Integrally-formed carved flower basket

By designing an integrated, sculpted flower basket, using PTFE material and a hollow structure, stable support and cleaning of thin sheets are achieved, solving the problems of sheet deformation and adsorption in existing technologies, and improving cleaning effect and efficiency.

CN224267226UActive Publication Date: 2026-05-22SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD
Filing Date
2025-04-25
Publication Date
2026-05-22

AI Technical Summary

Technical Problem

Existing flower baskets cannot effectively support and clean thin sheets ranging from 100 to 350 micrometers, causing the sheets to easily deform or clump together, resulting in them becoming unusable.

Method used

A one-piece molded carved flower basket was designed using PTFE material. The hollow structure and four-way support positioning reduce the contact surface. The hollow groove design with internal and external connections prevents the adsorption of medicine, and the baffle assembly prevents the flakes from floating.

Benefits of technology

It achieves stable support and cleaning of thin sheets, reduces the risk of drug adsorption and fragmentation, and improves cleaning effect and efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of semiconductor equipment, and particularly relates to an integrally-formed carved flower basket which comprises a flower basket body which is integrally formed. The flower basket body comprises two opposite clamping walls arranged in the first direction, each clamping wall is provided with a clamping part, a clamping connection part and a supporting part from top to bottom, the clamping walls between the clamping parts and the clamping connection parts and between the clamping connection parts and the supporting parts are of hollow structures, and a plurality of clamping grooves formed at intervals are formed in the inner sides of the clamping connection parts in the second direction. A plurality of supporting grooves which are arranged at intervals are formed in the inner side of the supporting part in the second direction, the supporting grooves are inclined from the upper outer side to the lower inner side, and the supporting grooves are located below the corresponding clamping grooves. The flower basket body is integrally formed, the manufacturing cost is low, and assembly is not needed. Except for the clamping part, the clamping part and the supporting part, the other positions of the two opposite clamping walls all adopt the hollowed-out design of communicating the inside and the outside, the shielding area is small, and the clamp is suitable for being used for sheets.
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Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment technology, and specifically relates to an integrally molded engraved flower basket. Background Technology

[0002] A silicon wafer is a silicon chip used in the fabrication of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. Silicon wafers are the carrier used in the production of integrated circuits, and generally refer to monocrystalline silicon wafers. Monocrystalline silicon wafers are made by drawing and refining ordinary silicon sand, followed by a series of processes including dissolution, purification, and distillation to produce monocrystalline silicon rods. After polishing and slicing, the monocrystalline silicon rods become silicon wafers. During the silicon wafer manufacturing process, cleaning and drying are usually required. In cleaning and drying silicon wafers, the wafers are first placed in a basket, then immersed in a cleaning solution according to the process ratio for cleaning, and finally placed in an oven to bake and dry.

[0003] In existing technologies, baskets used for placing silicon wafers for cleaning are typically made of PFA material and can hold up to 25 standard silicon wafers. When using such baskets to support and clean wafers ranging from 100 to 350 micrometers, the wafers are prone to deformation, and adjacent wafers tend to stick together. If wafer adhesion occurs during the cleaning process, both wafers will be rendered unusable. Utility Model Content

[0004] This invention addresses the technical problem that existing flower baskets cannot be used for supporting and cleaning thin sheets of 100-350 micrometers, and aims to provide an integrally molded carved flower basket.

[0005] To solve the aforementioned technical problems, this utility model provides an integrally molded carved flower basket, which includes a flower basket body, and the flower basket body is made by integral molding.

[0006] The flower basket body includes two opposing clamping walls arranged along a first direction, forming a silicon wafer clamping space between the two opposing clamping walls. The clamping walls have a clamping part, a snap-fit ​​part, and a supporting part from top to bottom. The clamping walls between the clamping part and the snap-fit ​​part, and between the snap-fit ​​part and the supporting part, adopt a hollow structure. The snap-fit ​​part has a plurality of spaced-apart slots on its inner side along a second direction intersecting the first direction. The supporting part has a plurality of spaced-apart support grooves on its inner side along the second direction. The support grooves are support grooves that slope from the upper outer side to the lower inner side, and each support groove is located below the corresponding snap-fit ​​groove.

[0007] Optionally, in the one-piece molded carved flower basket as described above, an anti-shading groove is provided on the outer side of the snap-fit ​​part along the second direction, and the anti-shading groove connects at least the middle part of each of the snap-fit ​​slots, so that the middle part of the snap-fit ​​slot is an open structure.

