Machine software jamming detection device and semiconductor processing equipment

Abstract

The utility model relates to a machine software jamming detection device and semiconductor processing equipment, the machine software jamming detection device comprises a timing switch module, an alarm switch module and an alarm module, the timing switch module is connected with a machine and the alarm switch module, and the alarm switch module is connected with the alarm module; the timing switch module receives an operation state signal output by the machine station during operation, the operation state signal is switched between a rising voltage signal and a falling voltage signal, the timing switch module is switched on when the time that the operation state signal is kept at a preset voltage exceeds a preset duration, and the alarm switch module is switched on when the timing switch module is switched on. And the alarm module outputs alarm information, so that a worker can timely know that the software of the machine is stuck, the situation that the software of the machine is stuck for a long time to delay productivity and even cause wafer scrapping is avoided, and the machining reliability is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and in particular to a machine software jam detection device and semiconductor processing equipment. Background Technology

[0002] Semiconductor wafer polishing is a crucial step in semiconductor manufacturing, primarily used to adjust the flatness and roughness of the wafer surface. Through polishing, uneven areas on the wafer surface are smoothed to meet process requirements. Traditional semiconductor polishing equipment, such as CMP polishing equipment, requires both hardware and software to work in tandem. When the software freezes, the hardware also stops working. If no engineer is present at the machine, or if the engineer fails to notice the software freeze, the hardware will also stop, delaying production capacity and potentially causing wafer scrapping, resulting in low processing reliability. Utility Model Content

[0003] Therefore, it is necessary to provide a machine tool software jam detection device and semiconductor processing equipment that can improve processing reliability in response to the above problems.

[0004] The first aspect of this application provides a machine tool software freeze detection device, including a timer switch module, an alarm switch module, and an alarm module, wherein the timer switch module is connected to the machine tool and the alarm switch module, and the alarm switch module is connected to the alarm module.

[0005] The timer switch module receives the operating status signal output by the machine during operation. The operating status signal switches between rising voltage signal and falling voltage signal. It is activated when the operating status signal is maintained at a preset voltage for a preset duration. The alarm switch module is activated when the timer switch module is activated, causing the alarm module to output alarm information.

[0006] In one embodiment, the operating status signal includes a rising voltage signal, the timer switch module includes a timer switch K1 and a control switch K3, the timer switch K1 is configured to control the on / off state for a preset duration, the first end of the control part of the control switch K3 is connected to the power supply, the rising voltage signal is connected to the second end of the control part of the control switch K3, the first end of the controlled part of the control switch K3 is connected to the power supply, the second end of the controlled part of the control switch K3 is connected to the first end of the control part of the timer switch K1, the second end of the control part of the timer switch K1 is grounded, the first end of the controlled part of the timer switch K1 is connected to the power supply, and the second end of the controlled part of the timer switch K1 is connected to the alarm switch module;

[0007] When the control unit of the control switch K3 receives the rising voltage signal, it is energized, causing the controlled part of the control switch K3 to conduct and output voltage to the control unit of the timer switch K1; when the timer switch K1 receives the rising voltage signal for a period of time exceeding a preset duration, it controls the controlled part to conduct and outputs voltage to the alarm switch module, causing the alarm switch module to conduct.

[0008] In one embodiment, the alarm switch module includes an alarm switch K2, the first end of the control part of the alarm switch K2 is connected to the second end of the controlled part of the timer switch K1, the second end of the control part of the alarm switch K2 is grounded, the first end of the controlled part of the alarm switch K2 is connected to the power supply, and the second end of the controlled part of the alarm switch K2 is connected to the alarm module.

[0009] In one embodiment, the timing switch K1 is a time-delay relay; and / or, the control switch K3 and the alarm switch K2 are electromagnetic relays.

