Double-temperature-zone dynamic heat insulation device in vacuum chamber

Abstract

The utility model relates to the technical field of vacuum heat treatment equipment, and discloses a double-temperature-zone dynamic heat insulation device in a vacuum chamber, which comprises a vacuum chamber shell, the top of the vacuum chamber shell is fixedly connected with a fixed plate, the inner side of the fixed plate is fixedly connected with an upper chamber shell, the outer side of the vacuum chamber shell and the outer side of the upper chamber shell are provided with a circulating assembly, and the circulating assembly is connected with the vacuum chamber shell. A plurality of connecting plates are fixedly connected to the side face of the fixing plate, driving assemblies are arranged on the side faces of the connecting plates, two circular plate cooling assemblies are arranged in the vacuum cavity shell, and a plurality of rotating shafts are rotationally connected to the inner side of the fixing plate. The rotating power source drives the rotating shaft to rotate, so that dynamic stirring of the rectangular water cooling plate in the vacuum chamber is achieved, static heat distribution is broken, cooling liquid is driven to circulate through the water outlet flow channel and the water inlet flow channel in the rotating shaft, efficient heat exchange in the rotating state is achieved, and the turbulence effect is enhanced through centrifugal force.

Description

Technical Field

[0001] This utility model relates to the field of vacuum heat treatment equipment technology, and in particular to a dynamic heat insulation device with dual temperature zones inside a vacuum chamber. Background Technology

[0002] The dual-temperature zone dynamic heat insulation device in a vacuum chamber is a precision device that integrates mechanical transmission, fluid circulation and sealing technologies, aiming to achieve efficient isolation and precise control of different temperature zones in a vacuum environment.

[0003] Currently, dual-temperature zone dynamic heat insulation devices in vacuum chambers typically achieve dual-temperature zone insulation through multi-layer heat insulation screens or static water-cooled plates. Multi-layer reflective screens, such as aluminum foil or aluminized polyester film, are layered with spacer materials such as fiberglass, utilizing the heat radiation reflection and low conductivity characteristics of the vacuum environment to achieve insulation. Static water-cooled plates, on the other hand, utilize flow channels embedded in a metal substrate to remove heat through forced convection of the coolant (water, ethylene glycol solution), thus controlling heat conduction.

[0004] While multi-layer heat insulation panels or static water-cooled plates can achieve heat insulation, they cannot dynamically adjust the heat transfer path. Temperature switching requires overall cooling of the chamber or mechanical lifting of the workpiece, which is time-consuming and energy-intensive. Moreover, multi-layer heat insulation panels or static water-cooled plates are fixed and lack dynamic adjustment capabilities, making it difficult to meet the requirements of efficient temperature control. Therefore, a dual-temperature zone dynamic heat insulation device within a vacuum chamber is proposed to solve the above problems. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides a dual-temperature zone dynamic heat insulation device for a vacuum chamber, which aims to improve the problem that dynamic cooling cannot be achieved in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A dual-temperature zone dynamic heat insulation device for a vacuum chamber includes a vacuum chamber shell. A fixed plate is fixedly connected to the top of the vacuum chamber shell. An upper chamber shell is fixedly connected to the inner side of the fixed plate. Circulation components are arranged on the outer sides of the vacuum chamber shell and the upper chamber shell. Multiple connecting plates are fixedly connected to the side of the fixed plate. Each of the multiple connecting plates has a driving component on its side. Two circular plate cooling components are arranged inside the vacuum chamber shell. Multiple rotating shafts are rotatably connected to the inner side of the fixed plate. Cooling circulation components are arranged on the inner side of each of the multiple rotating shafts. Multiple threaded shells are fixedly connected to the side of the fixed plate. Sealing components are arranged on the inner side of each of the multiple threaded shells.

[0008] The drive assembly includes a rotary power source, which is fixedly connected to the inner side of the connecting plate. A rotary shaft is rotatably connected to the inner side of the fixed plate, and the rotary shaft is fixedly connected to the output end of the rotary power source.