[0008] Optionally, in the one-piece sculpted flower basket as described above, the first direction is perpendicular to the second direction.

[0009] Optionally, in the one-piece molded carved flower basket as described above, the flower basket body is made of PTFE material.

[0010] Optionally, in the one-piece molded carved flower basket as described above, the flower basket body is a flower basket body machined by a machine tool.

[0011] Optionally, in the one-piece molded sculpted flower basket as described above, the slot and the support slot are silicon wafer slots of the same width, and the width of the silicon wafer slot is:

[0012] H = T + h

[0013] Wherein, H is the width of the silicon wafer groove, T is the thickness of the silicon wafer supported by the silicon wafer groove, and h is the adjustment margin, which is 0.6mm to 0.9mm, preferably 0.7mm.

[0014] Optionally, in the one-piece molded carved flower basket as described above, the spacing between two adjacent slots and two adjacent support slots is the same, the spacing between the slots is 8mm to 10mm, and the spacing between the slots is preferably 9mm.

[0015] Optionally, in the one-piece molded carved flower basket as described above, the inner side of the snap-fit ​​part is provided with thirteen spaced-apart slots along the second direction, and the inner side of the support part is provided with thirteen spaced-apart support slots along the second direction.

[0016] Optionally, in the one-piece molded carved flower basket as described above, the clamping part has a first clamping block and a second clamping block arranged side by side at a predetermined distance along a third direction. The third direction intersects with the first direction and the second direction respectively. The length direction of the first clamping block and the length direction of the second clamping block are both the second direction.

[0017] Optionally, in the one-piece molded carved flower basket as described above, the top surface of the first clamping block and the top surface of the second clamping block are both inclined surfaces that slope from the upper inner side to the lower outer side, and the inclination angle of the inclined surface of the first clamping block is the same as or different from the inclination angle of the inclined surface of the second clamping block.

[0018] Optionally, in the one-piece molded carved flower basket as described above, the flower basket body further includes two fixing members, each of which is integrally connected to the underside of each of the supporting parts.

[0019] Optionally, in the one-piece molded carved flower basket as described above, the flower basket body also includes two side walls connected to the two sides of the two clamping walls, the two side walls are arranged along the second direction, and at least one hollow groove with internal and external communication is carved on the side walls.

[0020] Optionally, in the one-piece molded carved flower basket as described above, the wall of the hollow groove adopts an inner and outer chamfer structure, causing the wall of the hollow groove to form a shape with a convex center and inclined inner and outer sides.

[0021] Optionally, in the one-piece molded carved flower basket as described above, the top surface of the sidewall has an inner and outer chamfer structure, resulting in the top surface of the sidewall having a central protrusion and an inclined shape on both the inner and outer sides.

[0022] Optionally, in the one-piece molded carved flower basket as described above, the one-piece molded carved flower basket further includes a baffle assembly, the baffle assembly includes a baffle, the length direction of the baffle is a second direction, the baffle is detachably connected to the flower basket body, and the baffle is disposed above the silicon wafer clamping space.

[0023] Optionally, in the one-piece molded carved flower basket as described above, the baffle assembly further includes two connectors, which are respectively connected to the two ends of the baffle in a second direction, and the two ends of the connectors in a first direction are respectively snapped onto the flower basket body.

[0024] Optionally, in the one-piece molded carved flower basket as described above, the two ends of the clamping part in the second direction are provided with clamping grooves, and the two ends of the connector in the first direction are respectively engaged in the clamping grooves of the two clamping parts.

[0025] Optionally, in the one-piece molded carved flower basket as described above, one end of the stop bar in the second direction is fixed to the middle of one of the connecting members, and the other end of the stop bar in the second direction is detachably connected to the middle of another of the connecting members.

[0026] The positive and progressive effects of this utility model are as follows:

[0027] 1. The flower basket body of this utility model is integrally molded, especially using PTFE (polytetrafluoroethylene) material and machined into one piece. Compared with the traditional PFA material flower basket which uses injection molding process, the flower basket body of this utility model has low manufacturing cost and does not require assembly.

[0028] 2. In the flower basket body of this utility model, except for the clamping part, the snap-fit ​​part and the supporting part, all other parts of the two opposing clamping walls adopt a hollow design with internal and external connections. The covering area is small, which can be used for thin sheets and can reduce the adsorption of medicine.

