025] In one embodiment, combined Figures 2 to 7The inner wall of the primary filter tank 2 is fixed with two layers of first slide rails 12 along its axial direction. Each layer of first slide rail 12 consists of two symmetrically arranged slide grooves. The impurity filtration unit 21 is slidably inserted into the lower layer of first slide rail 12, and the dewatering unit 22 is slidably inserted into the upper layer of first slide rail 12. The impurity filtration unit 21 includes a first fixing frame 211, coarse filter cotton 212, and fine filter cotton 213. The first fixing frame 211 is horizontally arranged and its two sides are slidably inserted into the lower layer of first slide rail 12. The lower part of the inner channel of frame 211 is horizontally fixed with coarse filter cotton 212, and the upper part of its inner channel is horizontally fixed with fine filter cotton 213. The dewatering unit 22 includes a second fixed frame 221, a primary filter screen 222, a secondary filter screen 223, and a primary molecular sieve 224. The second fixed frame 221 is horizontally arranged and its two sides are slidably inserted into the upper first slide rail 12. The lower part of the inner channel of the second fixed frame 221 is horizontally fixed with a primary filter screen 222, and the upper part of its inner channel is horizontally fixed with a secondary filter screen 223. The inner channel of the second fixed frame 221, located between the primary filter screen 222 and the secondary filter screen 223, is filled with a primary molecular sieve 224. In this design, the primary filter tank 2 is arranged horizontally, with one end tightly connected to the air inlet tank cover 1 via a connecting flange. The impurity filtration unit 21 and the dehydration unit 22, which are arranged in layers inside, can be disassembled and replaced from the first slide rail 12 via the first fixed frame 211 and the second fixed frame 221 after the connecting flange is removed. The impurity filtration unit 21, using the coarse filter cotton 212 and fine filter cotton 213 built into the first fixed frame 211, can effectively intercept larger particulate impurities in the gas, reducing the load on subsequent processes. The dehydration unit 22 removes moisture and small impurities from the gas through the primary and secondary filter screens 223 and the primary molecular sieve 224 built into the second fixed frame 221. At the same time, the primary filter tank 2 is equipped with a lower partition baffle 7 and an upper flow channel to ensure that the filtered gas flows evenly into the next stage, realizing pretreatment and diversion.

[0026] In one embodiment, refer to Figures 2 to 7The inner wall of the adsorption purification tank 3 is fixed with two layers of second slides 13 along its axial direction. Each layer of second slides 13 consists of two symmetrically arranged slide grooves. The first adsorption purification unit 31 is slidably inserted into the upper second slide 13, and the second adsorption purification unit 32 is slidably inserted into the lower second slide 13. The first adsorption purification unit 31 includes a third fixing frame 311, a first filter screen 312, a second filter screen 313, and a secondary molecular sieve 314. The third fixing frame 311 is horizontally arranged, and its two sides are slidably inserted into the upper second slide 13. A first filter screen 312 is horizontally fixed at the upper part of the side channel, and a second filter screen 313 is horizontally fixed at the lower part of its inner channel. A secondary molecular sieve 314 is filled inside the inner channel of a third fixed frame 311 located between the first and second filter screens 312 and 313. The second adsorption and purification unit 32 includes a fourth fixed frame 321, a third filter screen 322, a fourth filter screen 323, and activated carbon 324. The fourth fixed frame 321 is horizontally positioned and its two sides are slidably inserted into the lower second slide rail 13. A third filter screen 314 is horizontally fixed at the upper part of the inner channel of the fourth fixed frame 321. A fourth filter screen 323 is horizontally fixed at the lower part of the inner channel of the filter screen 322. Activated carbon 324 is filled inside the inner channel of the fourth fixed frame 321 located between the third filter screen 322 and the fourth filter screen 323. In this design, the adsorption purification tank 3 is connected to the primary filter tank 2 by a flange. The tank has two layers of second slide rails 13, allowing the first adsorption purification unit 31 and the second adsorption purification unit 32 to be installed in the upper and lower layers respectively. This enables the first adsorption purification unit 31 and the second adsorption purification unit 32 to pass through the flanges after the connection is removed. The first adsorption purification unit 31 is disassembled and replaced from the second slide 13 via the third fixing frame 311 and the fourth fixing frame 321. The first adsorption purification unit 31 further adsorbs and filters residual micro-impurities through the two-stage filter screen built into the third fixing frame 311 and the filling of the secondary molecular sieve 314. The second adsorption purification unit 32 targets specific harmful components through the two-stage filter screen built into the fourth fixing frame 321 and the filling of activated carbon 324, removing odors and organic pollutants through adsorption. The design of the upper partition baffle 8 and the lower flow channel ensures the flow stability of the gas in the adsorption purification tank 3, improving the overall purification effect.

