High-precision ellipsoidal mirror device

Abstract

The embodiment of the utility model discloses a high-precision ellipsoidal mirror device, which comprises an ellipsoidal mirror, a pressing mechanism and a mounting seat, an axial flexible mechanism is arranged on the pressing mechanism, and the mounting seat is connected with the axial flexible mechanism; and the ellipsoidal mirror is arranged on the pressing mechanism and is fixed through the mounting seat. The ellipsoidal mirror can avoid mirror surface deformation, reduce vibration influence, adapt to temperature change, protect the mirror surface, improve adjustment precision, prolong the service life, adapt to complex working conditions, meet the requirements of a high-precision optical system, and ensure the stability and reliability of the ellipsoidal mirror in the high-precision optical system, thereby improving the quality and efficiency of laser processing.

Description

Technical Field

[0001] This utility model relates to the field of laser technology, and in particular to a high-precision ellipsoidal mirror device. Background Technology

[0002] Ellipsoidal mirrors are used in laser processing equipment to focus or reflect laser beams. Any minute deformation of the mirror surface can lead to a decrease in beam quality and affect processing accuracy. During laser processing, the equipment temperature may change, and the mirror surface stress caused by temperature changes can lead to deformation of the ellipsoidal mirror.

[0003] Therefore, ellipsoidal mirrors require flexible fixing primarily to prevent mirror deformation, reduce vibration effects, adapt to temperature changes, protect the mirror surface, improve adjustment accuracy, extend service life, and adapt to complex working conditions. Flexible fixing ensures the stability and reliability of the ellipsoidal mirror in high-precision optical systems, thereby improving the quality and efficiency of laser processing. Utility Model Content

[0004] The technical problem to be solved by this utility model embodiment is to provide a high-precision ellipsoidal mirror device to achieve flexible fixation of the ellipsoidal mirror and improve the accuracy of laser processing.

[0005] To address the aforementioned technical problems, this utility model provides a high-precision ellipsoidal mirror device, comprising an ellipsoidal mirror, a clamping mechanism, and a mounting base. The clamping mechanism is equipped with an axial flexible mechanism, and the mounting base is connected to the axial flexible mechanism. The ellipsoidal mirror is mounted on the clamping mechanism and fixed by the mounting base.

[0006] Furthermore, the clamping mechanism is ring-shaped.

[0007] Furthermore, the mounting base is ring-shaped.

[0008] Furthermore, the top of the ellipsoidal mirror contacts the bottom of the mounting base.

[0009] Furthermore, it also includes a fixing part, and the mounting base is provided with a radial flexible mechanism; the fixing part is connected to the radial flexible mechanism.

[0010] Furthermore, the fixing part is provided with mounting holes.

[0011] Furthermore, the mounting base has ears on its side, which are connected to an axial flexible mechanism.

[0012] Furthermore, the axially flexible mechanism is a flexible hinge.

[0013] The beneficial effects of this invention are as follows: This invention can avoid mirror deformation, reduce the impact of vibration, adapt to temperature changes, protect the mirror, improve adjustment accuracy, extend service life, and adapt to complex working conditions, meeting the requirements of high-precision optical systems, ensuring the stability and reliability of the ellipsoidal mirror in high-precision optical systems, thereby improving the quality and efficiency of laser processing. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the high-precision ellipsoidal mirror device according to an embodiment of the present invention, taken from one angle.

[0015] Figure 2 This is a three-dimensional structural diagram of the high-precision ellipsoidal mirror device from another angle, according to an embodiment of this utility model.

[0016] Figure 3 This is a three-dimensional structural diagram of the pressing mechanism according to an embodiment of the present utility model.

[0017] Figure 4 This is a three-dimensional structural diagram of the mounting base according to an embodiment of the present utility model.

[0018] Explanation of icon numbers

[0019] Ellipsoid mirror 10, clamping mechanism 20, axial flexible mechanism 21, mounting base 30, fixing part 31, radial flexible mechanism 32, ear part 33. Detailed Implementation

[0020] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of this application can be combined with each other. The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] In this embodiment of the invention, directional indicators (such as up, down, left, right, front, back, etc.) are only used to explain the relative positional relationship and movement of the components in a specific posture (as shown in the attached figure). If the specific posture changes, the directional indicators will also change accordingly.

