Multi-suction-nozzle manipulator calibration platform

Abstract

The utility model relates to a multi-suction-nozzle mechanical arm calibration platform. The multi-suction-nozzle mechanical arm calibration platform is used for calibrating the relative positions of a plurality of suction nozzles of the multi-suction-nozzle mechanical arm. The calibration platform comprises a rack, a movement mechanism arranged on the rack, an insertion calibration plate, a visual inspection mechanism and a fine adjustment mechanism connected to the multiple suction nozzles. The movement mechanism comprises a transverse translation mechanism capable of driving the multiple suction nozzles to move in the first direction, the insertion and matching calibration plate and the visual detection mechanism are sequentially arranged in the first direction, and the multiple suction nozzles are matched with the insertion and matching calibration plate in an insertion mode so as to preliminarily calibrate the relative positions of the multiple suction nozzles. The visual detection mechanism detects the relative coordinate position and the deviation value of each suction nozzle after preliminary calibration of the insertion calibration plate, and the fine adjustment mechanism accurately adjusts the position of the suction nozzle based on the deviation value detected by the visual detection mechanism. According to the multi-suction-nozzle manipulator calibration platform provided by the invention, the calibration accuracy and the calibration efficiency of the suction nozzles can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a multi-nozzle robotic arm calibration platform. Background Technology

[0002] Currently, the sorting and transfer of ICs (Integrated Circuits, chips) are typically performed using robotic arms. In one existing technology, the robotic arm comprises multiple suction nozzles arranged in an array, each nozzle picking up one IC. This allows the robotic arm to pick up multiple ICs simultaneously in a single operation, significantly improving production efficiency. However, the consistency of spacing and collinearity among the nozzles is a crucial factor affecting the suction stability. Poor spacing or collinearity can lead to the suction position deviating from the center of the IC, resulting in poor suction stability, skewed ICs, and difficulties in subsequent unloading. Therefore, multi-nozzle robotic arms require calibration before deployment.

[0003] Therefore, it is necessary to propose a new technical solution to overcome the shortcomings of existing technologies. Utility Model Content

[0004] Based on this, this application provides a multi-nozzle robotic arm calibration platform, which can improve the calibration accuracy and efficiency of the nozzles.

[0005] Therefore, this application adopts the following technical solution: a multi-nozzle robot calibration platform for calibrating the relative positions between multiple nozzles included in a multi-nozzle robot. The calibration platform includes a frame, a motion mechanism disposed on the frame, a fitting calibration plate and a vision inspection mechanism, and a fine-tuning mechanism connected to the multiple nozzles. The motion mechanism includes a lateral translation mechanism capable of driving the multiple nozzles to move in a first direction. The fitting calibration plate and the vision inspection mechanism are arranged sequentially in the first direction. The multiple nozzles are fitted into the fitting calibration plate to initially calibrate the relative positions between the multiple nozzles. The vision inspection mechanism detects the relative coordinate position and its deviation value of each nozzle after initial calibration by the fitting calibration plate. The fine-tuning mechanism precisely adjusts the position of the nozzle based on the deviation value detected by the vision inspection mechanism.

[0006] In some embodiments, the calibration platform includes a crossbeam extending along the first direction, the lateral translation mechanism includes a slide seat movably disposed on the crossbeam, the multi-nozzle manipulator is connected to the slide seat, and the lateral translation mechanism drives the slide seat to move along the crossbeam.

[0007] In some embodiments, the lateral translation mechanism includes a drive motor and a drive pulley and a drive belt driven by the drive motor, with the sliding seat connected to the drive belt.

[0008] In some embodiments, the crossbeams include two parallel beams, each beam having at least one set of the multi-nozzle robotic arms. The calibration platform also includes a vertical translation mechanism that drives the visual inspection mechanism to move along a second direction perpendicular to the first direction, so that the visual inspection mechanism moves from under one of the crossbeams to under the other crossbeam.

