High-sensitivity flexible touch sensor, sensor module and intelligent robot with body

Abstract

The utility model discloses a high-sensitivity flexible tactile sensor, a sensor module and an intelligent robot with a body, the high-sensitivity flexible tactile sensor comprises a flexible chamber substrate, an anti-corrosion protection ring, a flexible cover film, an induction material layer and a plurality of convex structures, the flexible chamber substrate comprises a flexible substrate, the anti-corrosion protection ring is arranged on the flexible substrate, and the anti-corrosion protection ring is arranged on the anti-corrosion protection ring. The electrode layer and the flexible bonding layer are sequentially and regularly arranged on the front face of the flexible substrate, the flexible bonding layer surrounds an interdigital electrode area of the electrode layer to form a cavity structure, and an electrode lead of the electrode layer is led out of the cavity structure. According to the high-sensitivity flexible tactile sensor, due to the innovative design of the flexible sealing cavity substrate, the flexible cover film and the protruding structure, the flexible tactile sensor shows high sensitivity and low detection limit.

Description

Technical Field

[0001] This utility model relates to the field of flexible sensing technology, specifically to a highly sensitive flexible tactile sensor, a sensor module, and an embodied intelligent robot. Background Technology

[0002] With the rapid development of flexible electronics technology, flexible sensing technology has been widely applied in various fields such as human-computer interaction. Robots primarily rely on a single interaction mode during human-computer interaction, relying on wearing bulky devices or maintaining physical contact with the interface. Due to limitations in sensitivity and integration of non-flexible sensors, the interaction efficiency and level of intelligence are limited. For example, in high-pressure and humid environments, the sensitivity and performance of some sensors lacking moisture and corrosion resistance decrease, thus limiting their effectiveness in practical applications.

[0003] New types of highly sensitive flexible tactile sensors can sense and identify subtle changes in signals with high sensing accuracy, but developing flexible tactile sensors with high sensitivity, high stability, and moisture and corrosion resistance remains a challenge for the industry. Utility Model Content

[0004] The technical problem solved by this utility model is to provide a highly sensitive flexible tactile sensor, a sensor module, and an embodied intelligent robot integrated with the highly sensitive flexible tactile sensor module.

[0005] The technical solution adopted by this utility model to solve its technical problem is:

[0006] A highly sensitive flexible tactile sensor includes a flexible chamber substrate, a corrosion-resistant protective ring, a flexible cover film, a sensing material layer, and several protruding structures;

[0007] The flexible chamber substrate includes a flexible substrate, on the front side of which an electrode layer and a flexible adhesive layer are sequentially and regularly disposed. The flexible adhesive layer surrounds the interdigitated electrode region of the electrode layer to form a chamber structure, and the electrode leads of the electrode layer lead out of the chamber structure.

[0008] The sensing material layer is disposed on the front side of the flexible cover film, and the plurality of protruding structures are regularly disposed on the back side of the flexible cover film. The sensing material layer on the front side of the flexible cover film is connected to the interdigitated electrode area of ​​the front electrode layer of the flexible substrate, and is bonded to the upper end of the flexible cavity substrate by the flexible adhesive layer, thereby sealing the cavity structure and forming a closed cavity.

[0009] The sensing material layer on the front side of the flexible cover film and the interdigitated electrode area on the front side of the flexible substrate electrode layer are separated and disposed in the closed cavity.

[0010] The anti-corrosion protective ring is disposed on the outer edge of the flexible adhesive layer and completely surrounds and covers the flexible adhesive layer.

[0011] Furthermore, the thickness of the flexible adhesive layer is 10-500μm, the thickness of the sensing material layer is 1-100μm, the height of the protruding structure is 1-2000μm, and the thickness of the anti-corrosion protective ring is 10-2000μm, with a width of 10-5000μm.

[0012] Furthermore, the protruding structure includes tiny dot-like protruding structures in the shape of spheres, hemispheres, teardrops, cones, etc., or slender strip-like protruding structures in the shape of elongated strips, rings, etc.; the plurality of protruding structures are arranged in an array.

[0013] Furthermore, an opening is provided at the center of the pressure-sensitive area of ​​the flexible substrate to form a through hole, and the interdigitated electrode areas of the electrode layer are arranged regularly on the pressure-sensitive area, avoiding the through hole.

