Multi-dimensional force sensor

Abstract

The embodiment of the utility model provides a multi-dimensional force sensor. A first strain beam group of the multi-dimensional force sensor is arranged between a first seat body and a second seat body; the first strain beam group comprises a plurality of first strain beams, and the first strain beams extend in the first direction and are arranged in a plane perpendicular to the first direction at intervals. The second strain beam group is arranged between the first strain beam group and the second seat body, the second strain beam group extends in a plane perpendicular to the first direction and forms a middle cavity in an enclosing manner, and two opposite ends of the first strain beam are respectively connected with the first seat body and the second strain beam group. The first strain gauge group is arranged on the first strain beam to form a Wheatstone bridge for measuring the torque along the first direction. And the second strain gauge group is arranged on the second strain beam group to form a Wheatstone bridge for measuring the force along the first direction. The multi-dimensional force sensor provided by the embodiment of the utility model is relatively low in crosstalk error.

Description

Technical Field

[0001] This application relates to the field of sensor technology, and in particular to a multidimensional force sensor. Background Technology

[0002] With the rapid development of industrial automation, more and more fields have implemented automated assembly technology, such as automatic screw tightening systems in the 3C industry, automatic watch assembly machines, and automated assembly of bottled beverages and alcoholic beverages. However, a problem often exists in these assemblies: in automatic screw tightening systems, the screws that need to be tightened are of different sizes, and the required tightening force and downward pressure are also different. If it is a small screw, excessive tightening force will cause stripping, and excessive downward pressure will damage the product.

[0003] In related technologies, pressure and torque can be measured by setting up multi-dimensional force sensors. However, in these multi-dimensional force sensors, strain gauges used to measure torque are easily affected by pressure, and strain gauges used to measure pressure are easily affected by torque, resulting in significant crosstalk errors in the measurement results of the multi-dimensional force sensors. Utility Model Content

[0004] In view of this, the main objective of the embodiments of this application is to provide a multidimensional force sensor that can reduce crosstalk errors.

[0005] To achieve the above objectives, the technical solution of this application embodiment is implemented as follows:

[0006] This application provides a multidimensional force sensor, including:

[0007] The first body;

[0008] The second seat body, the first seat body and the second seat body are spaced apart along the first direction;

[0009] The first strain beam group is disposed between the first base and the second base; the first strain beam group includes a plurality of first strain beams, each of which extends along the first direction and is spaced apart from each other in a plane perpendicular to the first direction.

[0010] The second strain beam group is disposed between the first strain beam group and the second base. The second strain beam group extends in a plane perpendicular to the first direction and encloses a central cavity. The opposite ends of the first strain beam are respectively connected to the first base and the second strain beam group.

[0011] The first strain gauge group is disposed on the first strain beam to form a Wheatstone bridge for measuring the torque along the first direction.

[0012] The second strain gauge assembly is mounted on the second strain beam assembly to form a Wheatstone bridge for measuring forces along the first direction.

[0013] In one embodiment, the multidimensional force sensor further includes at least one support beam, with the opposite ends of the support beam connected to the second strain beam group and the second base body, respectively; along the first direction, at least two of the first strain beams are offset from the support beam.

[0014] In one embodiment, along the first direction, each of the supporting beams is offset from each of the first strain beams.

[0015] In one embodiment, a gap region is formed between each adjacent first strain beam, and along the first direction, the area of ​​the second strain beam group opposite to each of the gap regions is provided with the support beam.

[0016] In one embodiment, the second strain beam group includes a plurality of second strain beams, the opposite ends of the second strain beams are respectively connected to the ends of two adjacent first strain beams away from the first base, and each second strain beam encloses to form the central cavity, and the second strain gauge group is attached to the second strain beam.

[0017] In one embodiment, the second strain beam is an arc-shaped strain beam.

[0018] In one embodiment, the first strain gauge group includes a plurality of first strain gauges, each of the first strain beams being arranged circumferentially around the multidimensional force sensor, and the first strain gauges being respectively attached to opposite sides of the first strain beams along the circumference of the multidimensional force sensor.

