Rapid filtering and recycling device for aluminum nitride ceramic substrate cleaning wastewater
By using a three-stage filtration system and automated equipment, the problems of poor filtration and difficulty in cleaning impurities in existing devices have been solved, achieving efficient separation and water recycling, thus improving production efficiency and environmental protection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHENGDU XUCI NEW MATERIAL CO LTD
- Filing Date
- 2025-05-19
- Publication Date
- 2026-04-28
AI Technical Summary
Existing aluminum nitride substrate cleaning wastewater filtration devices have poor filtration performance, cannot accurately separate impurities of different particle sizes, and the filtered water is difficult to recycle. Impurity removal is also difficult, affecting production efficiency and environmental protection.
Design a three-stage filtration system comprising a first coarse filter tank, a second fine filter tank, and a third adsorption tank. The system achieves graded filtration through a vibrating screen, a centrifugal separator, and a ceramic filter element, and combines automated equipment such as scrapers and pneumatic butterfly valves for automatic cleaning and sorting of residues.
It achieves efficient and precise separation of impurities of different particle sizes, with an impurity removal rate of up to 99.9%. The filtered water has high cleanliness and a water reuse rate of 95%, reducing the need for manual intervention and maintenance costs.
Smart Images
Figure CN224172630U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wastewater filtration technology, and more specifically, to a rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates. Background Technology
[0002] The production process of aluminum nitride substrates requires cleaning, which generates a large amount of wastewater containing aluminum nitride fragments, slag, and dust. Directly discharging this wastewater not only wastes water resources but also pollutes the environment.
[0003] Existing filtration devices for cleaning wastewater from aluminum nitride substrates have poor filtration efficiency, failing to accurately separate impurities of different particle sizes. The filtered water is difficult to recycle, increasing production costs. Furthermore, impurity removal is difficult, consuming manpower and time, thus impacting production efficiency. Moreover, most existing devices have low levels of automation, making it difficult to meet the demands of large-scale production.
[0004] In view of the above, this application is hereby submitted. Utility Model Content
[0005] The technical problem this invention aims to solve is that existing wastewater filtration devices have poor filtration effects, cannot accurately separate impurities of different particle sizes, are difficult to clean, and the filtered water is difficult to recycle. The purpose is to provide a rapid filtration and recycling device for aluminum nitride ceramic substrate cleaning wastewater. Through graded filtration, it can adapt to multiple particle sizes, accurately separate impurities of different particle sizes, and at the same time achieve automatic cleaning and classified collection of residues. It has a high impurity removal rate, high water cleanliness after filtration, and can be recycled as cleaning water for reuse.
[0006] This utility model is achieved through the following technical solution:
[0007] This utility model provides a rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates, comprising a first coarse filter tank, a second fine filter tank, and a third adsorption tank connected in sequence.
[0008] The first coarse filter tank has a sewage inlet at the top, a vibrating screen is installed below the sewage inlet, and a coarse filter overflow weir is installed on the side wall of the first coarse filter tank below the vibrating screen. The coarse filter overflow weir is connected to the top of the second fine filter tank through a pipe.
[0009] The second fine filtration tank is equipped with a centrifugal separator. The centrifugal separator has a slag discharge port at the bottom and an overflow port at the top. The overflow port is connected to the bottom of the third adsorption tank through a pipe.
[0010] The third adsorption tank is provided with an activated carbon layer and a ceramic filter element from bottom to top.
[0011] This utility model's rapid filtration and recycling device achieves graded filtration by setting up a three-stage filtration tank. It can adapt to multiple particle sizes, accurately separate impurities of different particle sizes, and automatically clean and classify the residue. It has a high impurity removal rate, and the filtered water has a high degree of cleanliness, which can be recycled as cleaning water for reuse.
[0012] In one specific embodiment, a liquid level sensor is installed in the first coarse filter tank. The two sides of the vibrating screen are installed on the inner wall of the first coarse filter tank by bolts and spring shock absorbers. An eccentric wheel and a vibration motor are installed on the outer wall of the first coarse filter tank. The eccentric wheel connecting rod is connected to the vibrating screen. The output shaft of the vibration motor drives the screen eccentric wheel to rotate through a V-belt. The rotation of the eccentric wheel causes the eccentric wheel connecting rod to perform linear reciprocating motion. The eccentric wheel connecting rod drives the vibrating screen to perform reciprocating vibration. The tension of the V-belt can be controlled by adjusting the bolts.
[0013] In one specific embodiment, the vibrating screen is inclined, preferably at an angle of 30°, and a scraper is installed on the surface of the vibrating screen, which can move back and forth along the inclined direction of the vibrating screen surface.