[0010] In one embodiment, the operating status signal includes a decreasing voltage signal, the timer switch module includes a timer switch K4 and a control switch K6, the timer switch K4 is configured to control the on / off state for a preset duration, the first end of the control part of the control switch K6 is connected to the power supply, the decreasing voltage signal is connected to the second end of the control part of the control switch K6, the first end of the controlled part of the control switch K6 is connected to the power supply, the second end of the controlled part of the control switch K6 is connected to the first end of the control part of the timer switch K4, the second end of the control part of the timer switch K4 is grounded, the first end of the controlled part of the timer switch K4 is connected to the power supply, and the second end of the controlled part of the timer switch K4 is connected to the alarm switch module;

[0011] When the control unit of the control switch K6 receives the falling voltage signal, it is energized, causing the controlled part of the control switch K6 to conduct and output voltage to the control unit of the timer switch K4; when the timer switch K4 receives the falling voltage signal for a period of time exceeding a preset duration, it controls the controlled part to conduct and outputs voltage to the alarm switch module, causing the alarm switch module to conduct.

[0012] In one embodiment, the alarm switch module includes an alarm switch K5. The first end of the control part of the alarm switch K5 is connected to the second end of the controlled part of the timer switch K4. The second end of the control part of the alarm switch K5 is grounded. The first end of the controlled part of the alarm switch K5 is connected to the power supply. The second end of the controlled part of the alarm switch K5 is connected to the alarm module.

[0013] In one embodiment, the timing switch K4 is a time-delay relay; and / or, the control switch K6 and the alarm switch K5 are electromagnetic relays.

[0014] A second aspect of this application provides a semiconductor processing apparatus, including a machine base and the aforementioned machine base software jam detection device.

[0015] In one embodiment, the semiconductor processing equipment further includes a data processing device connected to the machine tool software jam detection device and the machine tool, which records software jam-related information and records equipment production capacity information based on the operating status signal output by the machine tool.

[0016] In one embodiment, the data processing device includes a controller, an alarm signal receiving module, a signal receiving module, and a signal sending module. The controller is connected to the alarm signal receiving module, the signal receiving module, and the signal sending module. The alarm signal receiving module communicates with the machine software freeze detection device. The signal receiving module is connected to the machine. The signal sending module communicates with a mobile terminal and outputs alarm information to the mobile terminal.

[0017] The aforementioned machine software jam detection device and semiconductor processing equipment have a timer switch module that receives the operating status signal output by the machine during operation. The operating status signal switches between rising and falling voltage signals. When the operating status signal is maintained at a preset voltage for a preset duration, it is activated. The alarm switch module is activated when the timer switch module is activated, causing the alarm module to output alarm information so that the staff can be aware of the machine software jam in a timely manner. This avoids the machine software jam from delaying production capacity or even causing wafer scrapping due to prolonged machine software jam, thus improving processing reliability. Attached Figure Description

[0018] Figure 1 This is a structural block diagram of a machine software jam detection device in one embodiment;

[0019] Figure 2 This is a schematic diagram illustrating the working principle of a machine software jam detection device in one embodiment;

[0020] Figure 3 This is a circuit diagram of a machine software freeze detection device in one embodiment;

[0021] Figure 4 This is a structural block diagram of a data processing device in one embodiment. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0024] It is understood that the term "connection" in the following embodiments should be understood as "electrical connection," "communication connection," etc., if the connected circuits, modules, units, etc., have electrical signal or data transmission with each other.

[0025] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, operations, components, parts, or combinations thereof.

[0026] In one embodiment, such as Figure 1 As shown, a machine tool software freeze detection device is provided, including a timer switch module 110, an alarm switch module 120, and an alarm module 130. The timer switch module 110 is connected to the machine tool and the alarm switch module 120, and the alarm switch module 120 is connected to the alarm module 130. The timer switch module 110 receives the operating status signal output by the machine tool during operation, and the operating status signal switches between a rising voltage signal and a falling voltage signal. The timer switch module 110 is activated when the operating status signal is maintained at a preset voltage for a preset duration. The alarm switch module 120 is activated when the timer switch module 110 is activated, causing the alarm module 130 to output alarm information.