[0027] In one embodiment, refer to Figure 1 and Figure 2The catalytic purification unit 41 includes an inlet filter 411, an outlet filter 412, and a purifying agent 413. The inlet filter 411 is vertically fixed inside the opening at one end of the catalytic purification tank 4 facing the adsorption purification tank 3. The outlet filter 412 is vertically fixed inside the opening at the other end of the catalytic purification tank 4 facing the outlet cap 5. The catalytic purification tank 4, located between the inlet filter 411 and the outlet filter 412, is filled with the purifying agent 413. A serpentine heat exchange tube 9 passes through the purifying agent 413 filled between the inlet filter 411 and the outlet filter 412. In this design, the catalytic purification tank 4 is connected to the adsorption purification tank 3 and the outlet cap 5 via flanges to form an integrated purification system, which is filled with the purifying agent. The catalytic purification tank 413 is equipped with a serpentine heat exchanger 9. The inlet and outlet of the heat exchanger are located outside the tank body. By crossing the filling layer of the purifying agent 413, heat balance is promoted and the catalytic reaction effect is enhanced. At the same time, the inlet filter 411 and outlet filter 412 are respectively installed at both ends of the catalytic purification tank 4 to block residual particles and ensure the purity of the catalytic reaction environment. In addition, the two ends of the catalytic purification tank 4 are fixedly connected to the transition tank 18 through connecting flanges. The two ends of the transition tank 18 are fixedly connected to the adsorption purification tank 3 and the outlet tank cover 5 through connecting flanges respectively. The setting of the transition tank 18 plays the role of buffering and balancing airflow, ensuring the continuity and stability of the entire purification process.

[0028] In one embodiment, combined Figures 2 to 8 A first contact sealing plate 14 is horizontally fixed at the position corresponding to the first fixing frame 211 and the second fixing frame 221 on the inner side of the air inlet cover 1. One end of the first fixing frame 211 and the second fixing frame 221 contacts one side of the lower partition baffle 7. A first sealing strip 15 is embedded at the contact position between the first fixing frame 211 and the second fixing frame 221 and the first contact sealing plate 14. A second contact sealing plate 16 is horizontally fixed at the position corresponding to the third fixing frame 311 and the fourth fixing frame 321 on the other side of the lower partition baffle 7. One end of the third fixing frame 311 and the fourth fixing frame 321 contacts one side of the upper partition baffle 8. A second sealing strip 17 is embedded at the contact position between the fourth fixed frame 321 and the second contact sealing plate 16; a sealing ring 19 is embedded between the connecting flange of the air inlet tank cover 1 and the primary filter tank 2, between the connecting flange of the primary filter tank 2 and the adsorption purification tank 3, between the connecting flange of the transition tank 18 and the adsorption purification tank 3 and the air outlet tank cover 5, and between the connecting flange of the transition tank 18 and the catalytic purification tank 4. In this design, by embedding the sealing ring 19 between each connecting flange and the sealing strip between the fixed frame and the contact sealing plate, the airtightness between each tank and the internal unit connection is ensured, and leakage and secondary pollution are avoided.