[0009] As a further description of the above technical solution:

[0010] The cooling circulation assembly includes a third water outlet and a third water inlet, which are fixedly connected to the inner side of the rotating shaft. The inner side of the rotating shaft is provided with a water outlet channel and a water inlet channel, respectively. The third water outlet and the third water inlet are respectively located at the ends of the water outlet channel and the water inlet channel, and the other ends of the water outlet channel and the water inlet channel are fixedly connected to pipes.

[0011] As a further description of the above technical solution:

[0012] The sealing assembly includes a three-stage seal, which is disposed on the inner side of the threaded housing and sleeved on the outer side of the rotating shaft.

[0013] As a further description of the above technical solution:

[0014] The sealing assembly also includes a threaded block, which is threadedly connected to the inner side of the threaded housing and disposed on the outer side of the rotating shaft;

[0015] As a further description of the above technical solution:

[0016] The circular plate cooling assembly includes a water-cooled circulation pipe. Both ends of the water-cooled circulation pipe are fixedly connected to the inner side of the fixed plate. Two circular cold plates are provided on the outer side of the water-cooled circulation pipe. Two water inlets and two water outlets are respectively provided at both ends of the water-cooled circulation pipe. Two mounting blocks are fixedly connected to the outer side of the fixed plate. The two mounting blocks are respectively located on the outer side of both ends of the water-cooled circulation pipe.

[0017] As a further description of the above technical solution:

[0018] The circulation assembly includes a circulation pipe, which is disposed on the outside of the vacuum chamber shell and the upper chamber shell. An inlet and an outlet are respectively provided on the inner sides of both ends of the circulation pipe.

[0019] As a further description of the above technical solution:

[0020] Two rectangular water-cooled plates are fixedly connected to the bottom of the rotating shaft, and the two rectangular water-cooled plates are respectively arranged on both sides of the pipe;

[0021] As a further description of the above technical solution:

[0022] The upper chamber shell is provided with an upper chamber, in which two circular cold plates are fixedly connected to two fixing rods on their sides, and multiple fixing rods are provided on the inner side of the fixing plates.

[0023] This utility model has the following beneficial effects:

[0024] 1. In this utility model, a rotating power source drives a rotating shaft to rotate, thereby realizing dynamic stirring of the rectangular water-cooled plate in the vacuum chamber, breaking the static heat distribution. The water outlet and water inlet channels inside the rotating shaft drive the coolant circulation, thereby achieving efficient heat exchange in the rotating state. Centrifugal force enhances the turbulence effect.

[0025] 2. In this invention, a threaded block drives the three-stage seal to axially press, thereby achieving a high-vacuum seal between the rotating shaft and the fixed plate, while allowing unimpeded movement of the rotating components. A rotating power source (servo motor or rotary cylinder) drives the rotating shaft to rotate at high speed, thus forming a dynamic air curtain within the three-stage seal structure, further preventing particulate contaminants from entering the vacuum chamber. Attached Figure Description

[0026] Figure 1 This is a three-dimensional schematic diagram of the dual-temperature zone dynamic heat insulation device in the vacuum chamber proposed in this utility model.

[0027] Figure 2 This is a schematic diagram of the circulation pipeline of the dual-temperature zone dynamic heat insulation device in the vacuum chamber proposed in this utility model;

[0028] Figure 3 This is a schematic diagram of the structure of the fixing rod of the dual-temperature zone dynamic heat insulation device in the vacuum chamber proposed in this utility model;

[0029] Figure 4 This is a schematic diagram of the rotating power source of the dual-temperature zone dynamic heat insulation device in the vacuum chamber proposed in this utility model.

[0030] Figure 5 This is a schematic diagram of the circular cold plate of the dual-temperature zone dynamic heat insulation device in the vacuum chamber proposed in this utility model.

[0031] Figure 6 This is a schematic diagram of the piping structure of the dual-temperature zone dynamic heat insulation device in the vacuum chamber proposed in this utility model.