[0014] In one specific embodiment, an inclined scraper slide rail is installed on the inner wall of the first coarse filter tank, and the two ends of the scraper are slidably installed on the scraper slide rail. The scraper moves along the scraper slide rail under the drive of the scraper drive motor.
[0015] In one specific embodiment, a scraper limit controller is installed at the front end of the scraper slide rail.
[0016] In one specific embodiment, there is a slag discharge gap between the inclined lower end of the vibrating screen and the inner wall of the first coarse filter tank. A partition is provided at the slag discharge gap, and the partition divides the first coarse filter tank into a filtrate chamber and a slag discharge chamber. The vibrating screen completely covers the surface of the filtrate chamber, and a slag collection box is provided at the bottom of the slag discharge chamber.
[0017] The wastewater containing aluminum nitride fragments, slag, and impurities discharged from the cleaning machine is stored in a sewage storage tank and pumped by a 2.2kW, 5m³ / h water flow pump. 3The wastewater is drawn from the sewage storage tank and injected into the first coarse filter tank after being pressurized through a DN50 pipeline. The wastewater impacts a stainless steel vibrating screen (1mm aperture, 20Hz vibration frequency, ±2mm amplitude) set at a 30° angle. Aluminum nitride fragments larger than 1mm are intercepted on the vibrating screen, while smaller particles (≤1mm) and liquid pass through the screen and continue to flow downwards into the filtrate chamber. The scraper (length is the same as the width of the vibrating screen, and the stroke is equal to the length of the vibrating screen) can be set to run once every 10 minutes or other times, scraping the intercepted fragments into the slag discharge chamber along the inclined direction of the screen, and finally collecting them in the slag collection box at the bottom (50L volume, sliding rail pull-out design). When the scraper is pushed to the maximum stroke, the lower end of the vibrating screen can move downwards by 5mm under the action of the spring, and the scraper returns to its original position after completion. The filtered water accumulates in the filtrate chamber to the overflow height (500mm), and overflows through the coarse filter overflow weir by gravity, flowing into the second fine filter tank downstream through the guide pipe.
[0018] In one specific embodiment, the centrifugal separator is a stainless steel cylinder. The bottom of the centrifugal separator has an adjustable speed and is driven by a centrifugal separator drive motor through a coupling. The bottom of the centrifugal separator has a conical structure, and a pneumatic butterfly valve is installed at the slag discharge port. The slag discharge port extends at a 45° angle to the waste slag bucket through a stainless steel pipe.
[0019] When the water filtered through the first coarse filter tank enters the centrifugal separator (500mm in diameter, adjustable speed 800-1500rpm), the centrifugal separator rotates at high speed to generate centrifugal force, which can throw particles of 50μm-1mm toward the cylinder wall, while the liquid (≤50μm particles) gathers in the central area. The larger particles thrown toward the cylinder wall can slide down the cylinder wall to the bottom of the cone and then flow to the slag discharge port (equipped with a DN40 pneumatic butterfly valve, model SMC VQZ212), and finally discharge into the waste slag bucket at a 45° angle through a Φ40mm stainless steel pipe. The pneumatic butterfly valve can be set to open once every 2 hours or other times. The supernatant separated in the central area of the centrifugal separator overflows through the overflow port at the top of the separator and flows into the third adsorption tank by gravity. It is connected to the bottom inlet of the third adsorption tank through a guide pipe to ensure a smooth water flow transition.
[0020] In one specific embodiment, differential pressure sensors are respectively installed at the upper and lower ends of the ceramic filter element.
[0021] In one specific embodiment, the two sides of the ceramic filter element are detachably connected to the inner wall of the third adsorption tank via snap fasteners.
[0022] In one specific embodiment, a turbidity sensor is installed at the top outlet of the third adsorption tank.
[0023] When water enters from the bottom of the third adsorption tank, it first passes through a 200mm thick activated carbon layer (particle size 2-4mm). The porous structure of the activated carbon adsorbs organic matter and some micron-sized dust, reducing turbidity and organic matter content. Next, the water, treated by the activated carbon layer, enters the ceramic filter element (pore size 0.5μm). Particles ≤50μm are removed by the micropores. Differential pressure sensors at both ends of the ceramic filter element monitor the resistance in real time. When the differential pressure >0.1MPa (indicating a problem with the filter element), the pressure is controlled. (Clogging), HMI alarm prompts replacement, and the snap-on design allows for quick filter replacement within 5 minutes; after water is filtered through the ceramic filter, the turbidity sensor (range 0-100NTU) at the outlet of the third adsorption tank monitors the water quality in real time. Once the standard is met, the PLC starts the return pump (1.5kW, head 10m) to send the water back to the cleaning machine's clean water storage tank (capacity 500L, PE anti-corrosion) through a DN50 pipe, realizing water recycling. A check valve is installed at the pipe outlet to prevent backflow.
