Positioning device and laser processing equipment

Abstract

The utility model belongs to the technical field of laser processing, and particularly relates to a positioning device and laser processing equipment. The positioning device provided by the embodiment of the utility model comprises a bearing part, a calibration part, a reference part and a plurality of horizontal adjusting assemblies. The calibration piece is arranged on the bearing piece; the reference part is arranged in the center of the bearing part and serves as a horizontal reference of the calibration part; and the plurality of horizontal adjusting assemblies are mounted on the bearing part, are connected with the calibration part, and are used for adjusting the levelness of the calibration part by taking the horizontal height of the reference part as a reference. The laser processing equipment provided by the embodiment of the utility model comprises the positioning device. According to the embodiment of the invention, the precision of the calibration result is improved.

Description

Technical Field

[0001] This application belongs to the field of laser processing technology, and more specifically, relates to a positioning device and laser processing equipment. Background Technology

[0002] Semiconductor equipment is the core foundational equipment for chip manufacturing. The chip manufacturing process demands extremely high precision in processing and measurement, making the positioning accuracy of semiconductor equipment crucial. Existing calibration boards suffer from inaccurate installation and fixation during use, especially glass calibration boards, which are prone to tilting or twisting during installation. This alters the flatness of the calibration board, affecting the accuracy of calibration results. This problem is particularly pronounced when the calibration board has a large size. Utility Model Content

[0003] This application provides a positioning device and laser processing equipment, which improves the accuracy of calibration results.

[0004] The technical solution adopted in this application embodiment is: to provide a positioning device, including:

[0005] Load-bearing components;

[0006] A calibration component is mounted on the carrier component;

[0007] A reference element is disposed at the center of the bearing element, serving as a horizontal reference for the calibration element;

[0008] Several leveling components are installed on the support member and connected to the calibration member, used to adjust the levelness of the calibration member based on the horizontal height of the reference member.

[0009] Optionally, the leveling assembly includes a threaded adjusting member and a threaded fixing member. The threaded adjusting member passes through the bearing member, one end of the threaded adjusting member abuts against the calibrating member, and the threaded fixing member is threadedly connected to the threaded adjusting member. The threaded fixing member abuts against the bearing member to fix the threaded adjusting member.

[0010] Optionally, the leveling assembly further includes an anti-loosening element connected to the threaded fastener to prevent the threaded fastener from loosening.

[0011] Optionally, the anti-loosening element passes through the threaded fastener and abuts against the side of the threaded adjusting element, and the anti-loosening element is used to prevent the connection between the threaded fastener and the threaded adjusting element from becoming loose.

[0012] Optionally, the leveling assembly further includes an abutment member disposed on the side of the calibration member near the carrier member, the abutment member being used to abut against one end of the threaded adjustment member.

[0013] Optionally, the carrier is provided with a plurality of first fixing members, which abut against the edge of the calibration member to position the calibration member.

[0014] Optionally, the first fixing member includes a horizontal part and a vertical part that are vertically connected. The horizontal part and the vertical part are both mounted on the bearing member. The horizontal part and the vertical part are vertically connected to form a limiting groove for abutting against the corner edge of the calibration member.

[0015] Optionally, the positioning device further includes a worktable and a driving component. A first guide is provided on the worktable along a first direction. The carrier is connected to the first guide, and the driving component is driven to move the carrier along the first direction.

[0016] Optionally, a gantry frame is mounted on the workbench, and a visual inspection element that moves along a second direction is provided on the gantry frame. The visual inspection element is used to detect the levelness of the calibration component.

[0017] This application also provides a laser processing device, including the positioning device described above.

[0018] The advantages of the positioning device and laser processing equipment provided in this application are as follows: The positioning device of this application sets a reference piece at the center of the carrier as the horizontal reference for the calibration piece, and is equipped with multiple horizontal adjustment components to adjust the horizontality of the calibration piece based on the horizontal height of the reference piece, thereby accurately adjusting the horizontal state of the calibration piece. Compared with the possibility of tilting or twisting of the calibration plate in the prior art, this device can effectively avoid flatness errors caused by the non-horizontal installation of the calibration piece, thus significantly improving the installation accuracy of the calibration piece. Especially when the calibration piece has a large area, this high-precision horizontal adjustment capability is even more important, ensuring that the calibration piece maintains good flatness on the entire surface.

