Defect detection device for metal film surface of film

Abstract

The utility model relates to the technical field of film detection, in particular to a defect detection device for a metal film surface of a film, which comprises a main body, and an adjusting component is arranged in the main body; according to the utility model, the sliding plate is controlled to slide in the sliding groove plate through the telescoping of the first telescopic rod, so that the left and right positions of the projection light source and the high-resolution acquisition camera can be adjusted, and the front and back positions of the projection light source and the high-resolution acquisition camera can be adjusted through the telescoping of the second telescopic rod. Multi-directional adjustment can be suitable for detection of various types of film metal film surfaces, so that the device can adapt to film products with different sizes and shapes, a high-resolution acquisition camera and an advanced image processing algorithm are utilized, tiny defects on the film metal film surfaces can be accurately identified, the detection precision is improved, and the detection efficiency is improved. Due to the automatic detection process and the high-frame-rate image acquisition capability, the detection time is greatly shortened, and the detection efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of thin film inspection technology, specifically to a defect detection device for the metal film surface of a thin film. Background Technology

[0002] Thin film materials have wide applications in electronics, optics, materials science and other fields, and the quality of the metal film surface directly affects the performance and reliability of thin film products.

[0003] Metal films are thin-film materials composed of metal atoms or ions, with a certain thickness, typically ranging from a few nanometers to tens of micrometers. Metal films possess high electrical conductivity, thermal conductivity, and reflectivity, thus finding wide applications in many fields, such as electronic devices, solar cells, and sensors. The structural composition of a metal film refers to its crystal structure and the arrangement of metal atoms or ions. Significant changes in the electronic structure and thermal conductivity of a metal film can occur. For example, the electronic band structure of a metal film may exhibit band separation and quantum confinement phenomena, resulting in unique characteristics in its electronic transport properties. Furthermore, the thermal conductivity of a metal film decreases significantly with decreasing film thickness.

[0004] Traditional methods for detecting defects on thin-film metal surfaces mainly rely on manual visual inspection or simple optical microscope observation. These methods suffer from low detection efficiency and a high risk of missed detections. Therefore, a defect detection device for thin-film metal surfaces is needed to address these issues. Utility Model Content

[0005] To address the shortcomings of traditional methods for detecting defects on thin-film metal surfaces, which rely primarily on manual visual inspection or simple optical microscopy, resulting in low detection efficiency and a high risk of missed defects, this invention aims to provide a device for detecting defects on the metal surfaces of thin films, thereby resolving the problems mentioned in the background section.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A defect detection device for the metal film surface of a thin film includes a main body, and an adjustment component is disposed inside the main body;

[0008] The main body includes a detection box, a mounting plate is fixedly connected to the side of the detection box, and a control box is fixedly connected to the side of the mounting plate.

[0009] The adjustment assembly includes a mounting base, a first telescopic rod mounted on the side of the mounting base, a connecting block fixedly connected to the output end of the first telescopic rod, a support base fixedly connected to the bottom of the connecting block, a second telescopic rod mounted on the side of the support base, and a projection light source and a high-resolution acquisition camera mounted on the output end of the second telescopic rod.

[0010] As a preferred embodiment of this utility model, a support plate is fixedly connected to the bottom of the testing box, a sliding plate is fixedly connected to the bottom of the support plate, a sliding plate is slidably connected inside the sliding plate, and the connecting block is fixedly connected to the sliding plate.

[0011] As a preferred embodiment of this utility model, two support plates and two sliding plates are provided.

[0012] As a preferred embodiment of this utility model, a display screen is fixedly connected inside the control box, and the control box is equipped with a controller, an alarm module, an image processing unit, and a data storage and transmission module.

[0013] As a preferred embodiment of this utility model, the controller, alarm module, image processing unit, and data storage and transmission module are electrically connected.

[0014] As a preferred embodiment of this utility model, an alarm is installed on the top of the control box, and a detection platform is fixedly connected inside the detection box.

