Magnetic control fine adjustment interlocking mechanism

Abstract

The utility model discloses a magnetic control fine adjustment interlocking mechanism, which relates to the technical field of plasma sputtering and is characterized in that a sputtering target is arranged below a mounting plate, a mounting hole is vertically formed in the mounting plate, and a mounting block is arranged in the mounting hole in a penetrating manner; the lifting interlocking assembly is arranged above the mounting plate, the lifting interlocking assembly is used for driving the mounting block to ascend and descend, and the lifting interlocking assembly can lock the mounting block; the magnetic control assembly is rotationally mounted below the mounting block, the magnetic control assembly comprises a magnetic control substrate and a plurality of magnetic parts, and the magnetic parts are detachably connected to the lower portion of the magnetic control substrate; the rotating assembly is connected above the mounting block and is used for driving the magnetic control assembly to rotate; the measuring assembly is connected to the mounting plate and used for measuring the height of the magnetic control substrate. According to the utility model, the distance between the sputtering target and the magnetic control assembly can be accurately controlled.

Description

Technical Field

[0001] This utility model relates to the field of plasma sputtering technology, and in particular to a magnetically controlled fine-tuning interlocking mechanism. Background Technology

[0002] In physical vapor deposition (PVD) coating equipment, the magnetron control module is crucial for controlling coating quality and efficiency during substrate processing. Precise control of the magnetron module leads to higher-quality finished coatings. PVD is a critical process in this field, requiring high-speed rotation of the magnetron module on the back of the target and precise control of the distance between the target backplate and the magnetron according to process requirements. Most existing PVD coating equipment only controls high-speed rotation and horizontal movement, failing to precisely control the distance between the target backplate and the magnetron, resulting in decreased coating quality. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a magnetically controlled fine-tuning interlocking mechanism, which can precisely control the distance between the sputtering target and the magnetically controlled component.

[0004] A magnetically controlled fine-tuning interlock mechanism according to a first aspect of the present invention includes: a sputtering target disposed below a mounting plate; a mounting hole vertically formed on the mounting plate, through which a mounting block passes; a lifting interlock assembly disposed above the mounting plate, the lifting interlock assembly driving the mounting block to rise and fall, and the lifting interlock assembly locking the mounting block; a magnetically controlled assembly rotatably mounted below the mounting block, the magnetically controlled assembly including a magnetically controlled substrate and multiple magnetic components, the magnetic components being detachably connected to the lower part of the magnetically controlled substrate; a rotating assembly connected above the mounting block, the rotating assembly driving the magnetically controlled assembly to rotate; and a measuring assembly connected to the mounting plate, the measuring assembly measuring the height of the magnetically controlled substrate.

[0005] A magnetically controlled fine-tuning interlock mechanism according to an embodiment of the present invention has at least the following beneficial effects: the rotating component drives the magnetically controlled component to rotate, and the rotation of the magnetically controlled component generates a rotating magnetic field, which meets the process requirements of the processing. In different processes, the measuring component can provide real-time feedback on the distance between the magnetically controlled substrate and the sputtering target, which facilitates the control of the lifting interlock component to drive the magnetically controlled substrate to adjust its position and precisely control the distance between the magnetically controlled substrate and the sputtering target. After the magnetically controlled substrate moves to a preset height, the lifting interlock component locks the position of the mounting block, so that the mounting block can still be maintained at the preset height under the action of external force.

[0006] According to some embodiments of the present invention, the lifting interlock assembly includes a lifting drive component, a lead screw, and a lifting plate. The lifting plate is fixedly connected to the mounting block. A guide rod is vertically connected to the mounting plate for guiding the lifting plate. The lead screw is rotatably connected to the mounting plate. The lifting plate is connected to the lead screw via a nut. The lifting drive component drives the lifting plate to rise and fall via the lead screw.

[0007] According to some embodiments of this utility model, the lifting drive component is an electric motor with a worm gear reducer.