[0009] In some embodiments, the mating calibration board is detachably mounted on the rack, and the calibration platform further includes a plurality of calibration test boards that can replace the mating calibration board and be mounted on the rack.

[0010] In some embodiments, the frame includes a support plate, a beam support disposed on the support plate to support the beam, and a support base disposed on the support plate to support the calibration test plate and / or the mating calibration plate, wherein there are at least two support bases distributed in the extension direction of the beam.

[0011] In some embodiments, the fine-tuning mechanism is configured to drive the nozzle to move in the first direction and in a second direction perpendicular to the first direction.

[0012] In some embodiments, the fine-tuning mechanism includes:

[0013] A fixed connector is connected to the suction nozzle, and the two are fixed relative to each other;

[0014] The movable connector is connected to the fixed connector, and the two are capable of moving relative to each other in a first direction and a second direction.

[0015] In some embodiments, the fine-tuning mechanism includes a connecting bolt that connects the fixed connector and the movable connector in a third direction perpendicular to the first and second directions.

[0016] In some embodiments, the movable connector is provided with an adjustment hole that extends vertically, and the fixed connector is provided with a bolt hole that communicates with the adjustment hole. The connecting bolt passes through the adjustment hole and is connected to the bolt hole. The diameter of the connecting bolt is smaller than the size of the adjustment hole in the first and second directions, so that the movable connector and the fixed connector can move relative to each other.

[0017] In some embodiments, the fine-tuning mechanism includes:

[0018] A fixed connector is connected to the suction nozzle, and the two are fixed relative to each other;

[0019] The adapter connector is connected to the fixed connector, and the two can only move relative to each other in a first direction;

[0020] The upper connector is connected to the adapter connector, and the two can only move relative to each other in the second direction;

[0021] A first adjusting bolt is disposed between the fixed connector and the transition connector; and

[0022] The second adjusting bolt is located between the adapter connector and the upper connector.

[0023] The multi-nozzle robotic arm calibration platform provided in this application first uses a fitting calibration plate to perform pin calibration, thereby achieving preliminary correction of the nozzle position. After pin calibration, the nozzle position is within a suitable deviation range, facilitating subsequent precise calibration. Then, a vision inspection mechanism detects the relative coordinate position and deviation value of each nozzle after preliminary calibration by the fitting calibration plate, performs precise position calculation, and uses a fine-tuning mechanism to precisely adjust the nozzle position based on the deviation value. In this calibration process, the deviation can be quantified, further improving the problem of low calibration accuracy caused by machining, assembly, and other errors in the components used in the preliminary pin calibration process, thereby improving calibration efficiency and accuracy. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a perspective view of the multi-nozzle robotic arm calibration platform of this application.

[0026] Figure 2 This is a three-dimensional composite view of the multi-nozzle robotic arm calibration platform of this application, with the frame structure hidden.

[0027] Figure 3 This is a side view of the multi-nozzle robotic arm calibration platform of this application, with the frame structure hidden.

[0028] Figure 4 A perspective view of the multi-nozzle robot calibrated for the multi-nozzle robot calibration platform of this application.

[0029] Figure 5A side view of the multi-nozzle robot calibrated for the multi-nozzle robot calibration platform of this application.

[0030] Figure 6 This is a three-dimensional combination diagram of the fine-tuning mechanism and the suction nozzle in Embodiment 1 of the multi-nozzle robotic arm calibration platform of this application.

[0031] Figure 7 This is an exploded perspective view of the fine-tuning mechanism and the suction nozzle in the multi-nozzle robotic arm calibration platform of this application.

[0032] Figure 8 This is a three-dimensional combination diagram of the fine-tuning mechanism and the suction nozzle in Embodiment 2 of the multi-nozzle robotic arm calibration platform of this application.

[0033] Figure 9 This is an exploded perspective view of the fine-tuning mechanism and the suction nozzle in Embodiment 2 of the multi-nozzle robotic arm calibration platform of this application.