[0019] In one embodiment, the second strain gauge group includes a plurality of second strain gauges and a plurality of third strain gauges; at the connection between the first strain beam and the second strain beam group, the second strain gauges are attached to the outer surface of the second strain beam group near the first base, and are respectively located on opposite sides of the first strain beam along the circumference of the multidimensional force sensor; the third strain gauges are attached to the outer surface of the second strain beam group near the second base, and are respectively located on opposite sides of the first strain beam along the circumference of the multidimensional force sensor.

[0020] In one embodiment, the first strain beam group includes four first strain beams, the second strain beam group includes four second strain beams, the multidimensional force sensor includes four support beams, each first strain beam is arranged at intervals along the circumference of the multidimensional force sensor, and a second strain beam is arranged between two adjacent first strain beams. The support beams are connected to the second strain beams in a one-to-one correspondence and are staggered from the first strain beams.

[0021] In one embodiment, the cross-sectional area of ​​the support beam gradually decreases from the outside to the inside of the multidimensional force sensor.

[0022] This application provides a multidimensional force sensor, which includes a first base, a second base, a first strain beam group, a second strain beam group, a first strain gauge group, and a second strain gauge group. Each of the first strain beams in the first strain beam group extends along a first direction and is spaced apart from each other in a plane perpendicular to the first direction. The second strain beam group is disposed between the first strain beam group and the second base, extending in a plane perpendicular to the first direction and forming a central cavity. The opposite ends of the first strain beams are connected to the first base and the second strain beam group, respectively. The first strain gauge group is disposed on the first strain beams to form a Wheatstone bridge for measuring the torque along the first direction. The second strain gauge group is disposed on the second strain beam group to form a Wheatstone bridge for measuring the force along the first direction. Specifically, when the multidimensional force sensor is subjected to a force along the first direction, each of the first strain beams can transmit the force along the first direction to the second strain beam group, causing the second strain beam group to deform. Therefore, an electrical signal is generated by a Wheatstone bridge formed by the second strain gauge group mounted on the second strain beam group to complete the force measurement. During this process, since each of the first strain beams extends along the first direction, the first strain beams can effectively transfer the force to the second strain beam group and produce less deformation under the force, thus reducing the impact on the measurement results of the first strain gauge group. On the other hand, when the multidimensional force sensor is subjected to a torque along the first direction, each of the first strain beams can deform under the torque. Therefore, an electrical signal is generated by a Wheatstone bridge formed by the first strain gauge group mounted on the first strain beam to complete the torque measurement. During this process, since the second strain beam group extends in a plane perpendicular to the first direction, the influence of the torque along the first direction on the second strain beam group can be greatly reduced, resulting in less deformation under the torque and thus reducing the impact on the measurement results of the second strain gauge group. Therefore, the multidimensional force sensor of this application can reduce crosstalk errors, making the force and torque measurement results of the multidimensional force sensor more accurate. Attached Figure Description

[0023] Figure 1This is a schematic diagram of the structure of a multidimensional force sensor according to an embodiment of this application;

[0024] Figure 2 for Figure 1 A partial structural diagram of a multi-dimensional force sensor;

[0025] Figure 3 for Figure 2 A structural schematic diagram of a multi-dimensional force sensor from another perspective;

[0026] Figure 4 An exploded view of a portion of the structure of a robot with a multidimensional force sensor according to another embodiment of this application;

[0027] Figure 5 for Figure 2 A schematic diagram of the Wheatstone bridge formed by the first strain gauge group in the middle;

[0028] Figure 6 for Figure 2 A schematic diagram of the Wheatstone bridge formed by the second strain gauge group.

[0029] Explanation of reference numerals in the attached figures

[0030] 1. Multidimensional force sensor; 10. First base; 20. Second base; 30. First strain beam group; 30a. Spacing zone; 31. First strain beam; 40. Second strain beam group; 40a. Central cavity; 41. Second strain beam; 50. First strain gauge group; 51. First strain gauge; 60. Second strain gauge group; 61. Second strain gauge; 62. Third strain gauge; 70. Support beam; 2. Working arm; 3. Connector. Detailed Implementation

[0031] In this application, the "first direction" orientation or positional relationship is based on the appendix. Figure 2 The orientation or positional relationship shown is for illustrative purposes only and is not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this application.

