Horizontal graphite boat

Abstract

The utility model provides a horizontal graphite boat. The horizontal graphite boat comprises a bottom supporting structure, a boat body structure is installed on the upper side of the bottom supporting structure, an upper electrode structure and a lower electrode structure are arranged on the left side and the right side of the boat body structure, the upper electrode structure is located on the upper side of the lower electrode structure, and the bottom supporting structure comprises a cross beam. The two cross beams are distributed front and back, a first boat foot is arranged at the position between the two cross beams, bottom limiting rods are inserted into the two ends of the first boat foot in a bilateral symmetry mode, one ends of the two sets of bottom limiting rods extend to the inner side of the cross beam on the adjacent side, and the lower electrode structure comprises a second boat foot. The horizontal graphite boat provided by the utility model has the advantages that the novel graphite boat base is made of the carbon-carbon composite material, so that the whole life cycle cost of the structure and the whole boat quality are reduced, and the performance of the horizontal graphite boat is improved.

Description

Technical Field

[0001] This utility model relates to the field of graphite boats, and more particularly to a horizontal graphite boat. Background Technology

[0002] Horizontal graphite boats play a crucial role in the manufacturing of photovoltaic solar cells. Their high thermal conductivity, chemical stability, low coefficient of thermal expansion, and high mechanical strength make them an ideal material for photovoltaic manufacturing. Through their application in key processes such as silicon melting and crystallization, load-bearing and transport, prevention of contamination and defects, dopant carriers, and plasma cleaning, horizontal graphite boats not only improve the conversion efficiency and production efficiency of solar cells but also reduce manufacturing costs and environmental pollution. With the continuous development of photovoltaic technology, horizontal graphite boats are also undergoing ongoing technological improvements and innovations to meet the future demands of photovoltaic manufacturing.

[0003] Currently, the bottom support of traditional graphite boat structures is usually made of ceramic materials. Because the strength of ceramic materials decreases significantly at high temperatures close to their melting point, they are prone to softening or embrittlement, making the support components more susceptible to deformation or even breakage during long-term high-temperature use. In addition, ceramic material bases also have the problems of high thermal shock sensitivity and high material density, which makes this type of graphite boat structure require frequent maintenance during long-term use, resulting in high costs over the entire life cycle.

[0004] Therefore, it is necessary to provide a new horizontal graphite boat to solve the above-mentioned technical problems. Utility Model Content

[0005] The technical problem solved by this utility model is to provide a new type of graphite boat base made of carbon-carbon composite material, thereby reducing the total life cycle cost of the structure and the overall boat weight, and improving its performance.

[0006] To solve the above-mentioned technical problems, the present invention provides a horizontal graphite boat comprising: a bottom support structure, a boat body structure installed on the upper side of the bottom support structure, and an upper electrode structure and a lower electrode structure provided on both the left and right sides of the boat body structure, wherein the upper electrode structure is located on the upper side of the lower electrode structure;

[0007] The bottom support structure includes a crossbeam, and there are two crossbeams arranged in a front-to-back pattern. A first boat foot is provided between the two crossbeams. Bottom limiting rods are symmetrically inserted into both ends of the first boat foot. One end of each of the two sets of bottom limiting rods extends to the inner side of the crossbeam on the adjacent side.

[0008] The lower electrode structure includes a second boat foot, which has two parts and is respectively connected to the two ends of the crossbeams that are relatively far apart. The lower electrode structure is located on one side of the second boat foot. A lower connector is provided between the lower electrode structure and the adjacent second boat foot. A lower limiting rod is sleeved on the inner side of the lower connector. The two ends of the lower limiting rod are inserted into the lower electrode structure and the second boat foot in an interference fit manner.

[0009] The crossbeam, the first hull, and the second hull are all made of carbon-carbon composite material.

[0010] As a further embodiment of this utility model, the boat structure includes a first boat piece, a fourth boat piece is provided on the upper side of the first boat piece, and a plurality of third boat pieces are provided at the position between the first boat piece and the fourth boat piece, arranged longitudinally at equal intervals, with a second boat piece provided in the intervals between the plurality of third boat pieces.

[0011] With the above technical solution, the top of the first, second, and third boats are all provided with a support groove for loading silicon wafers, which facilitates the subsequent processing of silicon wafers using external diffusion furnaces and plasma-enhanced chemical vapor deposition equipment.