[0024] Compared with the prior art, this utility model has the following advantages and beneficial effects:
[0025] 1. The present invention provides a rapid filtration and recovery device for cleaning wastewater of aluminum nitride ceramic substrates. By setting up a three-stage filtration tank, it can achieve graded filtration, adapt to multiple particle sizes, and accurately separate impurities of different particle sizes. At the same time, the setting of vibrating screen, scraper and centrifugal separator can realize automatic cleaning and classified collection of residues, and the impurity removal rate is as high as 99.9% or more.
[0026] 2. The present invention provides a rapid filtration and recycling device for cleaning wastewater from aluminum nitride ceramic substrates. The filtered water has high cleanliness and can be recycled as cleaning water for reuse. The water reuse rate reaches more than 95%, which significantly improves the water utilization efficiency of the aluminum nitride substrate cleaning process.
[0027] 3. The rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates provided in this embodiment of the utility model does not require frequent manual intervention and only requires periodic cleaning of the slag collection box, resulting in low maintenance costs and environmental risks. Attached Figure Description
[0028] To more clearly illustrate the technical solutions of the exemplary embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0029] Fig. 1 A schematic diagram of the structure of the filtration and recovery device provided in this embodiment of the utility model;
[0030] Fig. 2 A schematic diagram of the first coarse filter tank structure provided in an embodiment of this utility model;
[0031] Fig. 3 This is a schematic diagram of the third adsorption tank structure provided in an embodiment of the present invention.
[0032] The attached diagram shows the markings and corresponding component names:
[0033] 1-Scraper slide rail, 2-Scraper, 3-Vibrating screen, 4-Scraper drive motor, 5-Centrifugal separator drive motor, 6-Turbidity sensor, 7-Differential pressure sensor, 8-Ceramic filter element, 9-Snap fastener, 10-Activated carbon layer, 11-Water pump, 12-Vibration motor, 13-Scraper limit sensor, 14-Slag collection box, 15-Waste residue bucket, 16-Recirculation pump, 17-Clear water storage tank, 18-Sewage storage tank, 19-First coarse filter tank, 20-Second fine filter tank, 21-Third adsorption tank. Detailed Implementation
[0034] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.
[0035] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be apparent to those skilled in the art that these specific details are not necessary to implement the present invention. In other embodiments, well-known structures are not specifically described in order to avoid obscuring the present invention.
[0036] Throughout this specification, references to "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in connection with that embodiment or example is included in at least one embodiment of the present invention. Therefore, the phrases "an embodiment," "an example," "an example," or "an example" appearing in various places throughout the specification do not necessarily refer to the same embodiment or example. Furthermore, specific features, structures, or characteristics can be combined in one or more embodiments or examples in any suitable combination and / or sub-combination. Moreover, those skilled in the art will understand that the illustrations provided herein are for illustrative purposes and are not necessarily drawn to scale. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0037] In the description of this utility model, the terms "front", "rear", "left", "right", "up", "down", "vertical", "horizontal", "high", "low", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.
[0038] Example 1
[0039] like Figs. 1-3 As shown, this utility model embodiment provides a rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates, including a first coarse filter tank 19, a second fine filter tank 20, and a third adsorption tank 21 connected in sequence.
[0040] The first coarse filter tank 19 has a sewage inlet at the top, and a vibrating screen 3 is provided below the sewage inlet. A coarse filter overflow weir is provided on the side wall of the first coarse filter tank 19 below the vibrating screen 3. The coarse filter overflow weir is connected to the top of the second fine filter tank 20 through a pipe.
[0041] The second fine filtration tank 20 is equipped with a centrifugal separator. The centrifugal separator has a slag discharge port at the bottom and an overflow port at the top. The overflow port is connected to the bottom of the third adsorption tank 21 through a pipe.
[0042] The third adsorption tank 21 is provided with an activated carbon layer 10 and a ceramic filter element 8 arranged sequentially from bottom to top.
[0043] This utility model's rapid filtration and recycling device achieves graded filtration by setting up a three-stage filtration tank. It can adapt to multiple particle sizes, accurately separate impurities of different particle sizes, and automatically clean and classify the residue. It has a high impurity removal rate, and the filtered water has a high degree of cleanliness, which can be recycled as cleaning water for reuse.