[0034] The component labels are as follows: 100, Calibration Platform; 1, Frame; 11, Support Plate; 12, Crossbeam Bracket; 13, Support Base; 2, Crossbeam; 3, Lateral Translation Mechanism; 31, Drive Motor; 32, Transmission Pulley; 33, Transmission Belt; 4, Fitting Calibration Plate; 5, Vision Inspection Mechanism; 51, Vertical Translation Mechanism; 6, Multi-Nozzle Robotic Arm; 61, Sliding Seat; 62, Nozzle; 63, Pitch Variable Mechanism; 631, Pitch Variable Motor; 632, Synchronous Pulley; 633, Synchronous Belt; 6331, Large Synchronous Belt; 6332, Small Synchronous Belt; 64, Fine-tuning Mechanism; 641 6410. Fixed connector; 6411. Air tube interface; 6412. First slider; 6413. Adjusting plate; 6414. Bolt hole; 642. Movable connector; 6420. Adjusting hole; 643. Connecting bolt; 6431. Bolt rod; 6432. Bolt cap; 644. Adapter connector; 6441. First slide groove; 6442. Limiting plate; 6444. Second slider; 6445. Adjusting cavity; 645. Upper connector; 6451. Second slide groove; 6452. Adjusting block; 646. First adjusting bolt; 647. Second adjusting bolt; 7. Calibration test plate. Detailed Implementation

[0035] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0036] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0038] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0039] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0040] Please see Figures 1 to 5As shown, this application provides a multi-nozzle robot calibration platform 100 for calibrating the relative positions of multiple nozzles 62 included in a multi-nozzle robot 6. The calibration platform 100 includes a frame 1, a motion mechanism disposed on the frame 1, a fitting calibration plate 4, a vision inspection mechanism 5, and a fine-tuning mechanism 64 connected to the multiple nozzles 62. The motion mechanism includes a lateral translation mechanism 3 capable of driving the multiple nozzles 62 to move in a first direction. The fitting calibration plate 4 and the vision inspection mechanism 5 are sequentially arranged in the first direction F1. The multiple nozzles 62 are fitted into the fitting calibration plate 4 to initially calibrate the relative positions of the multiple nozzles 62. The vision inspection mechanism 5 detects the relative coordinate position and its deviation value of each nozzle 62 after initial calibration by the fitting calibration plate 4. The fine-tuning mechanism 64 precisely adjusts the position of the nozzles 62 based on the deviation value detected by the vision inspection mechanism 5.

[0041] The multi-nozzle robotic arm calibration platform 100 provided in this application first uses a fitting calibration plate 4 to perform pin calibration, thereby achieving preliminary correction of the position of the nozzles 62. After pin calibration, the position of the nozzles 62 is within a suitable deviation range, requiring only minor adjustments later, which facilitates subsequent precise calibration. Then, a vision inspection mechanism 5 detects the relative coordinate position and deviation value of each nozzle 62 after preliminary calibration by the fitting calibration plate 4, performs precise position calculation, and uses a fine-tuning mechanism 64 to precisely adjust the position of the nozzles 62 based on the deviation value. In this calibration process, the deviation can be quantified, and it further improves the problem of low calibration accuracy caused by machining, assembly, and other errors in the parts used in the initial pin calibration process, thereby improving calibration efficiency and accuracy.

[0042] Please see Figures 1 to 3 As shown, the frame 1 serves as the basic support frame of the calibration platform 100, and includes a support plate 11, crossbeam supports 12 mounted on the support plate 11, and support bases 13 mounted on the support plate 11. There are at least two crossbeam supports 12, arranged at intervals along a first direction F1. The calibration platform 100 includes a crossbeam 2 extending along the first direction F1, with both ends of the crossbeam 2 supported on the crossbeam supports 12.

