Semiconductor crystal growth furnace crystal growth monitoring device based on dual-lens self-adaptive focusing
By combining dual-lens adaptive focusing technology and filters, efficient and stable monitoring of the crystal growth process in semiconductor crystal growth furnaces is achieved, solving problems such as inconvenient focus switching, inaccurate position adjustment, and interference from high-temperature light, thus ensuring the continuity of monitoring and imaging quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ANHUI YIXIN SEMICON CO LTD
- Filing Date
- 2025-04-14
- Publication Date
- 2026-05-12
AI Technical Summary
Traditional semiconductor single crystal growth monitoring methods suffer from problems such as inconvenient focus switching, inaccurate position adjustment, and high-temperature light interference affecting imaging quality.
A semiconductor crystal growth monitoring device based on dual-lens adaptive focusing is adopted. By using visual horizontal and vertical modules in combination, the camera can be accurately positioned in three-dimensional space. High-temperature light interference is solved by using filters, and the lens automatically switches focal length to adapt to the needs of different growth stages.
It achieves continuous and efficient monitoring, ensures the stability and clarity of the captured images, and solves the problems of inconvenient focus switching, inaccurate position adjustment, and interference from high temperature and light in traditional methods.
Smart Images
Figure CN224233780U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of visual inspection technology, specifically to a semiconductor crystal growth monitoring device based on dual-lens adaptive focusing. Background Technology
[0002] In the semiconductor single crystal growth process, real-time monitoring of the crystal growth state (such as seeding, shoulder formation, and constant diameter stages) is crucial. However, traditional monitoring methods typically rely on fixed-position industrial cameras for imaging. Because the position and size of the crystal vary significantly at different growth stages, a single-focal-length camera struggles to clearly capture the entire growth process. For example:
[0003] 1. During the crystal development stage, the crystal is located deep within the crystal, requiring a telephoto lens to capture local details;
[0004] 2. During the shoulder-building stage, the crystal diameter gradually increases, and the telephoto lens cannot completely cover the entire crystal, so it is necessary to switch to a close-up lens;
[0005] 3. In the constant diameter stage, the crystal length and diameter increase further, requiring a close-focus lens to cover a wider field of view.
[0006] The current technology has the following main problems:
[0007] 1. Inconvenient focus switching: Traditional methods require manual adjustment of the camera or replacement of the lens, which is not only inefficient but also affects the continuity of monitoring;
[0008] 2. Inaccurate positioning: During crystal growth, the camera needs to dynamically adjust its distance from the observation port and align with the center, but traditional sliding rail systems lack adaptive capabilities and are difficult to achieve precise positioning;
[0009] 3. High-temperature interference problem: Strong light and reflected light inside the furnace can easily affect image quality, and ordinary filters are difficult to fully adapt to this complex lighting environment.
[0010] Therefore, based on the above-mentioned technical problems, it is necessary for those skilled in the art to develop a semiconductor crystal growth monitoring device based on dual-lens adaptive focusing. Utility Model Content
[0011] The purpose of this invention is to provide a semiconductor crystal growth monitoring device based on dual-lens adaptive focusing, in order to solve the problems mentioned in the background art.
[0012] To achieve the above objectives, this utility model provides the following technical solution:
[0013] A technical solution for a semiconductor crystal growth furnace crystal growth monitoring device based on dual-lens adaptive focusing includes a vision lateral module, a lateral module motor disposed on the side of the vision lateral module, a lateral screw connected to the output end of the lateral module motor, a lateral slide connected to the lateral screw threadedly, a vision longitudinal module mounted on the lateral slide, a longitudinal module motor disposed on the side of the vision longitudinal module, a longitudinal screw connected to the output end of the longitudinal module motor, a longitudinal slide threadedly connected to the longitudinal screw, a camera mounting base connected to the bottom of the longitudinal slide, and an industrial camera with a near-focus lens and an industrial camera with a telephoto lens mounted side by side on the camera mounting base.
[0014] As a preferred technical solution, a rocker arm mounting base is installed at the bottom of the visual horizontal module, a rocker arm is connected to the rocker arm mounting base, a rocker arm tail seat is connected to the tail end of the rocker arm, a flange observation port is installed on the rocker arm tail seat, and a filter is provided inside the flange observation port.
[0015] As a preferred technical solution, the filter is located directly in front of the industrial camera with a close-focus lens and the industrial camera with a telephoto lens.
[0016] As a preferred technical solution, the industrial camera with a close-focus lens and the industrial camera with a telephoto lens are used to adapt the focal length according to the captured crystal image to ensure the clarity of the captured image.