[0044] In one specific embodiment, a liquid level sensor is installed in the first coarse filter tank. The two sides of the vibrating screen 3 are installed on the inner wall of the first coarse filter tank 19 by bolts and spring shock absorbers. An eccentric wheel and a vibration motor 12 are installed on the outer wall of the first coarse filter tank 19. The eccentric wheel connecting rod is connected to the vibrating screen 3. The output shaft of the vibration motor 12 drives the screen eccentric wheel to rotate through a V-belt. The rotation of the eccentric wheel causes the eccentric wheel connecting rod to perform linear reciprocating motion. The eccentric wheel connecting rod drives the vibrating screen 3 to perform reciprocating vibration. The tension of the V-belt can be controlled by adjusting the bolts.
[0045] In one specific embodiment, the vibrating screen 3 is inclined, preferably at an angle of 30°, and a scraper 2 is installed on the surface of the vibrating screen 3. The scraper 2 can move back and forth along the inclined direction of the surface of the vibrating screen 3.
[0046] In one specific embodiment, an inclined scraper slide rail 1 is installed on the inner wall of the first coarse filter tank 19, and the two ends of the scraper 2 are slidably installed on the scraper slide rail 1. The scraper 2 moves along the scraper slide rail 4 under the drive of the scraper drive motor 4.
[0047] In one specific embodiment, a scraper limit controller 13 is installed at the front end of the scraper slide rail 1.
[0048] In one specific embodiment, there is a slag discharge gap between the inclined lower end of the vibrating screen 3 and the inner wall of the first coarse filter tank 19. A partition is provided at the slag discharge gap, and the partition divides the first coarse filter tank 19 into a filtrate chamber and a slag discharge chamber. The vibrating screen 3 completely covers the surface of the filtrate chamber, and a slag collection box 14 is provided at the bottom of the slag discharge chamber.
[0049] The wastewater containing aluminum nitride fragments, slag, and impurities discharged from the cleaning machine is stored in the sewage storage tank 18, and then pumped by the water pump 11 (2.2kW, flow rate 5m³ / h). 3 The wastewater is drawn from the sewage storage tank and injected into the first coarse filter tank after being pressurized through a DN50 pipeline. The wastewater impacts a stainless steel vibrating screen (1mm aperture, 20Hz vibration frequency, ±2mm amplitude) set at a 30° angle. Aluminum nitride fragments larger than 1mm are intercepted on the vibrating screen, while smaller particles (≤1mm) and liquid pass through the screen and continue to flow downwards into the filtrate chamber. The scraper (length is the same as the width of the vibrating screen, and the stroke is equal to the length of the vibrating screen) can be set to run once every 10 minutes or other times, scraping the intercepted fragments into the slag discharge chamber along the inclined direction of the screen, and finally collecting them in the slag collection box at the bottom (50L volume, sliding rail pull-out design). When the scraper is pushed to the maximum stroke, the lower end of the vibrating screen can move downwards by 5mm under the action of the spring, and the scraper returns to its original position after completion. The filtered water accumulates in the filtrate chamber to the overflow height (500mm), and overflows through the coarse filter overflow weir by gravity, flowing into the second fine filter tank downstream through the guide pipe.
[0050] In one specific embodiment, the centrifugal separator is a stainless steel cylinder. The bottom of the centrifugal separator has an adjustable speed and is driven by a centrifugal separator drive motor 5 through a coupling. The bottom of the centrifugal separator has a conical structure, and a pneumatic butterfly valve is provided at the slag discharge port. It extends at a 45° angle to the waste slag bucket 12 through a stainless steel pipe.
[0051] When the water filtered through the first coarse filter tank enters the centrifugal separator (500mm in diameter, adjustable speed 800-1500rpm), the centrifugal separator rotates at high speed to generate centrifugal force, which can throw particles of 50μm-1mm toward the cylinder wall, while the liquid (≤50μm particles) gathers in the central area. The larger particles thrown toward the cylinder wall can slide down the cylinder wall to the bottom of the cone and then flow to the slag discharge port (equipped with a DN40 pneumatic butterfly valve, model SMC VQZ212), and finally discharge into the waste slag bucket at a 45° angle through a Φ40mm stainless steel pipe. The pneumatic butterfly valve can be set to open once every 2 hours or other times. The supernatant separated in the central area of the centrifugal separator overflows through the overflow port at the top of the separator and flows into the third adsorption tank by gravity. It is connected to the bottom inlet of the third adsorption tank through a guide pipe to ensure a smooth water flow transition.
[0052] In one specific embodiment, differential pressure sensors 7 are respectively installed at the upper and lower ends of the ceramic filter element 8.
