Single-shaft driving semiconductor pressure control valve suspension arm sealing mechanism

By using a single-axis drive design and a rigid connection between the suspension arm and the geometric center of the valve plate, combined with the cooperation of the V-shaped cross-section flow-blocking sealing ring and the wedge-shaped sealing groove, the problem of uneven force on the sealing ring caused by dual-axis drive is solved, thereby improving the verticality and airtightness of the sealing surface.

CN224229277UActive Publication Date: 2026-05-12SHANGHAI FAANS SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHANGHAI FAANS SEMICONDUCTOR TECHNOLOGY CO LTD
Filing Date
2025-06-13
Publication Date
2026-05-12

AI Technical Summary

Technical Problem

Existing pressure-controlled valves are prone to uneven stress on the sealing rings during biaxial machining or assembly, resulting in insufficient airtightness when closed.

Method used

It adopts a single-axis drive design and is rigidly connected to the geometric center of the valve plate through a cantilever arm. Combined with the cooperation of the V-shaped cross-section flow-blocking seal ring and the wedge-shaped sealing groove, the fluid pressure is used to automatically enhance the tightness of the sealing interface and compensate for machining errors and seal ring wear in real time.

Benefits of technology

It effectively eliminates motion deviation caused by dual-axis drive, ensuring that the sealing surface is always perpendicular, thus improving sealing reliability and airtightness.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model discloses a sealing mechanism for a suspension arm of a single-shaft driving semiconductor pressure control valve, which relates to the technical field of pressure control valves and comprises a valve body, and a valve hole is arranged in the middle of the valve body. An axially-extending mounting hole is formed in one side in the valve body, a valve plate driving shaft capable of axially moving is arranged in the mounting hole in a sliding fit mode, the tail end of the valve plate driving shaft is perpendicularly and fixedly connected with a suspension arm, and the end, away from the valve plate driving shaft, of the suspension arm is fixedly connected with a disc-shaped sealing valve plate. A flange surrounding the valve hole is arranged on one side of the valve body, and a butt joint sealing ring is arranged on the edge of the side, away from the flange, of the valve body. According to the suspension arm sealing mechanism of the single-shaft driving semiconductor pressure control valve, traditional double-shaft driving is changed into single-shaft driving, and the design that the suspension arm is rigidly connected with the geometric center of the valve plate is adopted, so that movement deviation caused by asynchronous double-shaft machining or assembling is fundamentally eliminated.
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Description

Technical Field

[0001] This utility model relates to the field of pressure-controlled valve technology, specifically a single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism. Background Technology

[0002] A pressure-controlled valve is a valve used to control the pressure in a liquid or gas system. It stabilizes the system pressure by automatically adjusting the valve opening, preventing excessively high or low pressure, thereby ensuring the safe operation of equipment and pipelines.

[0003] To achieve the above functions, a prior art Chinese patent (publication number: CN204828825U) discloses a pressure regulating valve, including a first housing with a fluid inlet at one end and a fluid outlet on its side wall. A thrust spring assembly is housed inside the first housing. A second housing is connected to the other end of the first housing, containing a thrust spring actuating device that abuts against the thrust spring assembly. A first ball seat is housed inside the first housing at one end, with one end abutting against the interior of the first housing. A sealing ball abuts against the other end of the first ball seat, and a second ball seat abuts against the other side of the sealing ball. An axial gap between the first and second ball seats forms an annular fluid channel, which communicates with the fluid outlet. The other end of the second ball seat abuts against one end of the thrust spring assembly. This pressure regulating valve effectively avoids pressure buildup, equipment damage, and fluid leakage caused by small fluctuations in flow rate. It provides stable pressure control during operation, has a simple structure, and is easy to operate.

[0004] While existing technologies can overcome the shortcomings mentioned above, other problems still exist in their operation: they control the valve plate by synchronously raising and lowering two drive shafts and use a ball seat and a sealing ball to achieve pressure regulation. In actual use, the asynchronous processing or assembly of the two shafts can easily lead to uneven stress on the sealing ring and insufficient airtightness when closed. Utility Model Content

[0005] The purpose of this invention is to provide a single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism to solve the problem in the background art where asynchronous processing or assembly of two axes easily leads to uneven force on the sealing ring and insufficient air tightness when closed.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism, comprising a valve body, wherein a valve hole is provided in the middle of the valve body;

[0007] The valve body has an axially extending mounting hole on one side. A valve plate drive shaft that can move axially is slidably fitted in the mounting hole. A suspension arm is vertically fixed to the end of the valve plate drive shaft. A disc-shaped sealing valve plate is fixedly connected to the end of the suspension arm away from the valve plate drive shaft.

[0008] Preferably, a flange surrounding the valve hole is provided on one side of the valve body, and a mating sealing ring is provided on the edge of the valve body away from the flange.

[0009] Preferably, the diameter of the sealing valve plate is larger than the diameter of the valve hole, the connection point between the suspension arm and the sealing valve plate is located at the geometric center of the valve plate, and the working surface of the sealing valve plate is perpendicular to the axis of the valve hole.

