Device for improving surface flatness of vacuum chuck

Abstract

The utility model relates to the technical field of sucker machining, in particular to a device for improving surface flatness of a vacuum sucker, which comprises a crank motor, a crank turntable is mounted at the top end of an output shaft of the crank motor, and a horizontally arranged adjustable threaded rod is mounted at the top of the crank turntable. According to the utility model, through the arrangement of the crank motor, the crank rotary table, the adjustable threaded rod, the knuckle bearing and the sliding motion table, when the device is used, firstly, a laser interferometer is used for detecting the surface appearance of the ceramic suction cup and marking a high-frequency convex area; then, a computer is used for setting the length and reciprocating frequency of a crank, a crank motor, a driving motor and a rotating motor are started, at the moment, the grinding block reciprocates in the protruding area and rotates automatically, meanwhile, the workpiece rotates slowly, and therefore local high-frequency protrusions are removed in a targeted mode, and the consistency of the surface shapes of the ceramic suction cups is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of suction cup processing technology, specifically a device for improving the surface flatness of vacuum suction cups. Background Technology

[0002] Vacuum suction cups, also known as vacuum hangers or vacuum nozzles, are one of the actuators in vacuum equipment. They use the principle of vacuum adsorption to fix or move objects. By expelling the air inside the suction cup to create negative pressure, the object is firmly adsorbed onto the surface of the suction cup by relying on the pressure difference between the external atmospheric pressure and the internal negative pressure. They are widely used in semiconductor, optical component manufacturing and other fields. The surface flatness (PV value) of the suction cup directly affects the uniformity of adsorption and processing accuracy of the workpiece.

[0003] In existing technologies, the polishing of vacuum suction cup surfaces mostly relies on manual or fixed-path mechanical grinding, which has the following problems: high-frequency ripples are difficult to remove, traditional grinding tools cannot specifically remove local high-frequency protrusions, resulting in poor surface uniformity; in addition, it is inefficient and has poor adaptability; manual adjustment of grinding parameters (such as pressure and path) depends on experience and cannot achieve dynamic adjustment; and existing equipment has difficulty in synchronously controlling the rotation of the grinding block and the movement of the workpiece, and the effect of correcting local high points is limited. Therefore, in order to address the above problems, a device for improving the surface flatness of vacuum suction cups is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a device for improving the surface flatness of vacuum suction cups, so as to solve the problem of poor flatness of suction cups produced by existing devices mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A device for improving the surface flatness of a vacuum suction cup includes a crank motor, a crank turntable mounted on the top of the output shaft of the crank motor, a horizontally adjustable threaded rod mounted on the top of the crank turntable, a spherical bearing mounted on the end of the adjustable threaded rod away from the crank turntable, a sliding motion stage mounted on the side of the spherical bearing away from the crank turntable, a drive motor mounted on the sliding motion stage, a drive wheel fixedly connected to the bottom of the output shaft of the drive motor, a grinding block tightly fitted to the drive wheel on one side, two driven wheels tightly fitted to the outer side of the grinding block on the outer side, a self-rotating assembly for placing objects below the grinding block, and a ceramic suction cup mounted on the top of the self-rotating assembly for placing objects.

[0007] Preferably, the bottom end of the grinding block is in close contact with the top end of the ceramic suction cup, and the rotation axis of the grinding block is perpendicular to the surface of the ceramic suction cup.

[0008] Preferably, the sliding motion table includes a sliding base disposed on one side of the crank turntable, a sliding frame slidably connected to the top of the sliding base, an installation frame installed on one side of the sliding frame, a first U-shaped groove horizontally penetrating the installation frame symmetrically opened on one side of the installation frame, and a second U-shaped groove vertically penetrating the installation frame opened at the bottom of the installation frame.

[0009] Preferably, the spherical bearing is fixedly connected to one side of the first U-shaped groove by bolts, the driven wheel is fixedly connected to one side of the second U-shaped groove by bolts, and the drive motor is fixedly connected to the inside of the mounting frame.

[0010] Preferably, the rotating assembly includes a rotating platform located below the grinding block, with the output shaft of a rotating motor fixedly connected to the bottom of the rotating platform, and the ceramic suction cup placed on the top of the rotating platform.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. In this utility model, by setting a crank motor, crank turntable, adjustable threaded rod, joint bearing and sliding motion table, when using the device, first use a laser interferometer to detect the surface morphology of the ceramic chuck and mark the high-frequency protrusion area. Then use a computer to set the crank length and reciprocating frequency, start the crank motor, drive motor and rotation motor. At this time, the grinding block reciprocates and rotates in the protrusion area, while the workpiece rotates slowly, thereby removing local high-frequency protrusions in a targeted manner, which greatly improves the surface consistency of the ceramic chuck.