[0027] The type of machine is not unique. Taking the application of the detection device in semiconductor processing equipment as an example, the machine could be a device for semiconductor grinding operations. For instance, semiconductor grinding equipment has a grinding head component. The grinding head rises and falls before and after operation, generating high and low signals accordingly. When the software freezes, the grinding head cannot perform normal rising and falling operations. The rising signal can be 24V, and the corresponding falling signal is 0V. Of course, the rising signal can also be 0V, and the corresponding falling signal is 24V. Correspondingly, the types of rising and falling voltage signals are not unique; for example, they can be high level (24V) or low level (0V), which can be set according to the actual situation. The specific value of the preset duration is also not unique. It can be set by selecting internal components of the timer switch module 110 according to actual needs. For example, the specific value of the preset duration can be set according to the frequency of high and low level switching of the running status signal to avoid false alarms. The timer switch module 110 continuously receives the operating status signal output by the machine tool. If the machine tool's software is working normally, the output operating status signal will switch back and forth between a rising voltage signal and a falling voltage signal, and the time it remains at a rising voltage signal or a falling voltage signal will not exceed a preset duration. When the machine tool's software freezes, the output operating status signal will remain at a rising voltage signal or a falling voltage signal. The timer switch module 110 will turn on when the received operating status signal remains at the preset voltage for more than the preset duration, supplying power to the alarm switch module 120, thus turning on the alarm switch module 120. The preset voltage can be set to a low level or a high level. After the alarm switch module 120 is turned on, it can control the alarm module 130 to output alarm information by supplying power to the alarm module 130 or sending an alarm signal, so that the staff can be informed in time that the machine tool software is frozen, avoiding prolonged software freezes that could delay production or even cause wafer scrapping. The alarm module 130 can output alarm information in a variety of ways. It can use an alarm device to provide sound and light alarms, play preset voice messages through a speaker, display preset text or animations on a monitor, or combine a variety of alarm methods.

[0028] The machine outputs one or more operating status signals. The timer switch module 110 continuously receives one or more signals from the machine. When one signal is kept at a preset voltage for a preset duration, it is turned on, energizing the alarm switch module 120 and triggering the alarm module 130 to output alarm information.

[0029] The specific structures of the timer switch module 110 and the alarm switch module 120 are not unique. In one embodiment, such as... Figure 2As shown, the operating status signal includes a rising voltage signal (HCLU cup up DO signal). The timer switch module 110 includes a timer switch K1 and a control switch K3. The timer switch K1 is set to control the on / off state for a preset duration. The first terminal of the control unit of the control switch K3 is connected to the power supply terminal VDC. The rising voltage signal is connected to the second terminal of the control unit of the control switch K3. The first terminal of the controlled unit of the control switch K3 is connected to the power supply terminal VDC. The second terminal of the controlled unit of the control switch K3 is connected to the first terminal of the control unit of the timer switch K1. The second terminal of the control unit of the timer switch K1 is grounded. The first terminal of the controlled unit of the timer switch K1 is connected to the power supply terminal VDC. The second terminal of the controlled unit of the timer switch K1 is connected to the alarm switch module 120. When the control unit of the control switch K3 receives the rising voltage signal, it is energized, causing the controlled unit of the control switch K3 to conduct and output voltage to the control unit of the timer switch K1. When the timer switch K1 receives the rising voltage signal for a time exceeding the preset duration, it controls the controlled unit to conduct and outputs voltage to the alarm switch module 120, causing the alarm switch module 120 to conduct. Specifically, the power supply VDC can be connected to a 24V DC voltage.

[0030] Correspondingly, the alarm switch module 120 may include an alarm switch K2. The first terminal of the control part of the alarm switch K2 is connected to the second terminal of the controlled part of the timer switch K1. The second terminal of the control part of the alarm switch K2 is grounded. The first terminal of the controlled part of the alarm switch K2 is connected to the power supply terminal VDC. The second terminal of the controlled part of the alarm switch K2 is connected to the alarm module 120. In this embodiment, the alarm module 120 uses an alarm that emits a warning sound. The grounding terminal of the alarm is grounded, and the power supply terminal of the alarm is connected to the controlled part of the alarm switch K2. The alarm is powered on after the alarm switch K2 is turned on and emits a warning sound to remind the equipment engineer to check the machine in time to prevent delays in production capacity or wafer scrapping.