[0015] As a preferred embodiment of this utility model, a base plate is fixedly connected to the bottom of the testing platform, a hydraulic rod is installed at the bottom of the base plate, and a foot is installed at the bottom of the hydraulic rod.

[0016] As a preferred embodiment of this utility model, four base plates, hydraulic rods, and feet are provided.

[0017] Compared with the prior art, the beneficial effects of this utility model are:

[0018] 1. In this utility model, by using the extension and retraction of the first telescopic rod to control the sliding plate to slide inside the slide groove, the left and right positions of the projection light source and the high-resolution acquisition camera can be adjusted. The extension and retraction of the second telescopic rod can adjust the front and rear positions of the projection light source and the high-resolution acquisition camera. The multi-directional adjustment can be applied to the detection of various types of thin film metal film surfaces, thereby adapting to thin film products of different sizes and shapes.

[0019] 2. In this utility model, by utilizing a high-resolution acquisition camera and advanced image processing algorithms, it is possible to accurately identify minute defects on the surface of thin-film metal films, thereby improving detection accuracy. The automated detection process and high frame rate image acquisition capability greatly shorten the detection time and improve detection efficiency. The defect identification method based on image analysis reduces the subjectivity of manual inspection and improves the reliability and consistency of the detection results. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the adjustment component structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the support component structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the control component structure of this utility model.

[0024] In the diagram: 1. Main body; 101. Detection box; 102. Base plate; 103. Hydraulic rod; 104. Foot; 105. Mounting plate; 106. Control box; 107. Display screen; 108. Alarm; 109. Detection platform; 2. Adjustment assembly; 201. Mounting base; 202. First telescopic rod; 203. Connecting block; 204. Support base; 205. Second telescopic rod; 206. Projection light source; 207. High-resolution acquisition camera; 208. Support plate; 209. Slide plate; 210. Slide plate. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0026] For examples, please refer to Figures 1-4 This utility model provides a technical solution:

[0027] A defect detection device for the metal film surface of a thin film includes a main body 1, and an adjustment component 2 is disposed inside the main body 1.

[0028] In this embodiment, as Figure 1 , Figure 2 and Figure 4As shown, the main body 1 includes a detection box 101, a mounting plate 105 fixedly connected to the side of the detection box 101, a control box 106 fixedly connected to the side of the mounting plate 105, and an adjustment component 2 including a mounting base 201. A first telescopic rod 202 is mounted on the side of the mounting base 201, a connecting block 203 is fixedly connected to the output end of the first telescopic rod 202, a support base 204 is fixedly connected to the bottom of the connecting block 203, a second telescopic rod 205 is mounted on the side of the support base 204, and a projection light source 206 and a high-resolution acquisition camera 207 are mounted on the output end of the second telescopic rod 205. The extension and retraction of the first telescopic rod 202 controls the sliding plate 210 to slide inside the slide plate 209, thereby adjusting the left and right positions of the projection light source 206 and the high-resolution acquisition camera 207. The extension and retraction of the second telescopic rod 205 can adjust the front and rear positions of the projection light source 206 and the high-resolution acquisition camera 207. The multi-directional adjustment is applicable to the detection of various types of thin film metal film surfaces, thus adapting to thin film products of different sizes and shapes.

[0029] The bottom of the inspection box 101 is fixedly connected to a support plate 208, and the bottom of the support plate 208 is fixedly connected to a sliding plate 209. A sliding plate 210 is slidably connected inside the sliding plate 209. A connecting block 203 is fixedly connected to the sliding plate 210. There are two support plates 208 and sliding plates 209. The inside of the control box 106 is fixedly connected to a display screen 107. The control box 106 contains a controller, an alarm module, an image processing unit, and a data storage and transmission module. The controller, alarm module, image processing unit, and data storage and transmission module are electrically connected. Utilizing a high-resolution acquisition camera 207 and advanced image processing algorithms, it can accurately identify minute defects on the thin-film metal film surface, improving detection accuracy. The automated detection process and high frame rate image acquisition capability greatly shorten the detection time and improve detection efficiency. The defect identification method based on image analysis reduces the subjectivity of manual inspection and improves the reliability and consistency of the detection results.