[0008] According to some embodiments of the present invention, a first annular boss is provided on the side wall of the mounting hole, a first pressure ring is detachably connected above the mounting plate, and a limiting ring is sandwiched between the first annular boss and the first pressure ring, the limiting ring being used to guide the mounting block.

[0009] According to some embodiments of this utility model, the upper end of the magnetic control component is connected to an adapter block, the upper end of the adapter block is connected to a bearing fixing column, the mounting block is vertically provided with a bearing hole, the bearing fixing column passes through the bearing hole, the upper end of the bearing fixing column is connected to the rotating component for transmission, a radial bearing is sleeved on the outer side of the bearing fixing column, and the outer peripheral wall of the radial bearing abuts against the inner wall of the bearing hole.

[0010] According to some embodiments of the present invention, the adapter block includes a first adapter post and a second adapter post, the first adapter post is connected to the first adapter post, the size of the first adapter post is larger than the size of the second adapter post, the first adapter post is connected to the magnetic control assembly, and the second adapter post is connected to the bearing fixing post.

[0011] According to some embodiments of this utility model, a rotating bracket is connected above the mounting block, the rotating component is mounted on the rotating bracket, the rotating component is connected to the bearing fixing column via a coupling, and an operating hole is provided on the rotating bracket to facilitate the disassembly and assembly of the coupling.

[0012] According to some embodiments of the present invention, a second annular boss is provided in the bearing hole, and the second annular boss is used to support the radial bearing in the vertical direction.

[0013] According to some embodiments of the present invention, a sleeve is provided inside the bearing hole, the upper end of the sleeve abuts against the rotating bracket, and the sleeve is used to fix the radial bearing inside the bearing hole.

[0014] According to some embodiments of the present invention, a bottom shell is provided below the mounting plate, and the sputtering target is mounted on the bottom shell.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0017] Figure 1 This is a schematic diagram of the installation structure of one embodiment of the present utility model;

[0018] Figure 2 This is an exploded schematic diagram of the bottom shell of one embodiment of the present invention;

[0019] Figure 3 This is a schematic diagram of an embodiment of the present utility model;

[0020] Figure 4 This is a schematic diagram of a lifting interlock assembly according to an embodiment of the present invention;

[0021] Figure 5 This is a schematic diagram of a rotating component according to an embodiment of the present invention;

[0022] Figure 6 This is a cross-sectional schematic diagram of one embodiment of the present utility model;

[0023] Figure 7 for Figure 5 Enlarged view of point A in the middle;

[0024] Figure 8 This is a schematic diagram of a magnetic control component according to an embodiment of the present invention;

[0025] Figure 9 This is an exploded view of some parts of one embodiment of the present invention;

[0026] Figure 10 This is a schematic diagram of the mounting plate according to one embodiment of the present invention.

[0027] Icon labels:

[0028] Mounting plate 100, mounting hole 110, first annular boss 111, mounting block 120, bearing hole 121, rotating bracket 122, operating hole 123, second annular boss 124, sleeve 125, guide rod 130, first pressure ring 140, and limiting ring 141;

[0029] Sputtering target 200;

[0030] Lifting interlock assembly 300, lifting drive component 310, lead screw 320, lifting plate 330, nut 331;

[0031] Magnetron assembly 400, magnetron substrate 410, magnetic component 420;

[0032] Rotary assembly 500, coupling 510;

[0033] Measurement component 600;

[0034] Adapter block 700, first adapter post 710, second adapter post 720;

[0035] Bearing retaining post 800, radial bearing 810;

