Beam source furnace capable of displaying temperature distribution

Abstract

The utility model relates to the technical field of molecular beam epitaxy film growth equipment, in particular to a beam source furnace capable of displaying temperature distribution, which mainly comprises a crucible, a heat insulation layer, a crucible support table and a heating sleeve arranged around the crucible, and a fiber bragg grating temperature sensor is arranged between the crucible and the heating sleeve. The fiber bragg grating temperature sensors are arranged in parallel along the axis direction of the crucible and are used for monitoring temperature data of the crucible; gratings are inscribed on a fiber core of the fiber grating temperature sensor, the number of the gratings is set according to the length requirement of the crucible, and the gratings are used for obtaining temperature distribution conditions of different height areas of the crucible in a segmented or continuous mode; the fiber bragg grating temperature sensor is connected with a multi-channel spectrum demodulator and used for analyzing the wavelength change of the grating in real time and generating longitudinal temperature distribution data of the crucible. The temperature distribution of the beam source furnace is comprehensively monitored, and the epitaxial film quality and the process stability are promoted.

Description

Technical Field

[0001] This utility model relates to the technical field of molecular beam epitaxy thin film growth equipment, specifically to a beam source furnace that can display temperature distribution. Background Technology

[0002] In molecular beam epitaxy (MBE) thin film growth technology, the beam source furnace is a core component, undertaking the crucial function of heating and evaporating solid source material to generate a directional beam. A traditional beam source furnace typically consists of a cylindrical crucible, heating wires wound around the outside of the crucible, a metal heat shield surrounding the heating wires, a metal thermocouple for temperature measurement, and a support structure. Its working principle is as follows: by applying electrical power to the heating wires, the crucible is heated, and the internal source material, having gained sufficient energy, evaporates to form a beam, which is then ejected through the furnace opening onto the substrate surface, completing the epitaxial growth of the thin film. During this process, the thermocouple is usually fixed at a specific location outside the crucible (such as the bottom or sidewall), and the heating power is adjusted through a single-point temperature feedback signal, thereby controlling the furnace temperature and beam intensity.

[0003] After years of development, this type of beam source furnace has become a standardized component of molecular beam epitaxial thin film growth equipment. Each machine is typically equipped with multiple beam source furnaces to accommodate different material systems. The beam current directly determines the composition ratio and growth rate of the epitaxial thin film, while beam current control mainly depends on the temperature of the beam source furnace and the state of the source material inside the crucible. However, existing technologies have the following problems:

[0004] 1. Traditional thermocouples can only acquire temperature data at a localized location within the crucible, failing to reflect the longitudinal or radial temperature distribution within the beam source furnace. As the source material is consumed, the morphology of the evaporation surface and the thermal field distribution dynamically change, leading to deviations between single-point temperature measurements and actual operating conditions. These deviations can easily cause beam fluctuations, thereby affecting the uniformity of the thin film composition and the stability of the growth rate.

[0005] 2. During long-term use, the source material inside the crucible gradually decreases, and the evaporation surface may become concave or agglomerated, leading to changes in evaporation kinetics. Current technologies lack effective means to monitor changes in the state of the source material, and can only indirectly infer these changes through experience or post-event analysis, making it difficult to achieve real-time process optimization.

[0006] 3. During the high-temperature evaporation process, the furnace mouth of the beam source furnace continuously radiates heat into the cavity. Some beam source furnaces without high-temperature protection devices are prone to forming residues at the furnace mouth. Such residues can not only interfere with the beam path but may also contaminate the thin film surface. However, currently, they can only be inspected manually through the observation window, which has problems such as strong subjectivity and slow response.

[0007] 4. To obtain temperature distribution information, existing technologies attempt to place multiple thermocouples at different locations within the beam source furnace. However, this is difficult to implement due to limitations in flange space and the difficulty of lead wire installation. The arrangement of multiple thermocouples not only increases structural complexity but may also introduce risks such as lead wire interference and insulation failure, reducing system reliability.