[0030] In this embodiment, as Figure 1 and Figure 3 As shown, an alarm 108 is installed on the top of the control box 106. A test platform 109 is fixedly connected inside the test box 101. A base plate 102 is fixedly connected to the bottom of the test platform 109. A hydraulic rod 103 is installed at the bottom of the base plate 102. A foot 104 is installed at the bottom of the hydraulic rod 103. There are four base plates 102, hydraulic rods 103, and foot 104. The hydraulic rod 103 can provide a large height adjustment range, which can meet the height requirements of different test scenarios. It can easily adapt to both low test spaces and high operating platforms. At the same time, it can also achieve precise fine-tuning of the height, ensuring that the test equipment can be accurately adjusted to the optimal test position.

[0031] The working process of this utility model is as follows: When the defect detection device for the metal film surface of a thin film designed in this scheme is in operation, the thin film to be detected is placed on the detection platform 109 of the detection device. The sliding plate 210 is controlled to slide within the sliding groove plate 209 by the extension and retraction of the first telescopic rod 202, thereby adjusting the left and right positions of the projection light source 206 and the high-resolution acquisition camera 207. The extension and retraction of the second telescopic rod 205 adjusts the front and rear positions of the projection light source 206 and the high-resolution acquisition camera 207. These positional changes allow the projection light source 206 to illuminate the metal film surface at different angles, while the high-resolution acquisition camera 207 acquires image information of the metal film surface, extracting its texture and edge features. Through image analysis algorithms, defects such as scratches, holes, and cracks on the metal film surface are identified, and the detection results are stored in the data storage and transmission module. The control unit automatically controls the entire detection process according to preset detection programs and parameters, achieving rapid and accurate defect detection.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A defect detection device for the metal film surface of a thin film, comprising a main body (1), characterized in that: An adjustment component (2) is provided inside the main body (1); The main body (1) includes a detection box (101), a mounting plate (105) is fixedly connected to the side of the detection box (101), and a control box (106) is fixedly connected to the side of the mounting plate (105). The adjustment component (2) includes a mounting base (201), a first telescopic rod (202) is mounted on the side of the mounting base (201), a connecting block (203) is fixedly connected to the output end of the first telescopic rod (202), a support base (204) is fixedly connected to the bottom of the connecting block (203), a second telescopic rod (205) is mounted on the side of the support base (204), and a projection light source (206) and a high-resolution acquisition camera (207) are mounted on the output end of the second telescopic rod (205).

2. The defect detection device for the metal film surface of a thin film according to claim 1, characterized in that, The bottom of the testing box (101) is fixedly connected to a support plate (208), the bottom of the support plate (208) is fixedly connected to a sliding plate (209), a sliding plate (210) is slidably connected inside the sliding plate (209), and the connecting block (203) is fixedly connected to the sliding plate (210).

3. The defect detection device for the metal film surface of a thin film according to claim 2, characterized in that, There are two of the support plate (208) and the slide plate (209).

4. The defect detection device for the metal film surface of a thin film according to claim 1, characterized in that, The control box (106) is fixedly connected to a display screen (107), and the control box (106) is equipped with a controller, an alarm module, an image processing unit, and a data storage and transmission module.

5. The defect detection device for the metal film surface of a thin film according to claim 4, characterized in that, The controller, alarm module, image processing unit, and data storage and transmission module are electrically connected.

6. The defect detection device for the metal film surface of a thin film according to claim 1, characterized in that, An alarm (108) is installed on the top of the control box (106), and a detection platform (109) is fixedly connected inside the detection box (101).

7. The defect detection device for the metal film surface of a thin film according to claim 6, characterized in that, The bottom of the testing platform (109) is fixedly connected to a base plate (102), a hydraulic rod (103) is installed at the bottom of the base plate (102), and a foot (104) is installed at the bottom of the hydraulic rod (103).

8. The defect detection device for the metal film surface of a thin film according to claim 7, characterized in that, The base plate (102), hydraulic rod (103), and foot (104) are provided in four parts.

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