[0031] The types of timer switch K1, control switch K3, and alarm switch K2 are not unique; relays or other switches can be used. In one embodiment, timer switch K1 is a time-delay relay with an adjustable delay time of 0 seconds to 99 hours, suitable for different machine models. The alarm can be triggered after the machine software freezes, as set according to actual conditions. K1-3 and K1-4 are the power supply pins of timer switch K1, serving as the two ends of the control unit. K1-1 and K1-2 are a pair of normally open contacts of timer switch K1, serving as the two ends of the controlled unit. Timer switch K1 starts timing upon power-up, and K1-1 and K1-2 will conduct after the preset timing period.

[0032] Furthermore, alarm switch K2 is an electromagnetic relay. K2-1 and K2-2 are the power supply pins of alarm switch K2, serving as the two ends of the control section. K2-3 and K2-4 are a pair of normally open contacts of alarm switch K2, serving as the two ends of the controlled section. When alarm switch K2 is energized, K2-3 and K2-4 will conduct, supplying power to the alarm. Control switch K3 can also be an electromagnetic relay. K3-1 and K3-2 are the power supply pins of control switch K3, serving as the two ends of the control section. K3-3 and K3-4 are a pair of normally open contacts of control switch K3, serving as the two ends of the controlled section. When control switch K3 is energized, K3-3 and K3-4 will conduct, supplying voltage to timer switch K1.

[0033] In one embodiment, continue to refer to Figure 2 The operating status signals include a voltage drop signal (HCLU cup downDO signal). The timer switch module 110 includes a timer switch K4 and a control switch K6. The timer switch K4 is set to control the on / off state for a preset duration. The first terminal of the control unit of the control switch K6 is connected to the power supply terminal VDC. The voltage drop signal is connected to the second terminal of the control unit of the control switch K6. The first terminal of the controlled part of the control switch K6 is connected to the power supply terminal VDC. The second terminal of the controlled part of the control switch K6 is connected to the first terminal of the control unit of the timer switch K4. The second terminal of the control unit of the timer switch K4 is grounded. The first terminal of the controlled part of the timer switch K4 is connected to the power supply terminal VDC. The second terminal of the controlled part of the timer switch K4 is connected to the alarm switch module 120. When the control unit of the control switch K6 receives the voltage drop signal, it is energized, causing the controlled part of the control switch K6 to conduct and output voltage to the control unit of the timer switch K4. When the timer switch K4 receives the voltage drop signal for a time exceeding the preset duration, it controls the controlled part to conduct and outputs voltage to the alarm switch module 120, causing the alarm switch module 120 to conduct.

[0034] Correspondingly, the alarm switch module 120 also includes an alarm switch K5. The first terminal of the control part of the alarm switch K5 is connected to the second terminal of the controlled part of the timer switch K4. The second terminal of the control part of the alarm switch K5 is grounded. The first terminal of the controlled part of the alarm switch K5 is connected to the power supply terminal VDC. The second terminal of the controlled part of the alarm switch K5 is connected to the alarm module 130. Similarly, the alarm module 120 uses an alarm that emits a warning sound. The grounding terminal of the alarm is grounded. The power supply terminal of the alarm is also connected to the controlled part of the alarm switch K5. The alarm is powered on after the alarm switch K5 is turned on and emits a warning sound to sound an alarm.

[0035] The types of timer switch K4, control switch K6, and alarm switch K5 are not unique; relays or other switches can be used. In one embodiment, timer switch K4 is a time-delay relay with an adjustable delay time of 0 seconds to 99 hours, suitable for different machine models. The alarm can be triggered after a software freeze, depending on the actual situation. K4-3 and K4-4 are the power supply pins of timer switch K4, serving as the two ends of the control unit. K4-1 and K4-2 are a pair of normally open contacts of timer switch K4, serving as the two ends of the controlled unit. Timer switch K4 starts timing upon power-up, and K4-1 and K4-2 will conduct after the preset timing period.

[0036] Furthermore, alarm switch K5 is an electromagnetic relay. K5-1 and K5-2 are the power supply pins of alarm switch K5, serving as the two ends of the control section. K5-3 and K5-4 are a pair of normally open contacts of alarm switch K5, serving as the two ends of the controlled section. When alarm switch K5 is energized, K5-3 and K5-4 will conduct, supplying power to the alarm. Control switch K6 can also be an electromagnetic relay. K6-1 and K6-2 are the power supply pins of control switch K6, serving as the two ends of the control section. K6-3 and K6-4 are a pair of normally open contacts of control switch K6, serving as the two ends of the controlled section. When control switch K6 is energized, K6-3 and K6-4 will conduct, supplying voltage to timer switch K4. Alternatively, alarm switch module 120 can share a single alarm switch connected to timer switches K2 and K4, supplying power to the alarm and triggering the alarm when either timer switch K2 or timer switch K4 is turned on.

