Antifouling structure of metal organic chemical vapor deposition (MOCVD) equipment

Abstract

The utility model belongs to the technical field of antifouling structures, in particular to an antifouling structure of MOCVD (Metal Organic Chemical Vapor Deposition) equipment, which comprises a mounting cabin, a multi-stage filtering module, a buffer flow guide cavity, a partition support plate and a sealing element, the mounting cabin is of a rectangular box-shaped structure, an air inlet and an air outlet are respectively arranged at two ends of the mounting cabin, and the multi-stage filtering module comprises a coarse filtering layer, a middle filtering layer and a fine filtering layer. The buffer flow guide cavity is located between the air inlet and the coarse filtering layer, multiple stages of flow guide plates are arranged on the inner side of the buffer flow guide cavity, the flow guide plates are obliquely arranged and arranged in a staggered mode, and the partition supporting plates are arranged in the mounting cabin and divide the multi-stage filtering module into multiple independent unit areas; according to the device, multi-layer efficient filtration, uniform airflow buffering, rapid modular replacement and long-term high-temperature corrosion-resistant operation are achieved, the operation stability, the film forming process yield and the maintenance efficiency of MOCVD equipment are remarkably improved, and the device has extremely high practical value and popularization prospects.

Description

Technical Field

[0001] This utility model belongs to the field of anti-fouling structure technology, specifically relating to an anti-fouling structure for MOCVD equipment. Background Technology

[0002] In the material preparation process of metal-organic chemical vapor deposition (MOCVD) equipment, the vapor deposition reaction generates a large number of particles, byproducts, and metal-organic residues. These contaminants diffuse into the equipment with the gas flow and easily deposit on the gas path system and reaction chamber surface, leading to film defects on the wafer surface, shortened equipment maintenance cycles, and reduced production yield. Existing MOCVD anti-fouling filtration technologies generally suffer from insufficient filtration efficiency and high fine particle penetration. Furthermore, existing filters typically employ an integral structure, requiring shutdown and disassembly of the entire filter assembly for maintenance, which is complex, time-consuming, and prone to secondary contamination. Conventional single-layer filter structures are also prone to rapid clogging due to particle accumulation, resulting in frequent equipment downtime for maintenance. Therefore, there is an urgent need for an innovative MOCVD anti-fouling filtration structure with higher filtration efficiency, convenient maintenance, and adaptability to high-temperature corrosive environments to improve equipment reliability and process stability. Utility Model Content

[0003] To address the above problems, the purpose of this utility model is to provide an anti-fouling structure for MOCVD equipment. This device achieves multi-level high-efficiency filtration, uniform airflow buffering, rapid modular replacement, and long-term high-temperature corrosion-resistant operation, significantly improving the operational stability, film formation yield, and maintenance efficiency of MOCVD equipment. It has extremely high practical value and promising prospects for promotion.

[0004] To achieve the above objectives, this utility model provides the following technical solution: an anti-fouling structure for MOCVD equipment, comprising an installation chamber, a multi-stage filtration module, a buffer flow guide cavity, a partitioned support plate, a snap-locking mechanism, and a sealing element, wherein the installation chamber is a rectangular box-shaped structure with an air inlet and an air outlet at each end;

[0005] The multi-stage filtration module includes a coarse filtration layer, a medium filtration layer, and a fine filtration layer. The coarse filtration layer is located near the air inlet, and the fine filtration layer is located near the air outlet.

[0006] The buffer guide cavity is located between the air inlet and the coarse filter layer. The inner side of the buffer guide cavity is provided with multi-stage guide plates, which are inclined and staggered.

[0007] The partition support plate is set inside the installation compartment, dividing the multi-stage filtration module into multiple independent unit areas;

[0008] The buckle locking mechanism includes an elastic metal sheet embedded in the side of the partition support plate. One end of the elastic metal sheet is connected to the buckle seat. The sides of the coarse filter layer, the medium filter layer, and the fine filter layer are all provided with buckle grooves, and the buckle seat is snapped into the buckle grooves.

[0009] The sealing element includes a pressure plate disposed on the side of the mounting compartment, and an elastic sealing strip is provided on one side of the pressure plate. The pressure plate is fixed and pressed to the mounting compartment by bolts.

