Scanning probe microscope laser measuring head capable of adjusting light path
By introducing a reflector and an optical path adjustment module into a scanning probe microscope, the technical problem of automatically correcting the probe cantilever angle deviation is solved, thus realizing the automatic correction of the probe cantilever and enabling the practical application of the probe.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 苏州铭显精密仪器有限公司
- Filing Date
- 2025-05-23
- Publication Date
- 2026-05-12
AI Technical Summary
Existing scanning probe microscopes require frequent manual adjustment of the optical path after probe replacement. Furthermore, deviations in the assembly position or cantilever angle of different probe models cause the optical path to deviate from the target surface in the four quadrants, making the adjustment process time-consuming and inconvenient.
A scanning probe microscope laser probe, comprising a first mirror and a second mirror, was designed. Through an optical path adjustment module and a position adjustment module, the cantilever angle deviation is automatically corrected by utilizing the optical lever amplification effect, thereby achieving rapid alignment of the optical path.
It significantly improves detection sensitivity, achieving sub-nanometer longitudinal resolution. At the same time, it simplifies the impact of external vibrations on the optical path, enables automatic correction of the probe cantilever angle, and improves operational efficiency.
Smart Images
Figure CN224231796U_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of scanning probe microscope technology, and in particular relates to a laser probe for scanning probe microscopes that can adjust the optical path. Background Technology
[0002] Scanning probe microscopy (STM) indirectly measures the morphology or physical properties of a sample surface by detecting the deformation or vibration of a microcantilever using a laser probe. The laser probe works by focusing a laser beam emitted from a laser onto the back of the scanning probe microcantilever. The position of the reflected light spot is received by a position-sensitive detector (PSD) or a four-quadrant photodiode (QPD). By detecting the amount of movement of the light spot, high-resolution scanning is achieved under the calculation of the control system.
[0003] Existing scanning probe microscopes require probe replacement during long-term use. After replacing the probe, the optical path needs to be adjusted manually frequently, making it difficult to achieve automated measurement. At the same time, deviations in the assembly position of different probe models or deviations in the probe cantilever angle cause the optical path to deviate from the target surface in the four quadrants. This requires repeated adjustments using high-precision displacement and angle adjustment devices, which is a time-consuming process. Therefore, a structure or method is needed to improve the above problems. Utility Model Content
[0004] The purpose of this invention is to provide a scanning probe microscope laser probe capable of adjusting the optical path, in order to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, the present invention employs the following technical solution: a scanning probe microscope laser probe capable of adjusting the optical path, comprising a mounting stage, wherein a light source emitting module, a light source receiving module, and a scanning probe are disposed on the mounting stage, characterized in that: it further comprises a first reflector and a second reflector, wherein the light emitted by the light source emitting module is reflected by the first reflector and falls onto the second reflector, and the second reflector reflects the received light onto the light source receiving module;
[0006] The mounting platform is also equipped with a light path adjustment module for adjusting the direction of the reflected light from the second reflection of the reflector.
[0007] Preferably, the optical path adjustment module includes a rotating shaft support and a rotating shaft. The rotating shaft support is mounted on the mounting platform, and the rotating shaft is rotatably connected to the rotating shaft support. The second reflector is disposed on the rotating shaft and rotates accordingly.
[0008] Preferably, the optical path adjustment module further includes an adjusting screw, a first tension member, and a connecting sleeve. The connecting sleeve is fixed on the rotating shaft. The adjusting screw is threadedly connected to a threaded seat. The threaded seat is mounted on the mounting platform. The first tension member is connected to the connecting sleeve and applies tension to it. One end of the adjusting screw abuts against the connecting sleeve to achieve a balance of the tension on the first tension member.
[0009] Preferably, an extension rod is further provided between the connecting sleeve and the adjusting screw, the extension rod slides on a limiting slide block, one end of the extension rod abuts against the connecting sleeve, and the other end abuts against one end of the adjusting screw.
[0010] Preferably, an extension rod is further provided between the connecting sleeve and the adjusting screw, the extension rod slides on a limiting slide block, the limiting slide block is installed on the mounting platform, one end of the extension rod abuts against the connecting sleeve, and the other end abuts against one end of the adjusting screw.
[0011] Preferably, the mounting platform is further provided with a position adjustment module. The position adjustment module includes a four-quadrant fixing seat with a light source receiving module, an adjusting screw two, a threaded seat two, a second tension member, a guide rail, and a slide. The guide rail is mounted on the mounting platform, the slide slides on the guide rail, the four-quadrant fixing seat is mounted on the slide, the threaded seat two is mounted on the mounting platform, the adjusting screw two is threadedly connected to the threaded seat two, the second tension member can apply a force that causes the slide to slide, and one end of the adjusting screw two abuts against the slide to achieve a balance of the tension of the second tension member.
[0012] Preferably, the first reflector is located between the second reflector and the light source receiving module, and the first reflector is fixed to the mounting platform by a reflector mounting bracket.
[0013] Preferably, the scanning probe is located below the first reflector, and the scanning probe is mounted on the mounting platform via a probe positioning seat.
