Supporting mechanism for MEMS baking device and MEMS baking device

Abstract

The utility model discloses a supporting mechanism for an MEMS baking device and the MEMS baking device.The supporting mechanism comprises a supporting plate and a plurality of fixing pieces, the supporting plate is provided with a plurality of holes, each fixing piece can comprise an installation end and a fixing end, the installation ends of the fixing pieces are attached to the supporting plate and detachably installed in at least part of the holes, and the fixing ends of the fixing pieces are connected with the supporting plate. At least one mounting space is defined by the fixing ends of the fixing pieces and the supporting plate, and the size of the mounting space is matched with the size of the MEMS material box, so that the MEMS material box is placed and fixed through the mounting space. The holes in the supporting plate are matched with the fixing pieces, so that the influence of metal dust particles generated by sliding friction between the MEMS material box and the supporting plate on the performance of the MEMS device can be effectively avoided, the curing and packaging yield of the MEMS device is improved, the cost is saved, and the production efficiency is improved. In addition, the arrangement mode and the number of the fixing pieces can be adjusted to adapt to placement and fixation of the MEMS material boxes of different sizes.

Description

Technical Field

[0001] This specification relates to the field of MEMS device packaging technology, and in particular to a support mechanism for a MEMS baking device and the MEMS baking device. Background Technology

[0002] In the field of MEMS (Micro-Electro-Mechanical Systems) device packaging, especially in the packaging process of acoustic MEMS devices (such as MEMS microphones), the baking equipment is a key piece of equipment used to cure the packaging materials. Operators typically place the containers containing MEMS devices directly onto the oven shelves for high-temperature treatment. However, during this process, because the bottom of the containers is in direct contact with the oven shelves, sliding friction easily occurs between the metal containers and the shelves when placing or removing the containers, resulting in fine metal dust particles (such as iron or aluminum shavings) on the metal surface. These particles are suspended and scattered onto the surface of the MEMS devices by the hot airflow inside the oven, causing a decrease in device performance or even failure.

[0003] To address the above problems, existing technologies have made improvements in the following ways: (1) optimizing the coating on the surface of the material box or shelf to reduce the coefficient of friction; however, the coating is prone to aging and peeling off under high temperature conditions, leading to increased maintenance costs and unsustainable effects; (2) using non-metallic composite materials to replace metal shelves; however, such materials have insufficient thermal stability and load-bearing capacity, making them unsuitable for baking environments and load-bearing requirements; (3) adjusting the placement angle of the material box to reduce the contact area; however, friction cannot be completely avoided, and the operational complexity increases significantly. It is evident that the above methods still cannot effectively solve the problem of metal dust particles generated by inter-metal friction and have low practicality.

[0004] There is currently no effective solution to the problem of metal dust particles generated by metal-to-metal friction during the baking process of MEMS devices, which affects the performance of MEMS devices. Utility Model Content

[0005] This specification provides a support mechanism and a MEMS baking device to solve the problem of metal dust particles generated by metal-to-metal friction during the baking process of MEMS devices, which affect the performance of MEMS devices.

[0006] The first aspect of this specification provides a support mechanism for a MEMS baking apparatus, the support mechanism being detachably mounted on the MEMS baking apparatus, the support mechanism including a support plate and a plurality of fasteners;

[0007] The support plate has multiple holes. The fastener includes an mounting end and a fixing end. The mounting end of the fastener is attached to the support plate and detachably installed in at least some of the holes. The fixing ends of the multiple fasteners and the support plate enclose at least one installation space. The size of the installation space matches the size of the MEMS material box so that the MEMS material box can be placed and fixed through the installation space.

[0008] In some embodiments of this specification, the plurality of holes on the support plate include a first hole arranged in a first array and a second hole arranged in a second array. The diameter of the first hole is different from that of the second hole. The first hole and the second hole are respectively used for detachably installing fasteners of different specifications, so as to place and fix MEMS material boxes of different sizes in the installation space formed by the fasteners.

[0009] In some embodiments of this specification, the plurality of holes on the support plate include a third hole on which the fastener is installed and a fourth hole on which the fastener is not installed, the fourth hole being used for the passage of hot or cold air.

[0010] In some embodiments of this specification, the fastener is an integrally formed structure, the fixing end includes a fixing plate, the mounting end includes a first side plate and a second side plate, the second side plate and the fixing plate are respectively connected to the adjacent two sides of the first side plate and form a certain angle with the first side plate; the mounting space is enclosed by the first side plate and the second side plate of the four fasteners.