[0010] The beneficial effects of this invention are as follows: This device achieves multi-level high-efficiency filtration, uniform airflow buffering, rapid modular replacement, and long-term high-temperature corrosion-resistant operation, significantly improving the operational stability of MOCVD equipment, the yield of film formation process, and maintenance efficiency, and has extremely high practical value and promotion prospects.

[0011] As a further improvement to the above technical solution: the coarse filter layer, the medium filter layer and the fine filter layer all include a filter element fixing frame, and a filter element is fixedly provided on the inner side of the filter element fixing frame.

[0012] As a further improvement to the above technical solution: the filter element of the coarse filter layer is composed of multiple layers of high-temperature resistant stainless steel woven mesh with a mesh size of 50μm to 100μm.

[0013] The beneficial effects of this improvement are: it achieves initial interception of large particulate impurities through multi-layer high-temperature resistant stainless steel woven mesh, delays clogging of subsequent filter layers, and improves the overall filter life.

[0014] As a further improvement to the above technical solution: the filter element of the middle filter layer is made of multi-layer composite ceramic fiber material, with a single layer thickness of 3mm to 5mm.

[0015] The beneficial effects of this improvement are: it effectively captures submicron suspended particles through multilayer composite ceramic fiber materials, improves filtration accuracy, and withstands the high-temperature corrosion environment of MOCVD.

[0016] As a further improvement to the above technical solution: the filter element of the fine filtration layer is made of ultra-fine glass fiber membrane with a membrane pore size of less than 1μm.

[0017] The beneficial effects of this improvement are: it achieves deep interception of fine particles through ultra-fine glass fiber membrane, ensuring that the cleanliness of the gas entering the reaction chamber meets the requirements of high-end film formation processes.

[0018] To reduce the direct impact of particles on the filter layer:

[0019] As a further improvement to the above technical solution: the guide vane is set with an inclination angle of 30° to 45°, and the guide vanes are staggered between every two stages.

[0020] The beneficial effects of this improvement are: by using inclined and staggered guide vanes, the impact force of high-speed airflow can be reduced, the flow field can be evenly distributed, the direct impact of particles on the filter layer can be reduced, and the system stability can be improved.

[0021] To reduce equipment weight:

[0022] As a further improvement to the above technical solution: the partition support plate adopts a honeycomb reinforced structure.

[0023] The beneficial effects of this improvement are: the honeycomb reinforcement structure of the partition support plate can reduce the weight of the equipment while ensuring overall strength.

[0024] The parts of the device not covered herein are the same as or can be implemented using existing technologies. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the isometric structure of this utility model;

[0026] Figure 2 This is a schematic diagram of the present invention when the pressure plate is removed;

[0027] Figure 3 This is a longitudinal sectional view of the present invention;

[0028] Figure 4 This is a partial cross-sectional view of the present invention;

[0029] Figure 5 This is a partial sectional view of the side of the present invention;

[0030] Figure 6 This is a schematic diagram of the partition support plate in this utility model;

[0031] In the diagram: 1. Installation compartment; 2. Multi-stage filtration module; 3. Buffer guide cavity; 4. Partition support plate; 6. Seal; 11. Air inlet; 12. Air outlet; 21. Coarse filter layer; 22. Medium filter layer; 23. Fine filter layer; 24. Filter element fixing frame; 25. Filter element; 31. Guide plate; 51. Elastic metal sheet; 52. Fastener; 53. Fastening groove; 61. Pressure plate; 62. Elastic sealing strip. Detailed Implementation

[0032] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be described in detail below with reference to the accompanying drawings. The description in this part is only exemplary and explanatory, and should not be used to limit the scope of protection of the present invention in any way.

[0033] like Figure 1-6As shown, an anti-fouling structure for an MOCVD device includes an installation chamber 1, a multi-stage filtration module 2, a buffer flow guiding cavity 3, a partitioned support plate 4, a snap-locking mechanism, and a sealing element 6. The installation chamber 1 is a rectangular box-shaped structure with an air inlet 11 and an air outlet 12 at its two ends, respectively.

[0034] The multi-stage filtration module 2 includes a coarse filtration layer 21, a medium filtration layer 22, and a fine filtration layer 23. The coarse filtration layer 21 is located near the air inlet 11, and the fine filtration layer 23 is located near the air outlet 12.

