Flange plate
By designing curved cooling channels with opposite rotation inside the flange, the flow path of the coolant is extended, solving the problem of heat accumulation in the flange and improving the safety and stability of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HANGZHOU JINGCHI ELECTROMECHANICAL TECH CO LTD
- Filing Date
- 2025-06-06
- Publication Date
- 2026-05-19
AI Technical Summary
Existing flanges in silicon carbide single crystal growth furnaces cause reduced equipment safety and stability due to heat accumulation, and may also cause thermal interference to surrounding components.
Design a flange that includes a cooling channel between a lower plate and an upper plate. The cooling channel consists of multiple curved channels with opposite directions of rotation. Coolant passes through these channels sequentially along the flow direction, extending the flow path to remove heat.
Effective heat dissipation ensures the safety and stability of the equipment, prevents thermal interference to surrounding components, and improves the overall performance of the equipment.
Smart Images
Figure CN224265143U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of mechanical connectors, and in particular to a flange. Background Technology
[0002] The growth process of silicon carbide single crystals places extremely high demands on equipment, especially the growth furnace, which is one of the key components. The silicon carbide single crystal growth furnace is used to cultivate silicon carbide single crystals in a high-temperature environment, and its structural design directly affects the quality and efficiency of crystal growth. The growth furnace mainly consists of a furnace shell, a heating system, and a temperature control system, among which the furnace shell plays a crucial role in supporting and sealing the crystals.
[0003] The furnace shell typically has flanges for mounting electrodes to ensure smooth current conduction and maintain the required furnace temperature. In existing technology, the entire flange is a solid structure. Because the electrodes generate a large amount of heat during operation, and this heat is conducted to the flange, coupled with the inherently high-temperature environment inside the growth furnace, the outer surface temperature of the flange becomes quite high. This not only affects the safety and stability of the equipment but may also cause thermal interference to other surrounding components. Utility Model Content
[0004] The purpose of this utility model is to provide a flange with better heat dissipation, ensuring the safety and stability of the equipment and preventing thermal interference to other surrounding components.
[0005] To achieve the above objectives, this utility model provides the following technical solution:
[0006] In a first aspect, this utility model provides a flange, including a lower plate and an upper plate. The lower plate is connected to the upper plate and forms a cooling channel for the flow of coolant between them. The cooling channel includes multiple sequentially connected curved channels along the flow direction of the coolant. Any two adjacent curved channels have opposite rotation directions. The lower plate has a first inlet communicating with the first curved channel and a first outlet communicating with the last curved channel.
[0007] Furthermore, each of the curved channels extends around the axis of the flange, and multiple curved channels are distributed sequentially from the inside to the outside along the radial direction of the flange.
[0008] Furthermore, the curved channel at the beginning is located inside the curved channel at the end.
[0009] Furthermore, the lower plate includes a plate, an electrode mounting base, and an air intake structure. The electrode mounting base and the air intake structure are both connected between the plate and the upper plate. The cooling channel is formed between the outer ring surface of the electrode mounting base, the outer ring surface of the air intake structure, the plate, and the upper plate. The inner ring surface of the electrode mounting base has an electrode mounting hole that is independently provided with respect to the cooling channel.
[0010] Furthermore, the outer ring surface of the electrode mounting base within the cooling channel is located within any two adjacent curved channels.
[0011] Furthermore, the cooling channel also includes a guide channel extending at least partially radially along the flange, the guide channel connecting the curved channel at the head end and the first inlet.
[0012] Furthermore, the flow channel extends radially along the flange and is directly connected to the curved channel at the head end.
[0013] Furthermore, the lower plate also includes a cover, which is connected to the side of the plate away from the upper plate. The cover is fitted outside the air intake structure and forms a cooling cavity with the air intake structure. The plate has a second inlet communicating between the flow channel and the cooling cavity, and a second outlet communicating between the cooling cavity and the curved channel at the beginning.
[0014] Furthermore, the flow channel includes a first channel extending radially along the flange and a second channel extending around the axis of the flange, the first channel communicating between the first inlet and the second channel, and the second inlet communicating with the second channel.
[0015] Furthermore, the second channel is positioned opposite to and independently of the curved channel at the first end.