[0036] Bottom shell 900. Detailed Implementation

[0037] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0038] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0039] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0040] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0041] Reference Figures 1 to 10As shown, an embodiment of the present invention provides a magnetically controlled fine-tuning interlock mechanism, comprising: a mounting plate 100, a lifting interlock assembly 300, a magnetic control assembly 400, a rotation assembly 500, and a measuring assembly 600. A sputtering target 200 is fixedly disposed below the mounting plate 100. The sputtering target 200 is a disc-shaped material made of metal or ceramic compound. A mounting hole 110 is vertically formed on the mounting plate 100, and a mounting block 120 passes through the mounting hole 110; the mounting block 120 can move vertically along the mounting hole 110. The lifting interlock assembly 300 is disposed above the mounting plate 100 and is used to drive the mounting block 120 to rise and fall. The lifting interlock assembly 300 can also fix the position of the mounting block 120 in the vertical direction. After driving the mounting block 120 to a preset height, the lifting interlock assembly 300 locks the position of the mounting block 120, ensuring that the mounting block 120 remains at the preset height under external force. The magnetron control assembly 400 is rotatably mounted below the mounting block 120. The magnetron control assembly 400 can rise and fall synchronously with the mounting block 120. The magnetron control assembly 400 includes a magnetron control substrate 410 and multiple magnetic components 420, which are evenly arranged along an Archimedean spiral. It is foreseeable that the number and arrangement of the magnetic components 420 will differ in different processes. Therefore, the magnetic components 420 are bolted to the underside of the magnetron control substrate 410, allowing for easy installation and removal to adapt to different processes. It is also foreseeable that the magnetic components 420 can be snap-fitted to the underside of the magnetron control substrate 410 for easy disassembly. A rotating assembly 500 is connected above the mounting block 120. The rotating assembly 500 drives the magnetron control assembly 400 to rotate; when the magnetron control assembly 400 rotates, it generates a rotating magnetic field to meet the processing requirements. The rotating assembly 500 can rise and fall synchronously with the mounting block 120 so that the rotating assembly 500 can drive the magnetron control assembly 400 to rotate. The measuring component 600 is connected to the mounting plate 100 and is used to measure the height of the magnetron substrate 410. The measuring component 600 may use a laser rangefinder, infrared rangefinder, etc. The installation method and working principle of the measuring component 600 are existing technologies and will not be described in detail. The function of the measuring component 600 is to measure the distance between the magnetron substrate 410 and the mounting plate 100. Since the sputtering target 200 and the mounting plate 100 are fixedly connected and remain relatively stationary, the greater the distance between the mounting plate 100 and the magnetron substrate 410, the smaller the distance between the magnetron substrate 410 and the sputtering target 200. By measuring the distance between the mounting plate 100 and the magnetron substrate 410 using the measuring component 600, the distance between the magnetron substrate 410 and the sputtering target 200 can be obtained. Under different process conditions, it is necessary to precisely control the distance between the magnetron substrate 410 and the sputtering target 200. The measurement component 600 can provide real-time feedback on the distance between the magnetron substrate 410 and the sputtering target 200, which facilitates the control of the lifting interlock component 300 to drive the magnetron substrate 410 to adjust its position.

[0042] Reference Figure 3 and Figure 4 As shown, the lifting interlock assembly 300 includes a lifting drive component 310, a lead screw 320, and a lifting plate 330. The lifting plate 330 is bolted to the mounting block 120. A lifting bracket is bolted to the top of the mounting plate 100. A guide rod 130 is vertically bolted to the mounting plate 100, and the end of the guide rod 130 away from the mounting plate 100 is bolted to the lifting bracket. Two linear bearings are bolted to the lifting plate 330, and the guide rod 130 passes through the corresponding linear bearings to guide the lifting plate 330. The guide rod 130 is arranged in a mirror image with the axis of the lead screw 320 as the center of symmetry, forming a stable double-rail guide structure to ensure that the lifting plate 330 can maintain the stability of vertical movement when subjected to radial loads. The lead screw 320 is rotatably connected to the mounting plate 100. The lifting plate 330 is bolted to a nut 331, which connects the lifting plate 330 to the lead screw 320. The lead screw 320 passes through the nut 331 and engages with its threads. The lifting drive component 310 drives the lifting plate 330 to rise and fall via the lead screw 320. The lifting drive component 310 is bolted to the top of the lifting bracket. When the lead screw 320 undergoes angular displacement under the action of the lifting drive component 310, the nut 331 converts the rotational motion into precise linear displacement of the lifting plate 330. A modular assembly process is adopted, and all components are detachably connected using standard fasteners.

