Gas pre-decomposer for high-temperature purification furnace

Abstract

The utility model provides a gas pre-decomposer for a high-temperature purification furnace, and belongs to the technical field of high-temperature industrial electric furnaces. The problem that an existing gas pre-decomposition device for the high-temperature purification furnace is low in decomposition efficiency is solved. Comprising a shell, a graphite crucible is arranged in the shell, the outer side of the graphite crucible is coated with a heat preservation layer, an induction coil is wound on the outer side of the shell, a filter element is arranged in the graphite crucible, an air inlet is formed in one end of the shell, an air outlet is formed in the other end of the shell, and thermocouples are arranged on the two sides of the air inlet respectively. The thermocouple penetrates through the heat preservation layer and then is inserted into the filter element, a blocking screen assembly is arranged at the front end of an air channel of the air outlet, and cooling systems are further arranged at the two ends of the shell respectively. According to the utility model, the halogen gas required by the high-temperature purification furnace can be obtained by decomposing the five-poison cheap raw material gas.

Description

Technical Field

[0001] This invention provides a gas pre-decomposer for a high-temperature purification furnace, belonging to the field of high-temperature industrial electric furnace technology. Background Technology

[0002] When purifying materials in a high-temperature vacuum purification furnace, process gases, including inert gases and halogen gases, need to be continuously introduced. The introduced halogen gases react with impurities in the material and are then extracted by a pump, thus purifying the material. However, common halogen gases are highly toxic and corrosive, making them difficult to transport and store, and also incurring high operating costs. Therefore, halogen gases are generally not used directly in the physical purification of materials in a high-temperature purification furnace; instead, they are obtained through the thermal decomposition of other non-toxic and inexpensive raw material gases. Therefore, it is crucial to install a gas pre-decomposition device before the gas inlet of the high-temperature vacuum purification furnace to pre-decompose the gas and obtain the halogen gas required for purification. However, existing thermal decomposition devices cannot monitor the decomposition heating process, resulting in low decomposition efficiency. Therefore, this invention proposes a simple and efficient gas pre-decomposition unit, which is an important prerequisite for stable and efficient purification in a high-temperature purification furnace and a necessary guarantee for reducing purification costs and improving purification efficiency. Utility Model Content

[0003] To address the problem of low decomposition efficiency in existing gas pre-decomposition devices used in high-temperature purification furnaces, this invention proposes a gas pre-decomposer for high-temperature purification furnaces. The aim is to improve its hardware structure to achieve the decomposition of non-toxic and inexpensive gases to obtain halogen gases through heating, while also monitoring the decomposition efficiency in real time.

[0004] The technical solution adopted by this utility model is as follows: a gas pre-decomposer for a high-temperature purification furnace, including a shell, a graphite crucible inside the shell, an insulation layer covering the outside of the graphite crucible, an induction coil wound around the outside of the shell, a filter element inside the graphite crucible, an air inlet at one end of the shell, an air outlet at the other end of the shell, thermocouples on both sides of the air inlet, the thermocouples passing through the insulation layer and inserted into the filter element, a baffle assembly at the front end of the air passage at the air outlet, and a cooling system at both ends of the shell.

[0005] Furthermore, the thermocouple is connected to an external control terminal via wires.

[0006] Furthermore, the induction coil is connected to an external control terminal via wires.

[0007] Furthermore, the shielding assembly has a multi-layered staggered corresponding structure, including three circular arrayed connecting rods and a central rod located at the center of the array. One end of each of the three connecting rods is fixed to a ring, which is fixed to a flange connected to the air outlet pipe. Fan-shaped plates are spaced apart on the three connecting rods, and the fan-shaped plates of each layer are staggered with the fan-shaped plates of the adjacent layers. The center of each multi-layered fan-shaped plate is fitted onto the central rod.

[0008] Furthermore, the sector plate is a sector of one-third of a circular arc, and any three adjacent layers of staggered sector plates form a complete circle.

[0009] Furthermore, the air outlet is connected to the air inlet of the high-temperature purification furnace via a pipe.