[0029] 3. Since the 100-350 micrometer thin film is relatively soft and easily deformed or broken, this utility model adopts four-way support positioning when contacting and supporting the silicon wafer. That is, the silicon wafer is snapped and supported by two slots on two snap-fit ​​parts and two support slots on two support parts. The rest of the clamping wall has no contact with the silicon wafer. This support positioning method is particularly suitable for the support and cleaning process of thin films due to the small contact surface.

[0030] 4. This utility model limits the width and spacing of the card slot and support slot, which can avoid shaking and chip placement problems during silicon wafer cleaning, making it more suitable for thin wafer support and cleaning processes.

[0031] 5. This utility model features at least one interconnected perforated groove on each of its two side walls. The small area of ​​the side walls reduces the absorption of pesticide residue, significantly improving the drying effect whether using a rotary dryer or IPA drying. Furthermore, the perforated groove employs an inner and outer chamfered structure, allowing the pesticide residue to flow out during cleaning and removal of the flower basket, preventing residue buildup.

[0032] 6. Since the flakes of 100-350 micrometers are relatively light and have high buoyancy, they may float during washing. This invention, through the design of the baffle assembly, can prevent the flakes from floating and greatly reduce the possibility of fragmentation. Attached Figure Description

[0033] The disclosure of this utility model will become more apparent with reference to the accompanying drawings. It should be understood that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. In the drawings:

[0034] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0035] Figure 2 This is a schematic diagram of the structure of the flower basket body of this utility model;

[0036] Figure 3 for Figure 2 The main view;

[0037] Figure 4 for Figure 3 AA section view;

[0038] Figure 5 for Figure 2 Side view;

[0039] Figure 6 for Figure 2 Top view;

[0040] Figure 7 This is a schematic diagram of one structure of the stop bar assembly of this utility model. Detailed Implementation

[0041] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0042] It should be noted that, unless otherwise specified, the following embodiments and features can be combined with each other.

[0043] In the description of this utility model, it should be noted that the directional terms such as "outer side", "middle section", "inner", "outer" indicate the orientation and positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. They should not be construed as limiting the specific protection scope of this utility model.

[0044] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. Thus, the use of "first" and "second" to define a feature may explicitly or implicitly include one or more of that feature. In the description of this utility model, "several" or "a number" means two or more, unless otherwise explicitly specified.

[0045] Reference Figures 1 to 6 This utility model provides an integrated carved flower basket, which includes a flower basket body 10. The flower basket body 10 is made by one-piece molding. The one-piece molding process can be carried out using existing technology depending on the material of the flower basket body 10. In other words, the flower basket body 10 of this utility model does not require subsequent assembly.

[0046] The flower basket body 10 includes two opposing clamping walls arranged along a first direction, forming a silicon wafer clamping space between the two opposing clamping walls. The clamping walls have a clamping part 11, a snap-fit ​​part 12, and a support part 13 from top to bottom. The clamping walls between the clamping part 11 and the snap-fit ​​part 12, and between the snap-fit ​​part 12 and the support part 13, adopt a hollow structure. That is to say, except for the clamping part 11, the snap-fit ​​part 12, and the support part 13, all other positions of the two opposing clamping walls adopt a hollow design with internal and external connections. In other words, the clamping wall is actually composed of the clamping part 11, the snap-fit ​​part 12, and the support part 13. The small covering area can reduce the adsorption of medicine.

[0047] The inner side of the latching part 12 is provided with a plurality of spaced-apart latching grooves 121 along the second direction intersecting the first direction, and the inner side of the support part 13 is provided with a plurality of spaced-apart support grooves 131 along the second direction. The support grooves 131 are support grooves 131 that slope from the upper outer side to the lower inner side, and each support groove 131 is located on the inner side below the corresponding latching groove 121.

[0048] In the prior art, the slot 121 usually extends to the top of the clamping wall to better engage and support the silicon wafer 30. However, since the 100-350 micrometer wafers are relatively soft and easily deformed or broken, the present invention adopts a four-way support positioning when contacting and supporting the silicon wafer 30. That is, the silicon wafer 30 is engaged and supported by the two slots 121 on the two engagement parts 12 and the two support slots 131 on the two support parts 13. The rest of the clamping wall does not contact the silicon wafer 30. This support positioning method is particularly suitable for supporting and cleaning thin wafers due to the small contact surface.

[0049] In some embodiments, refer to Figures 1 to 4 The clamping part 11 is located at the top of the clamping wall, the snap-fit ​​part 12 is located in the middle of the clamping wall, and the support part 13 is located at the bottom of the clamping wall.