[0043] Reference Figures 1 to 4 As shown, the lifting drive component 310 is an electric motor with a worm gear reducer. A standard 42-stepper motor is used, and this configuration is optimized for the inherent characteristics of the lead screw 320 and nut 331 pair. In traditional helical transmission mechanisms, when subjected to axial loads, the lifting plate 330 is prone to reverse transmission under gravity, causing uncontrolled rotation of the lead screw 320. This ultimately leads to a micrometer-level offset in the distance between the magnetron substrate 410 and the sputtering target 200, directly affecting the uniformity of the vacuum coating process. By introducing the reverse self-locking characteristic of the worm gear reducer, and setting the worm helix angle to a critical self-locking angle, when an external force attempts to drive the worm wheel to rotate in the opposite direction, the frictional resistance torque generated between the worm wheel and worm will counteract the motion tendency. The worm gear design fundamentally blocks the reverse transmission path of the gravity load of the lifting plate 330 to the lead screw 320 transmission chain, ensuring that the magnetron substrate 410 always maintains a preset height position during the process, meeting the stringent requirements of high-precision coating equipment for the magnetic field.

[0044] Reference Figure 6 and Figure 7As shown, the mounting hole 110 has a first annular boss 111 on its sidewall. The first annular boss 111 is integrally cast with the mounting plate 100, which is made of stainless steel or aluminum alloy. The mounting block 120 is annular, and a first pressure ring 140 is bolted to the top of the mounting plate 100. A limiting ring 141 is sandwiched between the first annular boss 111 and the first pressure ring 140. The limiting ring 141 is made of plastic or rubber and serves both as an axial guide for the mounting block 120 and as a vibration absorber. It is foreseeable that when polytetrafluoroethylene (PTFE) is used as the material for the limiting ring 141, its unique low coefficient of friction can significantly reduce the axial movement resistance of the mounting block 120 while maintaining excellent wear resistance. Through the combined application of metallic and non-metallic materials, the self-lubricating properties of the moving parts are achieved while ensuring structural rigidity. The bolt preload of the first pressure ring 140 is matched with the elastic deformation of the limit ring 141. By adjusting the bolt preload of the first pressure ring 140, the gap between the limit ring 141 and the mounting block 120 is adjusted, which allows the mounting block 120 to move smoothly within the set stroke and effectively suppresses radial movement.

[0045] Reference Figures 6 to 10 As shown, it can be understood that the upper end of the magnetic control assembly 400 is bolted to an adapter block 700. The function of the adapter block 700 is to pre-connect the magnetic control assembly 400, improving the assembly speed. A bearing fixing post 800 is connected to the upper end of the adapter block 700. The mounting block 120 has a vertically opened bearing hole 121, through which the bearing fixing post 800 passes. The upper end of the bearing fixing post 800 is connected to the rotating assembly 500 for transmission. A radial bearing 810 is sleeved on the outer side of the bearing fixing post 800. The radial bearing 810 is a deep groove ball bearing, which can bear both radial and axial loads. The outer peripheral wall of the radial bearing 810 abuts against the inner wall of the bearing hole 121. The function of the radial bearing 810 is to radially position the bearing fixing post 800 and reduce the frictional force when the magnetic control assembly 400 rotates.