[0032] In the description of the embodiments of this application, technical terms such as "first," "second," and "third" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0033] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0034] A multidimensional force sensor 1 refers to a force sensor capable of simultaneously measuring force and torque components in two or more directions. The multidimensional force sensor 1 can be a two-dimensional force sensor, a three-dimensional force sensor, a six-dimensional force sensor, or other types of force / torque sensor.

[0035] The multi-dimensional force sensor 1 boasts high measurement accuracy and a reliable measurement structure, making it well-suited for applications in humanoid robots, precision assembly, aerospace, medical equipment, and tools (torque wrenches, electric screwdrivers, etc.). For example, in industrial robotics, the multi-dimensional force sensor 1 can provide more accurate force information to humanoid robots, improving their motion accuracy and reaction speed. Furthermore, in material handling, assembly, and welding processes, the multi-dimensional force sensor 1 can be used to monitor and control robot movements in real time, improving operational accuracy and safety. In the medical field, the multi-dimensional force sensor 1 can be used in rehabilitation and surgical robots to enhance operational precision. Finally, in the tooling field, the multi-dimensional force sensor 1 can be used to detect the torque and downward pressure of automatic screw tightening systems.

[0036] For example, please refer to Figure 4 The robot includes a work arm 2 driven by a actuator to perform tasks. The end effector of the work arm 2 includes a connector 3 for connecting various task tools. A multi-dimensional force sensor 1 is installed within the connector 3. One of the first base 10 and the second base 20 of the multi-dimensional force sensor 1 is connected to the work arm 2, and the other is connected to the connector 3. The connector 3 can be used to connect various task tools, such as grippers, suction cups, etc. During the robot's execution of corresponding tasks via the task tools, the multi-dimensional force sensor 1 can detect the interaction force / torque information between the work arm 2 and the connector 3, thus meeting the force control requirements of the robot's end effector.

[0037] For example, a robot includes a base and a robot body. The robot body is mounted on the base, and a multi-dimensional force sensor 1 is installed inside the base. The base is used to fix the robot to a workbench. One of the first housing 10 and the second housing 20 of the multi-dimensional force sensor 1 is connected to the base, and the other is connected to the robot body. By setting the multi-dimensional force sensor 1 at the robot body and the base, when the robot body is subjected to an external force, the multi-dimensional force sensor 1 can detect the external force information, so as to obtain the location and magnitude of the force on the robot, thereby improving the detection accuracy of the robot, accurately controlling the robot to perform corresponding actions, and enhancing the robot's intelligence and user experience.

[0038] One embodiment of this application provides a multidimensional force sensor 1. Please refer to [link / reference]. Figures 1 to 3 The multidimensional force sensor 1 includes a first base 10, a second base 20, a first strain beam group 30, a second strain beam group 40, a first strain gauge group 50, and a second strain gauge group 60.

[0039] The first seat 10 and the second seat 20 are spaced apart along the first direction.

[0040] The first strain beam group 30 is disposed between the first base 10 and the second base 20; the first strain beam group 30 includes a plurality of first strain beams 31, each of which extends along a first direction and is spaced apart from each other in a plane perpendicular to the first direction.

[0041] The second strain beam group 40 is disposed between the first strain beam group 30 and the second seat 20. The second strain beam group 40 extends in a plane perpendicular to the first direction and encloses a central cavity 40a. The opposite ends of the first strain beam 31 are respectively connected to the first seat 10 and the second strain beam group 40.

[0042] Please see Figure 5 The first strain gauge group 50 is disposed on the first strain beam 31 to form a Wheatstone bridge for measuring the torque along the first direction.

[0043] Please see Figure 6 The second strain gauge group 60 is mounted on the second strain beam group 40 to form a Wheatstone bridge for measuring the force along the first direction.