[0011] In some embodiments of this specification, the first side plate includes a first sub-plate and a second sub-plate, and the second side plate includes a third sub-plate and a fourth sub-plate;

[0012] The first side of the third sub-plate and the fixing plate are respectively connected to the first side and the second side adjacent to the first sub-plate, the third side of the first sub-plate is connected to the first side of the second sub-plate, and the third side of the first sub-plate is adjacent to the first side of the first sub-plate.

[0013] The second side of the third sub-plate, which is adjacent to the first side and away from the support plate, is connected to the first side of the fourth sub-plate.

[0014] In some embodiments of this specification, the first sub-plate and the third sub-plate are perpendicular to each other and both are perpendicular to the plane where the fixing plate is located;

[0015] The second sub-board and the first sub-board, as well as the third sub-board and the fourth sub-board, form a certain angle so that when the MEMS box is placed in the installation space, the first sub-board and the third sub-board are attached to the outer wall of the MEMS box, and the second side of the second sub-board opposite to the first side of the second sub-board and the second side of the fourth sub-board are away from the MEMS box.

[0016] In some embodiments of this specification, the first sub-board and the third sub-board are square metal plates, and the second sub-board and the fourth sub-board are square metal plates or triangular metal plates.

[0017] In some embodiments of this specification, the lengths of the first sub-board and the second sub-board along the height direction of the MEMS cassette are determined based on the height of the MEMS cassette, and the lengths of the second sub-board and the fourth sub-board along the height direction of the MEMS cassette are greater than the lengths of the first sub-board and the second sub-board along the height direction of the MEMS cassette.

[0018] In some embodiments of this specification, the fixing end is installed in the hole by a snap-fit ​​or by a bolt.

[0019] A second aspect of this specification also provides a MEMS baking apparatus, including an oven and the support mechanism described in the first aspect above; the oven includes a cavity, the inner wall of the cavity is provided with a mounting member, and the support mechanism is mounted in the cavity through the mounting member;

[0020] At least one side of the cavity is provided with an openable and closable door to allow the MEMS material box to be placed or removed in the installation space through the openable and closable door.

[0021] The support mechanism and MEMS baking apparatus provided in this specification include a support plate and multiple fasteners. The support plate has multiple holes, and each fastener includes a mounting end and a fixing end. The mounting end of the fastener is attached to the support plate and detachably installed in at least a portion of the holes. The fixing ends of the fasteners and the support plate together form at least one installation space. The size of the installation space matches the size of the MEMS cartridge, allowing the MEMS cartridge to be placed and fixed within the installation space. By cooperating with the fasteners through the holes on the support plate, an installation space for placing and fixing the MEMS cartridge is formed on the support plate. This effectively avoids the impact of sliding friction between the MEMS cartridge and the support plate, which generates metal dust particles that could affect the performance of the MEMS device. This improves the yield of MEMS device curing and packaging, saves production costs, and increases production efficiency. Furthermore, the detachable installation of the fasteners into the holes on the support plate allows for adjustment of the arrangement and number of fasteners to create installation spaces of different sizes, accommodating the placement and fixing of MEMS cartridges of different sizes. In addition, the support plate with holes can be the original support mechanism in the MEMS baking device. The MEMS box can be fixed by simply adding fasteners. The structure is simple and can meet the needs of large-scale production.

[0022] Specific embodiments of the present invention are disclosed in detail with reference to the following description and accompanying drawings, indicating how the principles of the present invention can be adopted. It should be understood that the embodiments of the present invention are not limited in scope. Features described and / or shown for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0023] It should be emphasized that the term "comprising / including" as used herein refers to the presence of a feature, part, step, or component, but does not exclude the presence or addition of one or more other features, parts, steps, or components. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] The accompanying drawings described herein are for illustrative purposes only and are not intended to limit the scope of this application in any way. Furthermore, the shapes and scales of the components in the drawings are merely illustrative to aid in understanding this application and do not specifically limit the shapes and scales of the components. Those skilled in the art, guided by the teachings of this application, can select various possible shapes and scales to implement this application according to specific circumstances.