[0050] In some embodiments, the support groove 131 is an arc-shaped groove to facilitate use in conjunction with a circular silicon wafer 30 for support.

[0051] In some embodiments, refer to Figures 1 to 3 An anti-shielding groove 122 is provided on the outer side of the latching part 12 along the second direction. The anti-shielding groove 122 connects at least the middle part of each latching slot 121, so that the middle part of the latching slot 121 is an open structure.

[0052] In the silicon wafer cleaning process, to ensure that the contact portion of the silicon wafer abutting against the slot 121 is also thoroughly cleaned, this embodiment designs the middle of the slot 121 as an open structure. This allows the cleaning fluid to flow well between the open structure and the slot 121, thereby effectively cleaning the contact portion of the silicon wafer. Furthermore, since the slot 121 is a straight groove rather than an inclined one, the cleaning fluid can also flow out from the open structure of the slot 121 when the basket body 10 is removed, reducing fluid residue.

[0053] In some embodiments, refer to Figure 1 Let the first direction be the X direction and the second direction be the Y direction. The first direction and the second direction are perpendicular.

[0054] In some embodiments, the flower basket body 10 is a flower basket body 10 made of PTFE material.

[0055] In some embodiments, the flower basket body 10 is a flower basket body 10 formed by machine tool processing.

[0056] Because PTFE material is harder than traditional PFA material for flower baskets, the PTFE flower basket body 10 can be integrally molded using machine tools. Compared to the injection molding process used for traditional PFA flower baskets, the machine tool molding method results in lower manufacturing costs.

[0057] In some embodiments, the card slot 121 and the support slot 131 are silicon wafer slots of the same width, wherein the width of the silicon wafer slot is:

[0058] H = T + h

[0059] Wherein, H is the width of the silicon wafer groove (i.e., the width in the second direction), T is the thickness of the silicon wafer carried by the silicon wafer groove, and h is the adjustment margin, which is 0.6mm to 0.9mm, and h is preferably 0.7mm.

[0060] When the silicon wafer trench uses a V-shaped trench with a flat bottom, the above-mentioned trench width is the minimum width, which is the bottom width. This type of V-shaped trench is a silicon wafer trench that is narrow on the outside and wide on the inside.

[0061] In some embodiments, the spacing between two adjacent slots 121 and two adjacent support slots 131 is the same, and the spacing is 8mm to 10mm, preferably 9mm.

[0062] This invention limits the width and spacing of the slot 121 and the support slot 131, which can avoid shaking and wafer mounting problems during silicon wafer cleaning, making it more suitable for thin wafer support and cleaning processes.

[0063] In some embodiments, the inner side of the snap-fit ​​portion 12 is provided with thirteen spaced-apart slots 121 along the second direction, and the inner side of the support portion 13 is provided with thirteen spaced-apart support slots 131 along the second direction.

[0064] In this embodiment, the card slot 121 and support slot 131 are designed to be 13 in number, which can be used for cleaning 13 6-inch wafers.

[0065] In some embodiments, refer to Figures 1 to 6 The clamping part 11 has a first clamping block 111 and a second clamping block 112 arranged side by side at a preset distance along a third direction. The third direction intersects with the first direction and the second direction respectively. The length direction of the first clamping block 111 and the length direction of the second clamping block 112 are both the second direction.

[0066] Preferably, such as Figure 1 As shown in the figure, when the first direction is the X direction, the second direction is the Y direction, and the third direction is the Z direction, the third direction is perpendicular to the first direction and the second direction, respectively.

[0067] Compared to existing flower baskets, this embodiment uses two parallel and side-by-side clamping blocks for cleaning or transfer processes. The external grippers can use the first clamping block 111 and / or the second clamping block 112 to grip the flower basket for cleaning or transfer.

[0068] In some embodiments, refer to Figure 4 and Figure 5 The top surface of the first clamping block 111 and the top surface of the second clamping block 112 are both inclined surfaces that slope from the upper inner side to the lower outer side. The inclination angle of the first inclined surface 111a of the first clamping block 111 is the same as or different from the inclination angle of the second inclined surface 112a of the second clamping block 112.

[0069] like Figure 4 and Figure 5 As shown, the tilt angle of the first inclined surface 111a is different from that of the second inclined surface 112a. The tilt angle of the second inclined surface 112a is greater than that of the first inclined surface 111a.