[0044] Specifically, the specific structures of the first seat 10 and the second seat 20 are not limited.

[0045] For example, both the first mounting body 10 and the second mounting body 20 are flange structures. The first mounting body 10 is an upper mounting flange, and the second mounting body 20 is a lower mounting flange.

[0046] The first strain beam group 30 and the second strain beam group 40 are elastic structures that can undergo certain deformations under the action of external forces.

[0047] External force / torque is transmitted to the first strain beam group 30 and the second strain beam group 40 through the first base 10 and the second base 20, causing the first strain beam group 30 and the second strain beam group 40 to deform accordingly. Then, the mechanical deformation is converted into electrical signals through the first strain gauge group 50 and the second strain gauge group 60 to realize the detection of force and torque.

[0048] Both the first strain gauge group 50 and the second strain gauge group 60 are strain gauge structures, typically made of conductor or semiconductor materials with a sensitive grid structure, used to measure strain. When a strain gauge undergoes mechanical deformation under external force, its resistance changes accordingly; this phenomenon is called the "strain effect." In use, the strain gauge is attached to the application area of ​​the strain beam. When the component is subjected to force, strain occurs in the application area, and the sensitive grid deforms accordingly, causing its resistance to change. The magnitude of this resistance change is then measured by a measuring instrument and converted into a strain value for the application area, thus revealing the stress condition of the application area.

[0049] The first direction is the interval between the first seat 10 and the second seat 20.

[0050] The first strain beam group 30, the second strain beam group 40, the first strain gauge group 50, and the second strain gauge group 60 are all located between the first seat 10 and the second seat 20.

[0051] The first strain beam 31 extends along the first direction, and its number can be determined according to actual needs, such as 2, 3, 4 or more.

[0052] Each of the first strain beams 31 is spaced apart in a plane perpendicular to the first direction, and its specific arrangement can be determined according to the actual situation. For example, each of the first strain beams 31 is arranged circumferentially around the multidimensional force sensor 1.

[0053] It should be noted that since each of the first strain beams 31 extends along the first direction, when the first seat 10 and the second seat 20 are subjected to tension / compression along the first direction, the first strain beam 31 can effectively transfer the force to the second strain beam group 40, while its own deformation is relatively small.

[0054] The second strain beam assembly 40 extends in a plane perpendicular to the first direction, thereby reducing the deformation of the second strain beam assembly 40 when the multidimensional force sensor 1 is subjected to a torque along the first direction.

[0055] It should be noted that, since the second strain beam assembly 40 has a central cavity 40a, the second strain beam assembly 40 can be more easily deformed when subjected to tension / compression along the first direction, so as to facilitate the detection by the second strain gauge assembly 60.

[0056] Both the first strain gauge group 50 and the second strain gauge group 60 include multiple strain gauges, and their specific number and arrangement can be set according to actual conditions. The requirement is that the first strain gauge group 50 forms a Wheatstone bridge for measuring torque along the first direction, and the second strain gauge group 60 forms a Wheatstone bridge for measuring force along the first direction.

[0057] For example, the first strain gauge group 50 includes 2, 4 or 8 strain gauges.

[0058] For example, the second strain gauge group 60 includes 2, 4 or 8 strain gauges.