[0026] Figure 1 A schematic diagram of the support mechanism in an embodiment of this specification is shown;

[0027] Figure 2 A schematic diagram of a support plate in an embodiment of this specification is shown;

[0028] Figure 3 The diagram shown is a schematic diagram of the support plate in an embodiment of this specification;

[0029] Figure 4 The diagram shown is a schematic representation of a fastener in an embodiment of this specification.

[0030] The reference numerals in the above figures are as follows:

[0031] 100. Support mechanism; 110. Fixing component; 120. Support plate; 111. Fixing plate; 112. First side plate; 113. Second side plate; 1121. First sub-plate; 1122. Second sub-plate; 1131. Third sub-plate; 1132. Fourth sub-plate;

[0032] 200, MEMS material box. Detailed Implementation

[0033] The principles and spirit of this specification will now be described with reference to several exemplary embodiments. It should be understood that these embodiments are given merely to enable those skilled in the art to better understand and implement this specification, and are not intended to limit the scope of this specification in any way. Rather, these embodiments are provided to make this disclosure more thorough and complete, and to fully convey the scope of this disclosure to those skilled in the art.

[0034] The details of this utility model can be more clearly understood by referring to the accompanying drawings and the description of specific embodiments. However, the specific embodiments of this utility model described herein are only for explaining the purpose of this utility model and should not be construed as limiting this utility model in any way. Under the teachings of this utility model, those skilled in the art can conceive of any possible modifications based on this utility model, and these should all be considered to fall within the scope of this utility model. It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there may be an intervening element. The terms "mounted," "connected," and "connected" should be interpreted broadly, for example, it can be a mechanical connection or an electrical connection, or it can be a connection within two elements, which can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this specification belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of this specification. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0036] This specification provides an embodiment of a support mechanism for a MEMS baking apparatus. The support mechanism is detachably mounted on the MEMS baking apparatus and is used to place and fix the MEMS material box during the baking process of the MEMS device. Please refer to... Figure 1 The diagram shows a structural schematic of a support mechanism for a MEMS baking apparatus according to an embodiment of this specification. The support mechanism 100 may include a support plate 120 and a plurality of fasteners 110.

[0037] The support plate 120 has multiple holes. The fastener 110 may include an mounting end and a fixing end. The mounting end of the fastener 110 is attached to the support plate 120 and detachably installed in at least part of the holes. The fixing ends of the multiple fasteners 110 and the support plate 120 form at least one installation space. The size of the installation space matches the size of the MEMS material box 200 so that the MEMS material box 200 can be placed and fixed through the installation space.

[0038] Specifically, the number of fasteners 110 used to enclose and form an installation space can be determined based on the shape and size of the MEMS box 200, as well as the fixing requirements of the specific application scenario. For example, when the MEMS box 200 is a prism-shaped device formed by a support frame and a metal plate, the number of fasteners 110 enclosing and forming an installation space can be four, six, or eight, etc. Specifically, when there are four fasteners 110, each fastener 110 can correspond to one side edge of the MEMS box 200; when there are six fasteners 110, four of them can each correspond to one side edge of the MEMS box 200, and the other two can each correspond to two sides of the MEMS box 200; when there are eight fasteners 110, four of them can each correspond to one side edge of the MEMS box 200, and the other four can each correspond to at least two sides of the MEMS box 200. Of course, the MEMS container 200 can also be a device with a polygonal prism or other shapes formed by a support frame and metal plate. Correspondingly, the number of fasteners 110 that enclose and form an installation space can be adjusted based on actual application requirements.

[0039] Specifically, the installation space formed by the multiple fasteners 110 and the support plate 120 can be an open space that can move freely. That is, the installation space can fix the MEMS material box 200 by fixing only one end of the MEMS material box 200, avoiding sliding friction between the MEMS material box 200 and the support plate 120.

[0040] Specifically, the shape and size of the mounting space formed by the multiple fasteners 110 and the support plate 120 can be determined based on the shape and size of the bottom and side surfaces of the MEMS cassette 200. For example, when the outer surface of the MEMS cassette 200 is a regular square prism, the mounting space can be an open, freely movable square prism-shaped space, and the mounting space can be used to fix the end of the MEMS cassette 200 near the support plate 120. Furthermore, the mounting space can completely conform to the outer surface of the end of the MEMS cassette 200 near the support plate 120. For example, when the outer surface of the MEMS material box 200 is a straight quadrangular prism, the installation space is also a straight quadrangular prism. In this case, the fixing end of the fixing member 110 can be perpendicular to the support plate 120. When the outer surface of the MEMS material box 200 is an oblique quadrangular prism, the installation space is also an oblique quadrangular prism. In this case, the fixing end of the fixing member 110 can form a certain angle with the support plate 120. The size of this angle can match the angle between the side edge of the MEMS material box 200 and the ground.

