Cleaning device and cleaning system

Abstract

The embodiment of the utility model discloses a cleaning device and a cleaning system. The cleaning device comprises a support; the cleaning assembly comprises a cleaning module and a connecting rod, the first end of the connecting rod is connected with the cleaning module, and the cleaning module can spray water mist to the to-be-cleaned part; the driving assembly is arranged on the support, the driving assembly is connected with the second end of the connecting rod, and the driving assembly can drive the connecting rod to swing; a containing cavity is formed in the protective cover, the cleaning module is located in the containing cavity, the driving assembly is located outside the containing cavity, the connecting rod penetrates through the protective cover, the protective cover comprises an avoiding opening and an air suction opening, the avoiding opening is used for avoiding a to-be-cleaned part, and the cleaning module can spray water mist to the avoiding opening to clean the to-be-cleaned part. The exhaust inlet is used for being connected with exhaust equipment. According to the cleaning device provided by the embodiment of the invention, water mist generated during cleaning can be prevented from diffusing, and the problem that the cleaning device and the cleaned wafer are polluted by the water mist during cleaning is solved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment technology, and in particular to a cleaning device and cleaning system. Background Technology

[0002] Wafer thinning is a key process in semiconductor manufacturing, primarily involving mechanical grinding to thin the back side of the wafer. This improves the wafer's processing performance and reduces material waste during chip manufacturing. After thinning, the wafer surface may retain grinding fluid, abrasive particles, metal ions, and other processing byproducts. If these residues are not removed promptly, they will affect subsequent wafer processing steps.

[0003] However, existing wafer cleaning equipment uses water mist to spray and clean the surface of the wafer. During the cleaning process, the water mist sprayed out, as well as pollutants in the environment, may spread with the flow of water mist to the cleaning equipment or the cleaned wafer. These pollutants will recontaminate the wafer surface during the diffusion process, reduce the cleaning effect, and cause pollution or damage to the cleaning equipment itself. Utility Model Content

[0004] This application discloses a cleaning device and a cleaning system that can prevent water mist generated during cleaning from spreading to the external environment, thus solving the problem of water mist spreading during cleaning causing contamination to the cleaning device and the cleaned wafer.

[0005] To achieve the above objectives, this application provides a cleaning apparatus, which includes:

[0006] support;

[0007] A cleaning assembly, comprising a cleaning module and a connecting rod, wherein a first end of the connecting rod is connected to the cleaning module, and the cleaning module is capable of spraying water mist onto the workpiece to be cleaned;

[0008] A drive assembly is disposed on the bracket and connected to the second end of the connecting rod, and the drive assembly is capable of driving the connecting rod to swing.

[0009] A protective cover has an internal cavity, a cleaning module is located inside the cavity, a drive assembly is located outside the cavity, a connecting rod passes through the protective cover, the protective cover includes a clearance opening and a suction port, the clearance opening is used to avoid the part to be cleaned, the cleaning module can spray water mist into the clearance opening to clean the part to be cleaned, and the suction port is used to connect to an air extraction device.

[0010] As an optional implementation, the protective cover is fixed relative to the connecting rod so that the protective cover can swing with the connecting rod.

[0011] As an optional implementation, the protective cover and the connecting rod are connected by a mounting bracket, which is disposed within the receiving cavity.

[0012] As an optional implementation, the mounting bracket includes a support portion and two mounting portions respectively disposed at both ends of the support portion. The two mounting portions are respectively connected to the two opposite side walls of the receiving cavity, and the support portion is connected to the connecting rod.

[0013] As an optional implementation, the extension direction of the connecting rod is perpendicular to the arrangement direction of the two mounting portions.

[0014] As an optional implementation, the supporting part and the connecting rod are detachably connected, and the mounting part is detachably connected to the side wall.

[0015] As an optional implementation, the air intake is located on the side of the protective cover away from the clearance opening.

[0016] As an optional implementation, the cleaning device further includes a seal disposed around the clearance opening on the protective cover.