[0059] In the multidimensional force sensor 1 of this application embodiment, each of the first strain beams 31 of the first strain beam group 30 extends along a first direction and is spaced apart from each other in a plane perpendicular to the first direction. A second strain beam group 40 is disposed between the first strain beam group 30 and the second base 20. The second strain beam group 40 extends in a plane perpendicular to the first direction and encloses a central cavity 40a. The opposite ends of the first strain beams 31 are respectively connected to the first base 10 and the second strain beam group 40. A first strain gauge group 50 is disposed on the first strain beams 31 to form a Wheatstone bridge for measuring the torque along the first direction. A second strain gauge group 60 is disposed on the second strain beam group 40 to form a Wheatstone bridge for measuring the force along the first direction. Specifically, when the multidimensional force sensor 1 is subjected to a force along the first direction, each of the first strain beams 31 can transmit the force along the first direction to the second strain beam group 40, causing the second strain beam group 40 to deform. Therefore, an electrical signal is generated by a Wheatstone bridge formed by the second strain gauge group 60 mounted on the second strain beam group 40 to complete the force measurement. During this process, since each of the first strain beams 31 extends along the first direction, the first strain beams 31 can effectively transmit the force to the second strain beam group 40 and undergo less deformation under the force, thus reducing the impact on the measurement results of the first strain gauge group 50. On the other hand, when the multidimensional force sensor 1 is subjected to a torque along the first direction, each of the first strain beams 31 can deform under the torque. Therefore, an electrical signal is generated by a Wheatstone bridge formed by the first strain gauge group 50 mounted on the first strain beams 31 to complete the torque measurement. During this process, since the second strain beam group 40 extends in a plane perpendicular to the first direction, the influence of the torque along the first direction on the second strain beam group 40 can be greatly reduced, resulting in less deformation under the torque, thus reducing the impact on the measurement results of the second strain gauge group 60. Therefore, the multidimensional force sensor 1 of this application can reduce crosstalk error, making the measurement results of force and torque by the multidimensional force sensor 1 more accurate.

[0060] It should be noted that, in the multi-dimensional force sensor 1 of this application, since the crosstalk error of the multi-dimensional force sensor 1 of this application is small, it can meet the requirements of torque testing with a small range and pressure testing with a large range, thus making the multi-dimensional force sensor 1 more adaptable.

[0061] In one embodiment, please refer to Figures 1 to 3 The multidimensional force sensor 1 also includes at least one support beam 70, with its opposite ends connected to the second strain beam group 40 and the second base 20, respectively; along the first direction, at least two first strain beams 31 are offset from the support beam 70. This facilitates the transmission of force along the first direction to the second strain beam group 40, allowing the second strain beam group 40 to deform, thus facilitating measurement by the second strain gauge group 60.

[0062] Specifically, the multidimensional force sensor 1 may include only one support beam or multiple support beams.

[0063] The support beam can extend along the first direction or be at a certain angle to the first direction.

[0064] Two or more first strain gauge beams 31 are staggered with the support beam 70, meaning that two or more first strain gauge beams 31 and the support beam 70 are connected to different regions of the second strain gauge beam group 40, and are not on the same straight line as the support beam 70. This avoids the force along the first direction being directly transmitted to the second base 20 through the support beam 70, thus reducing the deformation of the second strain gauge beam group 40. Therefore, it facilitates improving the measurement performance of the second strain gauge group 60.

[0065] Depending on the actual situation, only some of the first strain beams 31 may be misaligned with each of the support beams 70, or all of the first strain beams 31 may be misaligned with each of the support beams 70.

[0066] For example, please refer to Figures 1 to 3 Along the first direction, each support beam 70 is offset from each first strain beam 31. This allows the second strain beam group 40 to deform better under the force along the first direction.

[0067] In one embodiment, please refer to Figures 1 to 3 Each adjacent first strain beam 31 forms an interval region 30a. Along the first direction, the area of ​​the second strain beam group 40 that is away from each interval region 30a is provided with a support beam 70.

[0068] In other words, each support beam 70 is located on the side of the second strain beam group 40 opposite to each interval 30a. The support beams 70 and the intervals 30a are arranged in a one-to-one correspondence, which facilitates better force transmission.

[0069] In one embodiment, please refer to Figures 1 to 3 The second strain beam assembly 40 includes multiple second strain beams 41. The opposite ends of each second strain beam 41 are connected to the ends of two adjacent first strain beams 31 facing away from the first base 10. Each second strain beam 41 encloses and forms the central cavity 40a. The second strain gauge assembly 60 is attached to the second strain beam 41. This facilitates the detection of deformation of the second strain beam 41 by the second strain gauge assembly 60.