[0037] It is understood that in other embodiments, the control switch in the timer switch module 110 may be omitted, and one end of the control unit of the timer switch may be directly connected to the running status signal, and the other end may be connected to the power supply. When the running status signal is kept at a low level for a period of time exceeding a preset duration, the control unit of the timer switch is powered on, so that the controlled part of the timer switch is turned on and the voltage is sent to the alarm switch module 120 to trigger the alarm.

[0038] Specifically, such as Figure 3As shown, the HCLU cup up DO signal and HCLU cup down DO signal are two operating status signals output by the machine tool. When the machine tool is operating, the CPU of the HCLU component will repeatedly rise and fall. During this time, the voltage of the HCLU cup up DO signal and HCLU cup down DO signal will switch between 0V and 24V, and the up and down signals are exactly opposite: when the HCLU cup up DO signal is 0V, the HCLU cup down DO signal is 24V; when the HCLU cup up DO signal is 24V, the HCLU cup down DO signal is 0V. When the machine tool software is frozen, the HCLU cup up DO signal and HCLU cup down DO signal will remain in the up or down state and will not switch back and forth.

[0039] Normal machine operation status: When the machine is operating normally, the HCLU cup up DO signal / HCLU cup down DO signal will switch back and forth between 0V and 24V. When the CUP is in the up state, the HCLU cup up DO signal outputs 0V, the control switch K3 is energized and works, and contacts K3-3 and K3-4 are connected. At this time, the timer switch K1 is energized and starts timing (the timing duration can be set according to the frequency of up / down switching to avoid false alarms). Under normal operating conditions, before the timer switch K1 reaches the preset duration, the CPU will switch to the down state, the HCLU cup up DO signal will output 24V, and neither the timer switch K1 nor the control switch K3 will be energized. The timer switch K1 will stop timing, and the alarm BZ will not activate. When the CPU is in the down state, the HCLU cup down DO signal will output 0V, the control switch K6 will be energized, and contacts K6-3 and K6-4 will conduct. At this time, the timer switch K4 will be energized and start timing (the timing duration can be set according to the up / down switching frequency to avoid false alarms). Under normal operating conditions, before the timer switch K4 reaches the preset duration, the CPU will switch to the up state, and the HCLU cup down... The DO signal output is 24V. The timer switch K4 and the control switch K6 are not energized. The timer switch K4 stops timing, and the alarm BZ does not work. Under normal machine operation, the timer switch K1 and the control switch K3 and the timer switch K4 and the control switch K6 will switch back and forth between being energized. The timing duration of the timer switch K1 and the timer switch K4 will not reach the preset duration, and the alarm BZ will always be in a non-alarm state.

[0040] Machine software freeze: When the machine software freezes, the CPU of the machine component HCLU will remain in an up or down state, and the HCLU cup up DO signal / HCLU cup down DO signal will not switch.

[0041] Scenario 1: When the machine is stuck, the CPU is in the up state, the HCLU cup up DO signal outputs 0V, the control switch K3 is energized and the contacts K3-3 and K3-4 are closed. At this time, the timer switch K1 is energized and starts timing. When the timer switch K1 exceeds the preset time, the contacts K1-1 and K1-2 are closed. At this time, the alarm switch K2 is energized and the contacts K2-3 and K2-4 are closed. The alarm BZ is energized and emits an alarm sound to remind the engineer to handle the machine.

[0042] Scenario 2: When the machine is stuck, the CPU is in the down state, the HCLU cup down DO signal outputs 0V, the control switch K6 is energized and contacts K6-3 and K6-4 are closed. At this time, the timer switch K4 is energized and starts timing. When the timer switch K4 exceeds the preset time, contacts K4-1 and K4-2 are closed. At this time, the alarm switch K5 is energized and contacts K5-3 and K5-4 are closed. The alarm BZ is energized and emits an alarm sound to remind the engineer to handle the machine.