[0032] Legend:

[0033] 1. Vacuum chamber shell; 2. Fixing plate; 3. Connecting plate; 4. Rotary power source; 5. Upper chamber shell; 6. Circulation pipe; 7. Inlet 1; 8. Outlet 1; 9. Inlet 2; 10. Outlet 2; 11. Mounting block; 12. Fixing rod; 13. Upper chamber; 14. Pipe; 15. Circular cold plate; 16. Outlet 3; 17. Inlet 3; 18. Rotating shaft; 19. Rectangular water-cooled plate; 20. Water-cooled circulation pipe; 21. Three-stage seal; 22. Threaded shell; 23. Threaded block; 24. Outlet channel; 25. Inlet channel. Detailed Implementation

[0034] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0035] Reference Figure 1 , Figure 2 , Figure 4 and Figure 6 This utility model provides an embodiment of a dual-temperature zone dynamic heat insulation device for a vacuum chamber, comprising a vacuum chamber shell 1, a fixed plate 2 fixedly connected to the top of the vacuum chamber shell 1, an upper chamber shell 5 fixedly connected to the inner side of the fixed plate 2, circulation components arranged on the outer sides of the vacuum chamber shell 1 and the upper chamber shell 5, multiple connecting plates 3 fixedly connected to the side of the fixed plate 2, each of the multiple connecting plates 3 having a drive component on its side, two circular plate cooling components arranged inside the vacuum chamber shell 1, multiple rotating shafts 18 rotatably connected to the inner side of the fixed plate 2, each of the multiple rotating shafts 18 having a cooling circulation component on its inner side, and multiple threaded shells 22 fixedly connected to the side of the fixed plate 2, each of the multiple threaded shells 22 having a sealing component on its inner side.

[0036] The drive assembly includes a rotary power source 4, which is fixedly connected to the inner side of the connecting plate 3. A rotating shaft 18 is rotatably connected to the inner side of the fixed plate 2, and the rotating shaft 18 is fixedly connected to the output end of the rotary power source 4. When the rotary power source 4 is started, the output torque is directly transmitted to the rotating shaft 18, driving it to rotate around the axis. The cooling circulation assembly includes an outlet 16 and an inlet 17, which are fixedly connected to the inner side of the rotating shaft 18. An outlet channel 24 and an inlet channel 25 are respectively opened on the inner side of the rotating shaft 18. The outlet 16 and inlet 17 are respectively located at the ends of the outlet channel 24 and the inlet channel 25. The other ends of the outlet channel 24 and the inlet channel 25 are fixedly connected to pipes 14. The external cooling system is connected to the inlet 17 through a hose, and the coolant enters the inlet channel 25. The coolant flows downwards along the inlet channel 25, then branches off through pipe 14 to the pipes inside the rectangular water-cooled plates 19 on both sides. After absorbing heat, it flows upwards through the outlet channel 24 back to the outlet 16, and finally returns to the external cooling system. Two rectangular water-cooled plates 19 are fixedly connected to the bottom of the rotating shaft 18, and the two rectangular water-cooled plates 19 are respectively set on both sides of the pipe 14. When the rotating shaft 18 drives the rectangular water-cooled plates 19 to rotate, the coolant accelerates its flow under the action of centrifugal force. The rotational motion of the rectangular water-cooled plates 19 breaks the static thermal boundary layer, causing the temperature standard in the vacuum chamber to decrease.

[0037] Reference Figure 2 , Figure 4 and Figure 6 The sealing assembly includes a three-stage seal 21, which is disposed inside the threaded housing 22 and fitted onto the outside of the rotating shaft 18. This multi-layered seal structure forms multiple barriers, preventing leakage of gas or liquid from inside or outside the vacuum chamber, while also accommodating the rotation of the rotating shaft 18 to ensure sealing during dynamic rotation. The sealing assembly also includes a threaded block 23, which is threaded onto the inside of the threaded housing 22 and disposed on the outside of the rotating shaft 18. Rotating the threaded block 23 axially applies a preload to the three-stage seal 21, adjusting the tightness of the fit between the seal and the rotating shaft 18.