[0008] In summary, the shortcomings of traditional beam furnaces in temperature monitoring and status feedback severely restrict the precise control and repeatability of the MBE process. Therefore, it is necessary to develop an integrated technology that can acquire the temperature distribution of the beam furnace in real time and comprehensively, and simultaneously monitor the status of the source material and the furnace mouth conditions, in order to improve the quality and process stability of epitaxial films. Summary of the Invention

[0009] To address the shortcomings of the existing technology, this invention provides a beam source furnace capable of displaying temperature distribution. By arranging fiber Bragg grating temperature sensors between the crucible and the heating sleeve, with the sensors arranged parallel to the axis and the fiber cores inscribed with gratings, temperature data at different heights of the crucible can be acquired segmentally or continuously. Combined with a multi-channel spectral demodulator to analyze wavelength changes, longitudinal temperature distribution data is generated. This overcomes the limitations of traditional single-point temperature measurement, enabling comprehensive monitoring of the beam source furnace's temperature distribution. It avoids beam fluctuations caused by insufficient temperature monitoring, thus contributing to improved epitaxial film quality and process stability.

[0010] Specifically, this utility model provides a beam source furnace that can display temperature distribution, including a crucible, a heat insulation layer, a crucible support platform, and a heating sleeve arranged around the crucible. A fiber optic grating temperature sensor is arranged between the crucible and the heating sleeve. The fiber optic grating temperature sensor is arranged parallel to the axial direction of the crucible and is used to monitor the temperature data of the crucible.

[0011] The fiber optic temperature sensor has gratings engraved on its fiber core. The number of gratings is dynamically configured according to the axial length of the crucible, and is used to acquire temperature data of different height regions of the crucible in segments or continuously.

[0012] The fiber optic grating temperature sensor is connected to a multi-channel spectral demodulator, which is used to analyze the wavelength changes of the grating in real time and generate longitudinal temperature distribution data of the crucible.

[0013] Furthermore, multiple fiber optic temperature sensors are configured according to the longitudinal temperature distribution detection requirements of the crucible;

[0014] Multiple fiber optic temperature sensors are staggered along the axis of the crucible, covering different detection areas along the longitudinal direction of the crucible.

[0015] The grating spacing of multiple fiber Bragg grating temperature sensors can be adjusted independently to achieve segmented or continuous temperature monitoring, and high-density axial temperature distribution data can be generated through synchronous analysis by a multi-channel spectral demodulator.

[0016] Furthermore, the heat insulation layer includes a first heat insulation sleeve, a second heat insulation sleeve, a third heat insulation sleeve, a first heat insulation sheet, a second heat insulation sheet, and a third heat insulation sheet;

[0017] The first layer of heat insulation sleeve, the second layer of heat insulation sleeve, and the third layer of heat insulation sleeve are sequentially sleeved on the outside of the heating sleeve to reduce heat radiation outward.

[0018] The first layer of heat insulation sheet, the second layer of heat insulation sheet, and the third layer of heat insulation sheet are respectively disposed at the bottom of the first layer of heat insulation sleeve, the second layer of heat insulation sleeve, and the third layer of heat insulation sleeve to form a heat insulation cavity;

[0019] The inner side of the first layer of heat insulation sleeve is fixed with a support component for the heating sleeve fixing ring, which is used to support the heating sleeve;

[0020] The top of the first layer of heat insulation sleeve, the second layer of heat insulation sleeve, and the third layer of heat insulation sleeve are connected to a top plate to form a closed heat insulation structure.

[0021] PBN insulation components are arranged between each layer of insulation sleeve and between each layer of insulation sheet to reduce heat transfer.

[0022] Furthermore, a heating sleeve fixing ring is fixedly connected to the support component of the heating sleeve fixing ring of the first layer of heat insulation sleeve, and the heating sleeve fixing ring is used to install the heating sleeve and the fiber optic grating temperature sensor.