[0043] In the above embodiments, the timer switch module 110 triggers the alarm when the running status signal remains at a low level for a preset duration. In other embodiments, the timer switch module 110 may also trigger the alarm when the running status signal remains at a high level for a preset duration. For example, by connecting one end of the control unit of the control switch in the timer switch module 110 to the running status signal and the other end to ground, the alarm is triggered when the running status signal remains at a high level for a preset duration. Alternatively, the control switch can be omitted from the timer switch module 110, and one end of the control unit of the timer switch can be directly connected to the running status signal and the other end to ground. The control unit of the timer switch is energized when the running status signal remains at a high level for a preset duration, causing the controlled part of the timer switch to conduct and supplying voltage to the alarm switch module 120 to trigger the alarm.

[0044] In one embodiment, a semiconductor processing apparatus is also provided, including a machine base and the aforementioned machine base software jam detection device. The semiconductor processing apparatus further includes a data processing device connected to the machine base software jam detection device, specifically connected to an alarm module within the machine base software jam detection device. The data processing device is used to record software jam-related information, such as the occurrence time of each software jam and the waiting time for processing each software jam. Furthermore, the data processing device is also connected to the machine base and records equipment capacity information based on the machine base's output operating status signals, such as recording the number of HCLU cup up DO signals / HCLU cup down DO signals. The equipment capacity (one wafer processed per up / down cycle) can be calculated from the number of up / down cycles.

[0045] In one embodiment, such as Figure 4 As shown, the data processing device includes a controller 210, an alarm signal receiving module 220, a signal receiving module 230, and a signal transmitting module 240. The controller 210 is connected to the alarm signal receiving module 220, the signal receiving module 230, and the signal transmitting module 240. The alarm signal receiving module 220 communicates with the machine software jam detection device, the signal receiving module 230 is connected to the machine, and the signal transmitting module 240 communicates with the mobile terminal, outputting alarm information to the mobile terminal. Furthermore, the data processing device may also include a memory 250 connected to the controller 210.

[0046] The controller 210 can be a functional component such as a CPU or MCU. In this embodiment, the controller 210 is a CPU. The mobile terminal can be, but is not limited to, various personal computers, laptops, smartphones, tablets, IoT devices, and portable wearable devices. IoT devices can be smart speakers, smart TVs, smart air conditioners, smart in-vehicle devices, etc., and portable wearable devices can be smartwatches, smart bracelets, head-mounted devices, etc. The signal transmission module 240 can specifically include a receiver and a transmitter. The receiver is connected to the controller 210 and receives the information processed by the controller 210, and transmits the received information to the transmitter. The transmitter then sends the information to the mobile terminal.

[0047] Specifically, the alarm signal receiving module 220 is always in receiving mode, receiving alarm signals from the machine software jam detection device. When an alarm signal is detected, it immediately transmits this signal to the controller 210. The controller 210 processes the information transmitted by the alarm signal receiving module 220, such as alarm time, alarm duration, equipment number, and alarm interval (analyzing machine jam frequency), and stores the information in the memory 250 for later review. The controller 210 also processes the information transmitted by the signal receiving module 230, calculates the number of wafers processed by the equipment by analyzing the received up / down signals, obtains production capacity information, and stores the information in the memory 250 for later review. In addition, the controller 210 also transmits information that needs to be sent, such as alarm time and equipment number, to the signal sending module 240, which then sends the information to the engineer's mobile terminal to notify the engineer to handle the anomaly as soon as possible.

[0048] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0049] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A machine software lockup detection device, characterized by, It includes a timer switch module, an alarm switch module, and an alarm module. The timer switch module is connected to the machine and the alarm switch module, and the alarm switch module is connected to the alarm module. The timer switch module receives the operating status signal output by the machine during operation. The operating status signal switches between rising voltage signal and falling voltage signal. It is activated when the operating status signal is maintained at a preset voltage for a preset duration. The alarm switch module is activated when the timer switch module is activated, causing the alarm module to output alarm information.