[0010] Preferably, an axially expandable vacuum bellows is fitted on the outer surface of the valve plate drive shaft. The fixed end of the vacuum bellows is fixedly connected to the outer wall of the valve body, and the free end of the vacuum bellows is fixedly connected to the end flange of the valve plate drive shaft.

[0011] Preferably, the inlet end of the valve hole is provided with an annular mounting groove, and a flow-blocking sealing ring is embedded in the mounting groove. The flow-blocking sealing ring has a V-shaped cross-section, and a wedge-shaped sealing groove is provided on the edge of the sealing valve plate corresponding to the position of the flow-blocking sealing ring.

[0012] Preferably, the axial extension stroke of the vacuum bellows is equal to the sliding stroke of the valve plate drive shaft, and the vacuum bellows still has elastic margin under maximum compression.

[0013] Preferably, the length direction of the suspension arm is perpendicular to the axis of the valve plate drive shaft, and the end of the suspension arm is fixedly connected to the sealing valve plate by bolts.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] This single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism fundamentally eliminates motion deviations caused by asynchronous machining or assembly of dual axes by changing the traditional dual-axis drive to a single-axis drive and adopting a design that rigidly connects the suspension arm to the geometric center of the valve plate.

[0016] By combining the V-shaped cross-section flow-blocking sealing ring with the wedge-shaped sealing groove, the sealing ring is radially expanded by axial pressure during the closing process, forming an initial line contact seal and a secondary lip seal driven by the medium pressure. This structure uses fluid pressure to automatically enhance the tightness of the sealing interface and compensate for machining errors, temperature deformation and sealing ring wear in real time. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0018] Figure 2 This is a schematic diagram of the flange structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the valve plate drive shaft structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the vacuum bellows structure of this utility model;

[0021] Figure 5 This is a schematic diagram of the opening structure of the sealing valve plate of this utility model;

[0022] Figure 6 This is a schematic diagram of the closed structure of the sealing valve plate of this utility model.

[0023] In the diagram: 1. Valve body; 2. Valve hole; 3. Flange; 4. Butt sealing ring; 5. Mounting hole; 6. Valve plate drive shaft; 7. Suspension arm; 8. Sealing valve plate; 9. Vacuum bellows; 10. Flow-stopping sealing ring; 11. Wedge-shaped sealing groove. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1: Please refer to Figure 1 - Figure 6The present invention provides the following technical solution: a single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism, comprising a valve body 1, a valve hole 2 provided in the middle of the valve body 1; an axially extending mounting hole 5 provided on one side inside the valve body 1, a valve plate drive shaft 6 that can move axially is slidably fitted in the mounting hole 5, a suspension arm 7 is vertically fixedly connected to the end of the valve plate drive shaft 6, and a disc-shaped sealing valve plate 8 is fixedly connected to the end of the suspension arm 7 away from the valve plate drive shaft 6; a flange 3 surrounding the valve hole 2 is provided on one side of the valve body 1, and a mating sealing ring 4 is provided on the edge of the valve body 1 away from the flange 3; the diameter of the sealing valve plate 8 is larger than the diameter of the valve hole 2, the connection point between the suspension arm 7 and the sealing valve plate 8 is located at the geometric center of the valve plate, and the working surface of the sealing valve plate 8 is perpendicular to the axis of the valve hole 2; A vacuum bellows 9 capable of axial extension is fitted onto the outer surface of the valve plate drive shaft 6. The fixed end of the vacuum bellows 9 is fixedly connected to the outer wall of the valve body 1, and the free end of the vacuum bellows 9 is fixedly connected to the end flange of the valve plate drive shaft 6. The inlet end of the valve hole 2 is provided with an annular mounting groove, in which a flow-blocking sealing ring 10 is embedded. The flow-blocking sealing ring 10 has a V-shaped cross-section. A wedge-shaped sealing groove 11 is provided on the edge of the sealing valve plate 8 corresponding to the position of the flow-blocking sealing ring 10. The axial extension stroke of the vacuum bellows 9 is equal to the sliding stroke of the valve plate drive shaft 6, and the vacuum bellows 9 still has elastic margin under maximum compression. The length direction of the suspension arm 7 is perpendicular to the axis of the valve plate drive shaft 6, and the end of the suspension arm 7 is fixedly connected to the sealing valve plate 8 by bolts.

[0026] The valve plate drive shaft 6 is driven by an external actuator and slides axially along the mounting hole 5 of the valve body 1. The end of the drive shaft is vertically fixed with a suspension arm 7. When the drive shaft moves downward, the suspension arm 7 pushes the disc-shaped sealing valve plate 8 towards the inlet end of the valve hole 2 with the axis of the drive shaft as the fulcrum. Since the length direction of the suspension arm 7 is perpendicular to the axis of the drive shaft, the valve plate always maintains a perpendicular relationship with the axis of the valve hole 2 during the movement, ensuring that the sealing surface is facing the fluid channel.

