Renewable purifier for deep purification of silane
By designing a scraping cleaning mechanism and regeneration purification components for the regenerable purifier, the problem of purity decline caused by long-term use of adsorption equipment was solved, realizing the recycling of the purifier and the restoration of purification effect, thus improving the purity of silane and product quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-07
- Publication Date
- 2026-04-10
AI Technical Summary
In existing technologies, the adsorption capacity of adsorption equipment decreases after long-term use during silane purification, resulting in substandard purity of exported silane and affecting product quality.
Design a regenerative purifier comprising a scraping cleaning mechanism and a regeneration purification component. Impurities are removed and the purification effect is restored through inert gas purging and heating with heat pipes, thus enabling recycling.
It effectively restored the purification effect of the purifier, reduced the occurrence of substandard silane purity, and improved product quality.
Smart Images
Figure CN224100293U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of silane purification, and relates to a renewable purifier for silane deep purification. BACKGROUND
[0002] Silane is a key high-purity gas in the production of semiconductors, photovoltaics and display panels, and the purity directly affects the quality of the products. The production of silane generally adopts cold hydrogenation and disproportionation process technology, and then the produced silane is purified.
[0003] It is found that the following technical problems exist in the prior art: in the process of purifying silane, the adsorption capacity of the internal adsorption equipment may decrease in the case of long-term use, leading to the purity of the exported silane not meeting the standard and affecting the quality of the products produced by using silane. UTILITY MODEL CONTENTS
[0004] The utility model wants to solve the technical problem that: in the process of purifying silane, the adsorption capacity of the internal adsorption equipment may decrease in the case of long-term use, leading to the purity of the exported silane not meeting the standard and affecting the quality of the products produced by using silane.
[0005] The renewable purifier for silane deep purification comprises a purification device shell, an air outlet pipe is fixedly connected to the top of the outer side of the purification device shell, an air inlet pipe is fixedly connected to the bottom of the outer side of the purification device shell, a sealing cover is installed at the end of the outer side of the purification device shell, and a detachable primary filter assembly is arranged at the end of the air inlet pipe.
[0006] A regenerative purification assembly is arranged at the bottom of the inner side of the purification device shell, and the regenerative purification assembly comprises a scraping and cleaning mechanism; the regenerative purification assembly and the scraping and cleaning mechanism cooperate to clean the inside of the purification device shell.
[0007] The detachable primary filter assembly comprises a threaded sealing sleeve; the threaded sealing sleeve is located at one end of the air inlet pipe close to the purification device shell; a gas conveying pipe is fixedly connected to the bottom of the inner side of the purification device shell; the end of the gas conveying pipe is threadedly connected with the threaded sealing sleeve; a fixed block is fixedly connected to the inside of the air outlet pipe; a rotating connecting shaft is fixedly connected to one side of the outside of the fixed block; a sliding groove is formed in the inner side of the gas conveying pipe; a front filter plate is slidably arranged in the sliding groove; and the rotating connecting shaft is rotatably connected with the front filter plate at the side away from the fixed block.
[0008] The regenerative purification assembly comprises a metal diffusion plate; the metal diffusion plate is installed in the inside of the purification device shell; the gas conveying pipe penetrates through the gas conveying pipe; a palladium membrane is fixedly connected to the inside of the metal diffusion plate; a filling layer is fixedly connected to the outside of the palladium membrane; and a molecular sieve is fixedly connected to the outside of the filling layer.
[0009] The scraping cleaning mechanism comprises a driving motor; the driving motor is located at the top of the sealing cover; a pulling module is fixedly connected to the bottom of the sealing cover; a connecting device main body is installed at the bottom of the driving motor; the pulling module is connected with the driving motor through the connecting device main body; and a cleaning scraping groove is fixedly connected to the bottom of the pulling module.
[0010] A heating module is fixedly connected to the bottom of the inside of the purification device shell; and a heat conduction pipe is fixedly connected to the top of the heating module.
[0011] Inert ceramic balls are filled in the inside of the filling layer.
