Wafer carrier

Abstract

The utility model relates to a wafer carrier, which comprises a box body, the box body comprises two side walls, the two side walls are oppositely arranged along the length direction of the box body, each side wall is provided with a plurality of clamping grooves at intervals along the width direction of the box body, and the plurality of clamping grooves in the two side walls are symmetrically arranged to form a plurality of pairs of clamping grooves for placing wafers; a plurality of identification areas corresponding to the plurality of clamping grooves are arranged on one side face, facing the opening of the box body, of each side wall, the plurality of identification areas are provided with digital serial numbers, and in any two adjacent digital serial numbers, one digital serial number is arranged in a sunken mode, and the other digital serial number is arranged in a protruding mode. According to the utility model, a plurality of pairs of clamping grooves are marked through the concave-convex staggered arrangement of the serial numbers, so that the occurrence of wrong groove phenomena can be effectively reduced, the product yield is improved, and the occurrence of production accidents is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and specifically to a wafer carrier. Background Technology

[0002] Front-opening unified pods (FOUPs) are primarily used in semiconductor manufacturing to protect, transport, and store wafers. Their main functions include: (1) effectively preventing physical damage to wafers during transport; (2) effectively preventing particulate contamination of wafers during storage; and (3) reducing manual operation time and improving production efficiency during loading and unloading. FOUPs with individual wafer carriers mainly consist of a FOUP box and a wafer carrier, facilitating wafer handling and surface inspection by operators.

[0003] However, misplacement often occurs when placing wafers back into the slot, which may cause wafer scratches and damage, or even production accidents, thereby reducing product yield. Utility Model Content

[0004] Based on the above description, this utility model provides a wafer carrier to reduce the occurrence of misaligned slots.

[0005] The technical solution of this utility model to solve the above-mentioned technical problems is as follows:

[0006] A wafer carrier includes a housing with two sidewalls arranged opposite each other along the length of the housing. Multiple slots are spaced apart on each sidewall along the width of the housing, forming multiple pairs of slots for placing wafers. Multiple marking areas are provided on the sidewall facing the opening of the housing, corresponding to the multiple slots. Each marking area is assigned a numerical serial number, and in any two adjacent numerical serial numbers, one is recessed while the other is raised.

[0007] Based on the above technical solution, the present invention can be further improved as follows.

[0008] Furthermore, when the number is odd, the number is raised; when the number is even, the number is recessed.

[0009] Furthermore, in any two adjacent marking areas, one marking area is set to a blank pattern, and the other marking area is set to a diagonal pattern.

[0010] Furthermore, when the serial number is odd, the serial number is raised, and the corresponding identification area is set to a blank pattern; when the serial number is even, the serial number is recessed, and the corresponding identification area is set to a diagonal pattern.

[0011] Furthermore, in any two adjacent card slots, the width of one card slot is greater than the width of the other card slot.

[0012] Furthermore, when the number is odd, the number is raised; when the number is even, the number is recessed; the width of the slot corresponding to the odd number is greater than the width of the slot corresponding to the even number.

[0013] Furthermore, in any two adjacent card slots, the width of one card slot is greater than the width of the other card slot.

[0014] Furthermore, when the serial number is odd, the serial number is raised, and the corresponding identification area is set to a blank pattern; when the serial number is even, the serial number is recessed, and the corresponding identification area is set to a diagonal pattern; the width of the slot corresponding to the odd serial number is greater than the width of the slot corresponding to the even serial number.

[0015] Furthermore, each of the side walls is provided with 25 slots spaced apart along the width direction of the box body.

[0016] Furthermore, the wafer carrier is used to load 8-inch wafers.

[0017] Compared with the prior art, the technical solution of this application has the following beneficial technical effects:

[0018] (1) This utility model sets multiple marking areas corresponding to multiple slots on one side of the opening, and sets numerical serial numbers in the marking areas. The numerical serial numbers are arranged in an alternating pattern, which can increase the contrast and make it easy to distinguish, thereby effectively reducing the occurrence of mis-slot phenomenon, improving product yield, and reducing the occurrence of production accidents.

[0019] (2) By alternating the blank pattern and diagonal pattern in the marking area, this utility model can further increase the contrast, thereby further effectively reducing the occurrence of mis-groove phenomenon, improving product yield, and reducing the occurrence of production accidents.