[0041] In this embodiment, the holes on the support plate 120 cooperate with the fasteners 110. Multiple fasteners 110 and the support plate 120 can form at least one mounting space for placing and fixing the MEMS cartridge 200. This effectively avoids the impact of sliding friction between the MEMS cartridge 200 and the support plate 120 on the performance of the MEMS device, thus improving the yield of MEMS device curing and packaging, saving production costs, and increasing production efficiency. Furthermore, the fasteners 110 are detachably mounted on the holes on the support plate 120, allowing adjustment of the arrangement and number of fasteners 110 to create mounting spaces of different sizes, accommodating the placement and fixing of MEMS cartridges 200 of different sizes.

[0042] In the embodiments described in this specification, the multiple holes on the support plate 120 can be the original ventilation holes on the support mechanism 100 in the MEMS baking device. Therefore, there is no need to redesign or improve the support mechanism 100. Only the addition of a fastener 110 that can be used to install with the holes is required. This can effectively prevent the sliding friction between the MEMS material box 200 and the support plate 120 from generating metal dust particles that affect the performance of MEMS devices. This can meet the needs of large-scale production, save production costs, and improve production efficiency.

[0043] In some embodiments of this specification, when determining the holes for installation with the fastener 110, the holes for installing the fastener 110 can be selected in any combination, and the installation positions of the fastener 110 can be arranged and adjusted to meet the fixing requirements of the MEMS box 200 in actual application scenarios.

[0044] In some embodiments of this specification, the plurality of holes on the support plate 120 may include first holes arranged in a first array and second holes arranged in a second array. The diameter of the first holes is different from that of the second holes. The first holes and the second holes are respectively used for detachably installing fasteners 110 of different specifications, so as to place and fix MEMS material boxes 200 of different sizes in the installation space formed by the fasteners 110.

[0045] Specifically, the area on the support plate 120 where the first array of holes forms can partially overlap with or completely separate the area on the support plate 120 where the second array of holes forms. See details below. Figure 2 As shown in the figure, region a1 of the first array overlaps with region B1 of the second array, meaning that this region may include the first hole array and the second hole array arranged in the array. Region b of the figure shows the overlap between region A2 of the first array and region B2 of the second array.

[0046] Specifically, the distances between the holes in the first and / or second hole arrays can be exactly the same or partially the same. See details... Figure 3 As shown, taking a support plate 120 with only one type of hole as an example, Figure a shows that the distance between each hole in the hole array is exactly the same, and Figure b shows that the distance between some holes in the hole array is the same. The distance between hole 1 and hole 2 is equal to the distance between hole 3 and hole 4, and the distance between hole 1 and hole 3 is equal to the distance between hole 2 and hole 4.

[0047] Understandably, the multiple holes on the support plate 120 may also include other holes with different diameters than the first and second holes, in order to accommodate the fixing of MEMS boxes 200 of more specifications and improve the applicability of the support mechanism 100.

[0048] In the embodiments of this specification, the fixing of MEMS boxes 200 of different specifications can be achieved by designing the hole diameter and arrangement of the holes on the support plate 120, and / or by selecting different positions and numbers of holes in multiple holes to fix the fasteners 110. The structure is simple and has a wide range of applications.

[0049] In some embodiments of this specification, the plurality of holes on the support plate 120 may include a third hole on which a fastener 110 is installed and a fourth hole on which no fastener 110 is installed, the fourth hole being used for the passage of hot or cold air.

[0050] It is understandable that the holes on the support plate 120 can be used to cooperate with the fastener 110 to realize the detachable installation of the fastener 110, or to allow hot or cold air to circulate so that the MEMS devices placed on the MEMS box 200 are heated evenly.