[0070] Specifically, the central cavity 40a is formed by the enclosure of each second strain beam 41, and the two ends of each second strain beam 41 are respectively connected to the ends of two different first strain beams 31. When the multidimensional force sensor 1 is subjected to a force along the first direction, the external force can be transmitted to the second strain beam 41 through the first strain beam 31, thereby causing the second strain beam 41 to deform accordingly, so that the second strain gauge group 60 attached to the second strain beam 41 can detect it.

[0071] It should be noted that the specific shape of the second strain beam 41 can be determined according to the actual situation.

[0072] For example, please see Figures 1 to 3 The second strain beam 41 is an arc-shaped strain beam. This further reduces the influence of the moment along the first direction on the second strain beam 41.

[0073] For example, each of the second strain beams 41 encloses and forms a ring-shaped strain beam group.

[0074] In one embodiment, please refer to Figure 3 The first strain gauge group 50 includes multiple first strain gauges 51. Each first strain beam 31 is arranged at circumferential intervals around the multidimensional force sensor 1, and the first strain gauges 51 are respectively attached to opposite sides of the first strain beam 31 along the circumference of the multidimensional force sensor 1. This makes the measurement of the first strain gauge group 50 more accurate.

[0075] Specifically, the first strain gauge group 50 is used to measure the torque along the first direction. Therefore, by arranging each first strain beam 31 circumferentially around the multidimensional force sensor 1, and attaching the first strain gauge 51 to the opposite sides of the first strain beam 31 along the circumferential direction, the first strain gauge 51 can better measure the deformation of the first strain beam 31.

[0076] In one embodiment, please refer to Figure 3The second strain gauge group 60 includes multiple second strain gauges 61 and multiple third strain gauges 62. At the connection between the first strain beam 31 and the second strain beam group 40, the second strain gauges 61 are attached to the outer surface of the second strain beam group 40 near the first base 10, and are respectively located on opposite sides of the first strain beam 31 along the circumference of the multidimensional force sensor 1. The third strain gauges 62 are attached to the outer surface of the second strain beam group 40 near the second base 20, and are respectively located on opposite sides of the first strain beam 31 along the circumference of the multidimensional force sensor 1. This significantly improves the accuracy of the measurement of the second strain beam group 40 by the second strain gauge group 60.

[0077] Specifically, each strain gauge of the second strain gauge group 60 is attached to the connection between the first strain beam 31 and the second strain beam group 40. Each second strain gauge 61 is attached to the outer surface of the second strain beam group 40 near the first base 10, while each third strain gauge 62 is attached to the outer surface of the second strain beam group 40 near the second base 20. Furthermore, on opposite sides of the first strain beam 31 along the circumference of the multidimensional force sensor 1, the outer surfaces of the second strain beam group 40 are respectively attached to the second strain gauge 61 and the third strain gauge 62.

[0078] In other words, at the connection between the first strain beam 31 and the second strain beam group 40, at least four strain gauges are attached to the outer surface of the second strain beam group 40.

[0079] In one embodiment, please refer to Figures 1 to 3 The first strain beam group 30 includes four first strain beams 31, the second strain beam group 40 includes four second strain beams 41, and the multidimensional force sensor 1 includes four support beams 70. Each first strain beam 31 is spaced circumferentially along the multidimensional force sensor 1, and a second strain beam 41 is positioned between two adjacent first strain beams 31. The support beams 70 are connected to the second strain beams 41 in a one-to-one correspondence and are offset from the first strain beams 31. This design achieves good measurement results while reducing structural costs.

[0080] It should be noted that, depending on the actual situation, each of the first strain beams 31 can be set at equal intervals along the circumference of the multidimensional force sensor 1, or it can be set at unequal intervals.

[0081] Similarly, each support beam 70 can be equally spaced along the circumference of the multidimensional force sensor 1, or it can be unequally spaced.

[0082] It should be noted that the specific shape of the support beam 70 is determined based on the actual situation.

[0083] For example, the cross-sectional area of ​​the support beam 70 gradually decreases from the outside to the inside of the multidimensional force sensor 1. That is, the closer to the inside of the multidimensional force sensor 1, the smaller the cross-sectional area of ​​the support beam 70 along the first direction, thereby further reducing material costs.