[0013] 2. In this utility model, by setting a sliding motion table, a drive motor, a driving wheel, a grinding block, and a driven wheel, it is possible to use the self-weight of the grinding block to apply pressure during the grinding process, thereby avoiding over-polishing or damage and ensuring processing consistency.

[0014] 3. In this utility model, the sliding motion table, the self-rotating component, the rotating table, the rotating motor and the ceramic suction cup can be steplessly speed-adjusted to achieve targeted polishing of local high points. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall front structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the overall bottom structure of this utility model;

[0017] Figure 3 This is a schematic diagram of the overall rear structure of this utility model;

[0018] Figure 4 This is a schematic diagram of the adjustable threaded rod connecting component of this utility model;

[0019] Figure 5 This is a schematic diagram of the mounting frame connecting component of this utility model.

[0020] In the diagram: 1. Crank motor; 2. Crank turntable; 3. Adjustable threaded rod; 4. Joint bearing; 5. Sliding motion table; 51. Sliding base; 52. Sliding frame; 53. Mounting frame; 54. First U-shaped groove; 55. Second U-shaped groove; 6. Drive motor; 7. Driving wheel; 8. Grinding block; 9. Driven wheel; 10. Object rotation assembly; 101. Turntable; 102. Rotating motor; 11. Ceramic suction cup. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0023] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0024] Please see Figure 1-5 This utility model provides a technical solution:

[0025] A device for improving the surface flatness of a vacuum suction cup includes a crank motor 1, a crank turntable 2 mounted on the top of the output shaft of the crank motor 1, a horizontally adjustable threaded rod 3 mounted on the top of the crank turntable 2, a spherical bearing 4 mounted on the end of the adjustable threaded rod 3 away from the crank turntable 2, a sliding motion table 5 mounted on the side of the spherical bearing 4 away from the crank turntable 2, a drive motor 6 mounted on the sliding motion table 5, a drive wheel 7 fixedly connected to the bottom of the output shaft of the drive motor 6, a grinding block 8 closely fitted to the drive wheel 7 on one side, and two driven wheels 9 closely fitted to the outer side of the grinding block 8. The device is equipped with a rotating assembly 10 at the bottom and a ceramic suction cup 11 at the top. With the crank motor 1, crank turntable 2, adjustable threaded rod 3, joint bearing 4 and sliding motion stage 5, when using the device, a laser interferometer is first used to detect the surface morphology of the ceramic suction cup 11 and mark the high-frequency protrusion areas. Then, the crank length and reciprocating frequency are set by the computer, and the crank motor 1, drive motor 6 and rotation motor 102 are started. At this time, the grinding block 8 reciprocates and rotates in the protrusion area, while the workpiece rotates slowly, thereby specifically removing local high-frequency protrusions and greatly improving the surface consistency of the ceramic suction cup 11.

[0026] The bottom end of the grinding block 8 is tightly fitted to the top end of the ceramic suction cup 11. The rotation axis of the grinding block 8 is perpendicular to the surface of the ceramic suction cup 11. The sliding motion table 5 includes a sliding base 51 located on one side of the crank turntable 2. A sliding frame 52 is slidably connected to the top end of the sliding base 51. A mounting frame 53 is installed on one side of the sliding frame 52. A first U-shaped groove 54 is symmetrically opened on one side of the mounting frame 53, and a second U-shaped groove 55 is opened at the bottom end of the mounting frame 53, which is vertically connected to the mounting frame 53. The spherical bearing 4 is fixedly connected to one side of the first U-shaped groove 54 by bolts. The driven wheel 9 is fixedly connected to one side of the second U-shaped groove 55 by bolts. The drive motor 6 is fixedly connected to the inside of the mounting frame 53. Through the sliding motion table 5, drive motor 6, drive wheel 7, grinding block 8 and driven wheel 9, the self-weight of the grinding block 8 can be used to apply pressure during the grinding process, avoiding over-polishing or damage and ensuring processing consistency.

[0027] The rotating assembly 10 includes a rotating table 101 located below the grinding block 8. The bottom end of the rotating table 101 is fixedly connected to the output shaft of the rotating motor 102. The ceramic suction cup 11 is placed on the top of the rotating table 101. Through the sliding motion table 5, the rotating assembly 10, the rotating table 101, the rotating motor 102, and the ceramic suction cup 11, the grinding block 8 and the ceramic suction cup 11 can be steplessly speed-adjusted, thereby achieving targeted polishing of local high points.