[0012] As a further embodiment of this utility model, several insulating sleeves are provided between the first boat piece and the second boat piece, between several second boat pieces and the third boat piece, and between the third boat piece and the fourth boat piece. Several sets of insulating sleeves distributed longitudinally are provided with ceramic rods on their inner sides, and the ceramic rods penetrate the surfaces of the first boat piece, the second boat piece, the third boat piece, and the fourth boat piece.

[0013] Through the above technical solution, the insulating sleeve can separate several boat pieces, while the ceramic rod can be used with graphite nuts and washers to fix several boat pieces, upper electrode structure, lower electrode structure and bottom support structure together.

[0014] As a further embodiment of this utility model, the upper electrode structure includes an upper electrode spacer. Two upper electrode spacers are provided, each located between the ends of two adjacent second boat pieces on one side. An upper docking spacer is provided on one side of the upper electrode spacer. The upper docking spacer is located between the ends of two adjacent third boat pieces on one side. An upper connecting member is provided between the upper docking spacer and the upper electrode spacer. An upper limit rod is sleeved on the inner side of the upper connecting member. The two ends of the upper limit rod are inserted into the upper docking spacer and the upper electrode spacer on the adjacent side by an interference fit.

[0015] Through the above technical solution, since graphite has good electrical and thermal conductivity, by setting an upper electrode structure and a lower electrode structure on the graphite boat structure, it is possible to use electrical conductivity to realize silicon wafer heating or electrochemical reaction.

[0016] As a further embodiment of this utility model, side partitions are provided between the ends of two adjacent third boat pieces, between the ends of two adjacent second boat pieces, between the ends of the fourth boat piece and the third boat piece, between the ends of the fourth boat piece and the second boat piece, and between the ends of the first boat piece and the second boat piece, respectively, and the ends of the third boat piece located at the bottom overlap the surfaces of the two lower electrode partitions.

[0017] Through the above technical solution, the first and second boat pieces and the third and fourth boat pieces are separated by a spacer. The second and fourth boat pieces at the separation point are made to avoid contact with the spacer, so as to give up the spacer and prevent them from contacting the spacer.

[0018] The second boat piece is also separated from the first boat piece and from the fourth boat piece by a spacer. The third boat piece at the separation point is made to leave space for the spacer so that it does not come into contact with the spacer.

[0019] Among them, the upper electrode spacer and the lower electrode spacer are used to connect the positive and negative poles of the external circuit;

[0020] With the above arrangement, the first and third boat plates form one pole (of the electric field), and the second and fourth boat plates form the other pole (of the electric field).

[0021] As a further embodiment of this utility model, several of the side partitions, two upper electrode partitions, two lower electrode partitions, two crossbeams, the first boat foot, and the upper docking partition are all penetrated by ceramic rods on one side, and both ends of several of the ceramic rods are fitted with gaskets and threaded with graphite nuts.

[0022] By using the above technical solution, a combination of ceramic rods, washers and graphite nuts can be used to fix several boat structures, bottom support structures, upper electrode structures and lower electrode structures together, so that the entire graphite boat structure is connected into one unit.

[0023] Compared with related technologies, the horizontal graphite boat provided by this utility model has the following beneficial effects:

[0024] 1. In this utility model, the device features a redesigned bottom support structure for the horizontal boat based on the carbon-carbon components. This ensures that the horizontal boat will not become unusable due to the conductivity of the carbon-carbon components within the overall circuit structure. Furthermore, the carbon-carbon composite material can withstand temperatures exceeding 2000℃ in an inert atmosphere or vacuum environment without any decrease in strength at high temperatures. Its carbon-based structure is more stable at high temperatures, and its carbon density is approximately 1.6-2.0 g / cm³. 3 The density of silicon carbide ceramics is typically lower than that of ceramics (e.g., silicon carbide ceramics have a density of approximately 3.1 g / cm³). 3 This can significantly reduce structural weight;

[0025] 2. In this utility model, although the initial cost of carbon-carbon composite material is high, its long lifespan and low maintenance frequency can reduce the total life cycle cost. Ceramic materials, on the other hand, have relatively high hidden costs due to their significant decrease in strength at high temperatures, relatively high thermal shock sensitivity, and frequent maintenance. By using a carbon-carbon composite material for the bottom support structure and through material upgrades, the graphite boat structure has higher strength, temperature resistance, thermal shock resistance, and lightweight in extreme environments, thereby improving the reliability, efficiency, and economy of the equipment. Attached Figure Description

[0026] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.