[0043] A support base 13 is disposed between two crossbeam supports 12, and the support base 13 is used to support the mating calibration plate 4 and the calibration test plate 7. In this embodiment, there are at least two support bases 13 distributed in the extending direction of the crossbeam 2, and the support base 13 is located between the two crossbeam supports 12. The support base 13 is used to support the mating calibration plate 4 so that multiple nozzles 62 on the multi-nozzle robot 6 can be initially calibrated with the mating calibration plate 4 by means of pin insertion. In this embodiment, the mating calibration plate 4 is detachably mounted on the support base 13. The calibration platform 100 includes a plurality of calibration test plates 7, which can replace the mating calibration plate 4 and be mounted on the support base 13.

[0044] During the pin insertion calibration process, a fixed insertion calibration plate 4 is installed on one of the two support bases 13 to perform pin insertion calibration with the nozzle 62. After calibration, the insertion calibration plate 4 can be replaced with a calibration test plate 7, so that the calibration test plates 7 are fixed on the two support bases 13 respectively. The calibration test plate 7 has a material pit corresponding to the nozzle 62 for placing ICs. After replacing with the calibration test plate 7, the multi-nozzle robot 6 reciprocates on the crossbeam 2 to perform pick-and-place operations on the ICs in the two calibration test plates 7. If no abnormalities are found after a number of pick-and-place operations (e.g., 2000 times), the calibration accuracy is considered to meet the actual production accuracy requirements. By setting the calibration test plate 7, actual pick-and-place tests can be performed after calibration to verify the calibration results and ensure the reliability of the calibrated multi-nozzle robot 6 in subsequent formal operation. In this embodiment, the calibration test board 7 is a test shuttle board with a pick-and-place accuracy that is comparable to, or even higher than, the pick-and-place accuracy of the shuttle board used in the subsequent formal operation. If several tests can be completed without any abnormalities, then normal pick-and-place operation in the subsequent formal operation can be basically guaranteed.

[0045] Please see Figures 2 to 4 As shown, in this embodiment, the lateral translation mechanism 3 includes a sliding seat 61 movably mounted on the crossbeam 2. The multi-nozzle manipulator 6 is connected to the sliding seat 61, and the lateral translation mechanism 3 drives the sliding seat 61 to move along the crossbeam 2. The lateral translation mechanism 3 includes a drive motor 31 and a transmission pulley 32 and a transmission belt 33 driven by the drive motor 31. The sliding seat 61 is connected to the transmission belt 33. Specifically, the transmission pulley 32 includes a driving pulley and a driven pulley, and the transmission belt 33 is rotatably connected between the driving pulley and the driven pulley. During operation, the output shaft of the drive motor 31 rotates to drive the driving pulley in the transmission pulley 32 to rotate. The driving pulley drives the transmission belt 33 to move, thereby driving the sliding seat 61 fixed on the transmission belt 33 to move along the crossbeam 2, so as to realize that the multi-nozzle manipulator 6 moves along the crossbeam 2 in the first direction F1.

[0046] In this embodiment, the crossbeams 2 include two parallel beams, each beam 2 having at least one set of multi-nozzle robotic arms 6. The calibration platform 100 also includes a vertical translation mechanism 51, which drives the vision inspection mechanism 5 to move along a second direction F2 perpendicular to the first direction F1, so that the vision inspection mechanism 5 moves from under one crossbeam 2 to under the other crossbeam 2. With this configuration, one set of vision inspection mechanism 5 can calibrate the multi-nozzle robotic arms 6 on both crossbeams 2, eliminating the need for two sets of vision inspection mechanisms 5, thus reducing costs and space requirements.

[0047] Please refer to it again. Figures 1 to 3As shown, the visual inspection mechanism 5 detects the position of the nozzle 62 to be inspected based on optical components, which can be achieved through methods such as taking pictures or using light sensors. In this embodiment, the visual inspection mechanism 5 includes a CCD (Charge Coupled Device) module and a host system. The host system includes a housing, a lens group disposed within the housing, and cables, connectors, and electrical components required for operation. In this embodiment, to meet portability requirements, the lens group adopts a corner reflection method. The visual inspection mechanism 5 has an upward-facing detection window, the length direction of the host system is horizontal, and the optical axis of a portion of the lenses in the lens group extends horizontally. The light changes its transmission direction through a reflector at the corner. This arrangement reduces the height of the host system, making the visual inspection mechanism 5 more compact and portable.

