Efficient double-light-path system of energy dispersion X-ray fluorescence spectrophotometer

Abstract

The utility model discloses a high-efficiency double-light-path system of an energy dispersion X-ray fluorescence spectrophotometer, which comprises a light path bottom plate, a first light path module, a second light path module, a third light path module to an nth light path module, the integrated optical shutter collimation optical filter switching module is installed below the first optical path module, the second optical path module, the third optical path module to the nth optical path module, and the movable adjusting module is used for adjusting the second optical path module, the third optical path module to the nth optical path module and the first optical path module. According to the utility model, a plurality of optical path modules are arranged, one path is in a fixed mode, the displacement of other paths can be adjusted through a mobile module, optical path accessories of an integrated optical shutter, a collimation and optical filter switching assembly are optimally configured, and a test unit effectively adjusts the displacement of a movable optical path according to samples of different specifications and sizes and algorithm calculation. The high-efficiency and high-performance optical path system is realized, so that the test requirements of different products are met, and the requirements of accuracy and efficiency in the test process can be met at the same time.

Description

Technical Field

[0001] This utility model belongs to the field of energy dispersive X-ray fluorescence spectroscopy detection, and relates to a dual-optical-path system for a spectrometer. Background Technology

[0002] In modern market applications, as customer demands increase, traditional optical path systems are finding it increasingly difficult to meet the market's requirements for high efficiency and high performance due to limitations in receiving angle and energy in certain situations. Furthermore, with the increasing demands for efficiency, especially for high-efficiency and high-precision detection of array samples, there is still no suitable equipment available. Therefore, it is necessary to find new high-efficiency and high-performance application solutions. Utility Model Content

[0003] In view of this, it is necessary to overcome at least one of the above-mentioned defects in the prior art. The present invention provides a high-efficiency dual-optical-path system for an energy-dispersive X-ray fluorescence spectrometer, which can effectively solve the related problems. It includes: an optical path base plate, a first optical path module fixedly mounted on the optical path base plate, a second optical path module, a third optical path module, up to an nth optical path module mounted on a sliding component on the optical path base plate and matched with the fixed optical path module, an integrated optical shutter collimating filter switching module mounted under the first optical path module and the second, third, up to nth optical path modules, and an adjustment module for adjusting the movement of the second optical path module, the third optical path module, up to the nth optical path module, and the first optical path module;

[0004] The first optical path module includes a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the multiple detector assemblies. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting the multiple detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample.

[0005] The second, third, and up to the nth optical path modules include a single-path X-ray source assembly for providing an X-ray source to excite a sample, a dual-path detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and multiple detector assemblies. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting multiple detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample.

[0006] The movable adjustment module corresponds one-to-one with the second optical path module, the third optical path module, and so on up to the nth optical path module. The movable adjustment module is connected to the second optical path module, the third optical path module, and so on up to the nth optical path module through a connecting component, and drives the second optical path module, the third optical path module, and so on up to the nth optical path module to move back and forth to adjust the distance between the first optical path module or the second optical path module, the third optical path module, and so on up to the nth optical path module.

[0007] As described in the background section of this utility model, traditional optical path systems suffer from insufficient receiving angle and energy in certain situations, making it increasingly difficult to meet market demands for high efficiency and high performance. Furthermore, with increasing efficiency requirements, particularly under these conditions, there is a lack of corresponding equipment and methods for high-efficiency and high-precision detection of array samples. In contrast, the energy-dispersive X-ray fluorescence spectrometer high-efficiency dual-optical-path system disclosed in this utility model optimizes the optical path system based on practical applications. It features multiple optical path modules, one fixed mode, while the others can be adjusted via movable modules. The system also optimizes the configuration of integrated shutters, collimators, and filter switching components. The testing unit, based on different sample sizes, effectively adjusts the displacement of the movable optical paths using algorithms to achieve a high-efficiency, high-performance optical path system. This meets the testing needs of various products, simultaneously satisfying both accuracy and efficiency requirements during testing. It is applicable to industries with higher efficiency and accuracy requirements, such as RoHS-related industries, the electronics industry, and integrated circuits.

[0008] In addition, the high-efficiency dual-optical-path system for energy-dispersive X-ray fluorescence spectrometer disclosed in this utility model also has the following additional technical features:

[0009] Furthermore, the detector assembly and the tilting interface are symmetrically distributed around the single-channel X-ray source assembly and the vertical interface, and the uniform distribution design enables the overall detection effect to be more accurate and achieve higher efficiency.

[0010] Furthermore, the angle of the tilting interface is 20-70 degrees. The angle design not only facilitates installation and maintenance, but also improves the collection of excitation light.

[0011] Furthermore, the angle of the tilting interface is 30, 45, 50, 60, or 70 degrees.

[0012] Furthermore, the detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

[0013] Furthermore, a collimator for providing collimation is provided between the sample and the X-ray source assembly. The collimator is a circular channel used to shield X-rays from unnecessary / off-center areas.