[0070] When cleaning silicon wafers, the cleaning fluid at the top of the basket body 10 can flow outward from the first inclined surface 111a or the second inclined surface 112a, avoiding the residue of cleaning fluid on the basket body 10.

[0071] In some embodiments, refer to Figure 1 and Figure 2 , Figure 4 and Figure 5 The flower basket body 10 also includes two fasteners 14, each of which is integrally connected to the underside of each support part 13.

[0072] The fastener 14 is used to fix the flower basket body 10 on the cleaning machine to clean the thin sheet.

[0073] In some embodiments, refer to Figure 1 and Figure 2 The flower basket body 10 also includes two side walls 15 connected to the two sides of the two side walls. The two side walls 15 are arranged along the second direction, and at least one hollow groove 151 with internal and external communication is provided on the side walls 15.

[0074] In this embodiment, the two side walls 15 are designed with at least one hollowed-out groove 151 that communicates internally and externally. The side walls 15 have a small covering area, which can reduce the adsorption of the medicine and greatly improve the drying effect of both rotary dryer and IPA. Specifically, the two ends of the clamping part 11, the snap-fit ​​part 12, and the support part 13 in the second direction are integrally connected to the two opposite side walls 15. The two clamping parts 11, the two snap-fit ​​parts 12, the two support parts 13 and the two side walls together form a basket body 10. The bottom of the basket body 10 is hollow to facilitate the outflow of cleaning liquid.

[0075] In some embodiments, refer to Figure 1 and Figure 2 The groove wall 151a of the hollow groove 151 adopts an inner and outer chamfer structure, which makes the groove wall of the hollow groove 151 form a shape with a convex middle and inclined inner and outer sides.

[0076] The hollow groove 151 adopts an inner and outer chamfer structure. When cleaning with medicine and removing the flower basket body 10, the medicine can flow out along the inner and outer chamfer structure to prevent the medicine from remaining.

[0077] In some embodiments, the top surface 15a of the sidewall 15 has an inner and outer chamfer structure, causing the top surface 15a of the sidewall 15 to have a central protrusion and an inclined shape on both the inner and outer sides.

[0078] In some embodiments, refer to Figure 1 and Figure 7 The one-piece molded carved flower basket also includes a baffle assembly 20, which includes a baffle 21. The length direction of the baffle 21 is the second direction. The baffle 21 is detachably connected to the flower basket body 10 and is positioned above the silicon wafer clamping space.

[0079] Since the 100-350 micrometer flakes are relatively light and have high buoyancy, they may float during cleaning. This embodiment uses the design of the baffle assembly 20 to prevent the flakes from floating and greatly reduce the possibility of fragmentation.

[0080] In some embodiments, refer to Figure 1 and Figure 7 The baffle assembly 20 also includes two connectors 22. The middle parts of the two connectors 22 are respectively connected to the two ends of the baffle 21 in the second direction, and the two ends of the connectors 22 in the first direction are respectively snapped onto the flower basket body 10.

[0081] In some embodiments, each clamping part 11 has a clamping groove 113 on both ends of the second direction, and the two ends of the connector 22 in the first direction are respectively engaged in the clamping grooves 113 of the two clamping parts 11.

[0082] When the clamping part 11 has a first clamping block 111 and a second clamping block 112 arranged side by side at a preset distance along a third direction, the clamping groove 113 is located on the end faces of both ends of the clamping part 11 between the first clamping block 111 and the second clamping block 112.

[0083] In some embodiments, one end of the stop bar 21 in the second direction is fixed to the middle of a connector 22, and the other end of the stop bar 21 in the second direction is detachably connected to the middle of another connector 22.

[0084] In practice, the connector that fixes the baffle 21 is first snapped into the basket body 10, and then another connector 22 is snapped into the basket body 10 and connected to the baffle 21. When the two are connected, fasteners such as screws or bolts can be used to achieve a detachable connection.

[0085] The present invention has been described in detail above with reference to the accompanying drawings and embodiments. Those skilled in the art can make various modifications to the present invention based on the above description. Therefore, certain details in the embodiments should not be construed as limiting the present invention, and the scope of protection of the present invention shall be defined by the appended claims.