[0048] Please see Figures 3 to 5 As shown, in this embodiment, the multi-nozzle robot 6 includes eight nozzles 62 arranged in two rows and four columns. When the nozzles 62 are adjusted along the first direction F1 shown in the figure, the spacing between adjacent nozzles 62 in the same row is adjusted. When the nozzles 62 are adjusted along the second direction F2, which is perpendicular to the first direction F1 shown in the figure, the collinearity of multiple nozzles 62 in the same row is adjusted. During use after calibration, the eight nozzles 62 can be configured to perform variable-spacing movement in the first direction F1 or the second direction F2, or in the first direction F1 and the second direction F2, or the spacing can be fixed. For those capable of variable-spacing movement, they can be configured to allow all nozzles 62 to move, or to use one or one column of nozzles 62 as a fixed reference point, with the other nozzles 62 moving. In short, this application does not limit the movement mode of the nozzles 62 during use after calibration. In addition, the number and arrangement of the nozzles 62 are not limited to the above-mentioned two rows and four columns; in other embodiments, they can be any other row and column arrangement.

[0049] Please see Figure 4 and Figure 5As shown, in this embodiment, the multi-nozzle robot 6 includes a pitch-changing mechanism 63. The pitch-changing mechanism 63 drives the multiple nozzles 62 included in the multi-nozzle robot 6 to move relative to each other to change the spacing between the nozzles 62. Specifically, the pitch-changing mechanism 63 includes a pitch-changing motor 631, a synchronous pulley 632 driven by the pitch-changing motor 631, and a synchronous belt 633. There are at least two synchronous belts 633, each having a forward section and a reverse section with opposite directions of travel. Any two nozzles 62 are connected to the forward and reverse sections of the same synchronous belt 633, respectively, or they can be connected to two different synchronous belts 633. In this embodiment, the synchronous belt 633 includes a large synchronous belt 6331 and a small synchronous belt 6332. When the two suction nozzles 62 are respectively connected to the forward and reverse sections of the large synchronous belt 6331 or the small synchronous belt 6332, the rotation of the synchronous belt 633 will cause the distance between the two suction nozzles 62 connected to the forward and reverse sections of the same synchronous belt 633 to increase or decrease relatively.

[0050] When performing visual calibration on multiple nozzles 62, the visual inspection mechanism 5 is first fixed. A motion mechanism then drives each nozzle 62 to move sequentially into the inspection window of the visual inspection mechanism 5, aiming to center the nozzle 62 within the field of view of the inspection window. The visual inspection mechanism 5 identifies the center of the nozzle 62 based on its shape and records its coordinates, setting this point as the reference nozzle point. Since this point is set as the reference nozzle point, the deviation of the nozzle 62 in both the first direction F1 and the second direction F2 is 0.

[0051] After setting the reference nozzle point, the robotic arm moves a preset distance along the first direction F1. This preset distance is the target distance between two adjacent nozzles 62 in the same row, for example, 40mm, so that the other nozzle 62 appears in the field of view of the detection window. A real-time photo is taken, and the real-time coordinates are displayed. By comparing the coordinates of the nozzle 62 with those of the reference nozzle point, the deviation value of the nozzle 62 can be automatically calculated. The sign of the deviation value represents the direction of the deviation, and the absolute value of the deviation value represents the size of the deviation. Based on the sign and size of the deviation value, the position of the nozzle 62 is adjusted by the fine-tuning mechanism 64. After the position of the nozzle 62 is adjusted, a real-time photo is taken again, and the coordinates and deviation value of the nozzle 62 are updated synchronously. Multiple adjustments and photos can be taken until the position of the nozzle 62 meets the requirements. In this embodiment, a deviation value within ±0.02 is considered sufficient to meet the position requirements. During the calibration process, the robotic arm can move back and forth several times to eliminate the error of the visual inspection mechanism 5 by repeatedly calculating the nozzle position. The subsequent adjustments to other nozzles 62 are made in the same way as those described above.