[0017] As an optional implementation, the cleaning module includes: a water inlet connector for connecting to a cleaning medium supply device; an air inlet connector for connecting to the cleaning medium supply device; a mixing component having a mixing chamber inside, the mixing chamber being connected to the water inlet connector and the air inlet connector, the mixing chamber being used to mix the liquid provided by the water inlet connector and the gas provided by the air inlet connector to form a water mist; and a spray connector connected to the mixing chamber, the spray connector being capable of spraying the mixed water mist onto the part to be cleaned.

[0018] As an optional implementation, the connecting rod has a connecting channel inside, the connecting channel is connected to the mixing chamber, and the water inlet connector is connected to the end of the connecting channel away from the mixing chamber.

[0019] As an optional implementation, the spray connector includes a spray nozzle, which is circular and its inner diameter gradually increases along the direction close to the part to be cleaned; along the extension direction of the connecting rod, the side wall of the protective cover near the spray connector is arc-shaped so that the protective cover covers the spray range of the spray nozzle.

[0020] A second aspect of this application provides a cleaning system, including the cleaning device; an air extraction device connected to the air intake; and a cleaning medium supply device connected to the cleaning module.

[0021] Compared with the prior art, the beneficial effects of this application are:

[0022] The cleaning device provided in this application embodiment can spray water mist onto the parts to be cleaned through the cleaning module. The protective cover and the platform carrying the parts to be cleaned form a relatively sealed space, which avoids the water mist generated during cleaning from contaminating the driving components or the external environment. At the same time, the air intake provided by the protective cover ensures that the water mist and pollutants generated during the cleaning process are sucked out through the air intake, so that the water mist and pollutants will not fall back onto the parts to be cleaned, thus ensuring the cleaning effect of the parts to be cleaned and avoiding the possibility of secondary pollution. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the cleaning device provided in the embodiments of this application;

[0025] Figure 2 This is a cross-sectional schematic diagram of the cleaning apparatus provided in the embodiments of this application;

[0026] Figure 3 This is a cross-sectional schematic diagram of the cleaning assembly and protective cover provided in an embodiment of this application.

[0027] Explanation of reference numerals in the attached figures:

[0028] 100-Cleaning device; 1-Bracket; 2-Cleaning assembly; 21-Cleaning module; 211-Water inlet connector; 212-Air inlet connector; 213-Mixing component; 213a-Mixing chamber; 214-Spray connector; 22-Connecting rod; 221-Connecting channel; 3-Drive assembly; 31-Drive component; 32-Coupling; 33-Rotating shaft; 34-Connecting block; 4-Protective cover; 41-Receiving cavity; 42-Allowing opening; 43-Air intake; 5-Mounting bracket; 51-Mounting part; 52-Bearing part; 6-Sealing component. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0030] In this application, the terms "upper," "lower," "top," "bottom," "inner," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0031] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0032] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0033] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0034] Wafer thinning, a crucial process in semiconductor manufacturing, aims to thin the back side of the wafer to a predetermined thickness through mechanical grinding. This step not only enhances the processing flexibility and efficiency of the wafer in subsequent chip manufacturing but also reduces the use of raw materials, lowers production costs, and contributes to the miniaturization and high performance of semiconductor devices.

[0035] After wafers undergo thinning processes, their surfaces often retain various processing byproducts, including but not limited to grinding fluid, fine abrasive particles, metal ions, and other chemicals that may be generated during the grinding process. If these residues are not removed promptly and thoroughly, they can significantly interfere with subsequent wafer processing steps. This can lead to decreased pattern accuracy, impaired device performance, and even reliability issues, directly impacting the quality of the final product.

[0036] However, most widely used wafer cleaning equipment currently relies on water mist spraying to clean wafers. While this method effectively washes away some residue from the wafer surface, the fine water mist sprayed during the cleaning process may carry dust, microorganisms, and other contaminants from the environment. Due to the fluidity of the water mist, these contaminants may settle on the surface of the cleaning equipment or the wafer itself. Once these contaminants re-adhere to the wafer surface, the cleaning effect is weakened, and the cleanliness of the wafer cannot be fully guaranteed. The accumulation of these contaminants can also corrode or contaminate the internal structure of the cleaning equipment, further threatening the stability and lifespan of the device.