[0019] The laser processing equipment of this application embodiment includes the positioning device described above, and therefore has the beneficial effects brought about by the positioning device described above, which will not be repeated here. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a three-dimensional structural diagram of the positioning device provided in the embodiments of this application;

[0022] Figure 2 This is a three-dimensional structural diagram of the carrier used in the embodiments of this application;

[0023] Figure 3 A front view of a partial structure of the positioning device provided in an embodiment of this application;

[0024] Figure 4 For along Figure 3 Cross-sectional view of line AA in the middle.

[0025] The following are the labeling elements in the figure:

[0026] 1. Bearing component; 11. First fixing component; 111. Horizontal part; 112. Vertical part;

[0027] 2. Calibration parts;

[0028] 3. Reference components;

[0029] 4. Horizontal adjustment assembly; 41. Threaded adjustment component; 42. Threaded fastener; 43. Anti-loosening component; 44. Abutment component;

[0030] 5. Worktable; 51. First guide component;

[0031] 6. Gantry crane; 7. Visual inspection components. Detailed Implementation

[0032] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0033] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0034] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0036] Please see Figure 1 and Figure 2 The positioning device provided in the embodiments of this application will now be described. The positioning device provided in the embodiments of this application includes a support member 1, a calibration member 2, a reference member 3, and a plurality of horizontal adjustment components 4. The calibration member 2 is disposed on the support member 1; the reference member 3 is disposed at the center of the support member 1, serving as a horizontal reference for the calibration member 2; the plurality of horizontal adjustment components 4 are mounted on the support member 1, and are connected to the calibration member 2. The horizontal adjustment components 4 are used to adjust the levelness of the calibration member 2 based on the horizontal height of the reference member 3.

[0037] In this embodiment, the support member 1 serves as the basic component of the entire positioning device, used to support other components. The support member 1 can be made of a material with certain strength and stability, such as metal or high-strength composite material, to ensure the stability of the entire device.

[0038] Calibration component 2 can be a plate-like structure with a certain degree of flatness, on which feature patterns or marks for measurement and calibration can be set. For example, calibration component 2 can be made of glass or metal, with a flat and smooth surface to reduce errors. Preferably, calibration component 2 is made of quartz glass, which has a low coefficient of thermal expansion and high surface pattern accuracy and flatness accuracy. Its surface is evenly distributed with patterns of equal row and column spacing, which can be recognized and calibrated by the CCD vision system. Calibration component 2 can help establish an error compensation model. By measuring the performance of the device on the calibration plate, the error distribution of the device can be obtained, and error compensation can be performed through software algorithms, thereby improving the overall performance of the device. For example, in the two-dimensional compensation of the motion platform, calibration component 2 is used to obtain the deviation between the actual coordinate data and the ideal coordinate data of the positioning platform, and then generate a compensation table.

[0039] The reference element 3 is positioned at the center of the support element 1, serving as the horizontal reference for the calibration element 2. The reference element 3 can be a device with a horizontal indication function, such as a bubble level, which determines whether the calibration element 2 is horizontal by observing the position of the bubble.

[0040] The leveling assembly 4 may include multiple linear motors. By adjusting these assemblies, the tilt angle of the calibrator 2 can be precisely changed to achieve the desired levelness. Several leveling assemblies 4 may be arranged in a circular array around the reference member 3.

[0041] The positioning device of this application uses a reference element 3 at the center of the support element 1 as a horizontal reference for the calibration element 2, and is equipped with multiple horizontal adjustment components 4 to adjust the horizontality of the calibration element 2 based on the horizontal height of the reference element 3, thereby accurately adjusting the horizontal state of the calibration element 2. Compared with the possibility of tilting or twisting of the calibration plate in the prior art, this device can effectively avoid flatness errors caused by the non-horizontal installation of the calibration element 2, thus significantly improving the installation accuracy of the calibration element 2. This high-precision horizontal adjustment capability is especially important when the calibration element 2 has a large size, ensuring that the calibration element 2 maintains good flatness across the entire surface.

[0042] The embodiments of this application enable the flatness of the large-format calibration component 2 to meet the working requirements of the CCD camera system, thereby obtaining accurate compensation files and ultimately significantly improving the positioning accuracy of the platform.

[0043] For preferred options, please refer to [link / reference]. Figure 3 and Figure 4 The horizontal adjustment assembly 4 includes a threaded adjustment member 41 and a threaded fixing member 42. The threaded adjustment member 41 passes through the bearing member 1, and one end of the threaded adjustment member 41 abuts against the calibration member 2. The threaded fixing member 42 is threadedly connected to the threaded adjustment member 41 and abuts against the bearing member 1 to fix the threaded adjustment member 41.