[0051] In some embodiments of this specification, multiple fasteners 110 detachably mounted in the holes of the support plate 120 may have identical or partially identical structures. When multiple fasteners 110 have partially identical structures, fasteners 110 with different structures can be used to fix different parts of the MEMS cassette 200. For example, eight fasteners 110 are mounted on the support plate 120, of which four fasteners can be structurally identical components, designated as fasteners A, and the other four fasteners can be structurally identical components, designated as fasteners B. The mounting end of fastener A is an L-shaped metal plate, and the mounting end of fastener B is a flat metal plate. Fasteners A and fasteners B can enclose a right quadrangular prism mounting space with the support plate 120. The four fasteners A are located at the side edges of the mounting space, and the four fasteners B are located at the side walls of the mounting space.

[0052] refer to Figure 4As shown in some embodiments of this specification, the fastener 110 is a one-piece molded structure. The fixing end may include a fixing plate 111, and the mounting end may include a first side plate 112 and a second side plate 113. The second side plate 113 and the fixing plate 111 are respectively connected to the adjacent two sides of the first side plate 112 and form a certain angle with the first side plate 112. The mounting space is enclosed by the first side plates 112 and the second side plates 113 of the four fasteners 110. In the embodiments of this specification, the use of a one-piece molded fastener 110 makes the installation operation of the fastener 110 simpler and facilitates the removal of the fastener 110 from the support plate 120 at any time, thereby improving production efficiency.

[0053] Specifically, the first side plate 112 and the second side plate 113 can be connected into an L-shaped structure to fit against a portion of the wall surface of two adjacent side walls of the MEMS material box 200. Furthermore, the first side plate 112 and the fixing plate 111 can also be connected into an L-shaped structure to fit against the side wall of the MEMS material box 200 while fitting against the support plate 120, thereby improving the stability of the fixing member 110.

[0054] Continue to refer to Figure 4 As shown, in some embodiments of this specification, the first side plate 112 may include a first sub-plate 1121 and a second sub-plate 1122, and the second side plate 113 may include a third sub-plate 1131 and a fourth sub-plate 1132; the first side of the third sub-plate 1131 and the fixing plate 111 are respectively connected to the first side and the second side adjacent to the first sub-plate 1121, the third side of the first sub-plate 1121 is connected to the first side of the second sub-plate 1122, and the third side of the first sub-plate 1121 is adjacent to the first side of the first sub-plate 1121; the second side of the third sub-plate 1131 that is adjacent to the first side and away from the support plate 120 is connected to the first side of the fourth sub-plate 1132.

[0055] It is understood that the second sub-plate 1122 and the fourth sub-plate 1132 are two separate components on the integrally formed fastener 110. The first sub-plate 1121 and the third sub-plate 1131 can be used to fix the MEMS cartridge 200, while the second sub-plate 1122 and the fourth sub-plate 1132 can assist in the placement of the MEMS cartridge 200 within the mounting space. That is, each side plate of the fastener 110 may include portions for fixing the MEMS cartridge 200, such as the first sub-plate 1121 and the third sub-plate 1131, and may also include portions for assisting in the placement of the MEMS cartridge 200, such as the second sub-plate 1122 and the fourth sub-plate 1132. For example, when specifically placing the MEMS cartridge 200, the current mounting space can be expanded by pressing one or more of the second sub-plates 1122 and the fourth sub-plate 1132 of the fastener 110, and the directions of the forces applied when pressing the second sub-plate 1122 and the fourth sub-plate 1132 may be different. For example, a vertically downward force can be applied to the second sub-board 1122, and a downward force, but biased towards the first sub-board 1121, can be applied to the fourth sub-board 1132. In this case, the first sub-board 1121 will move closer to the fixing plate 111, and the side of the second sub-board 1122 away from the mounting space will also move closer to the fixing plate 111. Thus, the mounting space enclosed by the side plates of the fixing member 110 increases. At this point, the MEMS cartridge 200 can be smoothly and frictionlessly placed into the mounting space, and then the second sub-board 1122 and the fourth sub-board 1132 can be released. At this point, the first sub-board 1121 and the third sub-board 1131 can completely conform to the outer wall of the MEMS cartridge 200. By adopting a two-part sub-board design, friction between the outer wall of the MEMS cartridge 200 and the side plates of the fixing member 110, which generates metal dust particles, can be avoided when placing the MEMS cartridge 200, thereby improving the yield of MEMS devices and increasing production efficiency.