[0038] Reference Figure 3 , Figure 4 and Figure 5 The circular plate cooling assembly includes a water-cooled circulation pipe 20, with both ends of the pipe fixedly connected to the inner side of a fixed plate 2. Two circular cold plates 15 are disposed on the outer side of the water-cooled circulation pipe 20. Inlet 9 and outlet 10 are respectively located at both ends of the water-cooled circulation pipe 20. When the cooling medium flows into the pipe from inlet 9, it exchanges heat with the circular cold plates 15 through the pipe wall, absorbing the heat generated by the heat load on the circular cold plates 15, and then flows out from outlet 10, forming a continuous cooling cycle. Two mounting blocks 11 are fixedly connected to the outer side of the fixed plate 2, respectively located at both ends of the water-cooled circulation pipe 20. The mounting blocks 11 are fixed to the outer side of the fixed plate 2 and located at both ends of the water-cooled circulation pipe 20, serving to support and fix the entire circular plate cooling assembly, ensuring the relative position of the pipe and the circular cold plates 15 is stable.

[0039] Reference Figure 2 , Figure 4 and Figure 5 The circulation assembly includes a circulation pipe 6, which is located outside the vacuum chamber shell 1 and the upper chamber shell 5. Inlet 7 and outlet 8 are located on the inner sides of both ends of the circulation pipe 6. The circulation pipe 6 surrounds the outer sides of the vacuum chamber shell 1 and the upper chamber shell 5, forming a closed loop. The cooling medium flows into the circulation pipe 6 from the inlet 7, flows along the pipe past the outer sides of the vacuum chamber shell 1 and the upper chamber shell 5, absorbs heat from the chamber walls, and then flows out from the outlet 8. After being cooled by external cooling equipment, it flows back into the inlet 7, achieving circulating cooling. The upper chamber shell 5 contains an upper chamber 13, in which two circular cold plates 15 are each fixedly connected to two fixing rods 12 on their sides. Multiple fixing rods 12 are located inside a fixing plate 2. The circular cold plates 15 are connected to the fixing plate 2 via the fixing rods 12, which support the circular cold plates 15, ensuring they are stably attached to the outside of the water-cooled circulation pipe 20.

[0040] Working principle: The device forms a dual-zone space through the vacuum chamber shell 1 and the upper chamber shell 5. In conjunction with the circulation assembly, cooling assembly, and drive assembly, independent temperature control and dynamic heat insulation are achieved in both zones. The temperature inside the vacuum chamber shell 1 is controlled by a circular plate cooling assembly and a cooling circulation assembly. The temperature inside the upper chamber shell 5 is independently regulated through the circulation assembly, forming a dual-temperature zone with the vacuum chamber shell.

[0041] The circulation assembly inputs the circulating medium into the inlet 7 through an external heat source or cold source. When the medium flows through the pipe 6, it exchanges heat with the chamber shell. The upper chamber 13 inside the upper chamber shell 5 is individually temperature-controlled by the circulation assembly, forming an independent temperature zone; the vacuum chamber shell 1 is temperature-controlled by other cooling components, achieving dual-temperature zone isolation.

[0042] The circular plate cooling assembly receives external cooling medium from inlet 29 into the water-cooled circulation pipe 20. As it flows through the two circular cold plates 15, it absorbs heat from the vacuum chamber and then discharges from outlet 20. The circular cold plates 15 are fixed to the fixing plate 2 by fixing rods 12, directly contacting the interior of the vacuum chamber to rapidly reduce the temperature in that area, forming a low-temperature zone.

[0043] The cooling circulation assembly receives the cooling medium from inlet 17 into inlet channel 25, then flows through pipe 14 to rectangular water-cooled plate 19. After absorbing heat, it is discharged from outlet 16 through outlet channel 24. The rotating shaft system is driven by a servo motor and rotary cylinder to rotate the rotating shaft 18, causing the rectangular water-cooled plate 19 to stir or dissipate heat evenly within the vacuum chamber. Simultaneously, the flowing cooling medium enables dynamic temperature regulation, preventing localized overheating.