[0012] Compared with the prior art, the beneficial effects of the present application are that: through the use of the cleaning scraping groove and the regenerated purification assembly, the device can be restored to the purification effect under the condition of long-term use and reduced purification effect, the inert gas is injected from the air outlet pipe to blow the inside of the purification device shell, the heating of the heat conduction pipe makes the metal diffusion plate release the adsorbed device, the cleaning scraping groove scrapes and collects the released impurities, the device is recycled, the situation that the quality of the purified silane does not meet the standard is reduced, and the influence on the silane production product is further reduced.
[0013] The inert ceramic balls have the characteristics of high temperature resistance, are relatively stable, do not react with silane, can adsorb trace amounts of water on the surface, reduce the working pressure of the molecular sieve, can reduce the generation of particulate matter through surface electrolytic polishing, and improve the working effect while filling the purification device shell between the palladium membrane and the molecular sieve. BRIEF DESCRIPTION OF DRAWINGS
[0014] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0015] Figure 1 is a structural schematic view of the purification device shell of the present application.
[0016] Figure 2 is a structural schematic view of the air inlet pipe of the present application.
[0017] Figure 3 is a schematic view of the metal diffusion plate of the present application.
[0018] Figure 4 is a structural schematic view of the front filter plate of the present application.
[0019] Figure 5It is the structural schematic view of the air outlet pipe of the utility model.
[0020] Figure 6 It is Figure 3 The enlarged view of A.
[0021] In the figure: 1, the purification device shell; 101, air outlet pipe; 102, air inlet pipe; 103, sealing cover; 2, threaded sealing sleeve; 201, fixed block; 202, sliding groove; 203, front filter plate; 204, rotating connecting shaft; 205, gas conveying pipe; 3, metal diffusion plate; 301, palladium membrane; 302, filling layer; 303, molecular sieve; 4, driving motor; 401, connecting device main body; 402, lifting module; 403, cleaning scraping groove; 5, heating module; 501, heat pipe. DETAILED DESCRIPTION
[0022] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the following will be further described in detail by combining with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the utility model, and are not used to limit the utility model.
[0023] In order to make the person in the art better understand the utility model scheme, the following will be combined with the drawings, and the technical scheme in the embodiment of the utility model is described clearly and completely.
[0024] It should be noted that, in the case of no conflict, the examples in the utility model and the features and technical schemes in the examples can be combined with each other.
[0025] It should be noted that: similar signs and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.
[0026] Example 1
[0027] As Figures 1-6 shown, a renewable purifier for silane deep purification includes a purification device shell 1; the air outlet pipe 101 is fixedly connected to the top of the outer side of the purification device shell 1; the air inlet pipe 102 is fixedly connected to the bottom of the outer side of the purification device shell 1; the sealing cover 103 is installed at the end of the outer side of the purification device shell 1; the air inlet pipe 102 is provided with a detachable primary filter assembly at the end;
[0028] The regenerative purification assembly is arranged at the bottom of the inside of the purification device shell 1, and the inside of the regenerative purification assembly comprises a scraping cleaning mechanism; the regenerative purification assembly and the scraping cleaning mechanism cooperate to clean the inside of the purification device shell 1, the detachable primary filter assembly comprises a threaded sealing sleeve 2, the threaded sealing sleeve 2 is located at one end of the air inlet pipe 102 close to the purification device shell 1, the inside bottom of the purification device shell 1 is fixedly connected with a gas conveying pipe 205, the end of the gas conveying pipe 205 is threadedly connected with the threaded sealing sleeve 2, the inside of the air outlet pipe 101 is fixedly connected with a fixed block 201, one side of the outside of the fixed block 201 is fixedly connected with a rotating connecting shaft 204, the inside of the gas conveying pipe 205 is provided with a sliding groove 202, the inside of the sliding groove 202 is slidably provided with a front filter plate 203, the side, away from the fixed block 201, of the rotating connecting shaft 204 is rotatably connected with the front filter plate 203, the regenerative purification assembly comprises a metal diffusion plate 3, the metal diffusion plate 3 is installed in the inside of the purification device shell 1, the gas conveying pipe 205 penetrates the gas conveying pipe 205, the inside of the metal diffusion plate 3 is fixedly connected with a palladium film 301, the outside of the palladium film 301 is fixedly connected with a filling layer 302, the outside of the filling layer 302 is fixedly connected with a molecular sieve 303, the scraping cleaning mechanism comprises a driving motor 4, the driving motor 4 is located at the top of the sealing cover 103, the bottom of the sealing cover 103 is fixedly connected with a pulling module 402, the bottom of the driving motor 4 is provided with a connecting device main body 401, the pulling module 402 and the driving motor 4 are connected through the connecting device main body 401, the bottom of the pulling module 402 is fixedly connected with a cleaning scraping groove 403, the inside bottom of the purification device shell 1 is fixedly connected with a heating module 5, and the top of the heating module 5 is fixedly connected with a heat conduction pipe 501.