[0037] To address the aforementioned issues, the inventors investigated the limitations of existing cleaning devices and improved upon them. They designed a cleaning device that can prevent water mist diffusion and absorb water mist, thereby preventing water mist diffusion from contaminating the wafers and the cleaning device, and achieving the goal of improving wafer cleaning effect and efficiency.

[0038] Based on this, the present application discloses a cleaning device and a cleaning system, which solves the problem of water mist splashing during the cleaning of the parts to be cleaned contaminating both the cleaning device and the parts to be cleaned.

[0039] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0040] Please see Figure 1 , Figure 1This is a schematic diagram of the structure of the cleaning device 100 provided in this application embodiment. The cleaning device 100 includes: a support 1; a cleaning component 2, which includes a cleaning module 21 and a connecting rod 22, the first end of which is connected to the cleaning module 21, and the cleaning module 21 can spray water mist onto the workpiece to be cleaned; a driving component 3, which is disposed on the support 1 and connected to the second end of the connecting rod 22, and the driving component 3 can drive the connecting rod 22 to swing; and a protective cover 4, which has a receiving cavity 41 inside, the cleaning module 21 is located inside the receiving cavity 41, the driving component 3 is located outside the receiving cavity 41, and the connecting rod 22 passes through the protective cover 4. The protective cover 4 includes a clearance opening 42 and a suction port 43. The clearance opening 42 is used to avoid the workpiece to be cleaned, the cleaning module 21 can spray water mist onto the clearance opening 42 to clean the workpiece to be cleaned, and the suction port 43 is used to connect to an air extraction device.

[0041] The bracket 1 serves as the mounting base for the entire cleaning device 100, providing necessary support and positioning for other components of the cleaning device 100. Other components, such as the cleaning assembly 2 and the drive assembly 3, are mounted on the bracket 1. The bracket 1 prevents vibrations from occurring during operation of the cleaning device 100, which could cause the cleaning assembly 2 and drive assembly 3 to shake or detach.

[0042] Optionally, the bracket 1 can be configured as an integral structure or as several sub-installation structures that are spliced ​​together. In this embodiment, the form of the bracket 1 is not limited.

[0043] The cleaning assembly 2 includes a cleaning module 21 and a connecting rod 22. The cleaning module 21 is used to spray water mist onto the part to be cleaned, thereby completing the cleaning of the part. The cleaning module 21 sprays water mist directly onto the part to be cleaned, which ensures that the cleaning medium acts directly on the surface of the part to be cleaned, thus improving the cleaning efficiency.

[0044] It is understood that the object to be cleaned can be a wafer or other object that needs to be cleaned, and this application embodiment does not limit this.

[0045] Furthermore, the cleaning component 2 is connected to the drive component 3 via the connecting rod 22. The drive component 3 can drive the connecting rod 22 to swing, thereby ensuring that the connecting rod 22 drives the cleaning component 2 to swing, achieving a more comprehensive cleaning of the parts to be cleaned and preventing the problem of cleaning dead spots leading to a decrease in cleaning effect.

[0046] In addition, the drive assembly 3 may include a drive member 31, a rotating shaft 33 and a coupling 32 connecting the drive member 31 and the rotating shaft. A bearing may be provided between the rotating shaft and the bracket 1 so that the rotating shaft can pass through the bracket 1 and rotate relative to the bracket 1.

[0047] Optionally, the driving component 31 may be a component capable of driving the rotating shaft to rotate, such as a motor, cylinder, or compressor. This application embodiment does not limit this.

[0048] Furthermore, the rotating shaft and the connecting rod 22 can be connected by a connecting block 34, so that the rotation of the rotating shaft is converted into the swing of the connecting rod 22, which in turn drives the cleaning module 21 to swing.

[0049] The cleaning device 100 also includes a protective cover 4, inside which a receiving cavity 41 is formed. The cleaning module 21 is located inside the receiving cavity 41, and the drive assembly 3 is located outside the receiving cavity 41. The connecting rod 22 passes through the protective cover 4. This ensures that the cleaning process takes place inside the receiving cavity 41, preventing the water mist sprayed by the cleaning module 21 from splashing outside the protective cover and thus avoiding water mist falling on the drive assembly 3, causing contamination and damage to the drive assembly 3.