[0023] The fixed connection includes a heating sleeve fixing ring made of heat insulation material, and a through hole is opened on the heating sleeve fixing ring, through which a fiber optic grating temperature sensor is inserted.

[0024] Furthermore, the crucible support platform includes a support rod and a support base;

[0025] The top of the support rod is connected to the crucible support platform, and the bottom is connected to the support base; the support rod passes through the third layer of heat insulation sheet, the second layer of heat insulation sheet, and the first layer of heat insulation sheet in sequence, and places the crucible support platform inside the heating sleeve.

[0026] Furthermore, the support base is fixedly connected to a flange to provide support for the entire beam source furnace.

[0027] Furthermore, one end of the fiber optic temperature sensor passes sequentially through the flange, support base, bottom insulation layer, and heating sleeve fixing ring, and is connected to the top plate; the other end is connected to the multi-channel spectral demodulator; the fiber optic temperature sensor is fixed between the crucible and the heating sleeve by a fixing component to avoid direct contact with the heating sleeve or crucible, which could cause damage.

[0028] Furthermore, the heating sleeve is connected to a lead wire, which passes through the flange, the support base and the bottom insulation layer in sequence, and is connected to the heating sleeve to provide heating power.

[0029] The lead wire is covered with a lead wire protective sleeve inside the heat insulation layer to insulate against heat and prevent damage to the lead wire.

[0030] Furthermore, a fixing component is provided at the connection between the fiber optic temperature sensor and the lead wire of the heating sleeve and the flange. The fixing component is a sealing fixing component, and a seal is formed between the fiber optic temperature sensor and the lead wire and the flange. When the flange of the beam source furnace is connected to the molecular beam epitaxial thin film growth equipment, it ensures that the vacuum environment of the molecular beam epitaxial thin film growth equipment is not affected.

[0031] Working principle: When the beam source furnace, which can display the temperature distribution, is working, the two major functions of heating and temperature measurement work together.

[0032] During heating, an external power source supplies electrical energy to the heating sleeve 4 through lead wire 402, causing the heating sleeve 4 to heat up and transfer the heat to the crucible 1 inside. The crucible 1 is heated and the internal source material evaporates after obtaining sufficient energy to form a beam, which is sprayed onto the substrate surface through the furnace opening to complete the epitaxial growth of the thin film.

[0033] During temperature measurement, the fiber core of the fiber optic temperature sensor 13 is made of sapphire fiber with a temperature resistance of approximately 2000℃, and a Bragg grating 1301 is engraved on it. When light passes through the Bragg grating (FBG), light waves that satisfy the Bragg condition are reflected back, and the reflected wavelength is affected by the effective refractive index of the waveguide and the grating period. When the temperature changes, the thermo-optic effect changes the effective refractive index, and the grating period changes slightly due to factors such as thermal expansion. By measuring the change in the wavelength of the reflected light wave, the temperature can be accurately calculated.

[0034] Fiber Bragg grating temperature sensors 13 are arranged parallel to the axis of crucible 1. The number of gratings 1301 can be flexibly set according to the length of the crucible to achieve segmented or continuous acquisition of temperature data in different height areas of crucible 1. If denser temperature monitoring is required or the crucible is long, multiple fiber Bragg grating temperature sensors 13 can be arranged and staggered along the axis of crucible 1 to cover different detection areas in the longitudinal direction. The spacing between each grating 1301 can be adjusted independently to further improve the accuracy and flexibility of temperature monitoring.

[0035] The acquired temperature information is transmitted to a multi-channel spectral demodulator via fiber optic grating temperature sensor 13 in the form of light wavelength changes. The multi-channel spectral demodulator analyzes the wavelength changes of grating 1301 in real time, converts them into processable information such as electrical signals, and finally generates longitudinal temperature distribution data of crucible 1.