[0014] Furthermore, a flexible adhesive layer is prepared at the outer edge of the flexible substrate and at the edge of the central through hole to form an inner and outer flexible adhesive layer. An annular cavity structure is formed between the inner and outer flexible adhesive layers, and the interdigitated electrode regions of the electrode layer are regularly arranged in the annular cavity structure.

[0015] Furthermore, a corrosion-resistant protective ring is provided on the outer edge of both the inner and outer flexible adhesive layers.

[0016] A highly sensitive flexible tactile sensor module includes the aforementioned highly sensitive flexible tactile sensor, a base, and a signal processing module. The highly sensitive flexible tactile sensor is attached and fixed to the front of the base, and the signal processing module is regularly disposed inside the base or on the back of the base. The leads of the highly sensitive flexible tactile sensor are electrically connected to the signal processing module.

[0017] An embodied intelligent robot with tactile perception function includes the aforementioned highly sensitive flexible tactile sensor module, which is regularly arranged on the embodied intelligent robot to realize the tactile perception function of the embodied intelligent robot.

[0018] This novel high-sensitivity flexible tactile sensor benefits from an innovative design featuring a flexible sealed chamber substrate, a flexible cover film, and a raised structure, exhibiting high sensitivity and a low detection limit.

[0019] This utility model's highly sensitive flexible tactile sensor improves the close-range sensing performance between the flexible sensor and interactive objects by establishing a raised structure. The sensor's micro-deformation capability is enhanced through the multi-layer deformation of the raised structure, flexible cover film, and cavity, thereby improving the sensor's sensitivity. Attached Figure Description

[0020] Figure 1 This is an exploded structural diagram of the present invention;

[0021] Figure 2 for Figure 1 Structural diagram after the middle section is assembled;

[0022] Figure 3 for Figure 1 Structure diagram in combined state;

[0023] Figure 4 for Figure 3 Top view;

[0024] Figure 5 for Figure 4 A cross-sectional view along the AA direction;

[0025] Figure 6 for Figure 1 Structural diagram after the transformation of the protruding structure;

[0026] Figure 7 for Figure 1 Mechanism diagram after changing the flexible substrate;

[0027] Figure 8 This is a structural diagram of the sensor module of this utility model;

[0028] The diagram is marked as follows:

[0029] 1. Flexible chamber substrate; 11. Flexible substrate; 12. Electrode layer; 13. Flexible adhesive layer; 101. Through hole; 102. Chamber structure; 121. Interdigitated electrode; 122. Electrode lead; 131. Outer flexible adhesive layer; 132. Inner flexible adhesive layer.

[0030] 2. Corrosion protection ring;

[0031] 3. Flexible cover film;

[0032] 4. Sensing material layer;

[0033] 5. Raised structure;

[0034] 6. Base;

[0035] 7. Signal processing module. Detailed Implementation

[0036] To make the above-mentioned contents, objectives, and beneficial effects of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0037] It should be noted that, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0038] like Figure 1-2 As shown, this utility model provides a highly sensitive flexible tactile sensor, including a flexible chamber substrate 1, a corrosion-resistant protective ring 2, a flexible cover film 3, a sensing material layer 4, and several protruding structures 5. The flexible chamber substrate 1 includes a flexible substrate 11, on which an electrode layer 12 and a flexible adhesive layer 13 are sequentially disposed. The flexible adhesive layer 13 surrounds the interdigitated electrode region (i.e., the pressure-sensitive region of the sensor) of the electrode layer 12 to form a chamber structure 102. The sensing material layer 4 is disposed on the lower surface (front) of the flexible cover film 3, and the protruding structures 5 are disposed on the upper surface (back) of the flexible cover film 3. The flexible cover film 3 is bonded to the flexible substrate 11 by the flexible adhesive layer 13 disposed on the upper surface (front) of the flexible chamber substrate 1, sealing the chamber structure 102 and thus forming a closed chamber inside the flexible adhesive layer 3. The sensing material layer 4 on the front of the flexible cover film 3 and the electrode layer 12 on the front of the flexible chamber substrate 1 are separately disposed in the closed chamber.

[0039] When no pressure is applied to the sensor device, the pressure-sensing material layer 4 on the flexible cover membrane 3 is separated from the patterned electrode layer 12 on the flexible chamber substrate 1 and does not make contact, so the sensor device does not output a signal. When pressure is applied, the two layers begin to make electrical contact, and the pressure-sensitive properties of the nanomaterial convert the external pressure signal into an electrical signal output. The output electrical signal changes with the pressure applied to the sensor surface. Through a specific pressure-electrical signal relationship, the pressure magnitude of the sensor can be measured.

