Anti-splashing evaporation boat assembly

Abstract

The anti-splashing evaporation boat assembly comprises an evaporation boat, an insulation heat conduction crucible and an insulation heat insulation cover, the insulation heat conduction crucible is placed on the evaporation boat, the insulation heat insulation cover is buckled above the insulation heat conduction crucible, crucible annular grooves are formed in the tops of the two side walls of the insulation heat conduction crucible, and the crucible annular grooves are communicated with the insulation heat conduction crucible. Height difference exists between an inner wall step and an outer wall step on the two sides of the crucible annular groove, a plurality of backflow grooves are formed in the inner wall step and communicated with the interior of the insulation heat conduction crucible and the crucible annular groove, and an air outlet is formed in the middle of the insulation heat insulation cover. The insulation heat conduction crucible is heated through the evaporation boat, the evaporation area is greatly larger than that of an evaporation liquid pool formed by directly conveying metal wires to the evaporation boat to be melted, the evaporation rate is higher, the insulation heat insulation cover forms a barrier between the evaporation boat and an upper film material, the heat radiation influence can be reduced, and the evaporation effect is improved. Overflowed molten metal is guided to flow to non-electrode and evaporation boat areas, and splashing is effectively avoided.

Description

Technical Field

[0001] This utility model relates to the field of anti-splash evaporation boat assembly. Background Technology

[0002] Vacuum evaporation technology involves heating an evaporation boat, causing metal wires on the boat to vaporize and deposit onto the substrate, forming a metal film. Roll-up vacuum thermal evaporation is a commonly used method for thin film preparation. Currently, most vacuum evaporation methods use resistance heating of the evaporation boat, with a large current applied to both ends. A wire feeding area is located on one side of the evaporation boat, where the metal wire is fed to the boat and melts to form a evaporation bath. The evaporation bath evaporates and deposits on a flexible thin film substrate to form a metal film.

[0003] The existing evaporation boat has a small area of ​​evaporation liquid pool formed by the wire feeding point, resulting in uneven liquid surface and slow overall evaporation rate. The metal wire is directly fed to the evaporation boat for heating, which occasionally causes metal coating splashing. The splashing is mainly caused by the spread and overflow of molten metal, which can easily form lightning-shaped conductive channels, causing splashing. The evaporation boat generates a lot of radiant heat, which affects the quality of the coated film substrate. Utility Model Content

[0004] To address the aforementioned problems, this invention provides an anti-splash evaporation boat assembly, which solves the issues of slow evaporation rate, easy splashing, and large heat radiation during the evaporation coating process.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: an anti-splash evaporation boat assembly, including an evaporation boat, an insulating and heat-conducting crucible, and an insulating and heat-insulating cover. The insulating and heat-conducting crucible is placed on the evaporation boat, and the insulating and heat-insulating cover is placed on top of the insulating and heat-conducting crucible. The top of the two side walls of the insulating and heat-conducting crucible are provided with crucible annular grooves. There is a height difference between the inner wall steps and the outer wall steps on both sides of the crucible annular groove. Several reflux grooves are provided on the inner wall steps to connect the interior of the insulating and heat-conducting crucible and the crucible annular groove. An air outlet is provided in the middle of the insulating and heat-insulating cover.

[0006] Furthermore, the height difference between the inner wall steps and the outer wall steps on both sides of the annular groove of the crucible is 2-5 mm.

[0007] Furthermore, the thickness of the insulating and heat-insulating cover is 2-10 mm higher than the height of the inner wall step.

[0008] Furthermore, the insulating and heat-insulating cover has interlocking grooves on the higher steps of the inner or outer wall of the crucible annular groove.

[0009] Furthermore, the extension covers on both sides of the insulating and heat-insulating cover along the electrode direction are straight, with a straight or rounded bevel extending upwards, and a straight or rounded bevel extending downwards.

[0010] Furthermore, the projected size of the extended cover of the insulating and heat-insulating cover is 5-100mm larger than that of the evaporation boat.

[0011] Furthermore, the insulating and heat-insulating cover is provided with baffles at both ends along the electrode direction, the baffles are 5-50mm high, and the baffles form an angle of 35°-110° with the extension cover.

[0012] As can be seen from the above description of the structure of this utility model, compared with the prior art, this utility model has the following advantages:

[0013] 1. This utility model heats an insulated and heat-conducting crucible by an evaporation boat, melting the metal to be plated placed in the crucible to form an evaporation pool. The evaporation area is much larger than that of a metal wire directly fed into the evaporation boat to form a vapor deposition pool, resulting in a faster evaporation rate. The use of an insulated and heat-conducting crucible ensures that the molten metal does not conduct electricity, effectively preventing splashing.

[0014] 2. The design of the annular groove, reflux groove and stepped height difference on the side wall of the insulating and heat-conducting crucible effectively prevents the molten metal from overflowing into the evaporation boat, and the molten metal flows back, reducing losses.