[0036] Beneficial effects:

[0037] 1. This utility model sets up a fiber optic grating temperature sensor arranged parallel to the axis between the crucible and the heating sleeve. With the help of a multi-channel spectral demodulator, it analyzes the grating wavelength changes in real time. It can acquire temperature data of different height areas of the crucible in segments or continuously, which completely solves the limitations of traditional thermocouple single-point temperature measurement. It realizes full-area coverage monitoring of longitudinal temperature distribution and provides accurate data support for beam stability control.

[0038] 2. The fiber optic temperature sensor of this invention is fixed between the crucible and the heating sleeve by a fixing component, avoiding direct contact with the heating sleeve or crucible, preventing the sensor from being damaged due to direct contact with high-temperature components, and extending the service life of the sensor.

[0039] 3. This invention can be equipped with multiple fiber Bragg grating temperature sensors according to detection requirements. These sensors are staggered along the crucible axis and the grating spacing can be adjusted independently to generate high-density axial temperature distribution data, meeting the precise temperature measurement needs under different working conditions. Even if the consumption of source material causes changes in the evaporation surface morphology, the dynamic thermal field can be captured in real time through dense temperature measurement points, avoiding beam fluctuations caused by temperature monitoring blind spots and improving the compositional uniformity of thin film growth.

[0040] 4. The fiber optic temperature sensor of this invention uses sapphire optical fiber with a temperature resistance of about 2000℃, which can work stably in the high temperature and complex thermal environment inside the beam source furnace.

[0041] 5. The grating spacing of the multi-fiber grating temperature sensor of this utility model can be adjusted independently, supporting segmented dense temperature measurement and continuous distributed temperature measurement modes.

[0042] 6. The multi-channel spectral demodulator of this invention generates real-time longitudinal temperature distribution data of the crucible, allowing operators to intuitively grasp the thermal field status of the beam source furnace and adjust parameters such as the heating power of the heating sleeve in a timely manner, thereby improving the quality and stability of thin film growth.

[0043] 7. This utility model, based on the principle of light wave reflection, is a fiber optic temperature sensor unaffected by electromagnetic interference and radio frequency interference. Even in complex electromagnetic environments surrounding the beam source furnace, it can still accurately measure temperature, ensuring the reliability of temperature data.

[0044] 8. The fiber optic grating temperature sensor of this invention has a small diameter, which allows it to be installed in the narrow gap between the crucible and the heating sleeve, reducing structural complexity and avoiding the risk of lead wire interference and insulation failure.

[0045] 9. This utility model enhances the installation stability of the fiber optic temperature sensor through a double reinforcement design of the fixing component and the interface, reduces displacement and loss at high temperatures, ensures that the temperature measurement accuracy remains unchanged during long-term use, and reduces equipment maintenance costs. Attached Figure Description

[0046] Figure 1 This is a schematic diagram of the structure of this utility model;

[0047] Figure 2 This is a schematic diagram of the internal structure of Embodiment 1 of the present utility model;

[0048] Figure 3 This is a partially enlarged view of the connection between the fiber optic temperature sensor and the heating sleeve fixing ring in Embodiment 1 of this utility model;

[0049] Figure 4 This is a split diagram of Embodiment 1 of the present utility model;

[0050] Figure 5 This is a schematic diagram showing the internal structure of Embodiment 1 of this utility model.

[0051] Figure 6 This is a top view of the present invention;

[0052] Figure 7 This is a cross-sectional view of Embodiment 1 of the present utility model;

[0053] Figure 8 This is a schematic diagram of the installation of the beam source furnace and the molecular beam epitaxial thin film growth equipment of this utility model;

[0054] Figure 9 This is a schematic diagram of the working state of the beam source furnace of this utility model;

[0055] Figure 10 This is a schematic diagram of the grating arrangement in Embodiment 2 of this utility model;

[0056] Figure 11 This is one of the schematic diagrams showing the arrangement of the fiber optic grating temperature sensor in Embodiment 3 of this utility model;

[0057] Figure 12 This is the second schematic diagram of the fiber optic grating temperature sensor arrangement in Embodiment 3 of this utility model;

