Six-degree-of-freedom piezoelectric nanometer displacement platform

Abstract

The utility model relates to the technical field of precision positioning tables, and discloses a six-degree-of-freedom piezoelectric nanometer displacement table which comprises a table body, a movable table, a piezoelectric screw assembly and a displacement adjusting assembly. The piezoelectric screw assembly comprises a first piezoelectric screw, a second piezoelectric screw, a third piezoelectric screw, a fourth piezoelectric screw, a fifth piezoelectric screw and a sixth piezoelectric screw. And the first piezoelectric screw pushes the moving table to linearly move along the Y axis. And the second piezoelectric screw and the third piezoelectric screw push the moving table to linearly move along the X axis or deflect along the Z axis. And the fourth piezoelectric screw, the fifth piezoelectric screw and the sixth piezoelectric screw push the moving table to linearly move along the Z axis or deflect along the X axis and the Y axis. The six piezoelectric screws are arranged to enable the moving table to achieve six-degree-of-freedom ultra-precision movement, and therefore the omni-directional six-degree-of-freedom positioning and posture adjusting functions in the space are achieved. Multi-degree-of-freedom cooperative control is carried out through six axes, and high-precision and high-resolution nanoscale positioning is achieved.

Description

Technical Field

[0001] This utility model belongs to the field of precision positioning stage technology, specifically, it relates to a six-degree-of-freedom piezoelectric nanodisplacement stage. Background Technology

[0002] Driven by the rapid development and huge demand in fields such as micro-nano manipulation and detection, microscopic life sciences, and ultra-precision machining, ultra-precision instruments and equipment have received increasingly widespread attention and research. As the core component of these instruments and equipment, ultra-precision actuators are undoubtedly a key focus of research. In the field of ultra-precision instruments and equipment, the stringent application requirements of ultra-high precision, large stroke, compact structural dimensions, and certain load capacity render traditional electromagnetic drive principles unsuitable. In contrast, the piezoelectric drive technology, which has emerged in recent years, has shown significant advantages. Its main advantages include high resolution, fast response speed, good electromagnetic compatibility, and compact and flexible structural design. Therefore, piezoelectric drive technology has become an important type of drive component in ultra-precision instruments and equipment. Generally speaking, the piezoelectric drive principle utilizes the inverse piezoelectric effect of piezoelectric materials to convert input electrical energy into output mechanical energy. By adjusting the magnitude of the input electrical quantity, the output mechanical quantity can be precisely adjusted, thus achieving high positioning accuracy. However, because multi-degree-of-freedom precision positioning stages are often complex in structure and large in size, they are not convenient for integration with other positioning systems. Furthermore, they suffer from large motion coupling, low repeatability, and insufficient resolution and response speed.

[0003] Based on the above, the current problem to be solved is to provide a six-degree-of-freedom piezoelectric nanostage with high repeatability, high resolution, fast response speed and small size. Utility Model Content

[0004] The purpose of this invention is to provide a six-degree-of-freedom piezoelectric nano-displacement stage, which aims to solve the problems of existing nano-positioning stages that cannot simultaneously achieve high-precision, high-resolution positioning of linear motion along the X, Y, and Z axes and deflection along θX, θY, and θZ axes, as well as slow response speed, complex structure, and large size.

[0005] This invention is achieved as follows: a six-degree-of-freedom piezoelectric nanodisplacement stage, comprising:

[0006] Platform;

[0007] A mobile platform is positioned above the platform body;

[0008] A piezoelectric screw assembly, comprising a first piezoelectric screw, a second piezoelectric screw, a third piezoelectric screw, a fourth piezoelectric screw, a fifth piezoelectric screw, and a sixth piezoelectric screw;

[0009] The first piezoelectric screw abuts against the first side of the movable stage, and is used to push the movable stage to move linearly along the Y-axis;

[0010] The second piezoelectric screw and the third piezoelectric screw abut against the second side of the moving stage, and are used to push the moving stage to move linearly along the X-axis or deflect along the Z-axis;

[0011] The moving platform is equipped with three sets of displacement adjustment components. The fourth, fifth, and sixth piezoelectric screws abut against the ends of the displacement adjustment components respectively. The movable end of the displacement adjustment component passes through the upper surface of the platform and abuts against the bottom surface of the moving platform, and is used to push the moving platform to move linearly along the Z-axis, deflect along the X-axis, or deflect along the Y-axis.