[0035] The buffer guide cavity 3 is located between the air inlet 11 and the coarse filter layer 21. The inner side of the buffer guide cavity 3 is provided with multi-stage guide plates 31, which are inclined and staggered.

[0036] The partition support plate 4 is installed inside the installation chamber 1, dividing the multi-stage filtration module 2 into multiple independent unit areas;

[0037] The buckle locking mechanism includes an elastic metal sheet 51 embedded in the side of the partition support plate 4. One end of the elastic metal sheet 51 is connected to the buckle seat 52. The sides of the coarse filter layer 21, the medium filter layer 22, and the fine filter layer 23 are all provided with buckle grooves 53, and the buckle seat 52 is snapped into the buckle grooves 53.

[0038] The sealing element 6 includes a pressure plate 61 disposed on the side of the mounting chamber 1, and an elastic sealing strip 62 is provided on one side of the pressure plate 61. The pressure plate 61 is fixed and pressed to the mounting chamber 1 by bolts.

[0039] This device achieves multi-level high-efficiency filtration, uniform airflow buffering, rapid modular replacement, and long-term high-temperature corrosion-resistant operation, significantly improving the operational stability of MOCVD equipment, film formation yield, and maintenance efficiency. It has extremely high practical value and promising prospects for promotion.

[0040] The coarse filter layer 21, the medium filter layer 22, and the fine filter layer 23 all include a filter element fixing frame 24, and a filter element 25 is fixedly installed on the inner side of the filter element fixing frame 24.

[0041] The filter element 25 of the coarse filter layer 21 is composed of multiple layers of high-temperature resistant stainless steel woven mesh with a mesh size of 50μm to 100μm.

[0042] The multi-layer high-temperature resistant stainless steel woven mesh achieves initial interception of large particle impurities, delays clogging of subsequent filter layers, and extends the overall filter life.

[0043] The filter element 25 of the middle filter layer 22 is made of multi-layer composite ceramic fiber material, with a single layer thickness of 3mm to 5mm.

[0044] Multi-layer composite ceramic fiber materials effectively capture submicron suspended particles, improving filtration accuracy and resisting the high-temperature corrosion environment of MOCVD.

[0045] The filter element 25 of the fine filtration layer 23 is made of ultra-fine glass fiber membrane with a pore size of less than 1 μm.

[0046] By using ultra-fine glass fiber membranes to achieve deep interception of fine particles, the cleanliness of the gas entering the reaction chamber is ensured to meet the requirements of high-end film formation processes.

[0047] The guide vanes 31 are tilted at an angle of 30° to 45°, and are staggered between every two stages of guide vanes 31.

[0048] By using inclined and staggered guide vanes 31, the impact force of high-speed airflow can be reduced, the flow field can be evenly distributed, the direct impact of particles on the filter layer can be reduced, and the system stability can be improved.

[0049] The partition support plate 4 adopts a honeycomb reinforced structure.

[0050] The partition support plate 4 adopts a honeycomb reinforced structure, which can reduce the weight of the equipment while ensuring the overall strength.

[0051] The working principle and usage process of this utility model are as follows: External airflow first enters the installation chamber 1 through the air inlet 11, and then passes through the buffer guide cavity 3. The high-speed airflow undergoes multiple refractions and splits under the staggered and inclined arrangement of the guide plates 31, reducing the airflow speed and dispersing it evenly. At the same time, it effectively blocks large particles from directly impacting the multi-stage filtration module 2. Subsequently, the airflow passes through the coarse filter layer 21, the medium filter layer 22, and the fine filter layer 23 in sequence. The coarse filter layer 21 intercepts larger impurity particles, the medium filter layer 22 further captures submicron-sized fine particles, and the fine filter layer 23 performs deep filtration on particles with a diameter of micron and below. The clean gas after multi-stage filtration enters the MOCVD reaction chamber through the air outlet 12. The entire filtration module is divided into multiple independent unit areas by the partition support plate 4, and a separate multi-stage filtration module is inserted in each unit area. Block 2, each multi-stage filtration module 2 is fixed to the partition support plate 4 by elastic metal sheet 51, which uses elasticity to press the fastener 52 into the fastening groove 53. When maintenance is required, simply open the pressure plate 61 and move the elastic metal sheet 51 to move the fastener 52 away from the fastening groove 53, so that the filtration module in the target unit area can be quickly removed and replaced without disassembling the entire installation chamber 1, which greatly shortens the maintenance downtime. At the same time, during use, the elastic sealing strip 62 in the sealing element 6 and the pressure plate 61 maintain a stable seal on the side of the installation chamber 1, preventing airflow leakage and contaminant escape. In summary, this device achieves multi-level high-efficiency filtration, uniform airflow buffering, rapid modular replacement, and long-term high-temperature corrosion-resistant operation, which significantly improves the operational stability of MOCVD equipment, film formation process yield, and maintenance efficiency, and has extremely high practical value and promotion prospects.