[0046] Reference Figures 6 to 10As shown, the adapter block 700 includes a first adapter post 710 and a second adapter post 720, with the first adapter post 710 located below the second adapter post 720. Both the first and second adapter posts 710 are cylindrical, with the first adapter post 710 integrally formed with the second adapter post 720. The cross-sectional area of ​​the first adapter post 710 is larger than that of the second adapter post 720. The lower end of the first adapter post 710 is bolted to the magnetic control assembly 400, and the upper end of the second adapter post 720 is bolted to the bearing fixing post 800. The larger size of the first adapter post 710 increases the contact area with the magnetic control assembly 400, improving the connection stability between the first adapter post 710 and the magnetic control assembly 400. The smaller size of the second adapter post 720 allows it to extend into the bearing hole 121 and connect to the bearing fixing post 800.

[0047] Reference Figures 1 to 5 As shown, a rotating bracket 122 is connected above the mounting block 120, and the rotating assembly 500 uses a brushless motor. The rotating assembly 500 is bolted to the rotating bracket 122, which facilitates the installation of the rotating assembly 500. The rotating assembly 500 is connected to the bearing fixing column 800 via a coupling 510. The rotating bracket 122 has multiple operating holes 123, which facilitate the installation and removal of the coupling 510. The coupling 510 secures the output shaft of the rotating assembly 500 and the bearing fixing column 800 via fastening screws on its side; therefore, these screws need to be tightened or loosened from the side.

[0048] Refer to 6 to Figure 10 As shown, a second annular boss 124 is provided inside the bearing hole 121, and the second annular boss 124 is integrally formed with the mounting block 120. The second annular boss 124 is used to support the radial bearing 810 in the vertical direction. The second annular boss 124 abuts against the lower end of the outer ring of the radial bearing 810. A third annular boss is integrally formed on the upper end of the bearing fixing post 800, the lower end of the third annular boss abuts against the upper end of the inner ring of the radial bearing 810, and the lower end of the inner ring of the radial bearing 810 abuts against the upper end of the second adapter post 720. The second adapter post 720 and the third annular boss work together to fix the inner ring of the radial bearing 810. By adopting this installation method, geometric constraints are used to replace the traditional snap ring structure, ensuring axial positioning accuracy while achieving quick assembly and disassembly.

[0049] Reference Figures 6 to 10As shown, a sleeve 125 is provided inside the bearing hole 121. The upper end of the sleeve 125 abuts against the rotating bracket 122, and the lower end of the sleeve 125 abuts against the upper end of the outer ring of the radial bearing 810. The sleeve 125 is used to fix the radial bearing 810 inside the bearing hole 121. The sleeve 125 and the second annular boss 124 work together to fix the outer ring of the radial bearing 810.

[0050] Reference Figure 1 and Figure 2 As shown, it can be understood that a base shell 900 is provided below the mounting plate 100, and the sputtering target 200 is mounted on the base shell 900. The function of the base shell 900 is to provide a mounting position for the sputtering target 200 and to fix the position of the sputtering target 200.

[0051] Working principle: When the lead screw 320 generates angular displacement under the action of the lifting drive component 310, the nut 331 converts the rotational motion into precise linear displacement of the lifting plate 330. This drives the magnetron substrate 410 to rise and fall. The measuring component 600 can provide real-time feedback on the distance between the magnetron substrate 410 and the sputtering target 200, facilitating the control of the lifting drive component 310 to adjust the magnetron substrate 410 to the preset position. The worm gear design fundamentally blocks the reverse transmission path of the gravity load of the lifting plate 330 to the lead screw 320 transmission chain, ensuring that the magnetron substrate 410 always maintains the preset height position during the process, meeting the stringent requirements of high-precision coating equipment for magnetic fields. Then, the rotating component 500 drives the magnetron substrate 410 to rotate, and the multiple magnetic components 420 below the magnetron substrate 410 form a rotating magnetic field.