[0044] In this embodiment, the threaded adjustment member 41 can be an adjustment bolt or screw with external threads, one end of which abuts against the calibration member 2 so as to stably support the calibration member 2 and make horizontal adjustments.

[0045] Specifically, the threaded fastener 42 can be a nut with internal threads that matches the external threads of the threaded adjusting member 41, and can fix the threaded adjusting member 41 through threaded connection.

[0046] Screw the threaded fastener 42 onto the external thread of the threaded adjusting member 41, and pass the threaded adjusting member 41 through the pre-set threaded hole on the bearing member 1. Adjust the position of the threaded adjusting member 41 so that one end can abut against the bottom surface of the calibration member 2. If the bottom surface of the calibration member 2 is flat, the abutting end of the threaded adjusting member 41 can be flat; if the bottom surface of the calibration member 2 is curved, the abutting end of the threaded adjusting member 41 can be spherical to ensure good contact and support.

[0047] Then, by rotating the threaded fastener 42, it is gradually brought closer to the carrier 1. When the threaded fastener 42 comes into contact with the carrier 1, the threaded fastener 42 is tightened until the threaded adjusting member 41 is firmly fixed on the carrier 1, and the threaded adjusting member 41 and the calibration member 2 maintain an appropriate contact force, which can provide stable support for the calibration member 2.

[0048] The horizontal adjustment assembly 4 also includes an anti-loosening element 43, which is connected to the threaded fastener 42 to prevent the threaded fastener 42 from loosening.

[0049] The anti-loosening component 43 can be an anti-loosening washer or a lock nut, used to prevent the threaded fastener 42 from loosening due to vibration or other external forces during use.

[0050] Preferably, the anti-loosening member 43 is inserted through the threaded fastener 42 and abuts against the side of the threaded adjusting member 41. The anti-loosening member 43 is used to prevent the connection between the threaded fastener 42 and the threaded adjusting member 41 from becoming loose.

[0051] In this embodiment, the anti-loosening component 43 can be an anti-loosening top screw, which passes through the side wall of the threaded fastener 42 and abuts against the thread on the side of the threaded adjusting component 41, further preventing the threaded fastener 42 from loosening due to vibration or other external forces during use.

[0052] Observe the indication of the reference piece 3. When the calibration piece 2 reaches the horizontal state, stop adjusting the threaded adjustment piece 41 and tighten the threaded fixing piece 42 and the anti-loosening piece 43 again to ensure that the position of the threaded adjustment piece 41 is fixed and the calibration piece 2 remains horizontal.

[0053] The leveling assembly 4 also includes an abutment 44, which is disposed on the side of the calibration member 2 near the support member 1, and is used to abut against one end of the threaded adjustment member 41.

[0054] The abutment 44 prevents the threaded adjustment part 41 from directly contacting the calibration part 2, thus preventing wear on the calibration part 2. The abutment 44 is made of black PEEK material, which has the characteristics of high strength and high precision, and can prevent the threaded adjustment part 41 from damaging the calibration plate.

[0055] Please see Figure 2 The carrier 1 is provided with a number of first fixing members 11, which abut against the edge of the calibration member 2 to position the calibration member 2.

[0056] The first fixing member 11 positions the calibrator 2 to prevent the calibrator 2 from moving on the bearing member 1.

[0057] The first fastener 11 can be made of materials such as metal or high-strength plastic, and has sufficient strength and stability.

[0058] The first fixing member 11 can be a limiting block, which is set along the circumference of the calibration member 2. The first fixing member 11 can be firmly installed on the bearing member 1 by screws, welding or other fixing methods. The material of the first fixing member 11 can be black BOM material.

[0059] Preferably, the first fixing member 11 may include a horizontal part 111 and a vertical part 112 that are vertically connected. The horizontal part 111 and the vertical part 112 are both mounted on the bearing member 1. The horizontal part 111 and the vertical part 112 are vertically connected to form a limiting groove for abutting against the corner edge of the calibration member 2.

[0060] The calibration element 2 is placed on the support element 1, and the corner edge of the calibration element 2 abuts against the limiting groove formed by the first fixing element 11. In this way, the calibration element 2 is accurately positioned on the support element 1, ensuring that its position is stable and does not shift.

[0061] Alternatively, a limiting block can be used to abut against the middle of the side of the calibration component 2 to further position the calibration component 2.