[0027] Figure 1 This is a schematic diagram of the overall structure of a horizontal graphite boat according to the present invention. Figure 1 ;

[0028] Figure 2 This is a schematic diagram of the overall structure of a horizontal graphite boat according to the present invention. Figure 2 ;

[0029] Figure 3 This is a partial structural breakdown diagram of a horizontal graphite boat according to the present invention. Figure 1 ;

[0030] Figure 4 This is a partial structural breakdown diagram of a horizontal graphite boat according to the present invention. Figure 2 .

[0031] Explanation of key symbols:

[0032] 1. Bottom support structure; 2. Boat structure; 3. Upper electrode structure; 4. Lower electrode structure; 5. First boat piece; 6. Graphite nut; 7. Crossbeam; 8. First boat foot; 9. Second boat piece; 10. Third boat piece; 11. Fourth boat piece; 12. Side partition; 13. Upper electrode partition; 14. Upper docking partition; 15. Lower electrode partition; 16. Second boat foot; 17. Lower connector; 18. Lower limit rod; 19. Ceramic rod; 20. Upper connector; 21. Upper limit rod; 22. Insulating sleeve; 23. Bottom limit rod; 24. Gasket. Detailed Implementation

[0033] Please combine Figures 1 to 4 ,in, Figure 1 This is a schematic diagram of the overall structure of a horizontal graphite boat according to the present invention. Figure 1 ; Figure 2 This is a schematic diagram of the overall structure of a horizontal graphite boat according to the present invention. Figure 2 ; Figure 3 This is a partial structural breakdown diagram of a horizontal graphite boat according to the present invention. Figure 1 ; Figure 4 This is a partial structural breakdown diagram of a horizontal graphite boat according to the present invention. Figure 2 A horizontal graphite boat includes:

[0034] The bottom support structure 1 has a boat structure 2 installed on its upper side. The boat structure 2 has an upper electrode structure 3 and a lower electrode structure 4 on its left and right sides, with the upper electrode structure 3 located on the upper side of the lower electrode structure 4.

[0035] The bottom support structure 1 includes a crossbeam 7. There are two crossbeams 7 arranged in a front-to-back pattern. A first boat foot 8 is provided between the two crossbeams 7. Bottom limiting rods 23 are symmetrically inserted into both ends of the first boat foot 8. One end of each of the two sets of bottom limiting rods 23 extends to the inner side of the crossbeam 7 on the adjacent side.

[0036] The lower electrode structure 4 includes a second boat foot 16. There are two second boat feet 16, which are respectively connected to the two crossbeams 7 at their relatively far ends. The lower electrode structure 4 is located on one side of the second boat foot 16. A lower connector 17 is provided between the lower electrode structure 4 and the adjacent second boat foot 16. A lower limiting rod 18 is sleeved on the inner side of the lower connector 17. The two ends of the lower limiting rod 18 are inserted into the lower electrode structure 4 and the second boat foot 16 in an interference fit manner.

[0037] The crossbeam 7, the first boat foot 8, and the second boat foot 16 are all made of carbon-carbon composite material.

[0038] like Figure 1-4 As shown, the boat structure 2 includes a first boat piece 5, a fourth boat piece 11 on the upper side of the first boat piece 5, and a plurality of third boat pieces 10 arranged longitudinally at equal intervals between the first boat piece 5 and the fourth boat piece 11. A second boat piece 9 is provided in the intervals between the plurality of third boat pieces 10.

[0039] The top of the first boat 5, the second boat 9, and the third boat 10 are all provided with support grooves for loading silicon wafers, thereby facilitating subsequent processing of the silicon wafers using external diffusion furnaces and plasma-enhanced chemical vapor deposition equipment.

[0040] like Figure 1-4 As shown, several insulating sleeves 22 are provided between the first boat piece 5 and the second boat piece 9, between several second boat pieces 9 and the third boat piece 10, and between the third boat piece 10 and the fourth boat piece 11. Several sets of insulating sleeves 22 distributed longitudinally are provided with ceramic rods 19 on their inner sides. The ceramic rods 19 penetrate the surfaces of the first boat piece 5, the second boat piece 9, the third boat piece 10, and the fourth boat piece 11.

[0041] The insulating sleeve 22 can separate several boat pieces, while the ceramic rod 19 can be used with the graphite nut 6 and washer 24 to fix several boat pieces, upper electrode structure 3, lower electrode structure 4 and bottom support structure 1 together.