[0014] Furthermore, the first optical path module, the second optical path module, and up to the nth optical path module also include an optical shutter assembly. The optical shutter assembly includes an optical shutter plate, and the optical shutter plate is equipped with an optical shutter baffle that shields X-ray leakage when the X-ray source is working normally and is located at the X-ray exit, and a filter that provides filtering of stray light.

[0015] Furthermore, the shutter assembly also includes a motor, which drives the shutter plate via a crank plate with an elongated slot. A rotating component is mounted on the shutter plate and inserted into the elongated slot of the crank plate. A slide rail assembly for driving the shutter plate is provided below the shutter plate.

[0016] Furthermore, the light shutter baffle adopts a labyrinth structure, and the light shutter has multiple annular vertical groove structures.

[0017] Furthermore, the dual-optical-path system also includes a high-voltage unit for improving the high excitation efficiency of the X-ray source, and the high-voltage unit is connected to the first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module.

[0018] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, in which:

[0020] Figure 1 This is a top view of the overall system of this utility model (containing only two optical path modules, but there can be multiple parallel or parallel optical path modules).

[0021] Figure 2 This is a side view of the overall system of this utility model;

[0022] Figure 3 This is a three-dimensional schematic diagram of the overall system of this utility model;

[0023] Figure 4 This is a schematic diagram of the sample array of this utility model (the markings in the sample circle indicate that parallel detection is performed using two optical path modules).

[0024] Figure 5 This is a three-dimensional schematic diagram of the optical path module of this utility model;

[0025] Figure 6 This is a front view schematic diagram of the optical path module of this utility model;

[0026] Figure 7 This is a side view of the optical path module of this utility model;

[0027] Figure 8 This is a top view of the optical shutter assembly in this utility model;

[0028] Figure 9 This is a schematic diagram of the optical shutter assembly in this utility model;

[0029] Figure 10 This is a schematic diagram of the optical shutter labyrinth structure in this utility model;

[0030] The components include: 1. Optical path cavity, 2. Detector insulating block, 3. One set of detector assemblies, 4. X-ray source assembly, 5. Binding post, 6. Two sets of detector assemblies, 7. Optical tube fixing ring, 8. Collimator, 9. Optical shutter baffle, 10. Filter, 11. Optical shutter plate, A. Optical shutter assembly, A4. Optical shutter fixing plate, A5. Motor, A6. Slide rail, A7. Bearing, A8. Crank plate, A9. Optical shutter trigger plate, A10. Photoelectric switch, B. Optical path base plate, C. First optical path module, D. High voltage unit, E. Adjustment module, F. Connecting plate, and G. Second optical path module. Detailed Implementation

[0031] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0032] In the description of this utility model, it should be understood that the terms "upper", "lower", "bottom", "top", "front", "rear", "inner", "outer", "horizontal", "vertical", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connection," "connection," "linking," "fitting," and "cooperation" should be interpreted broadly. For example, they can refer to a fixed connection, an integral connection, or a detachable connection; they can refer to the internal connection of two components; they can refer to a direct connection or an indirect connection through an intermediate medium; "fitting" can refer to the fit between surfaces, the fit between a point and a surface or a line and a surface, and also includes the fit between a hole and a shaft. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0034] The high-efficiency dual-optical-path system of the energy-dispersive X-ray fluorescence spectrometer of this invention will now be described with reference to the accompanying drawings. Figure 1-4 These are schematic diagrams of the overall system of this utility model. Figure 5-7 This is a schematic diagram of the optical path module of this utility model; Figure 8-9 This is a schematic diagram of the optical shutter assembly in this utility model.

[0035] According to embodiments of the present invention, such as Figure 1-7 The system includes an optical path base plate, a first optical path module fixedly mounted on the optical path base plate, a second optical path module, a third optical path module, and up to an nth optical path module mounted on a sliding component on the optical path base plate and matched with the fixed optical path module, an integrated optical shutter collimating filter switching module mounted under the first optical path module and the second, third, and up to the nth optical path modules, and a movement adjustment module for adjusting the second, third, and up to the nth optical path modules and the first optical path module;

[0036] The first optical path module includes a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the multiple detector assemblies. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting the multiple detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample.

[0037] The second, third, and up to the nth optical path modules include a single-path X-ray source assembly for providing an X-ray source to excite a sample, a dual-path detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and multiple detector assemblies. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting multiple detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample.

[0038] The movable adjustment module corresponds one-to-one with the second optical path module, the third optical path module, and so on up to the nth optical path module. The movable adjustment module is connected to the second optical path module, the third optical path module, and so on up to the nth optical path module through a connecting component, and drives the second optical path module, the third optical path module, and so on up to the nth optical path module to move back and forth to adjust the distance between the first optical path module or the second optical path module, the third optical path module, and so on up to the nth optical path module.

[0039] According to some embodiments of this utility model, the angle of the tilting interface is 20-70 degrees. The angle design not only facilitates installation and maintenance, but also improves the collection of excitation light.