[0017] Compared with the prior art, the beneficial effects of this utility model are:
[0018] This invention relates to a semiconductor crystal growth furnace crystal growth monitoring device based on dual-lens adaptive focusing. The dual lenses automatically switch focal lengths according to different shooting needs, eliminating the need for manual intervention and significantly improving monitoring efficiency while ensuring continuous monitoring. Through the cooperation of a horizontal and a vertical vision module, precise camera positioning in three-dimensional space is achieved, ensuring the camera remains aligned with the crystal center regardless of changes in crystal position and size, thus guaranteeing the stability and accuracy of the captured image. Furthermore, the use of filters effectively mitigates the impact of strong light and reflected light within the furnace on image quality, improving the clarity of the captured image. In summary, this invention effectively solves the problems existing in traditional monitoring methods, providing a more reliable technical solution for real-time monitoring of the semiconductor single crystal growth process. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the overall structure of a semiconductor crystal growth furnace crystal growth monitoring device based on dual-lens adaptive focusing.
[0020] Figure 2 This is a frontal three-dimensional structural diagram of a semiconductor crystal growth monitoring device based on dual-lens adaptive focusing.
[0021] Figure 3 This is a schematic diagram of the bottom view structure of a semiconductor crystal growth furnace crystal growth monitoring device based on dual-lens adaptive focusing.
[0022] In the attached diagram, the following are the reference numerals: 1. Longitudinal vision module; 11. Longitudinal module motor; 12. Longitudinal screw; 13. Longitudinal slide; 2. Lateral vision module; 21. Lateral module motor; 22. Lateral screw; 23. Lateral slide; 3. Camera mount; 31. Industrial camera with close-focus lens; 32. Industrial camera with telephoto lens; 33. Rocker arm mount; 34. Rocker arm; 35. Rocker arm tailstock; 36. Flange observation port; 37. Filter. Detailed Implementation
[0023] The features and exemplary embodiments of various aspects of this utility model will now be described in detail. To make the objectives, technical solutions, and advantages of this utility model clearer, the following description, in conjunction with the accompanying drawings and specific embodiments, will provide a further detailed description. For those skilled in the art, this utility model can be implemented without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of this utility model by illustrating examples.
[0024] like Figure 1 , Figure 2 and Figure 3 As shown, this utility model provides a technical solution for a semiconductor crystal growth furnace crystal growth monitoring device based on dual-lens adaptive focusing: it includes a visual horizontal module 2 and a visual vertical module 1. A horizontal module motor 21 is disposed on the side of the visual horizontal module 2, and a horizontal screw 22 is connected to the output end of the horizontal module motor 21. A horizontal slide block 23 is threaded onto the horizontal screw block 22, and the visual vertical module 1 is mounted on the horizontal slide block 23. A vertical module motor 11 is disposed on the side of the visual vertical module 1, and a vertical screw 12 is connected to the output end of the vertical module motor 11. A vertical slide block 13 is threaded onto the vertical screw block 12, and a camera mounting base 3 is connected to the bottom of the vertical slide block 13.
[0025] An industrial camera 31 with a close-focus lens and an industrial camera 32 with a telephoto lens are mounted side-by-side on the camera mount 3. The industrial camera 31 with a close-focus lens and the industrial camera 32 with a telephoto lens are used to adapt the focal length according to the captured crystal image to ensure the sharpness of the captured image.
[0026] To further improve the performance of the monitoring device, a rocker arm mounting base 33 is installed at the bottom of the visual transverse module 2. A rocker arm 34 is connected to the rocker arm mounting base 33, and a rocker arm tailstock 35 is connected to the tail end of the rocker arm 34. A flange observation port 36 is installed on the rocker arm tailstock 35. A filter 37 is installed inside the flange observation port 36. The filter 37 is located directly in front of the industrial camera 31 with a close-focus lens and the industrial camera 32 with a telephoto lens, effectively solving the influence of strong light and reflected light inside the furnace on the imaging quality.
[0027] In practical applications, the device achieves precise camera positioning in three-dimensional space through the cooperation of the horizontal vision module 2 and the vertical vision module 1. This ensures that regardless of changes in the position and size of the crystal within the crystal growth furnace, the camera remains aligned with the crystal center, guaranteeing the stability and accuracy of the captured images.
[0028] In addition, the device's dual-lens adaptive focusing function can automatically switch focal lengths according to different shooting needs without manual intervention, which greatly improves monitoring efficiency and ensures the continuity of monitoring.
[0029] In summary, the semiconductor crystal growth furnace crystal growth monitoring device of this invention effectively solves the problems existing in traditional monitoring methods by using dual-lens adaptive focusing technology, three-dimensional spatial positioning technology and the application of filters, providing a more reliable technical solution for real-time monitoring of the semiconductor single crystal growth process.