[0050] Furthermore, the protective cover 4 is installed on the platform that carries the parts to be cleaned, so that the protective cover 4 and the platform that carries the parts to be cleaned form a relatively closed space, thereby ensuring that the movement range of the water mist sprayed by the cleaning module 21 is limited within this closed space, preventing the water mist from polluting the external environment and extending the service life of the cleaning device 100.

[0051] The protective cover 4 includes a clearance opening 42 and an air intake 43. The clearance opening 42 is used to avoid the parts to be cleaned, ensuring that the cleaning module 21 can smoothly spray water mist onto the parts to be cleaned. It can be understood that during the cleaning process, the protective cover 4 is placed over the platform supporting the parts to be cleaned. The parts to be cleaned are placed on the platform, and the cleaning module 21 can spray water mist onto the parts to be cleaned placed on the platform through the clearance opening 42.

[0052] The air intake 43 is used to connect to the air extraction equipment, which is connected to the inside of the protective cover 4 through the air intake 43. It is used to extract air, moisture, water mist and particulate matter in the sealed space. This helps to maintain the cleanliness of the cleaning environment, reduce the accumulation of pollutants, and ensure that the water mist and pollutants generated during the cleaning process do not fall back onto the parts to be cleaned. This prevents secondary pollution during the cleaning process, ensures the cleanliness of the parts to be cleaned, and also ensures the efficiency of the cleaning.

[0053] Optionally, the connection between the air intake 43 and the extraction device may include flange connection, threaded connection or quick coupling, etc., and this application embodiment does not limit this.

[0054] Thus, the cleaning device 100 provided in this application embodiment can spray water mist onto the workpiece to be cleaned through the cleaning module 21, and form a relatively sealed space with the platform carrying the workpiece through the protective cover 4, avoiding water mist generated during cleaning from contaminating the drive component 3 or the external environment. At the same time, the air intake 43 provided by the protective cover 4 ensures that the water mist and pollutants generated during the cleaning process are sucked out through the air intake 43, so that the water mist and pollutants will not fall back onto the workpiece to be cleaned, ensuring the cleaning effect of the workpiece to be cleaned and avoiding the possibility of secondary pollution.

[0055] Please see Figure 1 In some embodiments, the protective cover 4 is fixed relative to the connecting rod 22 so that the protective cover 4 can swing with the connecting rod 22. It can be understood that by ensuring a stable connection between the protective cover 4 and the connecting rod 22, when the connecting rod 22 is driven by the driving component 3 to swing, the protective cover 4 can swing synchronously with the connecting rod 22.

[0056] Optionally, the protective cover 4 and the connecting rod 22 can be fixed by welding, bolting, or connecting rod 22, etc. This application embodiment does not limit this.

[0057] The protective cover 4 follows the swing of the connecting rod 22, ensuring that the protective cover 4 can cover and protect the cleaning area during the swing of the connecting rod 22. This ensures that the cleaning module 21 can spray water mist or other cleaning media to every corner of the part to be cleaned, thereby achieving the best cleaning effect, improving cleaning efficiency, and enhancing the uniformity and thoroughness of cleaning.

[0058] Please see Figure 1 In some embodiments, the protective cover 4 and the connecting rod 22 are connected by a mounting bracket 5, which is disposed within the receiving cavity 41. Under the action of the mounting bracket 5, a reliable connection is formed between the protective cover 4 and the connecting rod 22. This connection method ensures that when the connecting rod 22 swings, the protective cover 4 can swing stably with the connecting rod 22 without shaking or falling off. This not only ensures the stability and safety of the cleaning process but also improves the overall performance of the equipment.

[0059] Furthermore, the mounting bracket 5, positioned within the receiving cavity 41, not only reduces the space occupied by the external environment but also makes the entire cleaning device 100 more compact and tidy. Simultaneously, the protective cover 4 provides a degree of protection for the mounting bracket 5, preventing interference or damage from the external environment, thereby ensuring the stability of the connection between the mounting bracket 5, the connecting rod 22, and the protective cover 4.