[0028] Workflow: Before use, power on the equipment and connect it to an external computer controller. The entire device consists of three independent motion systems: 1. Crank motor 1, controlled by a computer, drives one end of crank turntable 2 for stepless speed regulation during operation; 2. Rotary motor 102 drives turntable 101 and ceramic suction cup 11 to rotate; 3. Drive motor 6 drives drive wheel 7 to rotate, and through friction, drives grinding block 8 to rotate. Driven wheel 9 assists in the movement of grinding block 8, preventing it from detaching from drive wheel 7; adjustable threaded rod 3 is used for polishing different diameter sizes. When the ceramic suction cup 11 is in operation, the grinding block 8 can always reciprocate within its radius area. The spherical bearing 4 allows for a 15° sway angle, eliminating the jamming phenomenon that occurs when the mounting frame 53 and sliding frame 52 move at the top of the sliding base 51 due to height differences. The grinding block 8 is driven solely by the friction of the drive wheel 7, and in the vertical direction, only its own weight is used. During reciprocating motion, the ceramic suction cup 11 experiences uniform force, achieving uniform polishing. The first U-shaped groove 54 is used to adjust the vertical height of the mounting frame 53 for processing ceramic suction cups 11 of different thicknesses. The second U-shaped groove 55 is used to fix the driven wheel 9, thus accommodating grinding blocks 8 of different diameters. When using the device, a laser interferometer is first used to inspect the surface morphology of the ceramic chuck 11, marking high-frequency protrusion areas. Then, the crank length and reciprocating frequency are set using a computer, and the crank motor 1, drive motor 6, and rotary motor 102 are started. At this time, the grinding block 8 reciprocates and rotates in the protrusion areas, while the workpiece rotates slowly, thereby specifically removing localized high-frequency protrusions and greatly improving the surface consistency of the ceramic chuck 11. When grinding is required on a single high point, the crank is shortened and the height increased. The rotation speeds of the crank motor 1, drive motor 6, and rotary motor 102 increase the rotation speed of the grinding block 8, eliminating high points after 30 seconds of spot polishing. The design of the sliding motion table 5 and its connecting components can efficiently remove high-frequency ripples on the surface of the ceramic suction cup 11, improving the surface PV value. The design of the placement rotation component 10 and its connecting components can steplessly adjust the speed of the grinding block 8 and the ceramic suction cup 11, thereby achieving targeted polishing of local high points. The design of the grinding block 8 and its connecting components can utilize the weight of the grinding block 8 to apply pressure during the polishing process, avoiding over-polishing or damage and ensuring processing consistency.

[0029] Contents not described in detail in this specification are existing technologies known to those skilled in the art. Standard parts used in this invention can all be purchased commercially, and irregularly shaped parts can be custom-made according to the description and drawings. The specific connection methods for each part all employ conventional methods such as bolts, rivets, and welding, which are already mature technologies. The machinery, parts, and equipment all use conventional models from the prior art, and the circuit connections also employ conventional connection methods from the prior art, which will not be detailed here.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for improving the surface flatness of a vacuum chuck comprising a crank motor (1), characterized in that: A crank turntable (2) is installed at the top of the output shaft of the crank motor (1). A horizontally adjustable threaded rod (3) is installed at the top of the crank turntable (2). A spherical bearing (4) is installed at the end of the adjustable threaded rod (3) away from the crank turntable (2). A sliding motion table (5) is installed on the side of the spherical bearing (4) away from the crank turntable (2). A drive motor (6) is installed on the sliding motion table (5). A drive wheel (7) is fixedly connected to the bottom of the output shaft of the drive motor (6). A grinding block (8) is provided on one side of the drive wheel (7) and is in close contact with the drive wheel (7). Two driven wheels (9) are provided on the outside of the grinding block (8) and are in close contact with the outside of the grinding block (8). A self-rotating component (10) is provided below the grinding block (8). A ceramic suction cup (11) is provided at the top of the self-rotating component (10).

2. The device for improving the surface flatness of a vacuum chuck according to claim 1, wherein: The bottom end of the grinding block (8) is in close contact with the top end of the ceramic suction cup (11), and the rotation axis of the grinding block (8) is perpendicular to the surface of the ceramic suction cup (11).

3. The device for improving the surface flatness of a vacuum chuck according to claim 2, wherein: The sliding motion table (5) includes a sliding base (51) located on one side of the crank turntable (2). A sliding frame (52) is slidably connected to the top of the sliding base (51). A mounting frame (53) is installed on one side of the sliding frame (52). A first U-shaped groove (54) is symmetrically opened on one side of the mounting frame (53) and a second U-shaped groove (55) is opened at the bottom of the mounting frame (53) and vertically through the mounting frame (53).

4. The device for improving the surface flatness of a vacuum chuck according to claim 3, wherein: The spherical bearing (4) is fixedly connected to one side of the first U-shaped groove (54) by bolts, the driven wheel (9) is fixedly connected to one side of the second U-shaped groove (55) by bolts, and the drive motor (6) is fixedly connected to the inside of the mounting frame (53).

5. The device for improving the surface flatness of a vacuum chuck according to claim 4, wherein: The rotating assembly (10) includes a rotating platform (101) located below the grinding block (8). The bottom end of the rotating platform (101) is fixedly connected to the output shaft of the rotating motor (102), and the ceramic suction cup (11) is placed on the top of the rotating platform (101).

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