[0052] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A magnetically controlled fine-tuning interlock mechanism, characterized in that, include: Mounting plate (100), below which sputtering target (200) is provided, mounting plate (100) has vertically opened mounting hole (110), mounting block (120) is inserted through mounting hole (110); A lifting interlock assembly (300) is disposed above the mounting plate (100). The lifting interlock assembly (300) is used to drive the mounting block (120) to rise and fall, and the lifting interlock assembly (300) can lock the mounting block (120). A magnetarium assembly (400) is rotatably mounted below the mounting block (120). The magnetarium assembly (400) includes a magnetarium substrate (410) and a plurality of magnetic components (420). The magnetic components (420) are detachably connected to the underside of the magnetarium substrate (410). A rotating assembly (500) is connected above the mounting block (120), and the rotating assembly (500) is used to drive the magnetic control assembly (400) to rotate; A measuring component (600) is connected to the mounting plate (100) and is used to measure the height of the magnetron substrate (410).

2. The magnetically controlled fine-tuning interlock mechanism according to claim 1, characterized in that: The lifting interlock assembly (300) includes a lifting drive (310), a lead screw (320), and a lifting plate (330). The lifting plate (330) is fixedly connected to the mounting block (120). A guide rod (130) is vertically connected to the mounting plate (100). The guide rod (130) is used to guide the lifting plate (330). The lead screw (320) is rotatably connected to the mounting plate (100). The lifting plate (330) is connected to the lead screw (320) through a nut (331). The lifting drive (310) drives the lifting plate (330) to rise and fall through the lead screw (320).

3. The magnetically controlled fine-tuning interlock mechanism according to claim 2, characterized in that: The lifting drive component (310) is an electric motor with a worm gear reducer.

4. The magnetically controlled fine-tuning interlock mechanism according to claim 3, characterized in that: The mounting hole (110) has a first annular boss (111) on its side wall. A first pressure ring (140) is detachably connected above the mounting plate (100). A limiting ring (141) is sandwiched between the first annular boss (111) and the first pressure ring (140). The limiting ring (141) is used to guide the mounting block (120).

5. The magnetically controlled fine-tuning interlock mechanism according to claim 4, characterized in that: The upper end of the magnetic control component (400) is connected to an adapter block (700), and the upper end of the adapter block (700) is connected to a bearing fixing column (800). The mounting block (120) has a bearing hole (121) vertically. The bearing fixing column (800) passes through the bearing hole (121). The upper end of the bearing fixing column (800) is connected to the rotating component (500) for transmission. A radial bearing (810) is sleeved on the outside of the bearing fixing column (800). The outer peripheral wall of the radial bearing (810) abuts against the inner wall of the bearing hole (121).

6. The magnetically controlled fine-tuning interlock mechanism according to claim 5, characterized in that: The adapter block (700) includes a first adapter post (710) and a second adapter post (720). The first adapter post (710) is connected to the second adapter post (720). The size of the first adapter post (710) is larger than that of the second adapter post (720). The first adapter post (710) is connected to the magnetic control assembly (400), and the second adapter post (720) is connected to the bearing fixing post (800).

7. The magnetically controlled fine-tuning interlock mechanism according to claim 6, characterized in that: A rotating bracket (122) is connected above the mounting block (120). The rotating component (500) is mounted on the rotating bracket (122). The rotating component (500) is connected to the bearing fixing column (800) via a coupling (510). An operating hole (123) is provided on the rotating bracket (122). The operating hole (123) facilitates the disassembly and assembly of the coupling (510).

8. The magnetically controlled fine-tuning interlock mechanism according to claim 7, characterized in that: A second annular boss (124) is provided in the bearing hole (121), and the second annular boss (124) is used to support the radial bearing (810) in the vertical direction.

9. The magnetically controlled fine-tuning interlock mechanism according to claim 8, characterized in that: A sleeve (125) is provided inside the bearing hole (121). The upper end of the sleeve (125) abuts against the rotating bracket (122). The sleeve (125) is used to fix the radial bearing (810) inside the bearing hole (121).

10. The magnetically controlled fine-tuning interlock mechanism according to claim 9, characterized in that: A bottom shell (900) is provided below the mounting plate (100), and the sputtering target (200) is mounted on the bottom shell (900).

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