[0060] Please see Figure 1In some embodiments, the mounting bracket 5 includes a support portion 52 and two mounting portions 51 respectively disposed at both ends of the support portion 52. The two mounting portions 51 are respectively connected to the two opposite side walls of the receiving cavity 41, and the support portion 52 is connected to the connecting rod 22.

[0061] The mounting frame 5 mainly consists of a support portion 52 and two mounting portions 51 respectively located at both ends of the support portion 52. The support portion 52, as the main structure of the mounting frame 5, supports the connecting rod 22 and the cleaning module 21 mounted on the connecting rod 22, effectively preventing the connecting rod 22 from tilting or swaying due to the mounting of the cleaning module 21. Simultaneously, the design of the support portion 52 ensures a tight connection between the mounting frame 5 and the connecting rod 22, guaranteeing the stability and reliability of their connection.

[0062] On the other hand, two mounting parts 51 are provided at both ends of the support part 52. The main function of the mounting parts 51 is to fix the mounting frame 5 on the two opposite side walls of the receiving cavity 41, thereby ensuring the connection between the mounting frame 5 and the protective cover 4. The swing is transmitted to the support part 52 through the connecting rod 22. The support part 52 drives the mounting part 51 to push the protective cover 4 to move, so that the protective cover 4 can swing with the connecting rod 22.

[0063] Please see Figure 1 In some embodiments, the extension direction of the connecting rod 22 is perpendicular to the arrangement direction of the two mounting parts 51. This mounting method ensures the stable support of the connecting rod 22 and optimizes the force transmission path, so that when the connecting rod 22 swings or is subjected to force, the force generated by the connecting rod 22 can act directly on the protective cover 4 without undergoing a change in direction.

[0064] Specifically, when the connecting rod 22 swings or is subjected to external force, if the extension direction of the connecting rod 22 is parallel to the arrangement direction of the mounting part 51, the force may be transmitted through the mounting part 51 to the side wall of the receiving cavity 41, and then through a complex structural transmission path to reach the protective cover 4 or other components that need to withstand the force. Such a transmission path not only increases the complexity of the structure, but may also cause unnecessary energy loss and vibration.

[0065] It is understood that the extension direction of the connecting rod 22 is perpendicular to the arrangement direction of the mounting part 51. When the connecting rod 22 swings or is subjected to force, the force it generates can act directly and vertically on the protective cover 4. This direct transmission of force not only improves the overall stability and response speed of the structure, but also reduces energy loss and vibration.

[0066] Please see Figure 1 In some embodiments, the support portion 52 and the connecting rod 22 are detachably connected, and the mounting portion 51 is detachably connected to the side wall.

[0067] First, the detachable connection between the support unit 52 and the connecting rod 22 allows the mounting bracket 5 to adapt to connecting rods 22 of different sizes and types, improving the versatility of the mounting bracket 5. The mounting bracket 5 or the connecting rod 22 can be replaced or adjusted according to actual needs, thus meeting different application scenarios. At the same time, the detachable connection also facilitates the disassembly and cleaning of the mounting bracket 5, extending the service life of both the connecting rod 22 and the mounting bracket 5.

[0068] Secondly, the detachable connection between the mounting part 51 and the side wall allows for flexible adjustment of the position and angle of the mounting part 51 according to the specific size and shape of the receiving cavity 41, ensuring that the mounting bracket 5 can be securely fixed to the side wall. Furthermore, the detachable connection facilitates the maintenance and replacement of the mounting bracket 5, reducing maintenance costs.

[0069] Optionally, the support portion 52 and the connecting rod 22 can be detachably connected by means of bolts, pins, or clips. Similarly, the mounting portion 51 and the side wall can also be detachably connected by means of bolts, pins, or clips.

[0070] Please see Figure 1 In some embodiments, the air intake 43 is located on the side of the protective cover 4 away from the avoidance opening 42.

[0071] Specifically, the air intake 43 is positioned on the side of the protective cover 4 away from the clearance opening 42, ensuring that the airflow carrying water mist forms a smoother and less turbulent path inside the protective cover 4, thereby improving exhaust efficiency. This avoids interference from the air intake 43 with the parts to be cleaned, ensuring the continuous operation of the water mist discharge process from the air intake 43 and the cleaning process of the cleaning module 21.