[0058] Figure 13 This is the third schematic diagram of the fiber optic grating temperature sensor arrangement in Embodiment 3 of this utility model;

[0059] The labels in the diagram are as follows: 1—Crucible, 6—Second layer heat insulation sleeve, 7—Third layer heat insulation sleeve, 8—First layer heat insulation sheet, 9—Second layer heat insulation sheet, 10—Third layer heat insulation sheet, 11—Interface, 12—PBN insulation component, 15—Band source furnace, 16—Molecular beam epitaxial thin film growth equipment, 17—Fixing component, 18—Top plate;

[0060] 2—Crucible support platform, 201—Support rod, 202—Support base;

[0061] 3—Flange, 301—Connecting rod;

[0062] 4—Heating sleeve, 401—Heating sleeve retaining ring, 402—Lead wire, 403—Lead wire protective sleeve;

[0063] 5—First layer of heat insulation sleeve; 501—Supporting component for heating sleeve fixing ring;

[0064] 13—Fiber Bragg grating temperature sensor, 1301—Grate. Detailed Implementation

[0065] The technical solution will now be described in detail with reference to the accompanying drawings of the embodiments of this utility model.

[0066] Example 1

[0067] like Figure 1 , 2 As shown, a beam source furnace capable of displaying temperature distribution includes a crucible 1, a crucible support platform 2, a support rod 201, a support base 202, a flange 3, a connecting rod 301, a heating sleeve 4, a heating sleeve fixing ring 401, a lead wire 402, a lead wire protective sleeve 403, a first layer heat insulation sleeve 5, a support component 501 for the heating sleeve fixing ring, a second layer heat insulation sleeve 6, a third layer heat insulation sleeve 7, a first layer heat insulation sheet 8, a second layer heat insulation sheet 9, a third layer heat insulation sheet 10, an interface 11, a PBN insulating component 12, a fiber optic grating temperature sensor 13, a grating 1301, a fixing component 17, and a top plate 18.

[0068] like Figure 2 , 4 As shown, the crucible 1 in this embodiment is made of an insulating material with good thermal conductivity, high temperature resistance, and low gas release. Commonly used materials include pyrolytic boron nitride (PBN), stainless steel, and quartz. The heating sleeve 4 is arranged around the crucible 1 and is made of a high-temperature resistant rare metal such as tantalum or tungsten wire.

[0069] The first layer of heat insulation sleeve 5, the second layer of heat insulation sleeve 6, and the third layer of heat insulation sleeve 7 are sequentially fitted onto the outside of the heating sleeve 4 to reduce heat radiation outward; PBN insulating elements 12 are arranged between each layer of heat insulation sleeve. The first layer of heat insulation sheet 8, the second layer of heat insulation sheet 9, and the third layer of heat insulation sheet 10 are respectively set at the bottom of the first layer of heat insulation sleeve 5, the second layer of heat insulation sleeve 6, and the third layer of heat insulation sleeve 7, and are welded to form a heat insulation cavity; PBN insulating elements 12 are arranged between each layer of heat insulation sheet. The PBN insulating elements 12 are used to reduce heat transfer.

[0070] like Figure 6 As shown, the support component 501 of the heating sleeve fixing ring is fixedly installed inside the first layer of heat insulation sleeve 5 to support the heating sleeve 4;

[0071] like Figure 4As shown, the top plate 18 is welded to the top of the first layer of heat insulation sleeve 5, the second layer of heat insulation sleeve 6, and the third layer of heat insulation sleeve 7 to form a closed heat insulation structure.

[0072] like Figure 3 As shown, the heating sleeve fixing ring 401 is a PBN insulating component, which is fixedly installed on the support component 501 of the heating sleeve fixing ring of the first layer heat insulation sleeve 5. The heating sleeve fixing ring 401 is used to install the heating sleeve 4 and the fiber optic grating temperature sensor 13.