[0014] The beneficial effects of this utility model are as follows: By setting up a reflector one and a reflector two, this solution can convert the nanometer-level deflection of the cantilever into the micrometer-level change of the spot displacement under the optical lever amplification effect, which significantly improves the detection sensitivity and the longitudinal resolution can reach the sub-nanometer level. At the same time, in this solution, the position of the reflector two can be adjusted by the optical path adjustment module, which can effectively correct the deviation of the cantilever angle of different probes.
[0015] In this solution, the connecting sleeve, the first tensioning component, and the first adjusting screw are used to adjust the first adjusting screw during use, thereby causing the connecting sleeve to drive the rotating shaft to move, which in turn causes the angle of the second reflector to change, thus effectively correcting the angle of different probe cantilever arms.
[0016] Since the threaded connection between adjusting screw one and threaded seat one should not be too long, by setting an extension rod and a limiting slide, the force required to operate the adjusting bolt can be reduced while ensuring the stability of the adjusting screw. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of the optical path and structure of this utility model. Figure 1 ;
[0018] Figure 2 This is a schematic diagram of the optical path and structure of this utility model. Figure 2 ;
[0019] Figure 3 This is a schematic diagram of the optical path and structure of this utility model. Figure 3 ;
[0020] In the diagram: 1. Laser mount; 2. Laser; 3. Reflector mount; 4. Reflector I; 5. Probe positioning mount; 6. Scanning probe; 7. Rotary shaft support; 9. Rotary shaft; 10. Reflector II; 11. Connecting sleeve; 12. Pin I; 13. First tension component; 14. Extension rod; 15. Adjusting screw I; 16. Guide rail; 17. Slide table; 18. Four-quadrant mount; 19. Four-quadrant; 20. Pin II; 21. Elastic component II; 22. Adjusting screw II. Detailed Implementation
[0021] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.
[0022] Example:
[0023] In this embodiment, the dotted line represents the pipeline path, see reference. Figures 1-3 A scanning probe microscope laser probe capable of adjusting the optical path includes a light source emitting module, a light source receiving module, and a scanning probe 6. The light source emitting module, the light source receiving module, and the scanning probe are placed on a mounting platform (not shown). A reflector 4 and a reflector 10 are mounted on the mounting platform. The light emitted by the light source emitting module is reflected by the reflector 4 and falls onto the reflector 10. The reflector 10 reflects the received light back to the light source receiving module. The mounting platform is also provided with an optical path adjustment module for adjusting the direction of the reflected light from the reflector 10.
[0024] The light source emitting module includes a laser mount 1 and a laser 2 mounted thereon. The light source receiving module includes a four-quadrant 19, which is mounted on a four-quadrant mount 18. The scanning probe is fixed on a probe positioning mount 5, and the reflector 4 is fixed on a reflector mount 3. The laser mount 1, the four-quadrant mount 18, the probe positioning mount 5, and the reflector mount 3 are all fixed on the mounting platform. The structure of the mounting platform and the connection relationship between it and the components are conventional setup methods and will not be shown in this article.
[0025] The optical path adjustment module includes a rotating shaft support 7 and a rotating shaft 9 rotatably connected thereto. The rotating shaft support 7 is mounted on the mounting platform. The second reflector 10 is disposed on the rotating shaft 9 and rotates accordingly. The optical path adjustment module also includes a connecting sleeve 11, a first tension member 13, and an adjusting screw 15. The connecting sleeve 11 is fixed to the rotating shaft 9 and rotates accordingly. A pin 12 is fixed on the connecting sleeve 11. The first tension member 13 can be a tension spring. One end of the first tension member 13... The adjusting screw 15 is connected to the pin 12, and its other end can be connected to the mounting platform. The adjusting screw 15 is threadedly connected to a threaded seat (not shown). The threaded seat is mounted on the mounting platform. The threaded seat can be a block with a through threaded hole. The first tension member 13 is connected to the connecting sleeve 11 and applies tension to it. One end of the adjusting screw 15 abuts against the connecting sleeve 11 to balance the tension on the first tension member 13. The threaded seat can be a block with a through threaded hole.
[0026] An extension rod 14 is provided between the connecting sleeve 11 and the adjusting screw 15. The extension rod 14 slides on a limiting slide (not shown). The limiting slide is installed on the mounting platform. The slide can be like a block with a through hole. The extension rod slides in the through hole. One end of the extension rod 14 abuts against the connecting sleeve 11, and the other end abuts against one end of the adjusting screw 15. The mounting platform is also equipped with a position adjustment module, which includes a four-quadrant fixing base 18 on which a light source receiving module is mounted, an adjusting screw 22, a threaded seat 2, a second tension member 21, a guide rail 16, and a slide 17. The guide rail is mounted on the mounting platform, and the slide slides on the guide rail. The four-quadrant fixing base is mounted on the slide, and the threaded seat 2 is mounted on the mounting platform. The adjusting screw 22 is threadedly connected to the threaded seat 2. The second tension member 21 can apply a force that causes the slide to slide. One end of the adjusting screw 22 abuts against the slide to balance the tension of the second tension member 21. Specifically, a pin 20 is fixed in the four-quadrant fixing base 18, and the second tension member 21 can also be a tension spring, with one end connected to the pin 20 and the other end connected to the mounting platform.