[0056] In some embodiments of this specification, among the multiple fasteners 110 installed on the support plate 120, the fixing plate 111 of some fasteners 110 can be connected to the first sub-plate 1121, and the fixing plate 111 of some fasteners 110 can be connected to the third sub-plate 1131. Thus, the fixing plates 111 of the multiple fasteners 110 can be located at opposite ends of the installation space, which can improve the neatness of the installation of the multiple fasteners 110 on the support plate 120.

[0057] refer to Figure 4As shown in some embodiments of this specification, the first sub-board 1121 and the third sub-board 1131 are perpendicular to each other and both are perpendicular to the plane where the fixing plate 111 is located; the second sub-board 1122 and the first sub-board 1121, and the third sub-board 1131 and the fourth sub-board 1132 form a certain angle, so that when the MEMS material box 200 is placed in the installation space, the first sub-board 1121 and the third sub-board 1131 are attached to the outer wall of the MEMS material box 200, and the second side of the second sub-board 1122 opposite to the first side of the second sub-board 1122 and the second side of the fourth sub-board 1132 are away from the MEMS material box 200.

[0058] It is understandable that the second sub-board 1122 and the fourth sub-board 1132 open outwards from the installation space so that the size of the installation space can be temporarily changed by pressing the second sub-board 1122 and the fourth sub-board 1132, so that the MEMS material box 200 can be smoothly and frictionlessly placed into the installation space.

[0059] In some embodiments of this specification, the first sub-plate 1121 and the third sub-plate 1131 can be square metal plates, and the second sub-plate 1122 and the fourth sub-plate 1132 can be square or triangular metal plates. Of course, it is understood that the first sub-plate 1121, the second sub-plate 1122, the third sub-plate 1131, and the fourth sub-plate 1132 can also be metal plates of other shapes, and the specific design can be based on actual application requirements.

[0060] In some embodiments of this specification, the lengths of the first sub-board 1121 and the second sub-board 1122 along the height direction of the MEMS material box 200 are determined based on the height of the MEMS material box 200. The lengths of the second sub-board 1122 and the fourth sub-board 1132 along the height direction of the MEMS material box 200 can be greater than the lengths of the first sub-board 1121 and the second sub-board 1122 along the height direction of the MEMS material box 200. By controlling the length of each sub-board in the embodiments of this specification, it is more convenient to quickly adjust the size of the installation space and improve the placement and fixing efficiency of the MEMS material box 200.

[0061] In some embodiments of this specification, when the MEMS material box 200 adopts a cylindrical structure, the mounting end may only include a first side plate, and the first side plate may be arc-shaped to fit the outer side wall of the MEMS material box 200 near the support plate 120, so as to achieve sufficient fixation of the MEMS material box 200.

[0062] Furthermore, the first side plate may also include a connected first sub-plate and a second sub-plate, and the planes on which the first sub-plate and the second sub-plate are located intersect. Thus, when the MEMS cassette 200 is placed in the installation space, the first sub-plate is completely flush with the outer wall of the MEMS cassette 200, and the end of the second sub-plate away from the first sub-plate is away from the outer wall of the MEMS cassette 200.

[0063] In some embodiments of this specification, the fixed end is installed in the hole by a snap-fit ​​or by a bolt.

[0064] In some embodiments of this specification, the fixing member 110 may also include a spring buffer assembly for providing buffering force when the MEMS material box 200 is placed, and for separating the bottom surface of the MEMS material box 200 from the support plate 120 to avoid rigid collision between the MEMS material box 200 and the support plate 120, which would generate metal dust particles and affect the performance of the MEMS device.

[0065] Specifically, the spring buffer assembly can be fixedly connected to the side wall of the fixed end of the fixing member 110, such as the side wall of the first side plate and / or the second side plate that is in contact with the MEMS box 200, and one end of the spring buffer assembly can be connected to or abut against the support plate 120, and the other end of the spring buffer assembly can be a free end that is connected to the MEMS box 200 when the MEMS box 200 is placed in the installation space.

[0066] The second aspect of this specification also provides a MEMS baking apparatus, which may include an oven and the support mechanism 100 mentioned above; the oven may include a cavity, the inner wall of which is provided with a mounting member, and the support mechanism 100 is mounted in the cavity through the mounting member; at least one side of the cavity is provided with an openable and closable door to allow the MEMS material box 200 to be placed or removed in the installation space through the openable and closable door.