[0072] In addition, this layout provides more space for cleaning and maintenance of the air intake 43, making it easier to clean the air intake 43 or replace the filter.

[0073] Please see Figure 1 In some embodiments, the cleaning device 100 further includes a seal 6 disposed around the clearance opening 42 on the protective cover 4. The seal 6 ensures that a relatively sealed space can be formed between the protective cover 4, the seal 6, and the support platform carrying the item to be cleaned.

[0074] Understandably, this relatively sealed space effectively prevents cleaning fluid or water mist from overflowing from the avoidance opening 42 during the cleaning process, avoiding potential pollution and damage to the surrounding environment or cleaning equipment. At the same time, this sealing also helps improve cleaning efficiency, ensuring that the cleaning water mist can fully act on the parts to be cleaned, achieving the desired cleaning effect.

[0075] In addition, the design of the seal 6 also helps to improve the convenience and durability of the cleaning device 100. The seal 6 can be made of a soft and wear-resistant material, which can fit tightly against the edge of the relief opening 42 and the support platform, and can maintain good sealing performance even under long-term use and frequent opening and closing operations.

[0076] Optionally, the sealing element 6 can be a rubber sealing strip, a silicone sealing strip, or a polyurethane sealing strip, etc., and this application embodiment does not limit this. In addition, the connection between the sealing element 6 and the protective cover 4 can be a bolt connection, an adhesive bonding, or a magnetic adsorption connection, etc.

[0077] Please see Figure 2 and Figure 3 , Figure 2 This is a cross-sectional schematic diagram of the cleaning device 100 provided in the embodiments of this application. Figure 3 This is a cross-sectional schematic diagram of the cleaning assembly 2 and the protective cover 4 provided in an embodiment of this application. In some embodiments, the cleaning module 21 includes: a water inlet connector 211 for connecting to a cleaning medium supply device; an air inlet connector 212 for connecting to the cleaning medium supply device; a mixing component 213, which has a mixing chamber 213a inside, which is connected to the water inlet connector 211 and the air inlet connector 212, and is used to mix the liquid provided by the water inlet connector 211 and the gas provided by the air inlet connector 212 to form a water mist; and a spray connector 214 connected to the mixing chamber 213a, which is capable of spraying the mixed water mist onto the part to be cleaned.

[0078] The cleaning module 21 includes a water inlet connector 211, an air inlet connector 212, a mixing component 213, and a spray connector 214. The water inlet connector 211 connects to the liquid supply equipment, stably introducing the cleaning liquid into the cleaning module 21. The air inlet connector 212 connects to the air supply equipment, providing the necessary gas to the cleaning module 21. The mixing component 213 has a mixing chamber 213a, which communicates with the water inlet connector 211 and the air inlet connector 212, and can thoroughly mix the liquid and gas provided by the water inlet connector 211 and the air inlet connector 212 to form a uniform water mist. Finally, the spray connector 214 connects to the mixing chamber 213a, and is responsible for spraying the mixed water mist onto the parts to be cleaned, thereby achieving a highly efficient cleaning effect.

[0079] Specifically, the cleaning fluid enters the mixing chamber 213 through the water inlet connector 211, while compressed air or inert gas enters through the air inlet connector 212. The fluid is thoroughly mixed within the mixing chamber 213a to form an ideal water mist. This water mist is then sprayed out through the spray connector 214, covering the parts to be cleaned and completing the cleaning task.

[0080] Please see Figure 2 and Figure 3 In some embodiments, the spray connector 214 includes a spray nozzle, which is a circular spray nozzle with an inner diameter that gradually increases along the direction close to the part to be cleaned; along the extension direction of the connecting rod 22, the side wall of the protective cover 4 near the spray connector 214 is arc-shaped so that the protective cover 4 covers the spray range of the spray nozzle.

[0081] First, the spray connector 214 includes a spray nozzle, which is circular. The circular nozzle not only facilitates the formation of a uniform water mist spray but also ensures the stability and controllability of the water mist during the spraying process. The inner diameter of the spray nozzle gradually increases towards the part to be cleaned. This design allows the sprayed water mist to diffuse as it leaves the nozzle, creating a larger coverage area, thereby improving cleaning efficiency and effectiveness.