[0029] The above embodiments are only used to illustrate the technical solutions of the embodiments of this application, and are not intended to limit them. Although the embodiments of this application have been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features, without departing from the spirit and scope defined by the claims of this application.

Claims

1. A horizontal purification apparatus for high-purity gas, characterized by, The utility model provides a kind of air purification tank, including air inlet tank cover (1), primary filter tank body (2), adsorption purification tank body (3), catalytic purification tank body (4) and air outlet tank cover (5), air inlet pipe (6) is fixedly provided at the outer side of air inlet tank cover (1) and is communicated with the inner side of air inlet tank cover (1), primary filter tank body (2) is transversely arranged, and one end opening edge is fixedly connected with the inner side edge of air inlet tank cover (1) by connecting flange, the inner portion of primary filter tank body (2) is layered and is provided with detachable impurity filter unit (21) and dehydration unit (22), the communication port of air inlet pipe (6) is located below impurity filter unit (21), and the other end opening inner side of primary filter tank body (2) is vertically fixedly provided with lower partition baffle (7), and the upper end between lower partition baffle (7) and the inner side wall of primary filter tank body (2) is provided with upper flow channel, and upper flow channel is located above dehydration unit (22), adsorption purification tank body (3) is transversely arranged, and one end opening edge is fixedly connected with the other end opening edge of primary filter tank body (2) by connecting flange, the inner portion of adsorption purification tank body (3) is layered and is provided with detachable first adsorption purification unit (31) and second adsorption purification unit (32), and the other end opening inner side of adsorption purification tank body (3) is vertically fixedly provided with upper partition baffle (8), and the lower end between upper partition baffle (8) and the inner side wall of adsorption purification tank body (3) is provided with lower flow channel, and lower flow channel is located below second adsorption purification unit (32), catalytic purification tank body (4) is transversely arranged, and one end opening edge is fixedly connected with the other end opening edge of adsorption purification tank body (3) by connecting flange, and the inside of catalytic purification tank body (4) is provided with catalytic purification unit (41), and catalytic purification unit (41) is provided with serpentine heat exchange pipe (9) inside, and the inlet end and outlet end of serpentine heat exchange pipe (9) are both provided outside catalytic purification tank body (4), and the other end opening edge of catalytic purification tank body (4) is fixedly connected with the inner side edge of air outlet tank cover (5) by connecting flange, and the inner side of air outlet tank cover (5) is fixedly provided with air outlet pipe (10) at lower position, and air outlet pipe (10) is communicated with the inner side of air outlet tank cover (5), and air outlet pump (11) is installed on air outlet pipe (10) and is communicated.

2. A horizontal purification apparatus for high-purity gas according to claim 1, characterized by The inner side wall of primary filter tank body (2) is fixedly provided with two layers of first slide (12) along its axial direction, each layer of first slide (12) is composed of two symmetrical chute, impurity filter unit (21) is slidably inserted into lower layer first slide (12), and dehydration unit (22) is slidably inserted into upper layer first slide (12) The impurity filtering unit (21) comprises a first fixed frame (211), coarse filter cotton (212) and fine filter cotton (213), the first fixed frame (211) is horizontally arranged and is slidably inserted into the lower first sliding channel (12) at both sides, the lower part of the inner channel of the first fixed frame (211) is horizontally fixed with the coarse filter cotton (212), and the upper part of the inner channel of the first fixed frame (211) is horizontally fixed with the fine filter cotton (213); The dehydration unit (22) comprises a second fixed frame (221), a first filter screen (222), a second filter screen (223) and a first molecular sieve (224), the second fixed frame (221) is horizontally arranged and is slidably inserted into the upper first sliding channel (12) at both sides, the lower part of the inner channel of the second fixed frame (221) is horizontally fixed with the first filter screen (222), and the upper part of the inner channel of the second fixed frame (221) is horizontally fixed with the second filter screen (223), and the inner channel of the second fixed frame (221) between the first filter screen (222) and the second filter screen (223) is filled with the first molecular sieve (224).