[0040] Furthermore, such as Figure 2As shown, the flexible adhesive layer 13 is bonded to the upper surface of the flexible substrate 11 and surrounds the interdigitated electrode region 121 of the electrode layer 12, thereby forming a cavity structure 102 on the upper surface of the flexible substrate 11. When the flexible cover film 3 is bonded to the flexible substrate 11 through the flexible adhesive layer 13, the cavity structure 102 on the upper surface of the flexible substrate 11 forms a closed cavity.

[0041] Furthermore, the electrode layer 12 is a patterned electrode layer, printed on the front side of the flexible substrate 11. The electrode layer 12 includes interdigitated electrode regions 121 and electrode leads 122. The interdigitated electrode regions 121 are pressure-sensitive regions disposed in a closed cavity, while the electrode leads 122 extend out of the closed cavity.

[0042] Furthermore, such as Figure 1 , Figure 2 and Figure 5 As shown, a corrosion-resistant protective ring 2 is regularly arranged around the outer edge of the flexible adhesive layer 13. The corrosion-resistant protective ring 2 surrounds and completely covers the flexible adhesive layer 13, thereby providing waterproof and corrosion-resistant functions for the sensor.

[0043] The flexible substrate 11 mentioned above is made of flexible materials such as polydimethylsiloxane (PDMS), polyimide (PI), polyethylene terephthalate (PET), polyurethane (PU), and polyethylene (PE).

[0044] The electrode layer 12 mentioned above is made of metal materials such as gold, silver, and copper, or carbon-based nanomaterials or conductive polymer materials.

[0045] The flexible adhesive layer 13 mentioned above is made of corrosion-resistant adhesive material, and its shape is not limited. It can be round, square or other irregular structure, and the thickness of the flexible adhesive layer is 10-500μm.

[0046] The flexible cover film 3 may be made of the same or different material as the flexible substrate 11, and may be made of flexible materials such as polydimethylsiloxane (PDMS), polyimide (PI), polyethylene terephthalate (PET), polyurethane (PU), or polyethylene (PE). The thickness is 5-200 μm.

[0047] The pressure sensing layer 4 is made of one or more of the following materials: metal nanowires, two-dimensional materials, carbon nanomaterials, etc., or composite materials. The thickness of the sensing material layer 4 is 1-100um.

[0048] The material of the aforementioned protrusion structure 5 is not limited, but a material with a certain degree of elasticity is preferred; its shape is also not limited, and it can be a dot-shaped protrusion (shaped as a sphere, hemisphere, teardrop, cone or other small dot-shaped protrusion structure) or a strip-shaped protrusion (shaped as a long strip, ring or other slender strip-shaped protrusion structure). The height of the protrusion structure is 1-2000μm, and the width is set according to actual needs.

[0049] The material of the aforementioned anti-corrosion protective ring 2 is not limited, but it is preferably cured with an adhesive that has anti-corrosion properties. The thickness of the anti-corrosion protective ring 2 is 1-2000μm, and the width is 10-5000μm.

[0050] like Figure 1 and Figure 2 As shown, an opening 101 is provided at the center of the pressure-sensitive area of ​​the flexible substrate 11. Correspondingly, to ensure the sealing of the pressure-sensitive area, a flexible adhesive layer 13 and a corrosion-resistant protective ring 2 are regularly arranged at the edge of the through-hole 101. Therefore, an outer flexible adhesive layer 131 and a corrosion-resistant protective ring are formed at the outer edge of the flexible substrate, and an inner flexible adhesive layer 132 and a corrosion-resistant protective ring are formed at the inner edge.

[0051] like Figure 2 As shown, the sensor forms an annular pressure-sensitive region (annular closed chamber) between the outer flexible adhesive layer 131 and the inner flexible adhesive layer 132. Correspondingly, the interdigitated electrode region 121 of the electrode layer 2 is also regularly arranged as annular interdigitated electrodes in relation to the annular pressure-sensitive region.

[0052] like Figure 7 As shown, the flexible substrate 11 has no opening in the center of the pressure-sensitive area, thus forming a circular pressure-sensitive area on the front side of the flexible substrate. Correspondingly, the flexible adhesive layer 13 is regularly disposed at the outer edge of the pressure-sensitive area, thereby surrounding and sealing the pressure-sensitive area of ​​the sensor, forming a circular closed chamber for the circular pressure-sensitive area.