[0016] The flange provided by this utility model can produce the following beneficial effects:
[0017] Compared with the prior art, the flange provided by this utility model has multiple curved channels connected sequentially along the flow direction of the coolant, and the rotation directions of any two adjacent curved channels are opposite, which allows the coolant to be fully distributed in the flange. The coolant has a long flow path, which can effectively remove the heat of the flange, thereby ensuring the safety and stability of the equipment and preventing thermal interference to other surrounding components. Attached Figure Description
[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0019] Figure 1 A three-dimensional structural schematic diagram of the flange provided in the first embodiment of this utility model;
[0020] Figure 2 This is a schematic diagram of the internal structure of the flange provided in the first embodiment of the present utility model;
[0021] Figure 3 A bottom view of the flange provided in the first embodiment of this utility model;
[0022] Figure 4 for Figure 3 A-A cross-sectional view;
[0023] Figure 5 A three-dimensional structural schematic diagram of the flange provided in the second embodiment of this utility model;
[0024] Figure 6 A side view of the flange provided in the second embodiment of this utility model;
[0025] Figure 7 This is a schematic diagram of the internal structure of the flange provided in the second embodiment of the present invention.
[0026] Icons: 1 - Lower plate; 11 - Plate; 111 - First inlet; 112 - First outlet; 113 - Second inlet; 114 - Second outlet; 12 - Electrode mounting base; 121 - Electrode mounting hole; 13 - Air intake structure; 14 - Cover; 2 - Upper plate; 3 - Cooling channel; 31 - Curved channel; 32 - Guide channel; 321 - First channel; 322 - Second channel; 4 - Cooling chamber. Detailed Implementation
[0027] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0028] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0030] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.
[0031] This embodiment provides a flange, such as Figures 1 to 7 As shown, it includes a lower plate 1 and an upper plate 2. The lower plate 1 is connected to the upper plate 2 and forms a cooling channel 3 for the flow of coolant between them. The cooling channel 3 includes multiple sequentially connected curved channels 31 along the flow direction of the coolant. Any two adjacent curved channels 31 have opposite rotation directions. The lower plate 1 has a first inlet 111 connected to the first curved channel 31 and a first outlet 112 connected to the last curved channel 31.
[0032] by Figure 2 Taking this example as a specific illustration, when the flange provided in this embodiment is in use, the coolant can enter the curved channel 31 at the beginning from the first inlet 111, flow through the remaining curved channels 31 in sequence, and finally be discharged from the first outlet 112 that is connected to the curved channel 31 at the end.
[0033] The flange provided in the above embodiment has multiple curved channels 31 connected sequentially along the flow direction of the coolant, and any two adjacent curved channels 31 have opposite rotation directions. This can extend the flow path of the coolant in the flange, improve the heat dissipation efficiency of the flange, ensure the safety and stability of the equipment, and prevent thermal interference to other surrounding components.
[0034] In an optional embodiment, the lower plate 1 may be recessed with a cooling groove, and the upper plate 2 may be fastened to the lower plate 1 to form a cooling channel 3; or the upper plate 2 may be recessed with a cooling groove, and the lower plate 1 may be fastened to the upper plate 2 to form a cooling channel 3; or the upper plate 2 may be recessed with a first cooling groove, and the lower plate 1 may be recessed with a second cooling groove, and the lower plate 1 may be fastened to the upper plate 2 so that a cooling channel 3 is formed between the first cooling groove and the second cooling groove.
[0035] In a preferred embodiment, such as Figure 2 As shown, the lower plate 1 may be recessed with a cooling groove. The adjacent curved channels 31 are separated by partitions provided by the lower plate 1, except for the positions where they are connected at the ends. The upper plate 2 is fastened to the lower plate 1 to form a cooling channel 3.
[0036] Specifically, the cooling channel 3 may include two, three, four, or more curved channels 31. The shape of the curved channel 31 can be an arc or an elliptical arc, and the curved channel 31 can also be formed by connecting multiple arc channels in sequence, with each arc channel having a different radius, or the curved channel 31 can be bent into an irregular curve. In other words, the shape of the curved channel 31 is not fixed and can be selected according to actual needs.
[0037] In an optional implementation, to make the arrangement of each curved channel 31 more orderly and to facilitate the design and processing of the curved channels 31, such as... Figure 2 As shown, each curved channel 31 extends around the axis of the flange, and multiple curved channels 31 are distributed sequentially from the inside to the outside along the radial direction of the flange.
[0038] The above-described embodiments allow the coolant to flow in concentric circles from the inside out or from the outside in through each curved channel 31, facilitating the full distribution of the cooling channels 3 between the lower plate 1 and the upper plate 2.
[0039] Specifically, each curved channel 31 extends in an arc shape, and in two adjacent curved channels 31, the tail end of the upstream curved channel 31 is connected to the head end of the downstream curved channel 31.