[0010] Furthermore, the cooling system includes cooling water tanks formed in the shell and insulation layer, through which cooling water flows.

[0011] Furthermore, the cooling water of the cooling systems at both ends of the casing is controlled separately.

[0012] The advantages of this utility model over the prior art are as follows:

[0013] 1. A thermal decomposition and filtration process is adopted to obtain the halogen gas required for purifying materials in a high-temperature purification furnace. Simultaneously, thermocouples are designed within the components to monitor the heating process in real time, ensuring efficient utilization of the decomposed gas.

[0014] 2. A cooling system and a shielding device are employed. The cooling system ensures that the component casing will not be damaged by high-temperature melting during thermal decomposition. The shielding device cools the halogen gases obtained from thermal decomposition, preventing the high-temperature halogen gases from reacting with the pipeline and corroding it.

[0015] 3. This utility model has a compact structure and a reasonable process flow design. It can realize the thermal decomposition treatment of non-toxic and inexpensive raw material gas to obtain halogen gas, which is then introduced into a high-temperature purification furnace to ensure the purification requirements of the material, greatly reducing the purification cost and improving the purification efficiency of the material. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings:

[0017] Figure 1 A schematic cross-sectional view of the gas pre-decomposer for a high-temperature purification furnace;

[0018] Figure 2 This is a partial structural diagram of the cold water tank portion of the cooling system of this utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the screen assembly of this utility model;

[0020] In the diagram: 1 is the air inlet, 2 is the thermocouple, 3 is the insulation layer, 4 is the graphite crucible, 5 is the induction coil, 6 is the filter element, 7 is the cooling system, 8 is the baffle assembly, 9 is the air outlet, 71 is the cooling water tank, 81 is the connecting rod, 82 is the intermediate rod, 83 is the ring, and 84 is the sector plate. Detailed Implementation

[0021] like Figures 1 to 3 As shown, this utility model provides a gas pre-decomposer for a high-temperature purification furnace, including a shell with an inlet 1 and an outlet 9 at its two ends. Inside the shell, there is an insulation layer 3, a graphite crucible 4, and a filter element 6. An induction coil 5 is wound around the shell, and a cooling system 7 is provided at both ends of the shell. The graphite crucible 4 is located at the center of the shell, and the outside of the graphite crucible 4 is wrapped with an insulation layer 3. When the induction coil 5 is energized, it can heat the graphite crucible 4. The insulation layer 3 is used to keep the graphite crucible 4 warm when the induction coil 5 heats it, so as to reach the set decomposition temperature as soon as possible and reduce heat loss.

[0022] After the induction coil 5 is energized, it heats the graphite crucible 4. The insulation layer 3 keeps it warm and quickly reaches the temperature required for decomposition. At the same time, the heating temperature is monitored by the thermocouple 2 to achieve precise control of the internal temperature of the component.

[0023] The graphite crucible 4 is equipped with a filter element 6 inside. The gas to be decomposed enters the assembly through the air inlet 1 for thermal decomposition. Thermocouples 2 are respectively installed on both sides of the air inlet 1. Thermocouples 2 pass through the insulation layer 3 and are inserted into the filter element 6 for temperature measurement during decomposition.

[0024] The filter element 6 used in this gas pre-decomposer assembly is of appropriate specifications, which can meet the purity requirements of the halogen gas purified by the purification furnace while meeting the required flow rate of the halogen gas as much as possible.

[0025] The outlet 9 is connected to the inlet of the high-temperature purification furnace via a pipe. Cooling systems 7 are installed at both ends of the casing. These systems cool the outer layer of the component when the induction coil 5 heats the graphite crucible 4, preventing the outer shell from melting and being damaged. A baffle assembly 8 is installed at the front end of the gas passage of the outlet 9. This baffle assembly has a multi-layered, staggered structure, which increases the flow time and contact area between the gas and the inner wall as the halogen gas passes through, thus cooling the halogen gas and preventing it from reacting with the pipe and corroding it.