[0027] The first reflector is located between the second reflector and the light source receiving module. The first reflector is fixed to the mounting platform by a reflector mounting bracket. The scanning probe is located below the first reflector and is mounted on the mounting platform by a probe positioning bracket. Through the above-mentioned position design, the entire device can be made more compact, effectively reducing the overall volume.
[0028] Working principle and process:
[0029] When the scanning probe 6 needs to be replaced, after the scanning probe 6 is inserted, the connecting sleeve 11 is offset by turning the adjusting screw 15. Under the combined action of the pulling force of the first tension member 13 and the supporting force of the extension rod 14, the connecting sleeve 11 can drive the rotating shaft 9 to stay stationary on the connecting seat of the rotating shaft 9. Based on the above movement, the position of the second reflector 10 in the axial direction of the rotating shaft 9 can be adjusted. At the same time, the position of the four quadrants 19 in the circumferential direction of the rotating shaft 9 is adjusted by the position adjustment module, thereby realizing the alignment of the optical path in the four quadrants 19 and realizing the correction of different probe cantilever angles.
[0030] Through reasonable design, the nanoscale deflection of the cantilever is transformed into a micrometer-level change in the spot displacement under the optical lever amplification effect, which significantly improves the detection sensitivity and enables the longitudinal resolution to reach the sub-nanometer level.
[0031] Meanwhile, through reasonable design, this scheme can achieve a compact structure and a short optical path, thereby reducing the impact of external vibration on optical path jitter and enhancing environmental adaptability.
[0032] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.
Claims
1. A scanning probe microscope laser probe capable of adjusting the optical path, comprising a mounting stage, wherein a light source emitting module, a light source receiving module, and a scanning probe (6) are disposed on the mounting stage, characterized in that: It also includes a first reflector (4) and a second reflector (10). The light emitted by the light source emitting module is reflected by the first reflector (4) and falls onto the second reflector (10). The second reflector (10) reflects the received light onto the light source receiving module. The mounting platform is also equipped with a light path adjustment module for adjusting the direction of the reflected light from the second reflector (10).
2. The laser probe for a scanning probe microscope capable of adjusting the optical path according to claim 1, characterized in that: The optical path adjustment module includes a rotating shaft support (7) and a rotating shaft (9). The rotating shaft support (7) is mounted on the mounting platform, and the rotating shaft (9) is rotatably connected to the rotating shaft support. The second reflector (10) is set on the rotating shaft (9) and rotates accordingly.
3. A scanning probe microscope laser probe capable of adjusting the optical path according to claim 2, characterized in that: The optical path adjustment module also includes an adjustment screw (15), a first tension member (13), and a connecting sleeve (11). The connecting sleeve (11) is fixed on the rotating shaft (9). The adjustment screw (15) is threadedly connected to a threaded seat. The threaded seat is mounted on the mounting platform. The first tension member (13) is connected to the connecting sleeve (11) and applies tension to it. One end of the adjustment screw (15) abuts against the connecting sleeve (11) to achieve a balance of tension on the first tension member. The rotating shaft (9) is rotated by the movement of the adjustment screw (15) against the connecting sleeve (11).
4. A scanning probe microscope laser probe capable of adjusting the optical path according to claim 3, characterized in that: An extension rod (14) is also provided between the connecting sleeve (11) and the adjusting screw (15). The extension rod (14) slides on a limiting slide block, which is installed on the mounting platform. One end of the extension rod (14) abuts against the connecting sleeve (11), and the other end abuts against one end of the adjusting screw (15).
5. A scanning probe microscope laser probe capable of adjusting the optical path according to claim 2, characterized in that: The mounting platform is also provided with a position adjustment module for adjusting the position of the light source receiving module. The position adjustment module includes a four-quadrant fixing seat (18) on which the light source receiving module is installed, an adjusting screw two (22), a threaded seat two, a second tension member (21), a guide rail (16), and a slide (17). The guide rail is installed on the mounting platform, the slide slides on the guide rail, the four-quadrant fixing seat is installed on the slide, the threaded seat two is installed on the mounting platform, the adjusting screw two (22) is threadedly connected to the threaded seat two, the second tension member (21) can apply a force to make the slide slide, and one end of the adjusting screw two (22) abuts against the slide to achieve the function of balancing the tension of the second tension member (21).
6. A scanning probe microscope laser probe capable of adjusting the optical path according to claim 1, characterized in that: The first reflector (4) is located between the second reflector (10) and the light source receiving module. The first reflector is fixed to the mounting platform by the reflector fixing seat (3).
7. A scanning probe microscope laser probe capable of adjusting the optical path according to claim 6, characterized in that: The scanning probe (6) is located below the reflector (4), and the scanning probe (6) is mounted on the mounting platform via the probe positioning seat (5).