[0040] In an optional embodiment, the curved channel 31 at the beginning is located inside the curved channel 31 at the end. That is, the coolant preferentially enters the inner curved channel 31 from the first inlet 111, and then flows from the inside to the outside through other curved channels 31 in sequence, and finally exits from the first outlet 112 which is connected to the outermost curved channel 31.
[0041] Since the center of the flange is directly opposite the silicon carbide single crystal growth chamber and the edge of the flange can contact the furnace shell for heat dissipation, the temperature in the center of the flange is slightly higher than the temperature at the edge of the flange. The above implementation method allows the coolant to preferentially dissipate heat to the center of the flange, ensuring a more uniform temperature throughout the flange and achieving better heat dissipation.
[0042] In the following embodiments, each curved channel 31 extends in an arc around the axis of the flange, and multiple curved channels 31 are distributed sequentially from the inside to the outside along the radial direction of the flange for detailed description.
[0043] In alternative implementations, such as Figures 1 to 4 As shown, the lower plate 1 includes a plate 11, an electrode mounting base 12, and an air intake structure 13, wherein the electrode mounting base 12 and the air intake structure 13 are both connected between the plate 11 and the upper plate 2, and a cooling channel 3 is formed between the outer surface of the electrode mounting base 12, the outer surface of the air intake structure 13, the plate 11, and the upper plate 2.
[0044] Specifically, to ensure a tight connection, the electrode mounting base 12 and the air intake structure 13 can both be welded between the plate 11 and the upper plate 2, thereby preventing leakage in the cooling channel 3.
[0045] The inner ring surface of the electrode mounting base 12 has an electrode mounting hole 121 that is independent of the cooling channel 3, and the air intake structure 13 can be provided with an air intake hole for communicating with the silicon carbide single crystal growth cavity.
[0046] like Figure 3 As shown, there are multiple electrode mounting bases 12, specifically three. The air intake structure 13 is located in the middle of the plate 11 and the upper plate 2, and the three electrode mounting bases 12 are arranged at equal intervals around the air intake structure 13.
[0047] In an optional embodiment, because the electrode mounting hole 121 is relatively large, in order to avoid the outer ring surface of the electrode mounting base 12 being located within a single curved channel 31, which would result in the width of the curved channel 31 needing to be designed to be larger, such as... Figure 2 As shown, the outer ring surface of the electrode mounting base 12 is located within any two adjacent curved channels 31.
[0048] The above-described implementation does not require a large width for the curved channel 31, thus enabling the number of curved channels 31 to be increased as much as possible within the fixed radial dimension of the flange, thereby extending the flow path of the coolant within the flange.
[0049] In an optional embodiment, the cooling channel 3 further includes a guide channel 32 extending at least partially radially along the flange, the guide channel 32 connecting the curved channel 31 at the beginning end and the first inlet 111 to guide the coolant at the first inlet 111 to the curved channel 31 at the beginning end.
[0050] In the above embodiments, the flow channel 32 can be directly connected to the curved channel 31 at the beginning or indirectly connected to the curved channel 31 at the beginning. The following sections will describe the different situations using two embodiments.
[0051] First embodiment:
[0052] In the first embodiment, such as Figure 2 and Figure 4 As shown, the lower plate body 1 also includes a cover 14, which is connected to the side of the plate body 11 away from the upper plate body 2. The cover 14 is fitted outside the air intake structure 13 and forms a cooling cavity 4 between the air intake structure 13 and the air intake structure 13. The plate body 11 has a second inlet 113 that connects the flow guide channel 32 and the cooling cavity 4, and a second outlet 114 that connects the cooling cavity 4 and the first end curved channel 31.
[0053] In the above embodiment, the coolant in the guide channel 32 first enters the cooling chamber 4 through the second inlet 113, and then enters the curved channel 31 at the beginning from the second outlet 114. That is to say, the guide channel 32 is connected to the curved channel 31 at the beginning through the cooling chamber 4.
[0054] The cooling chamber 4 described above can cool the rubber ring in the air intake structure 13 and extend the service life of the sealing rubber ring.
[0055] Specifically, the top of the cover 14 is welded to the plate 11, and the inner ring at the bottom of the cover 14 is welded to the air intake structure 13 to ensure the sealing of the cooling chamber 4.
[0056] In the first embodiment, such as Figure 2 As shown, the flow channel 32 includes a first channel 321 extending radially along the flange and a second channel 322 extending around the axis of the flange. The first channel 321 is connected between the first inlet 111 and the second channel 322, and the second inlet 113 is connected to the second channel 322.