[0026] The specific shielding component 8 includes three circularly arrayed connecting rods 81 and a central rod 82 located at the center of the array. One end of each of the three connecting rods 81 is fixed to a ring 83, which is fixed to a flange connected to the air outlet pipe. Sector-shaped plates 84 are spaced apart on the three connecting rods 81, with each layer of sector-shaped plates 84 staggered with adjacent layers. The centers of all layers of sector-shaped plates 84 are fitted onto the central rod 82. Each sector-shaped plate 84 is a one-third arc, and any three adjacent layers of staggered sector-shaped plates 84 form a complete circle.

[0027] The cooling system 7 includes a cooling water tank 71 formed on the shell and the insulation layer 3, and cooling water flows into the cooling water tank 71. The cooling water of the cooling system 7 at both ends of the shell is controlled separately.

[0028] The principle of this invention is as follows: the gas to be decomposed enters the component through the inlet 1, and after heating and decomposition, halogen gas and other gases are produced. These gases are then filtered by the filter element 6. The resulting halogen gas is cooled by the baffle assembly 8 and then introduced into the high-temperature purification furnace through the outlet 9. During component operation, the cooling system 7 cools the entire component shell to prevent melting damage caused by high temperatures.

[0029] This utility model has a compact structure and reasonable installation and debugging. It addresses the problems of high cost and difficulty in transportation and storage of halogen gas required in the high-temperature purification process of the purification furnace. At the same time, since the dust after decomposition has a certain impact on the purified product, it adopts a process of thermal decomposition and filtration to obtain halogen gas, which greatly reduces the purification cost of the high-temperature purification furnace and improves the material purification efficiency.

[0030] Regarding the specific structure of this utility model, it should be noted that the connection relationships between the various component modules adopted in this utility model are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this utility model without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this utility model, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0031] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A high temperature purification furnace gas pre-decomposer, characterized by: The device includes a shell, a graphite crucible (4) inside the shell, an insulation layer (3) covering the outside of the graphite crucible (4), an induction coil (5) wound around the outside of the shell, a filter element (6) inside the graphite crucible (4), an air inlet (1) at one end of the shell, an air outlet (9) at the other end of the shell, thermocouples (2) on both sides of the air inlet (1), the thermocouples (2) passing through the insulation layer (3) and then inserted into the filter element (6), a baffle assembly (8) at the front end of the air passage of the air outlet (9), and a cooling system (7) at both ends of the shell.

2. A high temperature purifier gas pre-decomposer according to claim 1, characterized in that: Thermocouple (2) is connected to an external control terminal via a wire.

3. The gas pre-decomposer for a high-temperature purification furnace according to claim 1, characterized in that: The induction coil (5) is connected to an external control terminal via a wire.

4. A high temperature purifier gas pre-decomposer according to claim 1, characterized in that: The shield assembly (8) is a multi-layer staggered corresponding structure, including three circular array of connecting rods (81) and a middle rod (82) located at the center of the circle. One end of each of the three connecting rods (81) is fixed on a ring (83), and the ring (83) is fixed on a flange connected to the air outlet pipe. Fan-shaped plates (84) are spaced apart on the three connecting rods (81), and the fan-shaped plates (84) of each layer are staggered with the fan-shaped plates (84) of the adjacent layers, and the center of each multi-layer fan-shaped plate (84) is fitted on the middle rod (82).

5. A high temperature purifier gas pre-decomposer according to claim 4, characterized in that: The sector is a sector with one-third of a circular arc, and any three adjacent sectors arranged in an alternating pattern form a complete circle.

6. A high temperature purifier gas pre-decomposer according to any one of claims 1-4, characterized in that: The outlet (9) is connected to the inlet of the high-temperature purification furnace through a pipe.

7. A high temperature purifier gas pre-decomposer according to any one of claims 1 to 4, characterized in that: The cooling system (7) includes a cooling water tank (71) formed on the shell and the insulation layer (3), and cooling water is introduced into the cooling water tank (71).

8. A high temperature purifier gas pre-decomposer according to claim 7, characterized in that: The cooling water of the cooling system (7) at both ends of the shell is controlled separately.

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