[0073] The heating sleeve fixing ring 401 is made of PBN heat insulation material and is fixedly connected. The heating sleeve fixing ring 401 has a through hole, and the fiber optic grating temperature sensor 13 is inserted into the through hole.

[0074] like Figure 2 , 3 As shown, a fiber optic temperature sensor 13 is disposed between the crucible 1 and the heating sleeve 4. The fiber optic temperature sensor 13 is arranged parallel to the axial direction of the crucible 1 and is used to monitor the temperature data of the crucible 1. A grating 1301 is engraved on the fiber core of the fiber optic temperature sensor 13. In this embodiment, five gratings 1301 are provided. One end of the fiber optic temperature sensor 13 passes through the flange 3, the support base 202, the bottom heat insulation layer and the heating sleeve fixing ring 401 in sequence, and is detachably connected to the top plate 18. The other end is connected to a multi-channel spectral demodulator to generate longitudinal temperature distribution data of the crucible 1.

[0075] like Figure 3 As shown, the fiber Bragg grating temperature sensor 13 is fixed between the crucible 1 and the heating sleeve 4 by a fixing member 17 to avoid direct contact with the heating sleeve 4 or the crucible 1, which could cause damage. The fiber core of the fiber Bragg grating temperature sensor 13 is made of sapphire optical fiber with a temperature resistance of about 2000℃, and the grating 1301 engraved on it is a Bragg grating.

[0076] like Figure 6 As shown, the top of the support rod 201 is connected to the crucible support platform 2, and the bottom is connected to the support base 202. The support rod 201 passes through the third layer of heat insulation sheet 10, the second layer of heat insulation sheet 9, and the first layer of heat insulation sheet 8 in sequence, placing the crucible support platform 2 inside the heating sleeve 4. The flange 3 is fixedly connected to the support base 202, providing support for the entire beam source furnace.

[0077] The lead wire 402 passes through the flange 3, the support base 202 and the bottom insulation layer in sequence, and is connected to the bottom of the heating sleeve 4 to provide heating power; the part of the lead wire 402 inside the insulation layer is covered with a lead wire protective sleeve 403 to insulate heat and prevent damage to the lead wire 402.

[0078] An interface 11 is provided at the connection point between the fiber Bragg grating temperature sensor 13 and the lead wire 402 and the support base 202. Fixing components 17 are provided at the connection points between the fiber Bragg grating temperature sensor 13 and the lead wire 402 and the flange 3 to improve installation stability. These fixing components 17 are sealing fixing components, forming a seal between the fiber Bragg grating temperature sensor 13 and the lead wire 402 and the flange 3. This ensures that the vacuum environment of the molecular beam epitaxial thin film growth equipment 16 is not affected when the flange 3 of the beam source furnace is connected to the molecular beam epitaxial thin film growth equipment 16.

[0079] Before using a beam source furnace that displays temperature distribution for thin film epitaxial growth, the equipment must be installed and debugged. Securely install flange 3 in the designated position on the molecular beam epitaxial thin film growth equipment 16, serving as the supporting foundation for the beam source furnace 15. Check that all component connections are secure and the seals are good. After confirming everything is correct, turn on the equipment's vacuum system to evacuate the inside of the beam source furnace to the required vacuum level.

[0080] After installation and preparation are completed, the thin film epitaxial growth operation begins. Electrical energy is supplied to the heating sleeve 4 via lead wire 402 from an external power source. The heating sleeve 4 generates heat, which is transferred to the crucible 1, causing the source material inside the crucible 1 to heat up. As the temperature rises, the source material gains sufficient energy to evaporate and form a beam, which is then sprayed onto the substrate surface through the furnace opening for thin film growth.

[0081] During the heating process, the temperature measurement system operates synchronously. The Bragg grating 1301 on the fiber core of the fiber optic temperature sensor 13 changes with temperature; the wavelength of the reflected light wave changes due to the thermo-optic effect and the alteration of the effective refractive index and grating period caused by thermal expansion. The changed light wave signal is transmitted through the optical fiber to a multi-channel spectral demodulator. The demodulator analyzes the wavelength change of the grating 1301 in real time, converting it into processable information such as electrical signals, generating longitudinal temperature distribution data for crucible 1, and displaying it in real time on the operating interface.

