Wafer box with high sealing performance

Abstract

The utility model relates to wafer box technical field, concretely relates to a wafer box of high sealing property, including wafer box main part, wafer box main part is fixed through bolt installation in detection device surface, the top of wafer box main part is connected with the protective cover that rotates through the hinge, the mechanical connection of wafer box main part and protective cover sleeve joint between sealing mechanism, wafer box main part and detection device junction mechanical connection has connecting mechanism, the connecting mechanism includes a seal ring, the one end mechanical fixing of a seal ring near detection device has the seal ring no.

Description

Technical Field

[0001] This utility model relates to the field of wafer cassette technology, specifically to a wafer cassette with high sealing performance. Background Technology

[0002] A wafer is a silicon wafer used to manufacture silicon semiconductor circuits. It is called a wafer because of its circular shape. Due to the small critical dimensions and dense patterns of semiconductors, the particle size requirements in production are very strict. To simplify transportation and minimize the risk of contamination, chip manufacturers use wafer cassettes to handle and store wafers.

[0003] After the wafers are produced, they need to be inspected for film thickness and surface finish by an inspection device. The wafers are usually placed in a cassette. After the cassette and the inspection device are connected and fixed together, the wafers in the cassette can be easily transported and inspected by the automatic robotic arm of the inspection device. However, when the existing cassette and the inspection device are connected and fixed together, there is a certain gap at the connection point, which makes it easy for outside air and dust to enter the cassette and cause the wafers to be contaminated.

[0004] Therefore, it is necessary to propose a highly sealed wafer cassette to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a highly airtight wafer cassette. Through the cooperation between the internal parts of the sealing mechanism, the sealing protection between the protective cover and the wafer cassette body is improved. Through the cooperation between the internal parts of the connecting mechanism, the connection sealing between the wafer cassette body and the testing device is improved, which helps to prevent dust in the air from entering and contaminating the wafer surface. This solves the problem in the prior art where there is a certain gap at the connection between the cassette and the testing device, which makes it easy for external air and dust to enter the cassette and contaminate the wafer.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a highly airtight wafer cassette, comprising a wafer cassette body, the wafer cassette body being fixed to the surface of a testing device by bolts, a protective cover being rotatably connected to the top of the wafer cassette body by a hinge, a sealing mechanism being mechanically connected between the wafer cassette body and the protective cover, and a connecting mechanism being mechanically connected at the connection between the wafer cassette body and the testing device.

[0007] The sealing mechanism includes a first sealing ring, which is mechanically fixed to the outer wall of the wafer cassette body, and a second sealing ring is mechanically fixed to the inner wall of the protective cover and sleeved with the outer wall of the first sealing ring.

[0008] The connecting mechanism includes a first sealing ring, which is mechanically fixed to the back of the wafer cassette body and fits against the surface of the testing device. A second sealing ring is mechanically fixed to one end of the first sealing ring near the testing device. Multiple fitting rings are mechanically fixed to the outer wall of the first sealing ring and fit against the outer wall of the second sealing ring. A connecting ring is mechanically fixed between the second sealing ring and the first sealing ring and is located between the fitting rings.

[0009] Preferably, the protective cover is connected to the wafer cassette body by a snap-fit ​​connection, the first sealing ring is distributed in a ring around the outer wall of the wafer cassette body, and the second sealing ring is distributed in a ring around the inner wall of the protective cover.

[0010] Preferably, the surfaces of the first sealing ring and the second sealing ring are both serrated, and the serrated surfaces of the first sealing ring and the second sealing ring are tapered. The first sealing ring and the second sealing ring fit together through the tooth grooves.

[0011] Preferably, the connecting ring is made of soft rubber, the first sealing ring and the second sealing ring are made of sealing rubber, and there is a deformation space between the second sealing ring and the first sealing ring that matches the connecting ring.

[0012] Preferably, the second sealing ring has a protrusion mechanically provided on the outer surface of the side near the first sealing ring, and the fitting ring has a groove matching the protrusion on the surface of the side near the second sealing ring.

[0013] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0014] 1. After placing the wafer inside the wafer cassette body, close the protective cover so that the protective cover fits snugly against the surface of the wafer cassette body. This causes the second sealing ring to move closer to the first sealing ring. The sawtooth surfaces of the first and second sealing rings are set as conical surfaces. The first and second sealing rings fit together through the tooth grooves, which facilitates the interlocking and fitting of the first and second sealing rings. This improves the tightness of the fit between the first and second sealing rings and thus enhances the sealing and protection between the wafer cassette body and the protective cover.