[0020] (3) By alternating wide and narrow slots, this utility model can further increase the contrast, thereby effectively reducing the occurrence of mis-slot phenomenon, improving product yield, and reducing the occurrence of production accidents. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a wafer carrier provided in one embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of a wafer carrier provided in another embodiment of the present invention;

[0023] Figure 3 This is a schematic diagram of the structure of a wafer carrier provided in another embodiment of the present invention;

[0024] Figure 4 This is a schematic diagram of the structure of a wafer carrier provided in another embodiment of the present invention;

[0025] Figure 5 This is a schematic diagram of the card slot provided in one embodiment of the present invention.

[0026] The attached diagram lists the components represented by each number as follows:

[0027] 1. Side wall; 2. Card slot; 21. Raised stripe; 3. Number sequence; 4. Blank pattern; 5. Twill pattern. Detailed Implementation

[0028] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0030] It is understood that spatial relation terms such as "below," "under," "below," "below," "above," "above," etc., can be used here to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as "below" or "below" of the other element or feature will be oriented "above" the other element or feature. Therefore, the exemplary terms "below" and "below" can include both upper and lower orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0031] It should be noted that when one element is considered to be "connected" to another element, it can be directly connected to the other element or connected to the other element through an intermediary element. In the following embodiments, "connection" should be understood as "electrical connection," "communication connection," etc., if the connected circuits, modules, units, etc., have the transmission of electrical signals or data between them.

[0032] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, step, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof.

[0033] See Figure 1 This utility model provides a wafer carrier, including a housing. The housing includes two side walls 1, which are arranged opposite each other along the length of the housing. Each side wall 1 has a plurality of slots 2 spaced apart along the width of the housing. The slots 2 on the two side walls 1 are symmetrically arranged to form multiple pairs of slots 2 for placing wafers. On the side of each side wall 1 facing the opening of the housing, a plurality of marking areas are provided corresponding to the slots 2. The marking areas are marked with serial numbers 3, and in any two adjacent serial numbers 3, one serial number 3 is recessed and the other serial number 3 is raised.

[0034] In this invention, by setting multiple marking areas corresponding to multiple slots 2 on one side facing the opening, and setting numerical serial numbers 3 in the marking areas, and the numerical serial numbers 3 are arranged in an alternating concave and convex manner, the contrast can be increased and the distinction can be made easier, thereby effectively reducing the occurrence of mis-slot phenomenon, improving product yield, and reducing the occurrence of production accidents.

[0035] It should be noted that the two symmetrical slots 2 on the two side walls 1 form a pair of slots 2 for placing the wafer; the numerical sequence 3 is a natural number arranged continuously starting from 1, and the numerical sequence 3 is ordered from one end to the other in the width direction of the box (e.g., Figure 1 As shown, the width direction of the box is vertical, and the length direction of the box is horizontal. The markings on the two side walls 1 corresponding to the same pair of slots 2 are consistent. The opening of the box is used to pick up and put in the wafer. The side wall 1 of the box can be a panel or a hollow panel, which can be used to place the wafer.

[0036] In one embodiment, when the number 3 is odd, the number 3 is raised; when the number 3 is even, the number 3 is recessed.

[0037] Please see Figure 2 In one embodiment, in any two adjacent marking areas, one marking area is set as a blank pattern 4, and the other marking area is set as a diagonal pattern 5.

[0038] Based on the alternating arrangement of the embossed number 3, the contrast can be further increased by alternating the blank pattern 4 and the diagonal pattern 5, thereby further reducing the occurrence of misaligned grooves, improving product yield, and reducing the occurrence of production accidents.

[0039] It should be noted that blank pattern 4 means that no pattern or logo is set on the side, and the logo area still has the original background color.

[0040] In one embodiment, when the number 3 is odd, the number 3 is raised and the corresponding identification area is set as a blank pattern 4; when the number 3 is even, the number 3 is recessed and the corresponding identification area is set as a diagonal pattern 5.

[0041] Please see Figure 3 In one embodiment, in any two adjacent card slots 2, the width of one card slot 2 is greater than the width of the other card slot 2.

[0042] Based on the alternating arrangement of the 3rd digit number, the contrast can be further increased by alternating the wide and narrow slots 2, thereby further reducing the occurrence of mis-slotting, improving product yield, and reducing the occurrence of production accidents.