[0053] In one specific embodiment, the two sides of the ceramic filter element 8 are detachably connected to the inner wall of the third adsorption groove 21 via buckles 9.
[0054] In one specific embodiment, the top of the third adsorption tank 21 is designed as an openable cover plate, which is fixed with bolts, and a turbidity sensor 6 is installed at the water outlet at the top of the third adsorption tank 21.
[0055] When water enters from the bottom of the third adsorption tank, it first passes through a 200mm thick activated carbon layer (particle size 2-4mm). The porous structure of the activated carbon adsorbs organic matter and some micron-sized dust, reducing turbidity and organic matter content. The water treated by the activated carbon layer enters the ceramic filter element (pore size 0.5μm), where micropores intercept and remove particles ≤50μm. The differential pressure sensors at both ends of the ceramic filter element monitor the resistance in real time. When the differential pressure >0.1MPa (indicating filter element blockage), the HMI alarm prompts replacement. The snap-fit design allows for quick filter element replacement within 5 minutes. After the water passes through the ceramic filter element, the turbidity sensor (range 0-100NTU) at the outlet of the third adsorption tank monitors the water quality in real time. Once the water meets the standard, the PLC starts the return pump (1.5kW, head 10m) to send the water back to the cleaning machine's clean water storage tank (capacity 500L, PE anti-corrosion) through a DN50 pipe, realizing water recycling. A check valve is installed at the pipe outlet to prevent backflow.
[0056] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above description is only a specific embodiment of this utility model and is not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.
Claims
1. A rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates, characterized in that, It includes a first coarse filter tank (19), a second fine filter tank (20), and a third adsorption tank (21) connected in sequence. The first coarse filter tank (19) has a sewage inlet at the top, and a vibrating screen (3) is provided below the sewage inlet. A coarse filter overflow weir is provided on the side wall of the first coarse filter tank (19) below the vibrating screen (3). The coarse filter overflow weir is connected to the top of the second fine filter tank (20) through a pipe. The second fine filter tank (20) is equipped with a centrifugal separator. The centrifugal separator has a slag discharge port at the bottom and an overflow port at the top. The overflow port is connected to the bottom of the third adsorption tank (21) through a pipe. The third adsorption tank (21) is provided with an activated carbon layer (10) and a ceramic filter element (8) from bottom to top.
2. The rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates according to claim 1, characterized in that, The two sides of the vibrating screen (3) are installed on the inner wall of the first coarse filter tank (19) by bolts and spring shock absorbers. An eccentric wheel and a vibration motor (12) are installed on the outer wall of the first coarse filter tank (19). The eccentric wheel connecting rod is connected to the vibrating screen (3). The output shaft of the vibration motor (12) drives the screen eccentric wheel to rotate through a V-belt. The rotation of the eccentric wheel causes the eccentric wheel connecting rod to make linear reciprocating motion. The eccentric wheel connecting rod drives the vibrating screen (3) to reciprocate.
3. The rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates according to claim 1, characterized in that, The vibrating screen (3) is inclined, and a scraper (2) is installed on the surface of the vibrating screen (3). The scraper (2) can move back and forth along the inclined direction of the surface of the vibrating screen (3).
4. The rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates according to claim 3, characterized in that, The inner wall of the first coarse filter tank (19) is equipped with an inclined scraper slide rail (1), and the two ends of the scraper (2) are slidably installed on the scraper slide rail (1). The scraper (2) moves along the scraper slide rail (1) under the drive of the scraper drive motor (4).
5. The rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates according to claim 2, characterized in that, The front end of the scraper slide rail (1) is equipped with a scraper limit controller (13).
6. The rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates according to claim 3, characterized in that, There is a slag discharge gap between the inclined lower end of the vibrating screen (3) and the inner wall of the first coarse filter tank (19). A partition is provided at the slag discharge gap, which divides the first coarse filter tank (19) into a filtrate chamber and a slag discharge chamber. The vibrating screen (3) completely covers the surface of the filtrate chamber, and a slag collection box (14) is provided at the bottom of the slag discharge chamber.
7. The rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates according to claim 1, characterized in that, The bottom of the centrifuge has a conical structure.
8. The rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates according to claim 1, characterized in that, Differential pressure sensors (7) are respectively installed at the upper and lower ends of the ceramic filter element (8).
9. A rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates according to claim 8, characterized in that, The ceramic filter element (8) is detachably connected to the inner wall of the third adsorption tank (21) on both sides by buckles (9).
10. A rapid filtration and recovery device for cleaning wastewater from aluminum nitride ceramic substrates according to claim 9, characterized in that, A turbidity sensor (6) is installed at the top outlet of the third adsorption tank (21).