[0052] The circuits, electronic components, and modules involved are all existing technologies, which can be fully implemented by those skilled in the art, and need not be elaborated upon. The content protected by this application does not involve any improvement to the software and methods.

[0053] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0054] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The above examples are only for the purpose of helping to understand the method and core ideas of this utility model. The above description is only a preferred embodiment of this utility model. It should be noted that due to the limitations of textual expression, there are objectively infinite specific structures. For those skilled in the art, several improvements, modifications, or changes can be made without departing from the principles of this utility model, and the above technical features can also be combined in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the concept and technical solution of the utility model to other occasions without modification, should all be considered within the protection scope of this utility model.

Claims

1. A fouling prevention structure for MOCVD equipment, characterized in that: It includes an installation chamber (1), a multi-stage filtration module (2), a buffer flow guide cavity (3), a partition support plate (4), a snap-locking mechanism, and a sealing element (6). The installation chamber (1) is a rectangular box structure with an air inlet (11) and an air outlet (12) at its two ends, respectively. The multi-stage filtration module (2) includes a coarse filtration layer (21), a medium filtration layer (22), and a fine filtration layer (23). The coarse filtration layer (21) is located near the air inlet (11), and the fine filtration layer (23) is located near the air outlet (12). The buffer guide cavity (3) is located between the air inlet (11) and the coarse filter layer (21). The inner side of the buffer guide cavity (3) is provided with multi-stage guide plates (31), which are inclined and staggered. The partition support plate (4) is set inside the installation chamber (1) to divide the multi-stage filtration module (2) into multiple independent unit areas; The buckle locking mechanism includes an elastic metal sheet (51) embedded in the side of the partition support plate (4). One end of the elastic metal sheet (51) is connected to the buckle seat (52). The sides of the coarse filter layer (21), the medium filter layer (22), and the fine filter layer (23) are all provided with buckle grooves (53). The buckle seat (52) is snapped into the buckle grooves (53). The sealing element (6) includes a pressure plate (61) disposed on the side of the mounting chamber (1), and an elastic sealing strip (62) is provided on one side of the pressure plate (61). The pressure plate (61) and the mounting chamber (1) are fixed and pressed together by bolts.

2. The anti-fouling structure for MOCVD equipment according to claim 1, characterized in that: The coarse filter layer (21), the medium filter layer (22), and the fine filter layer (23) all include a filter element fixing frame (24), and a filter element (25) is fixedly provided on the inner side of the filter element fixing frame (24).

3. The anti-fouling structure for MOCVD equipment according to claim 2, characterized in that: The filter element (25) of the coarse filter layer (21) is composed of multiple layers of high-temperature resistant stainless steel woven mesh with a mesh size of 50μm to 100μm.

4. The anti-fouling structure for MOCVD equipment according to claim 2, characterized in that: The filter element (25) of the middle filter layer (22) is made of multi-layer composite ceramic fiber material, with a single layer thickness of 3mm to 5mm.

5. The anti-fouling structure for MOCVD equipment according to claim 2, characterized in that: The filter element (25) of the fine filtration layer (23) is made of ultra-fine glass fiber membrane with a pore size of less than 1 μm.

6. The anti-fouling structure for MOCVD equipment according to claim 1, characterized in that: The guide vanes (31) are tilted at an angle of 30° to 45°, and are staggered between every two stages of guide vanes (31).

7. The anti-fouling structure for MOCVD equipment according to claim 1, characterized in that: The partition support plate (4) adopts a honeycomb reinforced structure.

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