[0012] The X-axis, Y-axis, and Z-axis are spatial rectangular coordinate axes. The first side is parallel to the plane containing the X-axis and Z-axis; the second side is parallel to the plane containing the Y-axis and Z-axis; and the bottom surface of the moving platform is parallel to the plane containing the X-axis and Y-axis.

[0013] Furthermore, the platform is provided with an L-shaped fixing seat, and the first piezoelectric screw, the second piezoelectric screw, the third piezoelectric screw, the fourth piezoelectric screw, the fifth piezoelectric screw and the sixth piezoelectric screw are fixed on the fixing seat.

[0014] Furthermore, the fixed base is provided with several sets of elastic components between itself and the first side and the second side respectively. The elastic components are used to apply preload in the X-axis and Y-axis directions between the fixed base and the moving platform.

[0015] Furthermore, an elastic component is provided between the platform and the moving platform, the elastic component being used to apply a preload force between the platform and the moving platform along the Z-axis direction.

[0016] Furthermore, the elastic component includes a tension spring and a pull rod connected to both ends of the tension spring.

[0017] Furthermore, the displacement adjustment assembly includes an adjustment rod, a ball bearing, a washer, and a compression spring. The adjustment rod has at least one groove with a ramp, and the ball bearing is disposed in the groove and can roll along the ramp. The platform has a through hole corresponding to the ball bearing, and part of the ball bearing passes through the through hole and abuts against the bottom surface of the moving platform through the washer. The two ends of the compression spring abut against the adjustment rod and the platform, respectively.

[0018] Furthermore, each of the three sets of displacement adjustment components includes one ball bearing, and the line connecting the three balls bearings forms a triangle.

[0019] The beneficial effects of the six-degree-of-freedom piezoelectric nanometer displacement stage provided by this invention are as follows:

[0020] This invention employs six piezoelectric screws (first, second, third, fourth, fifth, and sixth piezoelectric screws) to enable the moving stage to achieve six-degree-of-freedom ultra-precision motion: linear motion along the X, Y, and Z axes, and deflection along θx, θy, and θz, thus achieving omnidirectional six-degree-of-freedom positioning and attitude adjustment in space. Through coordinated control of multiple degrees of freedom across six axes, this invention achieves high-precision, high-resolution nanometer-level positioning. The invention utilizes a high-performance piezoelectric screw drive and serial structure design, significantly simplifying the structure and reducing size. It also offers advantages such as low motion coupling, fast response speed, and real-time adjustability, meeting the requirements of precision machining and optical alignment.

[0021] The arrangement of the stage, moving stage and piezoelectric screw assembly of this utility model is reasonable and compact, saving space while maintaining high precision and stability, making it suitable for optical equipment that requires a compact layout.

[0022] The elastic components apply preload to the entire structure along the X, Y, and Z axes, ensuring the effectiveness of the overall structural design and resulting in faster response and more stable operation. The displacement adjustment component features a simple, rational, and compact structural design, further promoting the miniaturization of the entire structure. Attached Figure Description

[0023] Figure 1 A three-dimensional structural schematic diagram of the six-degree-of-freedom piezoelectric nano-displacement stage provided by this utility model;

[0024] Figure 2 Partial exploded view of the six-degree-of-freedom piezoelectric nanodisplacement stage provided by this utility model;

[0025] Figure 3 A three-dimensional structural diagram of the combination of the platform, piezoelectric screw assembly, displacement adjustment assembly and elastic assembly provided by this utility model;

[0026] Figure 4 A three-dimensional structural diagram of the piezoelectric screw assembly and displacement adjustment assembly provided by this utility model;

[0027] In the figure: 1-platform; 11-fixed base; 2-moving platform; 21-first side; 22-second side; 31-first piezoelectric screw; 32-second piezoelectric screw; 33-third piezoelectric screw; 34-fourth piezoelectric screw; 35-fifth piezoelectric screw; 36-sixth piezoelectric screw; 4-displacement adjustment assembly; 41-adjusting rod; 42-ball bearing; 43-washer; 44-compression spring; 5-elastic assembly; 51-tension spring; 52-pull rod. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0029] The implementation of this utility model will be described in detail below with reference to specific embodiments.

[0030] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this utility model. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0031] Reference Figure 1-4 The image shown is a preferred embodiment of the present invention.