[0042] like Figure 1-4 As shown, the upper electrode structure 3 includes an upper electrode spacer 13. Two upper electrode spacers 13 are provided and are respectively located between the ends of two adjacent second boat pieces 9 on one side. An upper docking spacer 14 is provided on one side of the upper electrode spacer 13. The upper docking spacer 14 is located between the ends of two adjacent third boat pieces 10 on one side. An upper connector 20 is provided between the upper docking spacer 14 and the upper electrode spacer 13. An upper limit rod 21 is sleeved on the inner side of the upper connector 20. The two ends of the upper limit rod 21 are inserted into the upper docking spacer 14 and the upper electrode spacer 13 on the adjacent side in an interference fit manner.

[0043] Because graphite has good electrical and thermal conductivity, by setting an upper electrode structure 3 and a lower electrode structure 4 on the graphite boat structure, it is possible to use electrical conductivity to achieve silicon wafer heating or electrochemical reactions.

[0044] like Figure 1-4 As shown, side partitions 12 are provided between the ends of two adjacent third boat pieces 10, the ends of two adjacent second boat pieces 9, the ends of the fourth boat piece 11 and the third boat piece 10, the ends of the fourth boat piece 11 and the second boat piece 9, and the ends of the first boat piece 5 and the second boat piece 9 on the upper and lower sides of the upper docking partition 14 and the upper electrode partition 13. The ends of the third boat piece 10 at the bottom are respectively connected to the surfaces of the two lower electrode partitions 15.

[0045] The first boat piece 5 and the second boat piece 9, as well as the third boat piece 10 and the fourth boat piece 11, are separated by a spacer. The second boat piece 9 and the fourth boat piece 11 at the separation point are made to avoid contact with the spacer.

[0046] The second boat piece 9 is also separated from the first boat piece 5 and from the fourth boat piece 11 by a spacer. The third boat piece 10 at the separation point is made to avoid contact with the spacer.

[0047] Among them, the upper electrode spacer 13 and the lower electrode spacer 15 are used to connect the positive and negative poles of the external circuit.

[0048] With the above arrangement, the first boat piece 5 and the third boat piece 10 form one pole (of the electric field), and the second boat piece 9 and the fourth boat piece 11 form the other pole (of the electric field).

[0049] like Figure 1-4As shown, several side partitions 12, two upper electrode partitions 13, two lower electrode partitions 15, two crossbeams 7, the first boat foot 8, and the upper docking partition 14 are all penetrated by ceramic rods 19 on one side. Both ends of several ceramic rods 19 are fitted with washers 24 and threaded with graphite nuts 6.

[0050] By using the combination of ceramic rod 19, washer 24 and graphite nut 6, several boat structures, bottom support structure 1, upper electrode structure 3 and lower electrode structure 4 can be fixed together, so that the entire graphite boat structure is connected into one piece.

[0051] The working principle of the horizontal graphite boat provided by this utility model is as follows:

[0052] The first step: The device redesigned the bottom support structure 1 of the horizontal boat based on the carbon-carbon components. This ensures that the horizontal boat will not become unusable due to the conductivity of the carbon-carbon components within the overall circuit structure. Furthermore, the carbon-carbon composite material can withstand temperatures above 2000℃ in an inert atmosphere or vacuum environment without decreasing its strength. Its carbon-based structure is more stable at high temperatures, and its carbon density is approximately 1.6-2.0 g / cm³. 3 The density of silicon carbide ceramics is typically lower than that of ceramics (e.g., silicon carbide ceramics have a density of approximately 3.1 g / cm³). 3 This can significantly reduce structural weight;

[0053] The second step: Although carbon-carbon composite materials have high initial costs, their long lifespan and low maintenance frequency can reduce the total life cycle cost. Ceramic materials, on the other hand, have relatively high hidden costs due to their significant decrease in strength at high temperatures, relatively high thermal shock sensitivity, and more frequent maintenance. By using carbon-carbon composite materials for the bottom support structure 1, and through material upgrades, the graphite boat structure has higher strength, temperature resistance, thermal shock resistance, and lightweight in extreme environments, thereby improving equipment reliability, efficiency, and economy.

[0054] It should be noted that the device structure and accompanying drawings of this utility model mainly describe the principle of this utility model. In terms of the technical aspects of this design principle, the setting of the power mechanism, power supply system and control system of the device is not fully described. However, under the premise that those skilled in the art understand the principle of the above utility model, the specific details of its power mechanism, power supply system and control system can be clearly understood. The control method in the application document is automatic control through a controller. The control circuit of the controller can be implemented by those skilled in the art through simple programming.