[0057] The first channel 321 can quickly guide the coolant to the center of the flange, and the second channel 322 can further guide the coolant to the second inlet 113 to cool the rubber ring in the intake structure 13.
[0058] In the first embodiment, such as Figure 2As shown, in order to make the arrangement of the curved channel 31 and the second channel 322 more orderly, the second channel 322 is set opposite to and independently of the curved channel 31 at the first end.
[0059] The aforementioned independent arrangement refers to the fact that the second channel 322 and the curved channel 31 at the beginning are not directly connected, such as... Figure 2 As shown, the two are separated by the partition of the plate 11 and the air intake structure 13 to ensure that the coolant in the second channel 322 can be discharged from the cooling chamber 4 to the curved channel 31 at the beginning.
[0060] Specifically, the second channel 322 is approximately semi-circular in shape, and the first curved channel 31 is approximately semi-circular in shape. Thus, the second channel 322 and the first curved channel 31 are combined to form an inner cooling channel. The downstream curved channel 31, which is directly connected to the first curved channel 31, is located on the outer layer of the aforementioned inner cooling channel.
[0061] Second embodiment:
[0062] In the second embodiment, the flow channel 32 extends radially along the flange and is directly connected to the curved channel 31 at the head end.
[0063] In the above embodiments, the structure of cooling channel 3 is simpler, such as... Figure 7 As shown, the flow channel 32 is directly connected to the curved channel 31 at the head end, which allows the coolant in the flow channel 32 to quickly enter the cooling channel 3, thereby preferentially cooling the middle part of the upper plate 2 and the lower plate 1.
[0064] Specifically, the curved channel 31 at the beginning is approximately annular, forming an inner cooling channel, and the downstream curved channel 31, which is directly connected to the curved channel 31 at the beginning, is located on the outer layer of the aforementioned inner cooling channel.
[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.
Claims
1. A flange, characterized in that, It includes a lower plate (1) and an upper plate (2). The lower plate (1) is connected to the upper plate (2) and forms a cooling channel (3) for the flow of coolant between the lower plate (2). The cooling channel (3) includes multiple sequentially connected curved channels (31) along the flow direction of the coolant. Any two adjacent curved channels (31) have opposite rotation directions. The lower plate (1) has a first inlet (111) connected to the first curved channel (31) and a first outlet (112) connected to the last curved channel (31).
2. The flange according to claim 1, characterized in that, Each of the curved channels (31) extends around the axis of the flange, and multiple curved channels (31) are distributed sequentially from the inside to the outside along the radial direction of the flange.
3. The flange according to claim 2, characterized in that, The curved channel (31) at the beginning is located inside the curved channel (31) at the end.
4. The flange according to claim 1, characterized in that, The lower plate (1) includes a plate (11), an electrode mounting base (12), and an air intake structure (13). The electrode mounting base (12) and the air intake structure (13) are both connected between the plate (11) and the upper plate (2). The cooling channel (3) is formed between the outer surface of the electrode mounting base (12), the outer surface of the air intake structure (13), the plate (11), and the upper plate (2). The inner surface of the electrode mounting base (12) has an electrode mounting hole (121) that is independent of the cooling channel (3).
5. The flange according to claim 4, characterized in that, The outer surface of the electrode mounting base (12) located within the cooling channel (3) lies within any two adjacent curved channels (31).
6. The flange according to claim 4, characterized in that, The cooling channel (3) also includes a guide channel (32) extending at least partially radially along the flange, the guide channel (32) connecting the curved channel (31) at the head end and the first inlet (111).
7. The flange according to claim 6, characterized in that, The flow channel (32) extends radially along the flange and is directly connected to the curved channel (31) at the head end.
8. The flange according to claim 6, characterized in that, The lower plate (1) also includes a cover (14), which is connected to the side of the plate (11) away from the upper plate (2). The cover (14) is sleeved on the outside of the air intake structure (13) and forms a cooling cavity (4) with the air intake structure (13). The plate (11) has a second inlet (113) connecting the flow channel (32) and the cooling cavity (4) and a second outlet (114) connecting the cooling cavity (4) and the curved channel (31) at the beginning.
9. The flange according to claim 8, characterized in that, The flow channel (32) includes a first channel (321) extending radially along the flange and a second channel (322) extending around the axis of the flange. The first channel (321) is connected between the first inlet (111) and the second channel (322), and the second inlet (113) is connected to the second channel (322).
10. The flange according to claim 9, characterized in that, The second channel (322) is opposite to and independently set up with respect to the curved channel (31) at the first end.