[0032] The six-degree-of-freedom piezoelectric nanostage includes a stage body 1, a moving stage 2, and a piezoelectric screw assembly, as shown in the figure. Figure 1 The moving stage 2 is positioned above the platform 1. The piezoelectric screw assembly drives the moving stage 2 to perform six-degree-of-freedom high-precision motion. The piezoelectric screw assembly includes a first piezoelectric screw 31, a second piezoelectric screw 32, a third piezoelectric screw 33, a fourth piezoelectric screw 34, a fifth piezoelectric screw 35, and a sixth piezoelectric screw 36. Each of the first piezoelectric screw 31, second piezoelectric screw 32, third piezoelectric screw 33, fourth piezoelectric screw 34, fifth piezoelectric screw 35, and sixth piezoelectric screw 36 includes a piezoelectric drive unit and a screw rod. The screw rod moves linearly under the drive of the piezoelectric drive unit. The piezoelectric drive unit includes piezoelectric ceramic. When a voltage is applied, the piezoelectric ceramic generates a micro-displacement, which drives the piezoelectric screw assembly to produce linear motion.

[0033] The X, Y, and Z axes are spatial rectangular coordinate axes. The first side surface 21 is set parallel to the plane containing the X and Z axes. The second side surface 22 is set parallel to the plane containing the Y and Z axes. The bottom surface of the moving stage 2 is set parallel to the plane containing the X and Y axes.

[0034] The moving end of the first piezoelectric screw 31 abuts against the first side surface 21 of the movable stage 2, as shown in the reference. Figure 1-2 The first piezoelectric screw 31 pushes the moving stage 2 to move linearly along the Y-axis.

[0035] The moving ends of the second piezoelectric screw 32 and the third piezoelectric screw 33 abut against the second side surface 22 of the moving stage 2. The second piezoelectric screw 32 and the third piezoelectric screw 33 move synchronously, which can push the moving stage 2 to move linearly along the X-axis. The second piezoelectric screw 32 moves while the third piezoelectric screw 33 is stationary, or the second piezoelectric screw 32 is stationary while the third piezoelectric screw 33 moves, which can push the moving stage 2 to deflect along the Z-axis.

[0036] The moving stage 2 is equipped with three sets of displacement adjustment components 4. The moving ends of the fourth piezoelectric screw 34, the fifth piezoelectric screw 35, and the sixth piezoelectric screw 36 respectively abut against the ends of the three sets of displacement adjustment components 4. The moving ends of the displacement adjustment components 4 penetrate the upper surface of the stage body 1 and abut against the bottom surface of the moving stage 2. The displacement adjustment components 4 generate displacement in the direction perpendicular to the direction of movement of the piezoelectric screw sets.

[0037] The synchronous movement of the fourth piezoelectric screw 34, the fifth piezoelectric screw 35, and the sixth piezoelectric screw 36 can drive the moving stage 2 to move linearly along the Z-axis. Some of the fourth piezoelectric screw 34, the fifth piezoelectric screw 35, and the sixth piezoelectric screw 36 are stationary while others are moving, which can drive the moving stage 2 to deflect along the Y-axis or along the X-axis.

[0038] The platform 1 is provided with an L-shaped fixing seat 11, preferably integrally formed with the platform 1. The fixing seat 11 is used to fix the piezoelectric screw assembly. The first piezoelectric screw 31, the second piezoelectric screw 32, the third piezoelectric screw 33, the fourth piezoelectric screw 34, the fifth piezoelectric screw 35, and the sixth piezoelectric screw 36 are fixed on the fixing seat 11, and the screws pass through the fixing seat 11 and abut against the moving platform 2 or the displacement adjustment assembly 4. The two vertical sides of the fixing seat 11 are respectively provided on the first side 21 and the second side 22. Several sets of elastic components 5 are provided between the fixing seat 11 and the first side 21 and the second side 22, respectively. The elastic components 5 are used to apply a preload force between the fixing seat 11 and the moving platform 2 along the X-axis and Y-axis directions, as shown in the figure. Figure 3 An elastic component 5 is provided between the platform 1 and the movable platform 2. The elastic component 5 is used to apply a preload force along the Z-axis between the platform 1 and the movable platform 2. Preferably, the elastic component 5 includes a tension spring 51 and a pull rod 52 connected to both ends of the tension spring 51. Mounting holes are provided on the fixed base 11, the movable platform 2, and the platform 1 respectively, and both ends of the pull rod 52 are fixed in the mounting holes.