[0084] In one specific embodiment, please refer to Figure 1 The middle regions of the first seat 10 and the second seat 20 are penetrated to form a through hole communicating with the middle cavity 40a. This makes the multidimensional force sensor 1 form a through structure, which can reduce the weight of the multidimensional force sensor 1.

[0085] In the description of this application, the references to terms such as "in one embodiment," "in some embodiments," "in a specific embodiment," or "exemplary," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the embodiments of this application. In this application, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine the different embodiments or examples described in this application, as well as the features of the different embodiments or examples.

[0086] The above description is merely a preferred embodiment of this application and is not intended to limit the application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application are included within the scope of protection of this application.

Claims

1. A multidimensional force sensor, characterized in that, include: The first body; The second seat body, the first seat body and the second seat body are spaced apart along the first direction; The first strain beam group is disposed between the first base and the second base; the first strain beam group includes a plurality of first strain beams, each of which extends along the first direction and is spaced apart from each other in a plane perpendicular to the first direction. The second strain beam group is disposed between the first strain beam group and the second base. The second strain beam group extends in a plane perpendicular to the first direction and encloses a central cavity. The opposite ends of the first strain beam are respectively connected to the first base and the second strain beam group. The first strain gauge group is disposed on the first strain beam to form a Wheatstone bridge for measuring the torque along the first direction. The second strain gauge assembly is mounted on the second strain beam assembly to form a Wheatstone bridge for measuring forces along the first direction.

2. The multidimensional force sensor according to claim 1, characterized in that, The multidimensional force sensor further includes at least one support beam, with its opposite ends connected to the second strain beam group and the second base body, respectively; along the first direction, at least two of the first strain beams are offset from the support beam.

3. The multidimensional force sensor according to claim 2, characterized in that, Along the first direction, each of the supporting beams is offset from each of the first strain beams.

4. The multidimensional force sensor according to claim 2, characterized in that, Each adjacent first strain beam forms a gap region, and along the first direction, the area of ​​the second strain beam group opposite to each of the gap regions is provided with the support beam.

5. The multidimensional force sensor according to any one of claims 1-4, characterized in that, The second strain beam assembly includes multiple second strain beams. The two opposite ends of the second strain beams are respectively connected to the ends of two adjacent first strain beams away from the first base. Each second strain beam encloses the central cavity, and the second strain gauge assembly is attached to the second strain beam.

6. The multidimensional force sensor according to claim 5, characterized in that, The second strain beam is an arc-shaped strain beam.

7. The multidimensional force sensor according to any one of claims 1-4, characterized in that, The first strain gauge group includes a plurality of first strain gauges, each of the first strain beams being arranged circumferentially around the multidimensional force sensor, and the first strain gauges being attached to opposite sides of the first strain beams along the circumference of the multidimensional force sensor.

8. The multidimensional force sensor according to any one of claims 1-4, characterized in that, The second strain gauge group includes multiple second strain gauges and multiple third strain gauges; at the connection between the first strain beam and the second strain beam group, the second strain gauges are attached to the outer surface of the second strain beam group near the first base, and are respectively located on opposite sides of the first strain beam along the circumference of the multidimensional force sensor; the third strain gauges are attached to the outer surface of the second strain beam group near the second base, and are respectively located on opposite sides of the first strain beam along the circumference of the multidimensional force sensor.

9. The multidimensional force sensor according to any one of claims 2-4, characterized in that, The first strain beam group includes four first strain beams, the second strain beam group includes four second strain beams, and the multidimensional force sensor includes four support beams. Each first strain beam is arranged at intervals along the circumference of the multidimensional force sensor, and a second strain beam is arranged between two adjacent first strain beams. The support beams are connected to the second strain beams in a one-to-one correspondence and are staggered from the first strain beams.

10. The multidimensional force sensor according to any one of claims 2-4, characterized in that, From the outside to the inside of the multidimensional force sensor, the cross-sectional area of ​​the support beam gradually decreases.

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