[0052] After the above operations, the positions of the four suction nozzles 62 in the same row are adjusted. Then, the positions of the four suction nozzles 62 in the other row are adjusted. During adjustment, using one of the four adjusted suction nozzles 62 as a reference, the motion mechanism drives the four suction nozzles 62 in the other row to move a preset distance along the second direction F2. This preset distance is the target distance between two adjacent suction nozzles 62 in the same column, for example, 60mm, so that one suction nozzle 62 in the other row appears in the field of view of the detection window. Then, in the same way as the above adjustment, real-time photography, real-time coordinate display, deviation value calculation, and position fine-tuning are performed until the deviation value is within ±0.02, at which point the position adjustment can be considered to meet the requirements.

[0053] Please see Figure 6 and Figure 7 As shown, the fine-tuning mechanism 64 is configured to drive the nozzle 62 to move in the first direction F1 and the second direction F2. In this embodiment, the fine-tuning mechanism 64 includes a fixed connector 641 and a movable connector 642. The fixed connector 641 is connected to the nozzle 62 and the two are fixed relative to each other. The movable connector 642 is connected to the fixed connector 641 and the two can move relative to each other in the first direction F1 and the second direction F2. Specifically, the movable connector 642 is provided with an adjustment hole 6420 that extends vertically, the fixed connector 641 is provided with a bolt hole 6415, and the fine-tuning mechanism 64 includes a connecting bolt 643. The connecting bolt 643 connects the fixed connector 641 and the movable connector 642 in a third direction perpendicular to the first direction F1 and the second direction F2, that is, in the vertical direction. The connecting bolt 643 passes through the adjusting hole 6420 on the movable connector 642. The lower end of the bolt shank 6431 of the connecting bolt 643 is connected to the bolt hole 6415 on the fixed connector 641. The bolt cap 6432 at the upper end of the connecting bolt 643 is pressed against the movable connector 642. The diameter of the connecting bolt 643 is smaller than the size of the adjusting hole 6420 in the first direction F1 and the second direction F2. In this embodiment, the adjusting hole 6420 is a square hole, and the diameter of the bolt shank 6431 of the connecting bolt 643 is smaller than the side length of the square hole. When it is necessary to adjust the suction nozzle 62, by loosening the connecting bolt 643, the fixed connector 641 and the suction nozzle 62 connected thereto can be moved relative to the movable connector 642 in the first direction F1 or the second direction F2, thereby adjusting the position of the suction nozzle 62.

[0054] In another embodiment, such as Figure 8 and Figure 9As shown, the fine-tuning mechanism 64 includes a fixed connector 641, a transition connector 644, an upper connector 645, a first adjusting bolt 646, and a second adjusting bolt 647. The fixed connector 641 is connected to the suction nozzle 62, and the two are fixed relative to each other; the transition connector 644 is connected to the fixed connector 641, and the two can only move relative to each other in a first direction F1; the upper connector 645 is connected to the transition connector 644, and the two can only move relative to each other in a second direction F2; the first adjusting bolt 646 is disposed between the fixed connector 641 and the transition connector 644; the second adjusting bolt 647 is disposed between the transition connector 644 and the upper connector 645.