[0029] In operation, first, the outlet pipe 101 is inserted into the gas inlet pipe 205 by rotating the plug, and the front filter plate 203 is inserted into the sliding groove 202, then the outlet pipe 101 is rotated to connect the threaded sealing sleeve 2 with the gas inlet pipe 205, realizing the connection between the outlet pipe 101 and the gas inlet pipe 205, and the fixed block 201 is fixed in the outlet pipe 101 with the driving motor 4 and the rotating shaft 204, when the outlet pipe 101 rotates, the rotating shaft 204 rotates on the surface of the front filter plate 203, realizing the blocking of the front filter plate 203 to the middle part of the gas inlet pipe 205, then the silane to be purified is injected into the gas inlet pipe 205 through the outlet pipe 101, the gas inlet pipe 205 performs a preliminary filtration on the silane, blocking the larger particles or droplets in the silane, reducing the burden of the devices in the purification device shell 1 caused by the larger particles, at the same time, the inner diameter of the gas inlet pipe 205 becomes smaller when it is about to contact the front filter plate 203, making the flow rate of the silane gas faster, which can break the larger droplets in the silane, and also make the silane pass through the front filter plate 203 more quickly, when the silane is dispersed through the gas inlet pipe 205, it will successively pass through the metal diffusion plate 3, the palladium membrane 301, the filling layer 302 and the molecular sieve 303, and the silane is purified in stages, the metal diffusion plate 3 adsorbs the smaller particle impurities in the silane, the palladium membrane 301 removes oxygen from the silane, and the molecular sieve 303 blocks the remaining water in the silane, at this time, the purified silane completely enters the metal diffusion plate 3, and is sprayed out through the outlet pipe 101, when it is about to leave the outlet pipe 101, the inner diameter of the outlet pipe 101 becomes larger, making the flow rate of the silane slower, making the collection of the purified silane more stable, when the adsorption force of the outside of the metal diffusion plate 3 decreases, inert gas is injected into the purification device shell 1 through the outlet pipe 101 to clean the residual silane in the purification device shell 1, when the inert gas enters the outlet pipe 101, the flow rate is accelerated due to the influence of the pipe diameter, and the purging effect of the purification device shell 1 is better, at the same time, the molecular sieve 303 filters the water that may be mixed in the inert gas, making the inert gas blow the metal diffusion plate 3 through the palladium membrane 301 and the filling layer 302, at this time, the driving heating module 5 drives the heat pipe 501 to heat, evaporating the water molecules in the molecular sieve 303, the metal diffusion plate 3 is heated, making the impurities adsorbed on the surface of the metal diffusion plate 3 precipitate, and the precipitated impurities can be separated from the metal diffusion plate 3, at this time, the driving motor 4 drives the connecting device main body 401 to pull the lifting module 402 to pull the cleaning scraper 403, the cleaning scraper 403 starts to slide on the outside of the metal diffusion plate 3, the cleaning scraper 403 scrapes the outside of the metal diffusion plate 3, scraping the impurities on the surface of the metal diffusion plate 3, and the cleaning scraper 403 collects the scraped impurities,The inert ceramic balls are filled in the filling layer 302, and the inert ceramic balls have the characteristics of high temperature resistance, are stable, do not react with silane, can adsorb trace moisture on the surface, reduce the working pressure of the molecular sieve 303, and can reduce the generation of particulate matter through surface electrolytic polishing.