[0040] According to some embodiments of this utility model, the angle of the tilting interface is 30, 45, 50, 60, or 70 degrees.

[0041] According to some embodiments of the present invention, the detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

[0042] According to some embodiments of the present invention, a collimator for providing collimation is further provided between the sample and the X-ray source assembly. The collimator is a circular channel with a certain thickness, used to shield X-rays from unnecessary / off-center areas.

[0043] According to some embodiments of this utility model, the first optical path module, the second optical path module, and up to the nth optical path module further include an optical shutter assembly. The optical shutter assembly includes an optical shutter plate, on which an optical shutter baffle is mounted to shield X-ray leakage when the X-ray source is operating normally and located at the X-ray exit, and a filter to filter stray light. Figure 8 , 9 .

[0044] According to some embodiments of this utility model, the shutter assembly further includes a motor, which drives the shutter plate via a crank plate with an elongated slot. A rotating component is mounted on the shutter plate and inserted into the elongated slot of the crank plate. A slide rail assembly for driving the shutter plate is provided below the shutter plate. Figure 8 , 9 .

[0045] According to one embodiment of the present invention, the light shutter baffle adopts a labyrinth structure, and the light shutter plate has multiple annular vertical groove structures, such as... Figure 10 It is used to prevent X-ray leakage.

[0046] According to an embodiment of the present invention, the dual-optical-path system further includes a high-voltage unit for improving the high excitation efficiency of the X-ray source, and the high-voltage unit is connected to the first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module.

[0047] Any reference to "an embodiment," "embodiment," "illustrative embodiment," etc., means that the specific component, structure, or feature described in connection with that embodiment is included in at least one embodiment of this utility model. Such illustrative expressions throughout this specification do not necessarily refer to the same embodiment. Furthermore, when a specific component, structure, or feature is described in connection with any embodiment, it is claimed that implementing such a component, structure, or feature in connection with other embodiments falls within the scope of those skilled in the art.

[0048] Although the specific embodiments of this utility model have been described in detail with reference to several illustrative examples, it should be understood that those skilled in the art can devise various other modifications and embodiments that fall within the spirit and scope of the principles of this utility model. Specifically, reasonable variations and modifications can be made to the arrangement of components and / or dependent combinations within the scope of the foregoing disclosure, drawings, and claims without departing from the spirit of this utility model. The scope of these variations and modifications, except for those concerning components and / or layout, is defined by the appended claims and their equivalents.

Claims

1. A high-efficiency dual-optical-path system for energy-dispersive X-ray fluorescence spectrometer, characterized in that... ,include: An optical path base plate is installed with a fixed first optical path module and sliding second, third, up to nth optical path modules; an integrated optical shutter collimating filter switching module is installed on the first optical path module and the second, third, up to nth optical path modules; and an adjustment module is used to adjust the movement of the second, third, up to nth optical path modules and the first optical path module. The first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module include a single-path X-ray source assembly and a dual-path detector assembly, used to position and install the X-ray source assembly and the dual-path detector assembly in an optical path cavity. The optical path cavity has a vertical interface for installing the X-ray source assembly and an inclined interface surrounding the vertical interface for installing the dual-path detector assembly. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is installed below the vertical interface, and the inclined interface is axially pointed towards the sample. The moving adjustment module corresponds one-to-one with the second optical path module, the third optical path module, and so on up to the nth optical path module. The moving adjustment module is connected to the second optical path module, the third optical path module, and so on up to the nth optical path module through a connecting component.

2. The high-efficiency dual-optical-path system for energy-dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that, The angle of the tilting interface is 20-70 degrees.

3. The high-efficiency dual-optical-path system for energy-dispersive X-ray fluorescence spectrometer according to claim 2, characterized in that, The angle of the tilting interface is 30, 45, 50, 60, or 70 degrees.

4. The high-efficiency dual-optical-path system for energy-dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that, The detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

5. The high-efficiency dual-optical-path system for energy-dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that, A collimator for providing collimation is also provided between the sample and the X-ray source assembly.

6. The high-efficiency dual-optical-path system for energy-dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that, The first optical path module, the second optical path module, and up to the nth optical path module also include an optical shutter assembly. The optical shutter assembly includes an optical shutter plate, and the optical shutter plate is equipped with an optical shutter baffle that shields X-ray leakage when the X-ray source is working normally and is located at the X-ray exit, and a filter that provides filtering of stray light.

7. The high-efficiency dual-optical-path system for energy-dispersive X-ray fluorescence spectrometer according to claim 6, characterized in that, The shutter assembly also includes a motor, which drives the shutter plate via a crank plate with an elongated slot. A rotating component is mounted on the shutter plate and inserted into the elongated slot of the crank plate. A slide rail assembly for driving the shutter plate is provided below the shutter plate.

8. The high-efficiency dual-optical-path system for energy-dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that, The dual-optical-path system also includes a high-voltage unit for improving the high excitation efficiency of the X-ray source. The high-voltage unit is connected to the first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module.

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