[0027] The design of the sealing valve plate 8 having a diameter larger than that of the valve hole 2 ensures that it covers the entire cross-section of the valve hole 2 when fully closed. The flow-blocking sealing ring 10, with a V-shaped cross-section structure, is embedded in the annular groove at the inlet end of the valve hole 2, forming a dynamic fit with the wedge-shaped sealing groove 11 on the edge of the sealing valve plate 8. When the sealing valve plate 8 approaches the closed position, the V-shaped sealing ring expands radially under axial pressure, forming a double sealing interface with the wedge-shaped sealing groove 11. Initial sealing is achieved through the line contact of the V-shaped tip, and the medium pressure pushes the lip of the sealing ring to fit tightly against the sealing valve plate 8, automatically compensating for machining errors and sealing ring wear, ensuring sealing reliability under different working conditions.

[0028] The vacuum bellows 9, which is sleeved on the outside of the drive shaft, is welded to the outer wall of the valve body 1 and the flange of the valve plate drive shaft 6 at both ends to form a closed isolation cavity. The axial extension and contraction stroke of the vacuum bellows 9 is matched with the sliding stroke of the valve plate drive shaft 6. It retains elastic margin at maximum compression to avoid metal fatigue, isolates the internal medium of the valve body 1 from the external environment, prevents particulate contamination, and balances the internal and external pressure difference when the drive shaft moves, thereby reducing the load on the actuator.

[0029] When the valve is opened, the valve plate drive shaft 6 retracts, causing the sealing valve plate 8 to move away from the valve hole 2, forming an annular flow channel. By controlling the displacement of the valve plate drive shaft 6, the gap between the sealing valve plate 8 and the flow-blocking sealing ring 10 is adjusted to achieve linear flow control.

[0030] When complete closure is required, the valve plate drive shaft 6 is pushed to its maximum stroke, and the sealing valve plate 8 fully compresses the flow-blocking sealing ring 10. At this time, the vacuum bellows 9 is in an elastic margin state. The single-point support design of the suspension arm 7 allows the sealing valve plate 8 to deflect slightly when under pressure, so that the flow-blocking sealing ring 10 is subjected to uniform circumferential force, overcoming the sealing failure problem caused by the asynchronous operation of traditional dual-shaft drives.

[0031] The valve plate drive shaft 6 serves as the sole power input end. Its axial movement is converted into the vertical displacement of the sealing valve plate 8 through the suspension arm 7. When the external actuator applies a thrust, the valve plate drive shaft 6 slides axially along the mounting hole 5. Since the suspension arm 7 is rigidly connected to the valve plate drive shaft 6 vertically, and the end of the suspension arm 7 is fixed to the geometric center of the sealing valve plate 8, the single-axis linear motion is converted into the translation of the sealing valve plate 8, thus avoiding the synchronization error present in traditional dual-axis drives.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" or "linked" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a mechanical connection or an electrical connection; it can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism, comprising a valve body (1), wherein a valve hole (2) is provided in the middle of the valve body (1); Its features are: The valve body (1) has an axially extending mounting hole (5) on one side inside. A valve plate drive shaft (6) that can move axially is slidably fitted in the mounting hole (5). A suspension arm (7) is vertically fixedly connected to the end of the valve plate drive shaft (6). A disc-shaped sealing valve plate (8) is fixedly connected to the end of the suspension arm (7) away from the valve plate drive shaft (6).

2. The single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism according to claim 1, characterized in that: The valve body (1) has a flange (3) surrounding the valve hole (2) on one side, and a mating sealing ring (4) is provided on the edge of the valve body (1) away from the flange (3).

3. The single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism according to claim 2, characterized in that: The diameter of the sealing valve plate (8) is larger than the diameter of the valve hole (2). The connection point between the suspension arm (7) and the sealing valve plate (8) is located at the geometric center of the valve plate. The working surface of the sealing valve plate (8) is perpendicular to the axis of the valve hole (2).

4. The single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism according to claim 3, characterized in that: The outer surface of the valve plate drive shaft (6) is fitted with an axially extendable vacuum bellows (9). The fixed end of the vacuum bellows (9) is fixedly connected to the outer wall of the valve body (1), and the free end of the vacuum bellows (9) is fixedly connected to the end flange of the valve plate drive shaft (6).

5. The single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism according to claim 4, characterized in that: The valve hole (2) has an annular mounting groove at its inlet end, and a flow-blocking sealing ring (10) is embedded in the mounting groove. The flow-blocking sealing ring (10) has a V-shaped cross-section, and a wedge-shaped sealing groove (11) is provided on the edge of the sealing valve plate (8) corresponding to the position of the flow-blocking sealing ring (10).

6. The single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism according to claim 5, characterized in that: The axial extension stroke of the vacuum bellows (9) is equal to the sliding stroke of the valve plate drive shaft (6), and the vacuum bellows (9) still has elastic margin under maximum compression.

7. The single-axis driven semiconductor pressure-controlled valve suspension arm sealing mechanism according to claim 6, characterized in that: The length direction of the suspension arm (7) is perpendicular to the axis of the valve plate drive shaft (6), and the end of the suspension arm (7) is fixedly connected to the sealing valve plate (8) by bolts.