[0055] In this embodiment, one end of the fixed connector 641 is connected to an air pipe interface 6410, which can be connected to a device such as an air pump to draw gas and create a negative pressure suction force at the nozzle 62. The fixed connector 641 is provided with a first slider 6411 and an adjusting plate 6412. In the first direction F1, that is, in the width direction of the adjusting plate 6412, the width of the adjusting plate 6412 is smaller than the width of the first slider 6411. From a top view, the two first sliders 6411 and the adjusting plate 6412 are connected in an I-shape. The adjusting plate 6412 is provided with a threaded hole that runs through the first direction F1, and a first adjusting bolt 646 is threaded into the threaded hole. The length of the first adjusting bolt 646 is greater than the length of the threaded hole, that is, both ends of the first adjusting bolt 646 can protrude from the threaded hole. The two ends of the first adjusting bolt 646 are used to abut against the adapter connector 644 to keep the position of the adapter connector 644 relatively fixed in the first direction F1. When the first adjusting bolt 646 rotates, the adjusting plate 6412 can be driven to move in the first direction F1 through the threaded engagement, that is, the fixed connecting piece 641 can be driven to move in the first direction F1, so as to realize the fine adjustment of the suction nozzle 62 in the first direction F1.

[0056] The adapter connector 644 is provided with a first sliding groove 6441, a limiting plate 6442, a second slider 6444, and an adjusting cavity 6445. The first sliding groove 6441 is used to cooperate with the first slider 6411. The two can slide relative to each other in the first direction F1, but cannot move relative to each other in the second direction F2. The limiting plate 6442 consists of two spaced-apart plates located on both sides of the adjusting plate 6412. Driven by the rotation of the first adjusting bolt 646, the adjusting plate 6412 can move between the two limiting plates 6442 in the first direction F1 to achieve fine adjustment of the suction nozzle 62 in the first direction F1. The second slider 6444 and the adjusting cavity 6445 are used to cooperate with the upper connector 645.

[0057] The upper connector 645 is provided with a second sliding groove 6451 and an adjusting block 6452. The second sliding groove 6451 cooperates with the second slider 6444, and the two can slide relative to each other in the second direction F2, but cannot move relative to each other in the first direction F1. The adjusting block 6452 is accommodated in the adjusting cavity 6445, and the size of the adjusting block 6452 in the second direction F2 is smaller than the size of the adjusting cavity 6445 in the second direction F2. The second adjusting bolt 647 is threadedly connected to the adjusting block 6452, and both ends of the second adjusting bolt 647 protrude from the adjusting block 6452 and abut against the two inner surfaces of the adjusting cavity 6445. Driven by the rotation of the second adjusting bolt 647, the adjusting block 6452 can move within the adjusting cavity 6445 in the second direction F2 to achieve fine adjustment of the suction nozzle 62 in the second direction F2.

[0058] When calibrating the multi-nozzle robot 6 using the multi-nozzle robot calibration platform 100 provided in this application, the insertion calibration plate 4 first performs pin calibration. Then, the vision inspection mechanism 5 detects the relative coordinate position and deviation value of each nozzle 62 after preliminary calibration by the insertion calibration plate 4, performs precise calculations, and the position of the nozzle 62 is precisely adjusted based on the deviation value by the fine-tuning mechanism 64. The solution of this application adopts a combination of preliminary calibration and precise calibration. On the one hand, the quick-operation pin calibration method ensures that the position of the nozzle 62 is within a suitable deviation range, requiring only minor adjustments later, which facilitates subsequent precise calibration and improves calibration efficiency. On the other hand, the visual analysis calculation calibration enables the deviation to be quantified, further improving calibration accuracy.

[0059] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0060] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A multi-nozzle robot calibration platform for calibrating relative positions between a plurality of nozzles (62) included in a multi-nozzle robot (6), characterized by, The calibration platform (100) comprises a rack (1), a motion mechanism arranged on the rack (1), a plug-in calibration plate (4) and a visual detection mechanism (5), and a fine adjustment mechanism (64) connected to the plurality of suction nozzles (62), the motion mechanism comprises a transverse translation mechanism (3) capable of driving the plurality of suction nozzles (62) to move in a first direction, the plug-in calibration plate (4) and the visual detection mechanism (5) are arranged in sequence in the first direction, the plurality of suction nozzles (62) are plug-in fitted with the plug-in calibration plate (4) to preliminarily calibrate the relative positions between the plurality of suction nozzles (62), the visual detection mechanism (5) detects the relative coordinate positions and deviation values of each suction nozzle (62) preliminarily calibrated by the plug-in calibration plate (4), and the fine adjustment mechanism (64) accurately adjusts the positions of the suction nozzles (62) based on the deviation values detected by the visual detection mechanism (5).