[0055] All standard parts used can be purchased from the market, and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the existing technology. The machinery, parts and equipment adopt conventional models in the existing technology, and the structure and principle of the components known to those skilled in the art can be known by those skilled in the art through technical manuals or conventional experimental methods.

[0056] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions, and alterations can be made to these embodiments, or they can be used directly or indirectly, without departing from the principles and spirit of the present invention. In other related technical fields, the scope of the present invention is defined by the appended claims and their equivalents, and they are similarly included within the patent protection scope of the present invention.

Claims

1. A horizontal graphite boat, characterized by, It includes a bottom support structure (1), a boat structure (2) is installed on the upper side of the bottom support structure (1), and an upper electrode structure (3) and a lower electrode structure (4) are provided on the left and right sides of the boat structure (2), with the upper electrode structure (3) located on the upper side of the lower electrode structure (4). The bottom support structure (1) includes a crossbeam (7), there are two crossbeams (7) and they are arranged in a front-to-back manner. A first boat foot (8) is provided between the two crossbeams (7). Bottom limiting rods (23) are symmetrically inserted at both ends of the first boat foot (8). One end of each of the two sets of bottom limiting rods (23) extends to the inside of the crossbeam (7) on the adjacent side. The lower electrode structure (4) includes a second boat foot (16). The second boat foot (16) has two parts and is respectively connected to the two crossbeams (7) at opposite ends. The lower electrode structure (4) is located on one side of the second boat foot (16). A lower connector (17) is provided between the lower electrode structure (4) and the adjacent second boat foot (16). A lower limiting rod (18) is sleeved on the inner side of the lower connector (17). The two ends of the lower limiting rod (18) are inserted into the lower electrode structure (4) and the second boat foot (16) in an interference fit manner. The crossbeam (7), the first boat foot (8), and the second boat foot (16) are all made of carbon-carbon composite material.

2. The horizontal graphite boat of claim 1, wherein, The boat structure (2) includes a first boat piece (5), a fourth boat piece (11) is provided on the upper side of the first boat piece (5), and a plurality of third boat pieces (10) arranged longitudinally at equal intervals are provided between the first boat piece (5) and the fourth boat piece (11), and a second boat piece (9) is provided in the intervals between the plurality of third boat pieces (10).

3. The horizontal graphite boat of claim 2, wherein, A plurality of insulating sleeves (22) are provided between the first boat piece (5) and the second boat piece (9), between a plurality of second boat pieces (9) and the third boat piece (10), and between the third boat piece (10) and the fourth boat piece (11). A plurality of insulating sleeves (22) arranged longitudinally are provided with ceramic rods (19) on their inner sides. The ceramic rods (19) penetrate the surfaces of the first boat piece (5), the second boat piece (9), the third boat piece (10), and the fourth boat piece (11).

4. The horizontal graphite boat of claim 3, wherein, The upper electrode structure (3) includes an upper electrode spacer (13). The upper electrode spacer (13) has two parts, which are located between the ends of two adjacent second boat pieces (9) on one side. An upper docking spacer (14) is located on one side of the upper electrode spacer (13). The upper docking spacer (14) is located between the ends of two adjacent third boat pieces (10) on one side. An upper connector (20) is provided between the upper docking spacer (14) and the upper electrode spacer (13). An upper limit rod (21) is sleeved on the inner side of the upper connector (20). The two ends of the upper limit rod (21) are inserted into the upper docking spacer (14) and the upper electrode spacer (13) on the adjacent side in an interference fit manner.

5. The horizontal graphite boat of claim 4, wherein, Side partitions (12) are provided between the two ends of two adjacent third boat pieces (10), the two ends of two adjacent second boat pieces (9), the two ends of the fourth boat piece (11) and the third boat piece (10), the two ends of the fourth boat piece (11) and the second boat piece (9), and the two ends of the first boat piece (5) and the second boat piece (9) on the upper and lower sides of the upper docking partition (14) and the upper electrode partition (13). The two ends of the third boat piece (10) at the bottom overlap the surfaces of the two lower electrode partitions (15).

6. The horizontal graphite boat of claim 5, wherein, Several of the side partitions (12), two upper electrode partitions (13), two lower electrode partitions (15), two crossbeams (7), the first boat foot (8) and the upper docking partition (14) are all penetrated by ceramic rods (19) on one side. Both ends of several of the ceramic rods (19) are fitted with gaskets (24) and threaded with graphite nuts (6).

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