[0015] 3. The design of the insulating and heat-insulating cover forms a barrier between the evaporation boat and the upper membrane material, which can reduce the thermal radiation impact of the evaporation boat on the membrane material, and at the same time guide the overflowing molten metal to the non-electrode and evaporation boat areas to avoid splashing. Attached Figure Description

[0016] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0017] Figure 1 This is a three-dimensional structural schematic diagram of Example 1;

[0018] Figure 2 This is a cross-sectional structural diagram of Example 1;

[0019] Figure 3 This is a schematic cross-sectional view of the evaporation boat in Example 1;

[0020] Figure 4 This is a cross-sectional view of Example 2;

[0021] Figure 5 This is a cross-sectional structural diagram of Example 3;

[0022] Figure 6 This is a cross-sectional structural diagram of Example 4. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0024] Example 1

[0025] refer to Figure 1-3 An anti-splash evaporation boat assembly includes an evaporation boat 1, an insulated and heat-conducting crucible 2, and an insulated and heat-insulating cover 3. The insulated and heat-conducting crucible 2 is placed on the evaporation boat, and the insulated and heat-insulating cover is placed on top of the insulated and heat-conducting crucible. The top of the two side walls of the insulated and heat-conducting crucible 2 has crucible annular grooves 21. The inner wall steps 22 on both sides of the crucible annular groove 21 are 2 mm higher than the outer wall steps 23. Several reflux grooves 24 are formed on the inner wall steps 22 to connect the inside of the insulated and heat-conducting crucible and the crucible annular grooves. The insulated and heat-insulating cover 3 has an air outlet 31 in the middle. The thickness of the insulated and heat-insulating cover 3 is 4 mm higher than the height of the inner wall steps 22.

[0026] The insulating and heat-insulating cover 3 has two extension covers 33 on both sides along the electrode direction, which are straight and sloping downwards. The projected size of the extension cover 33 is 50mm larger than that of the evaporation boat 1.

[0027] The insulating and heat-insulating cover 3 is provided with baffles 34 at both ends along the electrode direction. The height of the baffles 34 is 20mm, and the baffles 34 and the extension cover 33 form an angle of 35°.

[0028] Example 2

[0029] The difference from Example 1 is that, as Figure 4 As shown, the inner wall steps 22 on both sides of the annular groove 21 of the crucible are 2 mm lower than the outer wall steps 23.

[0030] The insulating and heat-insulating cover 3 has interlocking grooves 32 on the outer wall step 23 corresponding to the annular groove of the crucible.

[0031] Example 3

[0032] The difference from Example 2 is that, as Figure 5 As shown, the extension covers 33 on both sides of the insulating and heat-insulating cover 3 along the electrode direction are straight inclined edges facing upwards.

[0033] Example 4

[0034] The difference from Example 2 is that, as Figure 6 As shown, the extension covers 33 on both sides of the insulating and heat-insulating cover 3 along the electrode direction are straight.

[0035] This invention utilizes an evaporation boat to heat an insulated, heat-conducting crucible, melting the metal to be plated within the crucible to form an evaporation pool. The evaporation area is significantly larger than that of a metal wire directly fed into the evaporation boat to form the evaporation pool, resulting in a faster evaporation rate. The use of an insulated, heat-conducting crucible ensures the molten metal is non-conductive, effectively preventing splashing. The annular groove, reflux groove, and stepped design on the side wall of the insulated, heat-conducting crucible effectively prevent molten metal from overflowing into the evaporation boat, allowing for molten metal recirculation and reducing losses. An insulated heat-insulating cover is designed to create a barrier between the evaporation boat and the upper membrane material, reducing the thermal radiation impact of the evaporation boat on the membrane material and guiding any overflowing molten metal towards non-electrode and evaporation boat areas, thus preventing splashing.

[0036] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A splash-proof evaporation boat assembly, characterized in that: The device includes an evaporation boat, an insulated and heat-conducting crucible, and an insulated and heat-insulating cover. The insulated and heat-conducting crucible is placed on the evaporation boat, and the insulated and heat-insulating cover is placed on top of the insulated and heat-conducting crucible. The top of the two side walls of the insulated and heat-conducting crucible has an annular groove. There is a height difference between the inner wall steps and the outer wall steps on both sides of the annular groove. Several reflux grooves are formed on the inner wall steps to connect the inside of the insulated and heat-conducting crucible and the annular groove. The insulated and heat-insulating cover has a gas outlet in the middle.

2. The anti-splash evaporation boat assembly according to claim 1, characterized in that: The height difference between the inner and outer wall steps on both sides of the annular groove of the crucible is 2-5 mm.

3. The anti-splash evaporation boat assembly according to claim 1, characterized in that: The thickness of the insulating and heat-insulating cover is 2-10mm higher than the height of the inner wall step.

4. The anti-splash evaporation boat assembly according to claim 1, characterized in that: The insulating and heat-insulating cover has interlocking grooves on the higher step of the inner wall or outer wall of the crucible annular groove.

5. The anti-splash evaporation boat assembly according to claim 1, characterized in that: The insulating and heat-insulating cover extends along both sides of the electrode direction, with a straight, upward-facing, straight or rounded beveled edge, and downward-facing, straight or rounded beveled edge.

6. The anti-splash evaporation boat assembly according to claim 4, characterized in that: The projected dimensions of the extended cover of the insulating and heat-insulating cover are 5-100mm larger than those of the evaporation boat.

7. The anti-splash evaporation boat assembly according to claim 4, characterized in that: The insulating and heat-insulating cover is provided with baffles at both ends along the electrode direction. The baffles are 5-50mm high and the baffles form an angle of 35°-110° with the extension cover.

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