[0067] In some embodiments of this specification, the MEMS baking apparatus may also include components such as pipes, heating devices and / or cooling devices for the curing and packaging of MEMS devices. The embodiments of this specification mainly focus on the design of the support mechanism 100 within the baking apparatus, and do not impose specific limitations on other components within the MEMS baking apparatus.

[0068] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. For details, please refer to the foregoing descriptions of the relevant processing embodiments; they will not be repeated here.

[0069] It should be understood that the above description is for illustrative purposes and not for limitation. Many embodiments and applications beyond the provided examples will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of this specification should not be determined by reference to the above description, but rather by reference to the foregoing claims and the full scope of their equivalents.

[0070] The above description is merely a preferred embodiment of this specification and is not intended to limit this specification. Various modifications and variations can be made to the embodiments described herein by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this specification should be included within the scope of protection of this specification.

Claims

1. A support mechanism for a MEMS baking device, characterized in that, The support mechanism is detachably mounted on the MEMS baking device, and the support mechanism includes a support plate and multiple fasteners; The support plate has multiple holes. The fastener includes an mounting end and a fixing end. The mounting end of the fastener is attached to the support plate and detachably installed in at least some of the holes. The fixing ends of the multiple fasteners and the support plate enclose at least one installation space. The size of the installation space matches the size of the MEMS material box so that the MEMS material box can be placed and fixed through the installation space.

2. The support mechanism according to claim 1, characterized in that, The support plate has multiple holes, including a first hole arranged in a first array and a second hole arranged in a second array. The diameter of the first hole is different from that of the second hole. The first hole and the second hole are used to detachably install fasteners of different specifications, so as to place and fix MEMS material boxes of different sizes in the installation space formed by the fasteners.

3. The support mechanism according to claim 1, characterized in that, The support plate has multiple holes, including a third hole where the fastener is installed and a fourth hole where the fastener is not installed. The fourth hole is used to allow hot or cold air to pass through.

4. The support mechanism according to claim 1, characterized in that, The fastener is an integrally formed structure. The fixing end includes a fixing plate, and the mounting end includes a first side plate and a second side plate. The second side plate and the fixing plate are respectively connected to the adjacent two sides of the first side plate and form a certain angle with the first side plate. The mounting space is enclosed by the first side plate and the second side plate of the four fasteners.

5. The support mechanism according to claim 4, characterized in that, The first side panel includes a first sub-panel and a second sub-panel, and the second side panel includes a third sub-panel and a fourth sub-panel; The first side of the third sub-plate and the fixing plate are respectively connected to the first side and the second side adjacent to the first sub-plate, the third side of the first sub-plate is connected to the first side of the second sub-plate, and the third side of the first sub-plate is adjacent to the first side of the first sub-plate. The second side of the third sub-plate, which is adjacent to the first side and away from the support plate, is connected to the first side of the fourth sub-plate.

6. The support mechanism according to claim 5, characterized in that, The first sub-plate and the third sub-plate are perpendicular to each other and both are perpendicular to the plane where the fixing plate is located; The second sub-board and the first sub-board, as well as the third sub-board and the fourth sub-board, form a certain angle so that when the MEMS box is placed in the installation space, the first sub-board and the third sub-board are attached to the outer wall of the MEMS box, and the second side of the second sub-board opposite to the first side of the second sub-board and the second side of the fourth sub-board are away from the MEMS box.

7. The support mechanism according to claim 5, characterized in that, The first sub-plate and the third sub-plate are square metal plates, and the second sub-plate and the fourth sub-plate are square metal plates or triangular metal plates.

8. The support mechanism according to claim 5, characterized in that, The lengths of the first sub-board and the second sub-board along the height direction of the MEMS box are determined based on the height of the MEMS box, and the lengths of the second sub-board and the fourth sub-board along the height direction of the MEMS box are greater than the lengths of the first sub-board and the second sub-board along the height direction of the MEMS box.

9. The support mechanism according to any one of claims 1 to 8, characterized in that, The fixed end is installed in the hole by a snap fastener or by a bolt.

10. A MEMS baking apparatus, characterized in that, The invention includes an oven and a support mechanism as described in any one of claims 1 to 9; the oven includes a cavity, the inner wall of which is provided with a mounting member, and the support mechanism is mounted in the cavity via the mounting member; At least one side of the cavity is provided with an openable and closable door to allow the MEMS material box to be placed or removed in the installation space through the openable and closable door.

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