[0082] Secondly, along the extension direction of the connecting rod 22, the side wall of the protective cover 4 near the spray nozzle 214 is designed to be arc-shaped. This arc-shaped design not only allows the protective cover 4 to cover the spray range of the spray nozzle, preventing water mist from splashing out or spreading to unnecessary areas, but also minimizes the size of the protective cover 4 while ensuring coverage. This helps to reduce the space occupied by the entire cleaning device 100 and improve the compactness of the cleaning device 100.

[0083] The second aspect of this application discloses a cleaning system, including: a cleaning device 100; an air extraction device connected to an air intake 43; and a cleaning medium supply device connected to a cleaning module 21. Since the cleaning system provided in this application includes the cleaning device 100 provided in the first aspect of this application, the cleaning system has the beneficial effects of any of the aforementioned cleaning devices 100, which will not be elaborated further here.

[0084] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A cleaning device, characterized in that, include: support; A cleaning assembly, comprising a cleaning module and a connecting rod, wherein a first end of the connecting rod is connected to the cleaning module, and the cleaning module is capable of spraying water mist onto the workpiece to be cleaned; A drive assembly is disposed on the bracket and connected to the second end of the connecting rod, and the drive assembly is capable of driving the connecting rod to swing. A protective cover has an internal cavity, a cleaning module is located inside the cavity, a drive assembly is located outside the cavity, a connecting rod passes through the protective cover, the protective cover includes a clearance opening and a suction port, the clearance opening is used to avoid the part to be cleaned, the cleaning module can spray water mist into the clearance opening to clean the part to be cleaned, and the suction port is used to connect to an air extraction device.

2. The cleaning device according to claim 1, characterized in that, The protective cover is connected to the connecting rod via a mounting bracket, which is disposed within the receiving cavity so that the protective cover can swing with the connecting rod.

3. The cleaning device according to claim 2, characterized in that, The mounting bracket includes a support portion and two mounting portions respectively disposed at both ends of the support portion. The two mounting portions are respectively connected to the two opposite side walls of the receiving cavity, and the support portion is connected to the connecting rod.

4. The cleaning device according to claim 3, characterized in that, The extension direction of the connecting rod is perpendicular to the arrangement direction of the two mounting parts; The supporting part and the connecting rod are detachably connected, and the mounting part is detachably connected to the side wall.

5. The cleaning device according to claim 1, characterized in that, The air intake is located on the side of the protective cover away from the clearance opening.

6. The cleaning apparatus according to claim 1, characterized in that, The cleaning device also includes a seal that is disposed around the clearance opening on the protective cover.

7. The cleaning device according to claim 1, characterized in that, The cleaning module includes: A water inlet connector, which is used to connect to the water outlet of the cleaning medium supply equipment; An air inlet connector, which is used to connect to the air outlet of the cleaning medium supply equipment; A mixing component, wherein a mixing chamber is provided inside the mixing component, the mixing chamber is connected to the water inlet connector and the air inlet connector, and the mixing chamber is used to mix the liquid provided by the water inlet connector and the gas provided by the air inlet connector so that the liquid and the gas form a water mist; The spray nozzle is connected to the mixing chamber and is capable of spraying the mixed water mist onto the part to be cleaned.

8. The cleaning apparatus according to claim 7, characterized in that, The connecting rod has a connecting channel inside, which is connected to the mixing chamber, and the water inlet connector is connected to the end of the connecting channel away from the mixing chamber.

9. The cleaning apparatus according to claim 7, characterized in that, The spray connector includes a spray nozzle, which is a circular nozzle, and the inner diameter of the spray nozzle gradually increases along the direction close to the part to be cleaned; Along the extension direction of the connecting rod, the side wall of the protective cover near the spray connector is arc-shaped so that the protective cover covers the spray range of the spray nozzle.

10. A cleaning system, characterized in that, include: The cleaning apparatus as described in any one of claims 1-9; An air extraction device, wherein the air extraction device is connected to the air intake; A cleaning medium supply device, which is connected to the cleaning module.

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