[0030] Embodiment 2
[0031] As shown in Figure 3 , Figure 6 , the filling layer 302 is filled with inert ceramic balls.
[0032] In operation, the inert ceramic balls have the characteristics of high temperature resistance, are stable, do not react with silane, can adsorb trace moisture on the surface, reduce the working pressure of the molecular sieve 303, and can reduce the generation of particulate matter through surface electrolytic polishing, and improve the working effect of the inert ceramic balls while filling the purification device shell 1 between the palladium membrane 301 and the molecular sieve 303.
[0033] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details, nor limit the utility model to the specific implementation described. Obviously, according to the content of the specification, many modifications and changes can be made. The specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that the skilled in the art can well understand and use the utility model. The utility model is limited by the claims and the entire scope and equivalents thereof.
Claims
1. A regenerable purifier for the deep purification of silanes, characterized by: The utility model provides a kind of purification device, including the shell (1) of purification device;The top of the shell (1) of purification device is fixedly connected with the air outlet pipe (101) outside;The bottom of the shell (1) of purification device is fixedly connected with the air inlet pipe (102) outside;The end of the shell (1) of purification device is installed with sealing cover (103) outside;The end of the air inlet pipe (102) is provided with detachable initial filtration assembly; Regeneration purification assembly is arranged in the bottom of the shell (1) of purification device inside;Regeneration purification assembly includes scraping cleaning mechanism inside;Regeneration purification assembly and scraping cleaning mechanism cooperate to clean the inside of the shell (1) of purification device.
2. A regenerable purifier for deep purification of silane according to claim 1, characterized in that: The detachable initial filtration assembly includes threaded seal sleeve (2);The threaded seal sleeve (2) is located in the air inlet pipe (102) close to the shell (1) of purification device one end;The bottom of the shell (1) of purification device is fixedly connected with the gas delivery pipe (205) inside;The end of the gas delivery pipe (205) is threadedly connected with the threaded seal sleeve (2);The inside of the air outlet pipe (101) is fixedly connected with fixed block (201);The outside of the fixed block (201) is fixedly connected with rotating connection shaft (204) one side;The inside of the gas delivery pipe (205) is provided with sliding slot (202);The inside of the sliding slot (202) is slidably provided with front filter plate (203);The side, away from the fixed block (201), of the rotating connection shaft (204) is rotatably connected with the front filter plate (203).
3. A regenerable purifier for deep purification of silane according to claim 2, characterized in that: The regeneration purification assembly includes metal diffusion plate (3);The metal diffusion plate (3) is installed in the shell (1) of purification device inside;The gas delivery pipe (205) is penetrated by the gas delivery pipe (205);The inside of the metal diffusion plate (3) is fixedly connected with palladium film (301);The outside of the palladium film (301) is fixedly connected with filling layer (302);The outside of the filling layer (302) is fixedly connected with molecular sieve (303).
4. A regenerable purifier for deep purification of silane according to claim 3, characterized in that: The scraping cleaning mechanism includes drive motor (4);The drive motor (4) is located in the top of the sealing cover (103);The bottom of the sealing cover (103) is fixedly connected with pull module (402);The bottom of the drive motor (4) is installed with connecting device main body (401);The pull module (402) is connected with the drive motor (4) through the connecting device main body (401);The bottom of the pull module (402) is fixedly connected with cleaning scraping groove (403).
5. A regenerable purifier for deep purification of silane as claimed in claim 1, wherein: The bottom of the shell (1) of purification device is fixedly connected with heating module (5) inside;The top of the heating module (5) is fixedly connected with heat pipe (501).
6. A regenerable purifier for deep purification of silane as claimed in claim 3, wherein: The inside of the filling layer (302) is filled with inert ceramic ball.