[0044] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A dual-temperature zone dynamic heat insulation device for a vacuum chamber, comprising a vacuum chamber shell (1), characterized in that: A fixed plate (2) is fixedly connected to the top of the vacuum chamber shell (1). An upper chamber shell (5) is fixedly connected to the inner side of the fixed plate (2). A circulation assembly is provided on the outer side of the vacuum chamber shell (1) and the upper chamber shell (5). Multiple connecting plates (3) are fixedly connected to the side of the fixed plate (2). A driving assembly is provided on the side of each of the multiple connecting plates (3). Two circular plate cooling assemblies are provided inside the vacuum chamber shell (1). Multiple rotating shafts (18) are rotatably connected to the inner side of the fixed plate (2). A cooling circulation assembly is provided on the inner side of each of the multiple rotating shafts (18). Multiple threaded shells (22) are fixedly connected to the side of the fixed plate (2). A sealing assembly is provided on the inner side of each of the multiple threaded shells (22). The drive assembly includes a rotary power source (4), which is fixedly connected to the inner side of the connecting plate (3). A rotating shaft (18) is rotatably connected to the inner side of the fixed plate (2), and the rotating shaft (18) is fixedly connected to the output end of the rotary power source (4).

2. The dual-temperature zone dynamic heat insulation device in a vacuum chamber according to claim 1, characterized in that: The cooling circulation assembly includes a third outlet (16) and a third inlet (17). The third outlet (16) and the third inlet (17) are fixedly connected to the inner side of the rotating shaft (18). The inner side of the rotating shaft (18) is provided with an outlet channel (24) and an inlet channel (25). The third outlet (16) and the third inlet (17) are respectively located at the ends of the outlet channel (24) and the inlet channel (25). The other end of the outlet channel (24) and the inlet channel (25) is fixedly connected to a pipe (14).

3. The dual-temperature zone dynamic heat insulation device in a vacuum chamber according to claim 1, characterized in that: The sealing assembly includes a three-stage seal (21), which is disposed on the inner side of the threaded housing (22) and sleeved on the outer side of the rotating shaft (18).

4. The dual-temperature zone dynamic heat insulation device in a vacuum chamber according to claim 1, characterized in that: The sealing assembly also includes a threaded block (23), which is threaded to the inner side of the threaded housing (22) and is disposed on the outer side of the rotating shaft (18).

5. The dual-temperature zone dynamic heat insulation device in a vacuum chamber according to claim 1, characterized in that: The circular plate cooling assembly includes a water-cooled circulation pipe (20), both ends of which are fixedly connected to the inner side of the fixed plate (2). Two circular cold plates (15) are provided on the outer side of the water-cooled circulation pipe (20). A second water inlet (9) and a second water outlet (10) are respectively provided at both ends of the water-cooled circulation pipe (20). Two mounting blocks (11) are fixedly connected to the outer side of the fixed plate (2). The two mounting blocks (11) are respectively located on the outer side of both ends of the water-cooled circulation pipe (20).

6. The dual-temperature zone dynamic heat insulation device in a vacuum chamber according to claim 1, characterized in that: The circulation assembly includes a circulation pipe (6), which is located on the outside of the vacuum chamber shell (1) and the upper chamber shell (5). The inner sides of both ends of the circulation pipe (6) are respectively provided with an inlet (7) and an outlet (8).

7. The dual-temperature zone dynamic heat insulation device for a vacuum chamber according to claim 2, characterized in that: The bottom of the rotating shaft (18) is fixedly connected to two rectangular water-cooled plates (19), and the two rectangular water-cooled plates (19) are respectively arranged on both sides of the pipe (14).

8. The dual-temperature zone dynamic heat insulation device in a vacuum chamber according to claim 5, characterized in that: The upper chamber shell (5) is provided with an upper chamber (13), in which two circular cold plates (15) are fixedly connected to two fixing rods (12) on their sides, and multiple fixing rods (12) are provided on the inner side of the fixing plate (2).

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