3. A horizontal purification apparatus for high-purity gas according to claim 2, characterized by The inner wall of the adsorption purification tank (3) is fixed with two layers of second sliding channels (13) in the axial direction, each layer of the second sliding channels (13) is composed of two symmetrically arranged sliding grooves, the first adsorption purification unit (31) is slidably inserted into the upper second sliding channel (13), and the second adsorption purification unit (32) is slidably inserted into the lower second sliding channel (13); The first adsorption purification unit (31) comprises a third fixed frame (311), a first filter screen (312), a second filter screen (313) and a second molecular sieve (314), the third fixed frame (311) is horizontally arranged and is slidably inserted into the upper second sliding channel (13) at both sides, the upper part of the inner channel of the third fixed frame (311) is horizontally fixed with the first filter screen (312), and the lower part of the inner channel of the third fixed frame (311) is horizontally fixed with the second filter screen (313), and the inner channel of the third fixed frame (311) between the first filter screen (312) and the second filter screen (313) is filled with the second molecular sieve (314); The second adsorption purification unit (32) comprises a fourth fixed frame (321), a third filter screen (322), a fourth filter screen (323) and activated carbon (324), the fourth fixed frame (321) is horizontally arranged and is slidably inserted into the lower second sliding channel (13) at both sides, the upper part of the inner channel of the fourth fixed frame (321) is horizontally fixed with the third filter screen (322), and the lower part of the inner channel of the fourth fixed frame (321) is horizontally fixed with the fourth filter screen (323), and the inner channel of the fourth fixed frame (321) between the third filter screen (322) and the fourth filter screen (323) is filled with activated carbon (324).

4. A horizontal purification apparatus for high-purity gas according to claim 3, characterized by The first fixed frame (211) and the second fixed frame (221) are in contact with one side of the lower partition baffle (7), and the first fixed frame (211) and the second fixed frame (221) are embedded with a first sealing rubber strip (15) at the contact position with the first resisting sealing plate (14). The other side of the lower partition baffle (7) is horizontally fixed with a second resisting sealing plate (16) corresponding to the position of the third fixed frame (311) and the fourth fixed frame (321), and one end of the third fixed frame (311) and the fourth fixed frame (321) is in contact with one side of the upper partition baffle (8). The third fixed frame (311) and the fourth fixed frame (321) are embedded with a second sealing rubber strip (17) at the contact position with the second resisting sealing plate (16).

5. A horizontal purification apparatus for high-purity gas according to claim 1, wherein The catalytic purification unit (41) comprises an air inlet filter screen (411), an air outlet filter screen (412) and a purification agent (413). The air inlet filter screen (411) is vertically fixed inside the opening of one end of the catalytic purification tank body (4) facing the adsorption purification tank body (3). The air outlet filter screen (412) is vertically fixed inside the opening of one end of the catalytic purification tank body (4) facing the air outlet tank cover (5). The catalytic purification tank body (4) between the air inlet filter screen (411) and the air outlet filter screen (412) is filled with a purification agent (413). The serpentine heat exchange pipe (9) passes through the purification agent (413) filled between the air inlet filter screen (411) and the air outlet filter screen (412).

6. A horizontal purification apparatus for high-purity gas according to claim 5, characterized by The transition tank body (18) is fixedly connected to both ends of the catalytic purification tank body (4) through the connecting flanges. The transition tank bodies (18) at both ends are respectively fixedly connected to the adsorption purification tank body (3) and the air outlet tank cover (5) through the connecting flanges.

7. A horizontal purification apparatus for high-purity gas according to claim 6, characterized by The connecting flanges between the air inlet tank cover (1) and the primary filter tank body (2), the connecting flanges between the primary filter tank body (2) and the adsorption purification tank body (3), the connecting flanges between the transition tank body (18) and the adsorption purification tank body (3) and the air outlet tank cover (5), and the connecting flanges between the transition tank body (18) and the catalytic purification tank body (4) are all embedded with a sealing rubber ring (19).

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