[0082] Operators closely monitor temperature distribution data. If localized temperature anomalies or temperature gradients that do not meet process requirements are detected, such as excessively high or low temperatures in a certain height area of ​​crucible 1, the external power supply output can be adjusted promptly via the control system to change the heat output of the heating sleeve 4, precisely regulating the temperature of crucible 1 to ensure stable evaporation of the source material and maintain beam intensity and uniformity. Simultaneously, based on temperature distribution data and the consumption of source material, changes in the evaporation surface state are predicted, and process parameters are optimized in advance to ensure the stability and quality of the thin film epitaxial growth process. After thin film growth is complete, the temperature is lowered to the source material holding temperature.

[0083] Example 2

[0084] like Figure 12As shown, the difference from Embodiment 1 is that the fiber core grating 1301 of the fiber grating temperature sensor 13 can be arranged in a way that dynamically configures the number of gratings according to the axial length of the crucible 1, ensuring that it can be stably deployed and play a monitoring role under different crucible sizes, effectively meeting the diversified needs of intelligent temperature monitoring in high-temperature industrial scenarios.

[0085] Example 3

[0086] like Figure 9-11 As shown, the difference from Embodiments 1 and 2 is that multiple fiber optic temperature sensors 13 are set according to the axial temperature distribution detection requirements of crucible 1; multiple fiber optic temperature sensors 13 are arranged parallel to the axial direction of crucible 1, and each sensor is distributed around the crucible 1 with a circumferentially staggered angle, specifically including but not limited to 180° relative arrangement, 120° even distribution arrangement, 90° orthogonal arrangement, etc., to ensure that the sensor covers different detection areas in the longitudinal direction of crucible 1.

[0087] The spacing of the gratings 1301 engraved on the fiber core of each fiber optic temperature sensor 13 can be independently adjusted according to the temperature monitoring requirements of the corresponding detection area.

[0088] By employing the aforementioned staggered distribution and spacing adjustment, multiple fiber Bragg grating temperature sensors 13 can achieve segmented and precise temperature measurement of specific longitudinal regions of the crucible 1, or form continuous temperature monitoring along the entire axis through the overlapping coverage of the monitoring ranges of adjacent fiber Bragg grating temperature sensors 13. The grating 1301 signals from all sensors are synchronously acquired and analyzed by a multi-channel spectral demodulator, ultimately generating high-density axial temperature distribution data with accuracy matching the detection requirements.

[0089] It should be understood that the above-described specific embodiments of this utility model are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within the protection scope of this utility model. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

Claims

1. A beam source furnace capable of displaying temperature distribution, comprising a crucible (1), a heat insulation layer, a crucible support platform (2), and a heating sleeve (4) surrounding the crucible (1), characterized in that: A fiber optic temperature sensor (13) is provided between the crucible (1) and the heating sleeve (4). The fiber optic temperature sensor (13) is arranged parallel to the axis of the crucible (1) and is used to monitor the temperature data of the crucible (1). The fiber optic temperature sensor (13) has a grating (1301) engraved on its fiber core. The grating (1301) is used to acquire temperature data of different height regions of the crucible (1) in segments or continuously. The fiber optic grating temperature sensor (13) is connected to a multi-channel spectral demodulator, which is used to analyze the wavelength changes of the grating (1301) in real time and generate longitudinal temperature distribution data of the crucible (1).

2. The beam source furnace capable of displaying temperature distribution according to claim 1, characterized in that: Multiple fiber optic temperature sensors (13) are staggered along the axial direction of the crucible (1), covering different detection areas in the longitudinal direction of the crucible (1). The spacing of the gratings (1301) of the multi-fiber grating temperature sensor (13) can be adjusted independently to achieve segmented or continuous temperature monitoring, and high-density axial temperature distribution data can be generated by synchronous analysis through a multi-channel spectral demodulator.