[0022] Furthermore, in this utility model, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features.

[0023] Please refer to Figures 1-4 The high-precision ellipsoidal mirror device of this utility model embodiment includes an ellipsoidal mirror, a clamping mechanism, and a mounting base.

[0024] The clamping mechanism has an axially flexible mechanism on its side. Preferably, there are multiple sets of axially flexible mechanisms. A mounting base connects to the axially flexible mechanism. The ellipsoidal mirror is mounted on the clamping mechanism and fixed by the mounting base. A preset distance is maintained between the clamping mechanism and the mounting base, and the ellipsoidal mirror is clamped and fixed by the clamping mechanism and the mounting base.

[0025] In one implementation, the clamping mechanism is ring-shaped. The inner diameter of the clamping mechanism is larger than the outer diameter of the bottom of the ellipsoidal mirror but smaller than the outer diameter of the top. The ring-shaped clamping mechanism can evenly distribute the clamping force, avoiding localized stress concentration and preventing deformation of the mirror surface due to mechanical stress. The ring-shaped clamping mechanism can adapt to minute changes in the mirror surface, maintaining a stable clamping effect. The ring-shaped clamping mechanism and mounting base can adapt to the curved shape of the ellipsoidal mirror, providing uniform contact force and avoiding excessive localized pressure.

[0026] In one implementation, the mounting base is annular. The diameter of the mounting base matches the diameter of the top of the ellipsoidal mirror. The top of the ellipsoidal mirror is in contact with the bottom of the mounting base. After the ellipsoidal mirror expands due to heat, the distance between the clamping mechanism and the mounting base increases, and the axial flexible mechanism extends axially. The axial flexible mechanism absorbs the axial deformation of the ellipsoidal mirror, ensuring accuracy.

[0027] In one implementation, the high-precision ellipsoidal mirror device also includes a fixing part, and a radial flexible mechanism is provided on the mounting base. The radial flexible mechanism can be made of an elastic material, and the fixing part is connected to the radial flexible mechanism. Preferably, the fixing part has mounting holes, there are n sets of fixing parts, and 2n sets of radial flexible mechanisms, with each fixing part connected to 2 sets of radial flexible mechanisms. In a specific implementation, the high-precision ellipsoidal mirror device can be installed in a laser device using screws. The radial flexible mechanism absorbs radial deformation, ensuring the stability of the ellipsoidal mirror in a dynamic environment and guaranteeing the accuracy of the high-precision ellipsoidal mirror device.

[0028] In one implementation, the mounting base has ears on its side, which are connected to an axial flexible mechanism. The axial flexible mechanism is a flexible hinge, which can be made of elastic material to accommodate changes in the distance between the clamping mechanism and the mounting base, and absorb axial deformation.

[0029] This invention is easy to disassemble and maintain, and can be adapted to ellipsoidal mirrors of different sizes and shapes, thus improving the versatility of the equipment.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-precision ellipsoidal mirror device, characterized in that, It includes an ellipsoidal mirror, a clamping mechanism, and a mounting base. The clamping mechanism is equipped with an axial flexible mechanism, and the mounting base is connected to the axial flexible mechanism. The ellipsoidal mirror is mounted on the clamping mechanism and fixed by the mounting base.

2. The high-precision ellipsoidal mirror device as described in claim 1, characterized in that, The clamping mechanism is ring-shaped.

3. The high-precision ellipsoidal mirror device as described in claim 1, characterized in that, The mounting base is ring-shaped.

4. The high-precision ellipsoidal mirror device as described in claim 3, characterized in that, The top of the ellipsoidal mirror contacts the bottom of the mounting base.

5. The high-precision ellipsoidal mirror device as described in claim 1, characterized in that, It also includes a fixing part, and the mounting base is provided with a radial flexible mechanism; the fixing part is connected to the radial flexible mechanism.

6. The high-precision ellipsoidal mirror device as described in claim 1, characterized in that, The fixing part is provided with mounting holes.

7. The high-precision ellipsoidal mirror device as described in claim 1, characterized in that, The mounting base has ears on its side, which are connected to an axial flexible mechanism.

8. The high-precision ellipsoidal mirror device as described in claim 1, characterized in that, The axially flexible mechanism is a flexible hinge.

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