[0039] The displacement adjustment assembly 4 includes an adjustment rod 41, a ball bearing 42, a shim 43, and a compression spring 44, as shown in the reference. Figure 4At least one groove with a ramp is provided on the adjusting rod 41. The ball 42 is located in the groove and can roll along the ramp under the push of the fourth piezoelectric screw 34, the fifth piezoelectric screw 35, or the sixth piezoelectric screw 36. The rolling of the ball 42 on the ramp causes it to be displaced in the Z-axis, thereby pushing the moving stage 2 to be displaced in the Z-axis. The shim 43 is used to reduce the friction between the ball 42 and the moving stage 2. The stage body 1 is provided with a through hole corresponding to the ball 42. Part of the ball 42 passes through the through hole and abuts against the bottom surface of the moving stage 2 through the shim 43. The two ends of the compression spring 44 abut against the adjusting rod 41 and the stage body 1 respectively, and are used to apply a preload between the adjusting rod 41 and the stage body 1. Preferably, the three sets of displacement adjusting components 4 each include one ball 42, and the line connecting the three balls 42 forms a triangle. The triangular structure facilitates the control of the moving stage 2 to achieve θx and θy deflection, and the structure is stable.

[0040] This invention is not intended to limit the scope of this invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention shall be included within the protection scope of this invention.

Claims

1. A six-degree-of-freedom piezoelectric nanodisplacement stage, characterized in that, include: Platform (1); A mobile platform (2) is positioned above the platform body (1); The piezoelectric screw assembly includes a first piezoelectric screw (31), a second piezoelectric screw (32), a third piezoelectric screw (33), a fourth piezoelectric screw (34), a fifth piezoelectric screw (35), and a sixth piezoelectric screw (36). The first piezoelectric screw (31) abuts against the first side (21) of the moving platform (2) to push the moving platform (2) to move linearly along the Y-axis; The second piezoelectric screw (32) and the third piezoelectric screw (33) abut against the second side (22) of the moving stage (2) to push the moving stage (2) to move linearly along the X-axis or deflect along the Z-axis; The movable stage (2) is provided with three sets of displacement adjustment components (4). The fourth piezoelectric screw (34), the fifth piezoelectric screw (35) and the sixth piezoelectric screw (36) respectively abut against the ends of the displacement adjustment components (4). The movable end of the displacement adjustment components (4) passes through the upper surface of the stage body (1) and abuts against the bottom surface of the movable stage (2), and is used to push the movable stage (2) to move linearly along the Z-axis or deflect along the X-axis or deflect along the Y-axis. The X-axis, Y-axis, and Z-axis are spatial rectangular coordinate axes. The first side surface (21) is parallel to the plane containing the X-axis and Z-axis; the second side surface (22) is parallel to the plane containing the Y-axis and Z-axis; and the bottom surface of the moving platform (2) is parallel to the plane containing the X-axis and Y-axis.

2. The six-degree-of-freedom piezoelectric nanostage according to claim 1, characterized in that, The platform (1) is provided with an L-shaped fixing seat (11), and the first piezoelectric screw (31), the second piezoelectric screw (32), the third piezoelectric screw (33), the fourth piezoelectric screw (34), the fifth piezoelectric screw (35) and the sixth piezoelectric screw (36) are fixed on the fixing seat (11).

3. The six-degree-of-freedom piezoelectric nanodisplacement stage according to claim 2, characterized in that, The fixed base (11) is provided with several sets of elastic components (5) between the first side (21) and the second side (22) respectively. The elastic components (5) are used to apply pre-tightening force in the X-axis direction and Y-axis direction between the fixed base (11) and the moving platform (2).

4. The six-degree-of-freedom piezoelectric nanodisplacement stage according to claim 1, characterized in that, An elastic component (5) is provided between the platform (1) and the moving platform (2), and the elastic component (5) is used to apply a preload along the Z-axis between the platform (1) and the moving platform (2).

5. The six-degree-of-freedom piezoelectric nanodisplacement stage according to any one of claims 3 or 4, characterized in that, The elastic component (5) includes a tension spring (51) and a pull rod (52) connected to both ends of the tension spring (51).

6. The six-degree-of-freedom piezoelectric nanodisplacement stage according to claim 1, characterized in that, The displacement adjustment assembly (4) includes an adjustment rod (41), a ball (42), a washer (43), and a compression spring (44). The adjustment rod (41) has at least one groove with a slope. The ball (42) is located in the groove and can roll along the slope. The platform (1) has a through hole corresponding to the ball (42). Part of the ball (42) passes through the through hole and abuts against the bottom surface of the moving platform (2) through the washer (43). The two ends of the compression spring (44) abut against the adjustment rod (41) and the platform (1), respectively.

7. The six-degree-of-freedom piezoelectric nanodisplacement stage according to claim 6, characterized in that, The three sets of displacement adjustment components (4) each include one ball (42), and the line connecting the three balls (42) forms a triangle.

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