3. The beam source furnace capable of displaying temperature distribution according to claim 1, characterized in that: The heat insulation layer includes a first heat insulation sleeve (5), a second heat insulation sleeve (6), a third heat insulation sleeve (7), a first heat insulation sheet (8), a second heat insulation sheet (9), and a third heat insulation sheet (10); The first heat insulation sleeve (5), the second heat insulation sleeve (6), and the third heat insulation sleeve (7) are sequentially sleeved on the outside of the heating sleeve (4) to reduce heat radiation outward; The first layer of heat insulation sheet (8), the second layer of heat insulation sheet (9) and the third layer of heat insulation sheet (10) are respectively disposed at the bottom of the first layer of heat insulation sleeve (5), the second layer of heat insulation sleeve (6) and the third layer of heat insulation sleeve (7), and are welded to form a heat insulation cavity; The first layer of heat insulation sleeve (5) has a support component (501) for fixing the heating sleeve fixing ring fixed inside, which is used to support the heating sleeve (4); The top of the first layer heat insulation sleeve (5), the second layer heat insulation sleeve (6), and the third layer heat insulation sleeve (7) are welded with a top plate (18) to form a closed heat insulation structure. PBN insulation components (12) are arranged between each layer of heat insulation sleeves and between each layer of heat insulation sheets to reduce heat transfer.

4. The beam source furnace capable of displaying temperature distribution according to claim 3, characterized in that: A heating sleeve fixing ring (401) is fixedly connected to the support component (501) of the heating sleeve fixing ring of the first layer heat insulation sleeve (5). The heating sleeve fixing ring (401) is used to install the heating sleeve (4) and the fiber optic grating temperature sensor (13). The fixed connection is made of heat insulation material with a heating sleeve fixing ring (401). A through hole is opened on the heating sleeve fixing ring (401) and the fiber optic grating temperature sensor (13) is inserted into the through hole.

5. The beam source furnace capable of displaying temperature distribution according to claim 1, characterized in that: The crucible support platform (2) includes a support rod (201) and a support base (202); The top of the support rod (201) is connected to the crucible support platform (2), and the bottom is connected to the support base (202). The support rod (201) passes through the third heat insulation sheet (10), the second heat insulation sheet (9), and the first heat insulation sheet (8) in sequence, and places the crucible support platform (2) inside the heating sleeve (4).

6. The beam source furnace capable of displaying temperature distribution according to claim 5, characterized in that: The support base (202) is fixedly connected to the flange (3) to provide support for the entire beam source furnace.

7. The beam source furnace capable of displaying temperature distribution according to claim 6, characterized in that: One end of the fiber optic temperature sensor (13) passes through the flange (3), the support base (202), the bottom heat insulation layer and the heating sleeve fixing ring (401) in sequence, and is connected to the top plate (18); the other end is connected to the multi-channel spectral demodulator; the fiber optic temperature sensor (13) is fixed between the crucible (1) and the heating sleeve (4) by a fixing piece (17) to avoid direct contact with the heating sleeve (4) or the crucible (1).

8. The beam source furnace capable of displaying temperature distribution according to claim 7, characterized in that: The heating sleeve (4) is connected to a lead wire (402), which passes through the flange (3), the support base (202) and the bottom insulation layer in sequence, and is connected to the bottom of the heating sleeve (4) to provide heating power. The lead wire (402) is covered with a lead wire protective sleeve (403) inside the heat insulation layer to insulate against heat and prevent damage to the lead wire (402).

9. The beam source furnace capable of displaying temperature distribution according to claim 8, characterized in that: A fastener (17) is provided at the connection between the fiber optic temperature sensor (13) and the lead wire (402) and the flange (3). The fastener (17) is a sealing fastener, and a seal is formed between the fiber optic temperature sensor (13) and the lead wire (402) and the flange (3).

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