[0015] 2. When the wafer cassette body is bolted to the surface of the testing device, the back of the wafer cassette body is pressed against the surface of the testing device, thereby compressing the No. 2 and No. 1 sealing rings. The connecting ring is made of soft rubber, while the No. 1 and No. 2 sealing rings are made of sealing rubber. A deformation space matching the connecting ring is left between the No. 2 and No. 1 sealing rings, facilitating the mutual compression and connection of the No. 2 and No. 1 sealing rings. This also facilitates the close contact between the No. 2 and No. 1 sealing rings. Simultaneously, when the No. 2 and No. 1 sealing rings approach each other, the contact ring engages with the outer wall of the No. 2 sealing ring, improving the sealing performance between the No. 1 and No. 2 sealing rings. This seals and protects the gap at the connection between the wafer cassette body and the testing device, preventing dust in the air from entering the wafer cassette body and contaminating the wafer surface. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a side view of the main body of the wafer cassette of this utility model.

[0019] Figure 3 This is a schematic diagram of the back structure of the wafer cassette body of this utility model;

[0020] Figure 4 For the present utility model Figure 3 Enlarged structural diagram at point A in the middle;

[0021] Figure 5 This is a cross-sectional structural diagram of the No. 1 sealing ring of this utility model.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1. Wafer box body; 101. Protective cover; 2. Sealing mechanism; 201. First sealing ring; 202. Second sealing ring; 3. Connecting mechanism; 301. First sealing ring; 302. Second sealing ring; 303. Fitting ring; 304. Connecting ring. Detailed Implementation

[0024] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0025] This utility model provides, for example Figure 1-5 The wafer cassette shown includes a wafer cassette body 1, which is fixed to the surface of the testing device by bolts. A protective cover 101 is rotatably connected to the top of the wafer cassette body 1 by a hinge. A sealing mechanism 2 is mechanically connected between the wafer cassette body 1 and the protective cover 101. A connecting mechanism 3 is mechanically connected at the connection between the wafer cassette body 1 and the testing device.

[0026] The sealing mechanism 2 includes a first sealing ring 201, which is mechanically fixed to the outer wall of the wafer cassette body 1. A second sealing ring 202 is mechanically fixed to the inner wall of the protective cover 101 and is sleeved with the outer wall of the first sealing ring 201.

[0027] The connecting mechanism 3 includes a first sealing ring 301, which is mechanically fixed to the back of the wafer cassette body 1 and fits against the surface of the testing device. A second sealing ring 302 is mechanically fixed to one end of the first sealing ring 301 near the testing device. Multiple fitting rings 303 are mechanically fixed to the outer wall of the first sealing ring 301 and fit against the outer wall of the second sealing ring 302. A connecting ring 304 is mechanically fixed between the second sealing ring 302 and the first sealing ring 301 and is located between the fitting rings 303.

[0028] The mutual cooperation between the internal parts of the sealing mechanism 2 facilitates the improvement of the sealing protection between the protective cover 101 and the wafer box body 1. The mutual cooperation between the internal parts of the connecting mechanism 3 facilitates the improvement of the connection sealing between the wafer box body 1 and the detection device, and facilitates the prevention of dust in the air from entering and contaminating the wafer surface.

[0029] Refer to the instruction manual appendix Figure 1-5 The protective cover 101 is connected to the wafer cassette body 1 by snap-fit. The first sealing ring 201 is distributed around the outer wall of the wafer cassette body 1, and the second sealing ring 202 is distributed around the inner wall of the protective cover 101. The distribution of the first sealing ring 201 around the outer wall of the wafer cassette body 1 and the second sealing ring 202 around the inner wall of the protective cover 101 facilitates the improvement of the sealing performance at the connection between the wafer cassette body 1 and the protective cover 101.

[0030] Refer to the instruction manual appendix Figure 1-5The surfaces of both sealing ring 201 and sealing ring 202 are serrated, and the serrated surfaces of sealing ring 201 and sealing ring 202 are tapered. Sealing ring 201 and sealing ring 202 fit together through the tooth grooves. The tapered surfaces of the serrated surfaces of sealing ring 201 and sealing ring 202, along with the tooth grooves, facilitate the interlocking and fitting of sealing ring 201 and sealing ring 202, thereby improving the tightness of the fit.

[0031] Refer to the instruction manual appendix Figure 1-5 The connecting ring 304 is made of soft rubber, and the first sealing ring 301 and the second sealing ring 302 are made of sealing rubber. A deformation space matching the connecting ring 304 is left between the second sealing ring 302 and the first sealing ring 301. The fact that the connecting ring 304 is made of soft rubber and the first sealing ring 301 and the second sealing ring 302 are made of sealing rubber, and that a deformation space matching the connecting ring 304 is left between the second sealing ring 302 and the first sealing ring 301, facilitates the deformation of the connecting ring 304 by the mutual compression of the second sealing ring 302 and the first sealing ring 301, and also facilitates the mutual adhesion of the second sealing ring 302 and the first sealing ring 301.