[0030] Working principle and usage process of this utility model:
[0031] a. After the device is started, industrial camera 32 with a telephoto lens and industrial camera 31 with a close-focus lens simultaneously capture images of the guide tube inside the crystal growth furnace.
[0032] b. Calculate the center position of the guide tube using a center recognition algorithm (such as Hough circle detection or edge fitting) (assuming coordinates are (X0, Y0)).
[0033] c. The horizontal module motor 21 adjusts the horizontal position of the vertical vision module 1 so that the optical center of the camera is aligned with X0.
[0034] d. The longitudinal module motor 11 adjusts the longitudinal position of the camera mounting base 3 so that the distance between the camera and the flange observation port is adapted to the current crystal growth stage.
[0035] 2. Crystal pulling stage (for telephoto lenses):
[0036] a. In the early stages of crystal growth, when the crystal is located deep (far from the flange observation port), the system automatically selects an industrial camera 32 with a telephoto lens for imaging.
[0037] b. The longitudinal module motor 11 moves the camera mount 3 backward, so that the telephoto lens can clearly capture the crystal seeding state.
[0038] c. Adjust the position of the horizontal module motor 21 to ensure that the center of the shooting field of view is aligned with the crystal growth point.
[0039] 3. Shoulder-releasing stage (dual-lens switching):
[0040] a. As the crystal diameter increases (entering the shoulder expansion stage), the telephoto lens cannot capture the complete outline of the crystal.
[0041] b. The system automatically switches to the industrial camera 31 with a close-focus lens, while the longitudinal module motor 11 moves the camera fixing stake forward to shorten the shooting distance.
[0042] c. The horizontal module motor 21 continues to adjust to ensure that the crystal is always centered in the image.
[0043] 4. Constant Diameter Stage (Stabilized Shooting with Close-up Lens):
[0044] a. The crystal enters the constant diameter growth stage, the diameter tends to stabilize, and the close-focus lens continues to work.
[0045] b. The longitudinal module motor 1 is dynamically adjusted according to the crystal growth rate to maintain the optimal shooting distance.
[0046] c. If the crystal position shifts (e.g., due to thermal convection), the system recalculates the center and adjusts the slide rail position to ensure monitoring stability.
[0047] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
[0048] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0049] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0050] The embodiments described above are not exhaustive, nor do they limit the invention to specific implementations. Clearly, many modifications and variations can be made based on the above description. These embodiments are selected and specifically described in this specification to better explain the principles and practical applications of the invention, enabling those skilled in the art to effectively utilize the invention and its modifications. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the invention should be included within the protection scope of the invention.
Claims
1. A semiconductor crystal growth furnace crystal growth monitoring device based on dual-lens adaptive focusing, characterized in that, The system includes a vision horizontal module (2), a horizontal module motor (21) is provided on the side of the vision horizontal module (2), a horizontal screw (22) is connected to the output end of the horizontal module motor (21), a horizontal slide (23) is threaded on the horizontal screw (22), a vision vertical module (1) is installed on the horizontal slide (23), a vertical module motor (11) is provided on the side of the vision vertical module (1), a vertical screw (12) is connected to the output end of the vertical module motor (11), a vertical slide (13) is threaded on the external end of the vertical screw (12), a camera mounting base (3) is connected to the bottom of the vertical slide (13), and an industrial camera (31) with a near-focus lens and an industrial camera (32) with a far-focus lens are mounted side by side on the camera mounting base (3).
2. The semiconductor crystal growth monitoring device based on dual-lens adaptive focusing in a semiconductor crystal growth furnace according to claim 1, characterized in that: The bottom of the visual horizontal module (2) is equipped with a rocker arm fixing seat (33), a rocker arm (34) is connected to the rocker arm fixing seat (33), a rocker arm tail seat (35) is connected to the tail end of the rocker arm (34), a flange observation port (36) is installed on the rocker arm tail seat (35), and a filter (37) is provided inside the flange observation port (36).
3. The semiconductor crystal growth monitoring device based on dual-lens adaptive focusing in a semiconductor crystal growth furnace according to claim 2, characterized in that: The filter (37) is located directly in front of the industrial camera (31) with a close-focus lens and the industrial camera (32) with a telephoto lens.
4. The semiconductor crystal growth monitoring device based on dual-lens adaptive focusing in a semiconductor crystal growth furnace according to claim 1, characterized in that: The industrial camera (31) with a close-focus lens and the industrial camera (32) with a telephoto lens are used to adapt the focal length according to the captured crystal image to ensure the clarity of the captured image.