2. The multi-nozzle robot calibration platform of claim 1, wherein, The calibration platform (100) comprises a cross beam (2) extending along the first direction, and the transverse translation mechanism (3) comprises a sliding seat (61) movably arranged on the cross beam (2), and the multi-suction-nozzle manipulator (6) is connected to the sliding seat (61), and the transverse translation mechanism (3) drives the sliding seat (61) to move along the cross beam (2).

3. The multi-nozzle robot calibration platform of claim 2, wherein, The cross beam (2) comprises two cross beams arranged in parallel, and at least one set of multi-suction-nozzle manipulators (6) is arranged on each cross beam (2), and the calibration platform (100) further comprises a vertical translation mechanism (51) driving the visual detection mechanism (5) to move in a second direction perpendicular to the first direction, so that the visual detection mechanism (5) moves from below one cross beam (2) to below another cross beam (2).

4. The multi-nozzle robot calibration platform of claim 2, wherein, The plug-in calibration plate (4) is detachably mounted on the rack (1), and the calibration platform (100) further comprises a plurality of calibration test plates (7) capable of being mounted on the rack (1) instead of the plug-in calibration plate (4).

5. The multi-nozzle robot calibration platform of claim 4, wherein, The rack (1) comprises a support plate (11), a cross beam support (12) arranged on the support plate (11) to support the cross beam (2), and a support seat (13) arranged on the support plate (11) to support the calibration test plate (7) and / or the plug-in calibration plate (4), the support seat (13) is at least two, and is distributed in the extension direction of the cross beam (2).

6. The multi-tip robot calibration platform of claim 4, wherein, The fine adjustment mechanism (64) is configured to drive the suction nozzle (62) to move in the first direction and the second direction perpendicular to the first direction.

7. The multi-tip robot calibration platform of claim 6, wherein, The fine adjustment mechanism (64) comprises: a fixed connecting piece (641) connected with the suction nozzle (62) and fixed relative to each other; a movable connecting piece (642) connected with the fixed connecting piece (641) and capable of moving relative to each other in the first direction and the second direction.

8. The multi-tip robot calibration platform of claim 7, wherein, The fine adjustment mechanism (64) comprises a connecting bolt (643) connecting the fixed connecting piece (641) and the movable connecting piece (642) in a third direction perpendicular to the first direction and the second direction.

9. The multi-nozzle robot calibration platform of claim 8, wherein, The movable connecting piece (642) is provided with an adjusting hole (6420) penetrating from top to bottom, the fixed connecting piece (641) is provided with a bolt hole (6415) communicating with the adjusting hole (6420), and the connecting bolt (643) is connected to the bolt hole (6415) through the adjusting hole (6420); wherein the diameter of the connecting bolt (643) is smaller than the size of the adjusting hole (6420) in the first direction and the second direction, so that the movable connecting piece (642) and the fixed connecting piece (641) can move relatively.

10. The multi-tip robot calibration platform of claim 6, wherein, The fine adjustment mechanism (64) comprises: a fixed connecting piece (641) connected with the suction nozzle (62) and fixed relative to each other; an adapter connecting piece (644) connected with the fixed connecting piece (641) and capable of moving relative to each other only in the first direction; an upper connecting piece (645) connected with the adapter connecting piece (644) and capable of moving relative to each other only in the second direction; a first adjusting bolt (646) arranged between the fixed connecting piece (641) and the adapter connecting piece (644); and a second adjusting bolt (647) arranged between the adapter connecting piece (644) and the upper connecting piece (645).

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