[0032] Refer to the instruction manual appendix Figure 1-5 The second sealing ring 302 has a protrusion mechanically provided on the side of its surface near the first sealing ring 301, and the fitting ring 303 has a groove matching the protrusion on the side of its surface near the second sealing ring 302. The protrusion on the side of the second sealing ring 302 near the first sealing ring 301 and the groove matching the protrusion on the side of the fitting ring 303 near the second sealing ring 302 facilitate the fitting ring 303 to fit and adhere to the outer wall of the second sealing ring 302 when the second sealing ring 302 and the first sealing ring 301 are close to each other.

[0033] The working principle of this practical application is as follows:

[0034] Refer to the instruction manual appendix Figure 1-5 After placing the wafer inside the wafer cassette body 1, the protective cover 101 is closed, allowing the protective cover 101 to fit snugly against the surface of the wafer cassette body 1. This causes the second sealing ring 202 to move closer to the first sealing ring 201. By setting the serrated surfaces of the first sealing ring 201 and the second sealing ring 202 to be tapered, the first sealing ring 201 and the second sealing ring 202 fit together through the grooves, facilitating the interlocking and fitting of the first sealing ring 201 and the second sealing ring 202. This improves the tightness of the fit between the first sealing ring 201 and the second sealing ring 202, thereby enhancing the sealing and protection between the wafer cassette body 1 and the protective cover 101.

[0035] Refer to the instruction manual appendix Figure 1-5 When the wafer cassette body 1 is bolted to the surface of the testing device, the back of the wafer cassette body 1 is pressed against the surface of the testing device, thereby compressing the second sealing ring 302 and the first sealing ring 301. The connecting ring 304 is made of soft rubber, while the first sealing ring 301 and the second sealing ring 302 are made of sealing rubber. A deformation space matching the connecting ring 304 is provided between the second sealing ring 302 and the first sealing ring 301 to facilitate the stress on the second sealing ring 302 and the first sealing ring 301. The mutual compression of the connecting ring 304 causes deformation, which facilitates the mutual contact of the second sealing ring 302 and the first sealing ring 301. At the same time, when the second sealing ring 302 and the first sealing ring 301 are close to each other, the contact ring 303 engages with the outer wall of the second sealing ring 302, thereby improving the sealing performance between the first sealing ring 301 and the second sealing ring 302. This seals and protects the gap between the wafer cassette body 1 and the detection device, preventing dust in the air from entering the wafer cassette body 1 and contaminating the wafer surface.

[0036] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A wafer cassette with high sealing performance, characterized in that: The device includes a wafer box body (1), which is fixed to the surface of the testing device by bolts. A protective cover (101) is rotatably connected to the top of the wafer box body (1) by a hinge. A sealing mechanism (2) is mechanically connected between the wafer box body (1) and the protective cover (101) and the connection mechanism (3) is mechanically connected at the connection between the wafer box body (1) and the testing device. The sealing mechanism (2) includes a first sealing ring (201), which is mechanically fixed to the outer wall of the wafer box body (1), and a second sealing ring (202) is mechanically fixed to the inner wall of the protective cover (101), and is sleeved with the outer wall of the first sealing ring (201). The connecting mechanism (3) includes a first sealing ring (301), which is mechanically fixed to the back of the wafer cassette body (1) and fits against the surface of the detection device. A second sealing ring (302) is mechanically fixed to one end of the first sealing ring (301) near the detection device. Multiple fitting rings (303) are mechanically fixed to the outer wall of the first sealing ring (301) and fit against the outer wall of the second sealing ring (302). A connecting ring (304) is mechanically fixed between the second sealing ring (302) and the first sealing ring (301) and is located between the fitting rings (303).

2. The high-sealing wafer cassette according to claim 1, characterized in that: The protective cover (101) is connected to the wafer box body (1) by a snap-fit ​​connection. The first sealing ring (201) is distributed in a ring around the outer wall of the wafer box body (1), and the second sealing ring (202) is distributed in a ring around the inner wall of the protective cover (101).

3. The high-sealing wafer cassette according to claim 1, characterized in that: The surfaces of the first sealing ring (201) and the second sealing ring (202) are both serrated, and the serrated surfaces of the first sealing ring (201) and the second sealing ring (202) are tapered. The first sealing ring (201) and the second sealing ring (202) fit together through the tooth grooves.

4. A high-sealing wafer cassette according to claim 1, characterized in that: The connecting ring (304) is made of soft rubber, and the first sealing ring (301) and the second sealing ring (302) are made of sealing rubber. A deformation space matching the connecting ring (304) is left between the second sealing ring (302) and the first sealing ring (301).

5. A high-sealing wafer cassette according to claim 1, characterized in that: The second sealing ring (302) has a protrusion mechanically provided on the side of the first sealing ring (301) near the first sealing ring, and the fitting ring (303) has a groove matching the protrusion on the side of the second sealing ring (302).

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