2. The apparatus of claim 1, wherein the software hang detection device is further configured to: The operating status signal includes a rising voltage signal. The timer switch module includes a timer switch K1 and a control switch K3. The timer switch K1 is configured to control the on / off state for a preset duration. The first terminal of the control part of the control switch K3 is connected to the power supply terminal. The rising voltage signal is connected to the second terminal of the control part of the control switch K3. The first terminal of the controlled part of the control switch K3 is connected to the power supply terminal. The second terminal of the controlled part of the control switch K3 is connected to the first terminal of the control part of the timer switch K1. The second terminal of the control part of the timer switch K1 is grounded. The first terminal of the controlled part of the timer switch K1 is connected to the power supply terminal. The second terminal of the controlled part of the timer switch K1 is connected to the alarm switch module. When the control unit of the control switch K3 receives the rising voltage signal, it is energized, causing the controlled part of the control switch K3 to conduct and output voltage to the control unit of the timer switch K1; when the timer switch K1 receives the rising voltage signal for a period of time exceeding a preset duration, it controls the controlled part to conduct and outputs voltage to the alarm switch module, causing the alarm switch module to conduct.

3. The apparatus of claim 2, wherein the software hang detection device is further configured to: The alarm switch module includes an alarm switch K2. The first end of the control part of the alarm switch K2 is connected to the second end of the controlled part of the timer switch K1. The second end of the control part of the alarm switch K2 is grounded. The first end of the controlled part of the alarm switch K2 is connected to the power supply. The second end of the controlled part of the alarm switch K2 is connected to the alarm module.

4. The apparatus of claim 3, wherein the software hang detection device is further configured to: The timer switch K1 is a time delay relay; and / or, the control switch K3 and the alarm switch K2 are electromagnetic relays.

5. The machine tool software jam detection device according to any one of claims 1 to 4, characterized in that, The operating status signal includes a decreasing voltage signal. The timer switch module includes a timer switch K4 and a control switch K6. The timer switch K4 is configured to control the on / off state for a preset duration. The first terminal of the control part of the control switch K6 is connected to the power supply terminal. The decreasing voltage signal is connected to the second terminal of the control part of the control switch K6. The first terminal of the controlled part of the control switch K6 is connected to the power supply terminal. The second terminal of the controlled part of the control switch K6 is connected to the first terminal of the control part of the timer switch K4. The second terminal of the control part of the timer switch K4 is grounded. The first terminal of the controlled part of the timer switch K4 is connected to the power supply terminal. The second terminal of the controlled part of the timer switch K4 is connected to the alarm switch module. When the control unit of the control switch K6 receives the falling voltage signal, it is energized, causing the controlled part of the control switch K6 to conduct and output voltage to the control unit of the timer switch K4; when the timer switch K4 receives the falling voltage signal for a period of time exceeding a preset duration, it controls the controlled part to conduct and outputs voltage to the alarm switch module, causing the alarm switch module to conduct.

6. The machine software hang detection device of claim 5, wherein, The alarm switch module includes an alarm switch K5. The first end of the control part of the alarm switch K5 is connected to the second end of the controlled part of the timer switch K4. The second end of the control part of the alarm switch K5 is grounded. The first end of the controlled part of the alarm switch K5 is connected to the power supply. The second end of the controlled part of the alarm switch K5 is connected to the alarm module.

7. The machine software hang detection device of claim 6, wherein, The timer switch K4 is a time delay relay; and / or, the control switch K6 and the alarm switch K5 are electromagnetic relays.

8. A semiconductor processing apparatus, characterized by comprising: It includes a machine tool and the machine tool software jam detection device as described in any one of claims 1 to 7.

9. The semiconductor processing equipment according to claim 8, characterized in that, It also includes a data processing device, which is connected to the machine software jam detection device and the machine, records software jam-related information, and records equipment production capacity information based on the operating status signal output by the machine.

10. The semiconductor processing apparatus of claim 9, wherein The data processing device includes a controller, an alarm signal receiving module, a signal receiving module, and a signal sending module. The controller is connected to the alarm signal receiving module, the signal receiving module, and the signal sending module. The alarm signal receiving module communicates with the machine software freeze detection device. The signal receiving module is connected to the machine. The signal sending module communicates with a mobile terminal and outputs alarm information to the mobile terminal.

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