Claims

1. A one-piece molded carved flower basket, characterized in that, The one-piece molded carved flower basket includes a flower basket body, which is a flower basket body made by one-piece molding. The flower basket body includes two opposing clamping walls arranged along a first direction, forming a silicon wafer clamping space between the two opposing clamping walls. The clamping walls have a clamping part, a snap-fit ​​part, and a supporting part from top to bottom. The clamping walls between the clamping part and the snap-fit ​​part, and between the snap-fit ​​part and the supporting part, adopt a hollow structure. The snap-fit ​​part has a plurality of spaced-apart slots on its inner side along a second direction intersecting the first direction. The supporting part has a plurality of spaced-apart support grooves on its inner side along the second direction. The support grooves are support grooves that slope from the upper outer side to the lower inner side, and each support groove is located below the corresponding snap-fit ​​groove.

2. The one-piece molded carved flower basket as described in claim 1, characterized in that, An anti-obstruction groove is provided on the outer side of the latching part along the second direction. The anti-obstruction groove connects at least the middle part of each of the latching slots, so that the middle part of the latching slot is an open structure. And / or, the first direction is perpendicular to the second direction; And / or, the flower basket body is a flower basket body made of PTFE material; And / or, the flower basket body is a flower basket body formed by machine tool processing.

3. The one-piece molded carved flower basket as described in claim 1 or 2, characterized in that, The card slot and the support slot use silicon wafer slots of the same width, and the width of the silicon wafer slot is: H=T+h Wherein, H is the width of the silicon wafer groove, T is the thickness of the silicon wafer supported by the silicon wafer groove, and h is the adjustment margin, which is 0.6mm~0.9mm; And / or, the spacing between two adjacent card slots and two adjacent support slots is the same, and the spacing between the slots is 8mm~10mm.

4. The one-piece molded carved flower basket as described in claim 3, characterized in that, h is 0.7 mm; And / or, the slot spacing is 9 mm.

5. The one-piece molded carved flower basket as described in claim 3, characterized in that, The inner side of the snap-fit ​​portion is provided with thirteen spaced-apart slots along the second direction, and the inner side of the support portion is provided with thirteen spaced-apart support slots along the second direction.

6. The one-piece molded carved flower basket as described in claim 1 or 2, characterized in that, The clamping part has a first clamping block and a second clamping block arranged side by side at a predetermined distance along a third direction. The third direction intersects the first direction and the second direction respectively. The length direction of the first clamping block and the length direction of the second clamping block are both the second direction.

7. The one-piece molded carved flower basket as described in claim 6, characterized in that, The top surface of the first clamping block and the top surface of the second clamping block are both inclined surfaces that slope from the upper inner side to the lower outer side. The inclination angle of the inclined surface of the first clamping block is the same as or different from the inclination angle of the inclined surface of the second clamping block.

8. The one-piece molded carved flower basket as described in claim 1 or 2, characterized in that, The flower basket body also includes two fixing components, each of which is integrally connected to the underside of each of the supporting parts.

9. The one-piece molded carved flower basket as described in claim 1 or 2, characterized in that, The flower basket body also includes two side walls connected to the two ends of the two clamping walls. The two side walls are arranged along the second direction, and at least one hollow groove with internal and external communication is carved on the side walls.

10. The one-piece molded carved flower basket as described in claim 9, characterized in that, The wall of the hollow groove adopts an inner and outer chamfer structure, which makes the wall of the hollow groove convex in the middle and inclined on the inner and outer sides.

11. The one-piece molded carved flower basket as described in claim 9, characterized in that, The top surface of the sidewall has an inner and outer chamfer structure, which results in the top surface of the sidewall having a central protrusion and an inclined shape on both the inner and outer sides.

12. The one-piece molded carved flower basket as described in claim 1 or 2, characterized in that, The one-piece molded carved flower basket also includes a baffle assembly, which includes a baffle rod whose length direction is a second direction. The baffle rod is detachably connected to the flower basket body and is positioned above the silicon wafer clamping space.

13. The one-piece molded carved flower basket as described in claim 12, characterized in that, The baffle assembly also includes two connectors, which are respectively connected to the two ends of the baffle in a second direction, and the two ends of the connectors in a first direction are respectively snapped onto the flower basket body.

14. The one-piece molded carved flower basket as described in claim 13, characterized in that, The clamping part has clamping grooves on both ends in the second direction, and the two ends of the connector in the first direction are respectively engaged in the clamping grooves of the two clamping parts.

15. The one-piece molded carved flower basket as described in claim 13, characterized in that, One end of the stop bar in the second direction is fixed to the middle of one of the connecting members, and the other end of the stop bar in the second direction is detachably connected to the middle of another connecting member.