[0053] like Figure 1 As shown, in one embodiment, the protrusion structure 5 adopts a dot-shaped protrusion, and the shape of the dot-shaped protrusion is not limited. Figure 6 As shown, in another embodiment, the protrusion structure 5 adopts a strip-shaped protrusion, and the shape of the strip-shaped protrusion is not limited, but preferably adopts... Figure 6 The ring-shaped raised structure in the middle.

[0054] The highly sensitive flexible tactile sensor of this application uses a flexible adhesive layer 13 to surround and seal the pressure-sensitive area of ​​the sensor, thereby forming a closed cavity structure between the flexible substrate 11 and the flexible cover film 3. The closed cavity structure can be a single unit that completely surrounds and seals the pressure-sensitive area, or it can consist of multiple independent closed cavities. Thanks to the flexible adhesive layer, a closed cavity is formed between the flexible substrate and the flexible cover film. The interdigitated electrodes of the sensing material layer 4 and the electrode layer are separately disposed within the closed cavity, thus exhibiting high sensitivity and a low detection limit.

[0055] Furthermore, the flexible cover film 3 is a thin film with a low Young's modulus, and the pressure sensing layer 4 is prepared on the surface of the flexible cover film through processes such as printing, coating, and laser direct writing.

[0056] Furthermore, in one embodiment, the pressure-sensing layer 4 is prepared using a high-shear dispersion process (such as ultrasonic treatment, ball milling, etc.). This process utilizes mechanical force to uniformly disperse pressure-sensitive particles in a dispersion medium, forming independent units. Then, an in-situ synthesis method is used to form a pressure-sensitive composite material with relatively uniform dimensions. The pressure-sensing composite material prepared through the high-shear dispersion process not only exhibits high interfacial bonding strength but also significantly improves the stress transmission efficiency between the pressure-sensing material and the flexible cover membrane, thereby enhancing the sensor's electromechanical coupling efficiency and resulting in higher stability and sensing sensitivity.

[0057] Furthermore, before use, the flexible cover membrane 3 is treated with surface enhancement techniques (such as high-temperature enhancement, chemical deposition, particle implantation, etc.) to reduce the Young's modulus of the film and enhance its stability, resulting in better stability and higher sensitivity of the sensor in the low-pressure range. For example, high-temperature enhancement can reduce the Young's modulus of the film. Reducing the Young's modulus and the coefficient of thermal expansion can effectively eliminate membrane stress, thereby improving the sensitivity and stability of the flexible sensor. Ion implantation can change the crystal structure and chemical composition of the film, increasing its chemical inertness, thereby improving its stability and durability.

[0058] This application improves the near-field sensing performance of the sensor by regularly arranged protruding structures 5 on the back of the flexible cover film. Furthermore, the multi-layer deformation of the protruding structures, the flexible cover film, and the cavity enhances the sensor's micro-deformation capability, thereby improving the sensor's sensitivity.

[0059] Furthermore, the shape of the raised structure can be a discrete dot shape (such as at least two teardrop-shaped dots or pyramid-shaped dots) prepared using injection or printing processes based on liquid adhesive, molded under thermosetting or photocuring conditions, and tightly attached to the flexible cover film. Alternatively, it can be a sealing shape (such as a ring strip) prepared using injection or printing processes based on liquid adhesive, molded under thermosetting or photocuring conditions, and tightly attached to the flexible cover film. It can also be a discrete dot shape or other sealing shape prepared using a bonding process based on solid adhesive.

[0060] like Figure 8 As shown, this utility model also provides a high-sensitivity flexible tactile sensor module, including the aforementioned high-sensitivity flexible tactile sensor and a base 6. The base 6 serves as a support base for the high-sensitivity flexible tactile sensor and includes a housing. A signal processing module 7 is regularly arranged inside or on the back of the housing. The electrode leads of the high-sensitivity flexible tactile sensor are electrically connected to the signal processing module 7 for signal acquisition.