[0062] The positioning device also includes a worktable 5 and a driving component (not shown). A first guide 51 is provided on the worktable 5 along the first direction. The carrier 1 is connected to the first guide 51. The driving component is connected to the carrier 1 in a transmission manner to drive the carrier 1 to move along the first direction.

[0063] The driving component can be a motor or other power device, which is connected to the carrier 1 through a transmission mechanism (such as a gear, belt or lead screw) to achieve precise control of the carrier 1.

[0064] The first direction is specifically a horizontal direction, which can be the X direction.

[0065] A gantry frame 6 is mounted on the workbench 5. A visual inspection element 7 that moves along the second direction is mounted on the gantry frame 6. The visual inspection element 7 is used to inspect the levelness of the calibration element 2.

[0066] The gantry 6 is used to support the vision inspection component 7.

[0067] The visual inspection component 7 is mounted on the gantry 6 and can move along the second direction to inspect the levelness of the calibration component 2. The visual inspection component 7 can be a high-precision camera or other visual sensor, equipped with a corresponding optical system and image processing software, capable of acquiring image information of the calibration component 2 in real time.

[0068] The second direction is specifically the horizontal direction, which is perpendicular to the first direction. The second direction can be the Y direction.

[0069] The installation process of the positioning device provided in this application embodiment is as follows:

[0070] First, using the height of the reference component 3 located at the geometric center of the bearing component 1 as the reference height, the height of the calibration component 2 in the vertical direction can be raised or lowered by rotating the threaded adjustment component 41 in the horizontal adjustment assembly 4, so that the height of each horizontal adjustment assembly 4 reaches the height of the reference component 3, thereby achieving that the reference component 3 and the horizontal adjustment assembly 4 are at the same height and coplanar; then, the threaded adjustment component 41 is fixed using the threaded fastener 42, and the anti-loosening component 43 can be screwed into the side wall of the threaded fastener 42; finally, the calibration component 2 is further positioned around the calibration component 2 by the first fastener 11.

[0071] This application also provides a laser processing device, including the positioning device in any of the above embodiments.

[0072] The laser processing equipment of this application includes the positioning device in any of the above embodiments, and therefore has the beneficial effects brought by the positioning device in any of the above embodiments, which will not be repeated here.

[0073] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A positioning device, characterized in that, include: Load-bearing components; A calibration component is mounted on the carrier component; A reference element is disposed at the center of the bearing element, serving as a horizontal reference for the calibration element; Several leveling components are installed on the support member and connected to the calibration member, used to adjust the levelness of the calibration member based on the horizontal height of the reference member.

2. The positioning device according to claim 1, characterized in that, The horizontal adjustment assembly includes a threaded adjusting member and a threaded fixing member. The threaded adjusting member passes through the bearing member, and one end of the threaded adjusting member abuts against the calibration member. The threaded fixing member is threadedly connected to the threaded adjusting member and abuts against the bearing member to fix the threaded adjusting member.

3. The positioning device according to claim 2, characterized in that, The leveling assembly also includes an anti-loosening element, which is connected to the threaded fastener to prevent the threaded fastener from loosening.

4. The positioning device according to claim 3, characterized in that, The anti-loosening component is inserted through the threaded fastener and abuts against the side of the threaded adjusting component. The anti-loosening component is used to prevent the connection between the threaded fastener and the threaded adjusting component from becoming loose.

5. The positioning device according to claim 2, characterized in that, The leveling assembly further includes an abutment member disposed on the side of the calibration member near the support member, the abutment member being used to abut against one end of the threaded adjustment member.

6. The positioning device according to claim 1, characterized in that, The carrier is provided with a plurality of first fixing members, which abut against the edge of the calibration member to position the calibration member.

7. The positioning device according to claim 6, characterized in that, The first fixing member includes a horizontal part and a vertical part that are vertically connected. The horizontal part and the vertical part are both mounted on the bearing member. The horizontal part and the vertical part are vertically connected to form a limiting groove for abutting against the corner edge of the calibration member.

8. The positioning device according to claim 1, characterized in that, It also includes a worktable and a driving component. A first guide is provided on the worktable along a first direction. The carrier is connected to the first guide. The driving component is connected to the carrier in a transmission manner to drive the carrier to move along the first direction.

9. The positioning device according to claim 8, characterized in that, A gantry frame is mounted on the workbench, and a visual inspection component that moves along a second direction is installed on the gantry frame. The visual inspection component is used to detect the levelness of the calibration component.

10. A laser processing device, characterized in that, Includes the positioning device according to any one of claims 1-9.

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