[0043] Understandably, with Figure 3 For example, the width of slot 2 refers to the gap of slot 2 in the width direction of the box body. It can be, for example, please refer to [link / reference]. Figure 5 Multiple protrusions 21 are spaced apart on the opposite surfaces of the two side walls 1. Any two adjacent protrusions 21 form a slot 2. The width of the slot 2 refers to the distance between the center lines of two adjacent protrusions 21 parallel to the length direction of the box body. The width of one slot 2 is D1, and the width of the other slot 2 is D2.

[0044] In one embodiment, when the number 3 is odd, the number 3 is raised; when the number 3 is even, the number 3 is recessed; the width of the slot 2 corresponding to the odd number 3 is greater than the width of the slot 2 corresponding to the even number 3. It can be understood that, as... Figure 3As shown, the width of the slot 2 corresponding to the odd-numbered number 3 is D1, and the width of the slot 2 corresponding to the even-numbered number 3 is D2.

[0045] Please see Figure 4 In one embodiment, in any two adjacent card slots 2, the width of one card slot 2 is greater than the width of the other card slot 2.

[0046] By combining the alternating arrangement of embossed and recessed numbers 3, the alternating arrangement of blank patterns 4 and diagonal patterns 5, and the alternating arrangement of wide and narrow slots 2, the contrast can be further increased, thereby further reducing the occurrence of misaligned slots, improving product yield, and reducing the occurrence of production accidents.

[0047] In one embodiment, when the number 3 is odd, the number 3 is raised, and the corresponding marking area is set as a blank pattern 4; when the number 3 is even, the number 3 is recessed, and the corresponding marking area is set as a diagonal pattern 5; the width of the slot 2 corresponding to the odd number 3 is greater than the width of the slot 2 corresponding to the even number 3. It can be understood that, as... Figure 4 As shown, the width of the slot 2 corresponding to the odd-numbered number 3 is D1, and the width of the slot 2 corresponding to the even-numbered number 3 is D2.

[0048] In one embodiment, 25 slots 2 are provided at intervals along the width direction of the housing on each of the sidewalls 1. It is understood that the wafer carrier has 25 slots 2, and the numerical sequence 3 is a natural number from 1 to 25 arranged sequentially from one end to the other along the width direction of the housing.

[0049] In one embodiment, the wafer carrier is used to load 8-inch wafers.

[0050] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A wafer carrier, characterized in that, The device includes a housing with two sidewalls. The two sidewalls are arranged opposite each other along the length of the housing. Each sidewall has multiple slots spaced apart along the width of the housing. The multiple slots on the two sidewalls are symmetrically arranged to form multiple pairs of slots for placing wafers. On the side of each sidewall facing the opening of the housing, multiple marking areas are provided corresponding to the multiple slots. The multiple marking areas are marked with serial numbers, and in any two adjacent serial numbers, one serial number is recessed and the other serial number is raised.

2. The wafer carrier according to claim 1, characterized in that, When the number is odd, the number is raised; when the number is even, the number is recessed.

3. The wafer carrier according to claim 1, characterized in that, In any two adjacent marking areas, one marking area is set to a blank pattern, and the other marking area is set to a diagonal pattern.

4. The wafer carrier according to claim 3, characterized in that, When the serial number is odd, the serial number is raised and the corresponding identification area is set to a blank pattern; when the serial number is even, the serial number is recessed and the corresponding identification area is set to a diagonal pattern.

5. The wafer carrier according to claim 1, characterized in that, In any two adjacent card slots, the width of one card slot is greater than the width of the other card slot.

6. The wafer carrier according to claim 5, characterized in that, When the serial number is odd, the serial number is raised; when the serial number is even, the serial number is recessed; the width of the slot corresponding to the odd serial number is greater than the width of the slot corresponding to the even serial number.

7. The wafer carrier according to claim 3, characterized in that, In any two adjacent card slots, the width of one card slot is greater than the width of the other card slot.

8. The wafer carrier according to claim 7, characterized in that, When the serial number is odd, the serial number is raised, and the corresponding identification area is set to a blank pattern; when the serial number is even, the serial number is recessed, and the corresponding identification area is set to a diagonal pattern; the width of the slot corresponding to the odd serial number is greater than the width of the slot corresponding to the even serial number.

9. The wafer carrier according to claim 1, characterized in that, Each of the side walls has 25 slots spaced apart along the width of the box.

10. The wafer carrier according to claim 1, characterized in that, The wafer carrier is used to load 8-inch wafers.

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