[0061] Furthermore, the highly sensitive flexible tactile sensor is fixed to the upper part of the base 6. Supported by the base, the highly sensitive flexible tactile sensor can achieve highly sensitive interactive applications. The sensor collects pressure change signals during interaction and converts them into electrical signals, which are then output to the signal processing module. After filtering and amplification by the internal analog circuitry of the signal processing module, the signals are converted into digital signals. A dedicated algorithm is used to analyze and process the pressure data, and then the data is transmitted wirelessly (via Bluetooth Low Energy, Wi-Fi, 5G, etc.) to interact with mobile terminals (mobile apps, computer desktops, etc.). The computer recognizes the interactive actions based on the collected data. Wireless transmission can utilize Bluetooth, Wi-Fi, serial port, and 5G, synchronizing the measurement results to the mobile terminal for visualization and management.

[0062] This utility model also provides an embodied intelligent robot with tactile perception function, including the above-mentioned highly sensitive flexible tactile sensor module. By regularly setting the above-mentioned highly sensitive flexible tactile sensor module on the embodied intelligent robot, the tactile perception function of the embodied intelligent robot is realized.

[0063] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A highly sensitive flexible tactile sensor, characterized in that: It includes a flexible chamber substrate (1), a corrosion protection ring (2), a flexible cover film (3), a sensing material layer (4), and several protruding structures (5); The flexible chamber substrate (1) includes a flexible substrate (11). An electrode layer (12) and a flexible adhesive layer (13) are sequentially and regularly disposed on the front side of the flexible substrate (11). The flexible adhesive layer (13) surrounds the interdigitated electrode region of the electrode layer (12) to form a chamber structure (102). The electrode leads of the electrode layer (12) are led out of the chamber structure (102). The sensing material layer (4) is disposed on the front side of the flexible cover film (3), and the plurality of protrusion structures are regularly disposed on the back side of the flexible cover film (3). The sensing material layer (4) on the front side of the flexible cover film is connected to the interdigitated electrode area of ​​the front electrode layer of the flexible substrate, and is bonded to the upper end of the flexible cavity substrate (1) through the flexible adhesive layer (13), and the cavity structure (102) is sealed to form a closed cavity. The sensing material layer on the front side of the flexible cover film and the interdigitated electrode area on the front side of the flexible substrate electrode layer are separated and disposed in the closed cavity. The anti-corrosion protective ring (2) is disposed on the outer edge of the flexible adhesive layer (13) and completely surrounds and covers the flexible adhesive layer (13).

2. The highly sensitive flexible tactile sensor according to claim 1, characterized in that: The thickness of the flexible adhesive layer (13) is 10-500μm, the thickness of the sensing material layer (4) is 1-100μm, the height of the protruding structure (5) is 1-2000μm, the thickness of the anti-corrosion protective ring (2) is 10-2000μm, and its width is 10-5000μm.

3. The highly sensitive flexible tactile sensor according to claim 1, characterized in that: The protrusion structure (5) includes tiny dot-like protrusions in the shape of spheres, hemispheres, teardrops, or cones, or long strips or rings; the protrusion structures are arranged in an array.

4. The highly sensitive flexible tactile sensor according to claim 1, characterized in that: The flexible substrate (11) has an opening in the middle of the pressure-sensitive area to form a through hole (101). The interdigitated electrode area of ​​the electrode layer is arranged to avoid the through hole (101) and is regularly arranged on the pressure-sensitive area.

5. The highly sensitive flexible tactile sensor according to claim 4, characterized in that: A flexible adhesive layer (13) is prepared at the outer edge of the flexible substrate (11) and at the edge of the central through hole (101) to form an inner and outer flexible adhesive layer. An annular cavity structure is formed between the inner and outer flexible adhesive layers, and the interdigitated electrode regions of the electrode layer are regularly arranged in the annular cavity structure.

6. The highly sensitive flexible tactile sensor according to claim 5, characterized in that: The outer edges of both the inner and outer flexible adhesive layers are provided with a corrosion-resistant protective ring.

7. A highly sensitive flexible tactile sensor module, characterized in that: Includes a highly sensitive flexible tactile sensor as described in any one of claims 1-6, a base (6), and a signal processing module (7), wherein the highly sensitive flexible tactile sensor is attached and fixed to the front of the base (6), and the signal processing module (7) is regularly arranged inside the base (6) or on the back of the base; the leads of the highly sensitive flexible tactile sensor are electrically connected to the signal processing module.

8. An embodied intelligent robot with tactile sensing function, characterized in that: The system includes the highly sensitive flexible tactile sensor module as described in claim 7, wherein the highly sensitive flexible tactile sensor module is regularly arranged on the embodied intelligent robot to realize the tactile perception function of the embodied intelligent robot.

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